Screen printing apparatus

Abstract

This application provides a screen printing apparatus, relating to the technical field of screen printing. The screen printing apparatus includes a support table, a screen, and a paste removal assembly. The screen is disposed on the side of a silicon wafer away from the support table. A printing pattern is disposed on the screen, extending through the screen along its thickness direction. The surface of the screen away from the support table is a first surface, which includes a paste area without a printing pattern. The paste removal assembly includes a squeegee and a first driving member. The first driving member is connected to the squeegee and drives the squeegee along a first direction to be positioned on one side of the paste area and in contact with the first surface. The first driving member also drives the squeegee to move along the first direction toward the paste area, so that the squeegee removes the paste located on the first surface into the paste area. In the embodiments of this application, no operator is required to manually remove the paste located on the first surface, improving the efficiency of paste replacement.

Description

Technical Field

[0001] This application relates to the technical field of screen printing, and more particularly to a screen printing apparatus. Background Technology

[0002] Screen printing equipment typically includes a screen and a support platform. The screen is positioned on one side of the support platform, which holds the silicon wafer. A printing pattern is printed on the screen, extending through the screen along its thickness. The ink paste passes through the printing pattern and is printed onto the silicon wafer.

[0003] During the printing process, if the ink needs to be changed, it is usually necessary to manually remove the ink from the surface of the screen away from the carrier table and then replace it with new ink. This is inefficient and affects production efficiency and equipment utilization. Utility Model Content

[0004] Embodiments of this application disclose a screen printing apparatus for improving the efficiency of changing ink, thereby increasing production efficiency and equipment uptime.

[0005] On one hand, embodiments of this application provide a screen printing apparatus. The screen printing apparatus includes a support table, a screen, and a paste removal assembly. The support table is used to support a silicon wafer. The screen is disposed on the side of the silicon wafer away from the support table. A printing pattern is disposed on the screen, extending through the screen along its thickness direction. The surface of the screen away from the support table is a first surface, which includes a paste area without a printing pattern. The paste removal assembly includes a squeegee and a first driving member. The squeegee is located on the side of the screen away from the support table. The first driving member is connected to the squeegee. The first driving member drives the squeegee to move, so that the squeegee is positioned on one side of the paste area along a first direction and contacts the first surface. The first driving member also drives the squeegee to move closer to the paste area along the first direction, so that the squeegee removes the paste located on the first surface into the paste area. The first direction is parallel to the first surface.

[0006] In some possible implementations, the length of the scraper along the second direction is greater than or equal to the length of the screen along the second direction. The second direction is parallel to the first surface and perpendicular to the first direction.

[0007] In some possible implementations, the scraper includes a contact surface for contacting a first surface. The contact surface is parallel to the first surface.

[0008] In some possible implementations, the scraper also includes an inclined surface connected to the contact surface, with the inclined surface closer to the slurry zone relative to the contact surface. The angle between the inclined surface and the contact surface is an obtuse angle.

[0009] In some possible implementations, the angle between the inclined surface and the contact surface ranges from 125° to 130°.

[0010] In some possible implementations, the screen printing apparatus also includes a paste recovery assembly comprising a suction nozzle and a storage bin. The suction nozzle is located on the side of the paste zone away from the support table. The storage bin is connected to the suction nozzle. The storage bin encloses a receiving space into which the suction nozzle draws paste from the paste zone.

[0011] In some possible implementations, the storage box includes a body and a piston. The body encloses a receiving space, and the suction nozzle is connected to the body. The piston contacts the body along its circumference. Along its axial direction, the piston can move within the receiving space, causing the suction nozzle to draw slurry located in the slurry zone into the receiving space.

[0012] In some possible implementations, the slurry recovery assembly further includes a second drive member connected to the suction nozzle for driving the nozzle to move along a second direction. The second direction is parallel to the first surface and perpendicular to the first direction.

[0013] In some possible implementations, the slurry recovery assembly further includes a connecting pipe through which the suction nozzle is connected to the main body. The connecting pipe is connected to a second drive member. The position where the connecting pipe is connected to the second drive member is the first position, and the position where the connecting pipe is connected to the storage box is the second position. The pipe between the first and second positions is a flexible pipe, and the pipe between the first and second positions has a length allowance so that the second drive member can drive the first position to move in a second direction.

[0014] In some possible implementations, there are multiple storage boxes, and the connecting pipe is detachably connected to any one of the multiple storage boxes.

[0015] In some possible implementations, there are multiple storage boxes. The connecting pipes include a main connecting pipe and multiple connecting branch pipes. The slurry recovery assembly also includes a multi-way valve, through which the multiple connecting branch pipes are connected to the main connecting pipe respectively. The main connecting pipe is connected to the suction nozzle, and the multiple connecting branch pipes are connected to multiple storage boxes one-to-one. The multi-way valve is used to connect the main connecting pipe and any one of the connecting branch pipes.

[0016] In some possible implementations, the second driving component includes a motor, a conveyor belt, and conveyor wheels. There are multiple conveyor wheels, spaced apart along a second direction. The motor drives the multiple conveyor wheels to rotate. The conveyor belt connects the multiple conveyor wheels. A connecting pipe connects to the conveyor belt.

[0017] In some possible implementations, the slurry recovery assembly also includes a vision sensor located on the side of the slurry zone away from the support table, for acquiring image information of the slurry zone. The screen printing apparatus also includes a controller electrically connected to the vision sensor and the second drive unit, for controlling the movement of the drive nozzle of the second drive unit along a second direction based on the image information acquired by the vision sensor.

[0018] In some possible implementations, the slurry recovery assembly also includes a third drive unit connected to a vision sensor for driving the vision sensor to move in a second direction.

[0019] In some possible implementations, the slurry recovery assembly further includes a first guide located on the side of the slurry zone away from the support platform and extending along a second direction. A vision sensor is slidably connected to the first guide, and a third drive member is used to drive the vision sensor to slide relative to the first guide along the second direction.

[0020] In some possible implementations, the slurry removal assembly further includes a second guide located on the side of the screen away from the support platform and extending along a first direction. A scraper is slidably connected to the second guide, and a first drive member is used to drive the scraper to slide relative to the second guide along the first direction.

[0021] In summary, the embodiments of this application have at least the following beneficial effects:

[0022] In the embodiments of this application, the first driving member is connected to the scraper, enabling the first driving member to drive the scraper to move. The first driving member is used to drive the scraper to a position located on one side of the slurry area along a first direction, and the scraper can contact the first surface. Then, the first driving member is used to drive the scraper to move closer to the slurry area along the first direction, so that the scraper can scrape the slurry in other areas (areas other than the slurry area) on the first surface into the slurry area.

[0023] By adopting the above configuration, operators are no longer required to manually remove the slurry on the first surface, which improves the efficiency of slurry replacement, thereby increasing production efficiency and equipment uptime, and reducing labor costs.

[0024] In addition, it can avoid problems such as ink residue and screen damage caused by operator inexperience, and prevent operators from bringing impurities onto the screen, thus reducing the impact of the ink removal process on subsequent printing processes. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 This is a schematic diagram of the structure of a screen printing apparatus provided in some embodiments of this application;

[0027] Figure 2 This is a schematic diagram showing the positional relationship between the screen and the scraper provided in some embodiments of this application;

[0028] Figure 3 This is a schematic diagram showing the positional relationship between the scraper and the first surface provided in some embodiments of this application;

[0029] Figure 4 A schematic diagram showing the positional relationship between the screen, scraper, and slurry recovery assembly provided in some embodiments of this application;

[0030] Figure 5 This is a schematic diagram of the structure of a storage box provided in some embodiments of this application;

[0031] Figure 6 This is a schematic diagram of the structure of the second driving component provided in some embodiments of this application;

[0032] Figure 7 This is a schematic diagram illustrating the connection relationship between the connecting pipe and the multi-way valve provided in some embodiments of this application.

[0033] Explanation of reference numerals in the attached figures:

[0034] 200-Screen printing device, 210-Support platform, 220-Screen, 221-Printed pattern, 230-Frame, 110-Squeegee, 1101-Contact surface, 1102-Inclined surface, 120-Slurry recovery assembly, 121-Suction nozzle, 122-Storage box, 1221-Body unit, 1222-Piston, 1223-Piston connector, 1224-Base plate, 123-Second drive unit, 1231-Transmission wheel, 1232-Conveyor belt, 124-Connecting pipe, 1241-Connecting main pipe, 1242-Connecting branch pipe, 125-Multi-way valve, 126-Vision sensor, 301-Silicon wafer, X-First direction, Y-Second direction, P1-First surface, M1-Slurry area, Q-Accommodation space, N-Circumferential direction of piston 1222, G-Axial direction of piston 1222. Detailed Implementation

[0035] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0036] In this application, the terms "upper," "left," "right," "front," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this application and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0037] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0038] Furthermore, the terms "installation," "setup," "equipped with," and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0039] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, elements, or components (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, elements, or components. Unless otherwise stated, "a plurality of" means two or more.

[0040] Screen printing is an important process in the production of solar cells. It involves printing grid lines on a silicon wafer to collect the current generated by the wafer.

[0041] Figure 1 This is a schematic diagram of the structure of a screen printing apparatus provided in some embodiments of this application. Figure 2 This is a schematic diagram illustrating the positional relationship between the screen and the scraper provided in some embodiments of this application. For example... Figure 1 As shown, an embodiment of this application provides a screen printing apparatus 200 for printing grid lines on a silicon wafer.

[0042] In some examples, such as Figure 1 As shown, the screen printing apparatus 200 includes a support stage 210 and a screen 220. The support stage 210 is used to support the silicon wafer 301, and the screen 220 is disposed on the side of the silicon wafer 301 away from the support stage.

[0043] like Figure 2 As shown, the screen printing apparatus 200 may include a frame 230, which surrounds and is connected to the screen 220. The frame 230 is used to carry and support the screen 220.

[0044] Continue to refer to Figure 2 In some examples, a printing pattern 221 is provided on the screen 220, and the printing pattern 221 penetrates the screen 220 along the thickness direction of the screen 220. The surface of the screen 220 away from the support table 210 is the first surface P1.

[0045] The paste (e.g., silver paste) required to prepare the grid lines can be applied to the first surface P1. The screen printing apparatus 200 may include a squeegee that can contact the first surface P1 and move on the first surface P1 so that the paste on the first surface P1 can pass through the printing pattern 221 and be printed onto the silicon wafer 301.

[0046] Understandably, the shape of the printed pattern 221 can be regular or irregular. The embodiments of this application do not further limit the shape of the printed pattern 221.

[0047] During the printing process, if it is necessary to verify the printing effect of a new paste, the operator often needs to manually remove the paste located on the first surface P1 and replace it with a new paste.

[0048] Manually removing ink from the screen is inefficient and time-consuming, impacting production efficiency and equipment uptime, and increasing labor costs. Furthermore, inexperienced operators may leave ink residue on the screen 220, increasing the risk of ink mixing. Additionally, the removal process could damage the screen 220. Moreover, manually removing ink may introduce impurities onto the screen 220, affecting subsequent printing processes.

[0049] Based on this, in the embodiments of this application, such as Figure 1 and Figure 2 As shown, the screen printing apparatus 200 also includes a paste removal assembly, which is understood to be used to remove paste from at least a portion of the area located on the first surface P1.

[0050] In some examples, such as Figure 1 and Figure 2As shown, the paste removal assembly includes a doctor blade 110 and a first drive member (not shown). It is understood that the doctor blade 110 in the paste removal assembly and the doctor blade used in the normal printing process can be the same doctor blade to simplify the structure of the screen printing apparatus 200. Alternatively, the doctor blade 110 in the paste removal assembly and the doctor blade used in the normal printing process can be different doctor blades to reduce the mutual interference between the paste removal process and the normal printing process.

[0051] Continue to refer to Figure 1 and Figure 2 The scraper 110 is located on the side of the screen 220 away from the support platform 210. The first drive member is connected to the scraper 110, enabling the first drive member to drive the scraper 110 to move.

[0052] For example, the first driving component may include a motor. The slurry removal assembly may also include a connector that connects the motor and the scraper 110. The connector is capable of converting the rotation of the motor into linear motion, that is, the connector can drive the scraper 110 to move along a first direction X under the drive of the motor.

[0053] The connector may include a lead screw, which includes a threaded rod and a nut. The threaded rod extends along a first direction X, and the nut is rotatably connected to the threaded rod. A motor is connected to the nut to drive the nut to rotate, enabling the nut to move relative to the threaded rod along the first direction X. A scraper 110 is connected to the nut, allowing the nut to drive the scraper 110 to move along the first direction X.

[0054] Alternatively, the connector may include a gear and a rack, with the rack extending along a first direction X, and the gear and rack meshing. A motor is connected to the gear to drive the gear to rotate, enabling the gear to move relative to the rack along the first direction X. The scraper 110 is connected to the gear, enabling the gear to drive the scraper 110 to move along the first direction X.

[0055] The first driving component may also include a cylinder, which is connected to the scraper 110 and drives the scraper 110 to move along the first direction X.

[0056] like Figure 2 As shown, the first surface P1 includes a paste area M1, which is not provided with a printed pattern 221. A first driving member drives a squeegee 110 to move, such that the squeegee 110 is positioned on one side of the paste area M1 along a first direction X and contacts the first surface P1. The first driving member also drives the squeegee 110 to move closer to the paste area M1 along the first direction X, so that the squeegee 110 scrapes the paste located on the first surface P1 into the paste area M1. The first direction X is parallel to the first surface P1.

[0057] Understandably, when it is necessary to remove slurry from other areas of the first surface P1 (areas other than the slurry area M1), the first drive member can drive the scraper 110 to a position along the first direction X on one side of the slurry area M1, and to contact the first surface P1. For example, as... Figure 1 As shown, the first driving member can drive the scraper 110 to move to the edge of the screen 220 away from the slurry area M1 along the first direction X.

[0058] The first driving member can also drive the scraper 110 to move along the first direction X toward the slurry area M1, so that the scraper 110 can scrape off the slurry in other areas of the first surface P1 (areas other than the slurry area M1) and move it to the slurry area M1.

[0059] Understandably, the paste area M1 is not provided with the printed pattern 221, so that the strength of the paste area M1 is greater than the strength of the area where the printed pattern 221 is provided, thereby enabling the paste area M1 to bear the paste and also preventing the paste from leaking through the printed pattern 221 onto the silicon wafer 301.

[0060] When it is not necessary to remove the paste in other areas of the first surface P1 (excluding the paste area M1), the first drive member can drive the doctor blade 110 to separate from the first surface P1, so as to reduce the impact of the doctor blade 110 on the subsequent printing process.

[0061] In the embodiments of this application, the first driving member is connected to the scraper 110, enabling the first driving member to drive the scraper 110 to move. The first driving member is used to drive the scraper 110 to a position located on one side of the slurry area M1 along the first direction X, and the scraper 110 can contact the first surface P1. Then, the first driving member is used to drive the scraper 110 to move closer to the slurry area M1 along the first direction X, so that the scraper 110 can scrape the slurry located in other areas of the first surface P1 (areas other than the slurry area M1) into the slurry area M1.

[0062] By adopting the above configuration, operators are no longer required to manually remove the slurry located on the first surface P1, which improves the efficiency of slurry replacement, thereby increasing production efficiency and equipment uptime, and reducing labor costs.

[0063] In addition, it can avoid problems such as ink residue and screen 220 damage caused by operator inexperience, and prevent operators from bringing impurities onto screen 220, thus reducing the impact of ink removal process on subsequent printing processes.

[0064] In some examples, the slurry removal assembly also includes a second guide located on the side of the screen 220 away from the support platform 210 and extending along a first direction X. The scraper 110 is slidably connected to the second guide, and a first drive member is used to drive the scraper 110 to slide relative to the second guide along the first direction X.

[0065] For example, the second guide may include a guide rail extending along a first direction X. The slurry removal assembly may also include a slider connected to the scraper 110. The slider is embedded in and slidably connected to the guide rail, allowing the scraper 110 to slide relative to the second guide along the first direction X.

[0066] Alternatively, the second guide may also include a groove extending along the first direction X. The slurry removal assembly may also include a pulley connected to the scraper 110. The pulley is embedded in and slidably connected to the groove, allowing the scraper 110 to slide relative to the second guide along the first direction X.

[0067] Understandably, the second guide member can guide and limit the scraper 110, so that the scraper 110 can move along the first direction X under the driving action of the first drive member, reducing the risk of the scraper 110 deviating from the first direction X during the movement and improving the reliability of the slurry removal assembly.

[0068] In some examples, such as Figure 2 As shown, the length of the scraper 110 along the second direction Y is greater than or equal to the length of the screen 220 along the second direction Y. The second direction Y is parallel to the first surface P1, and the second direction Y is perpendicular to the first direction X.

[0069] The second direction Y and the first direction X can be perpendicular or approximately perpendicular. That is, the angle between the second direction Y and the first direction X can be 90°, or the angle between the second direction Y and the first direction X can be 88° or 89°, etc. The plane containing the second direction Y and the first direction X is parallel to the first surface P1, so that both the second direction Y and the first direction X can be parallel to the first surface P1.

[0070] The length of the squeegee 110 along the second direction Y is greater than or equal to the length of the screen 220 along the second direction Y. This allows the squeegee 110 to remove paste from other areas of the screen 220 at different positions along the second direction Y as it moves towards the paste area M1 along the first direction X. This reduces the risk of paste residue remaining in other areas of the screen 220, thereby reducing the risk of different pastes mixing during subsequent printing. Furthermore, the squeegee 110 does not need to move multiple times along the first direction X, improving its paste removal efficiency and thus increasing production efficiency and equipment uptime.

[0071] Figure 3This is a schematic diagram illustrating the positional relationship between the scraper and the first surface provided in some embodiments of this application. In some examples, such as... Figure 3 As shown, the scraper 110 includes a contact surface 1101 for contacting the first surface P1. The contact surface 1101 is parallel to the first surface P1.

[0072] For example, the contact surface 1101 can be a smooth plane. Setting the contact surface 1101 parallel to the first surface P1 can reduce the risk of the scraper 110 scraping against the first surface P1 and causing damage to the screen 220 during its movement along the first direction X towards the slurry area M1, thereby improving the reliability of the slurry removal assembly.

[0073] Continue to refer to Figure 3 In some examples, the scraper 110 also includes an inclined surface 1102. The inclined surface 1102 is connected to the contact surface 1101, and the inclined surface 1102 is closer to the slurry area M1 relative to the contact surface 1101. The included angle α between the inclined surface 1102 and the contact surface 1101 is an obtuse angle.

[0074] Understandably, the inclined surface 1102 is positioned closer to the slurry area M1 relative to the contact surface 1101, and the angle α between the inclined surface 1102 and the contact surface 1101 is an obtuse angle. This allows the scraper 110 to remove slurry from other areas of the first surface P1 into the slurry area M1 as it moves toward the slurry area M1 along the first direction X. This ensures the scraper 110's effectiveness in removing slurry and reduces the risk of slurry residue remaining in other areas of the first surface P1.

[0075] In some examples, the included angle α between the inclined surface 1102 and the contact surface 1101 ranges from 125° to 130°.

[0076] This configuration avoids the angle α between the inclined surface 1102 and the contact surface 1101 from being too large (e.g., greater than 130°), ensuring that the space between the inclined surface 1102 and the first surface P1 can accommodate a sufficient amount of slurry. Furthermore, it avoids the angle α between the inclined surface 1102 and the contact surface 1101 from being too small (e.g., less than 125°), ensuring the scraper 110 effectively removes the slurry.

[0077] For example, the included angle α between the inclined surface 1102 and the contact surface 1101 can be 126°, 128° or 129°, etc. The embodiments of this application do not further limit the value of the included angle α between the inclined surface 1102 and the contact surface 1101.

[0078] Figure 4 This is a schematic diagram showing the positional relationship of the screen, scraper, and slurry recovery assembly provided in some embodiments of this application. Figure 5This is a schematic diagram of the structure of a storage box provided in some embodiments of this application.

[0079] In some examples, such as Figure 4 As shown, the screen printing apparatus 200 also includes a paste recovery assembly 120. Understandably, the paste recovery assembly 120 is used to recover the paste located in the paste zone M1 to reduce paste loss.

[0080] like Figure 4 As shown, the slurry recovery assembly 120 includes a suction nozzle 121 and a storage box 122. The suction nozzle 121 is located on the side of the slurry area M1 away from the support platform 210. The storage box 122 is connected to the suction nozzle 121. Figure 5 As shown, the storage box 122 encloses a receiving space Q, and the suction nozzle 121 is used to absorb the slurry located in the slurry area M1 into the receiving space Q.

[0081] Understandably, the suction nozzle 121 is located on the side of the slurry area M1 away from the support platform 210, and the suction nozzle 121 is connected to the storage box 122, so that the suction nozzle 121 can absorb the slurry in the slurry area M1 into the receiving space Q.

[0082] For example, the storage box 122 may include a temperature control device for controlling the temperature within the containing space Q, so that the temperature within the containing space Q can be stabilized at a set temperature, avoiding excessively high or low temperatures that could cause the slurry within the containing space Q to solidify.

[0083] The storage box 122 may also include a valve, which is connected to the receiving space Q. When the valve is open, the slurry in the receiving space Q can flow out through the valve to enable the reuse of the scraped slurry and reduce slurry loss.

[0084] In some examples, such as Figure 5 As shown, the storage box 122 includes a body 1221 and a piston 1222. The body 1221 encloses a receiving space Q, and the suction nozzle 121 is connected to the body 1221, so that the suction nozzle 121 can communicate with the receiving space Q.

[0085] like Figure 5 As shown, along the circumferential direction N of piston 1222, piston 1222 contacts body part 1221. Along the axial direction G of piston 1222, piston 1222 can move within receiving space Q, so that suction nozzle 121 absorbs slurry located in slurry zone M1 into receiving space Q.

[0086] Understandably, the body 1221 includes a base plate 1224. When the piston 1222 moves away from the base plate 1224 along the axial direction G of the piston 1222, a negative pressure can be formed in the receiving space Q between the piston 1222 and the base plate 1224.

[0087] The suction nozzle 121 is connected to the receiving space Q, which allows the suction nozzle 121 to absorb the slurry located in the slurry zone M1 into the receiving space Q under the action of negative pressure, thereby realizing vacuum adsorption of the slurry and reducing the risk of impurities being mixed into the slurry.

[0088] For example, such as Figure 5 As shown, the slurry recovery assembly 120 may include a fourth driving component, which may include a motor. The storage box 122 may include a piston connector 1223, which connects the piston 1222 and the fourth driving component. The piston connector 1223 can convert the rotation of the motor into linear motion, that is, under the driving action of the motor, the piston connector 1223 can drive the piston 1222 to move along the axial direction G of the piston 1222.

[0089] The piston connector 1223 may include a lead screw, which includes a screw rod and a nut. The screw rod extends along the axial direction G of the piston 1222, and the nut is rotatably connected to the screw rod. A motor is connected to the nut to drive the nut to rotate, enabling the nut to move relative to the screw rod along the axial direction G of the piston 1222. The piston 1222 is connected to the nut, allowing the nut to drive the piston 1222 to move along the axial direction G of the piston 1222.

[0090] Alternatively, the piston connector 1223 may also include a gear and a rack, with the rack extending along the axial direction G of the piston 1222, and the gear and rack meshing. A motor is connected to the gear to drive its rotation, enabling the gear to move relative to the rack along the axial direction G of the piston 1222. The piston 1222 is connected to the gear, allowing the gear to drive the piston 1222 to move along the axial direction G of the piston 1222.

[0091] The fourth driving component may also include a cylinder connected to the piston 1222, which drives the piston 1222 to move along the axial direction G of the piston 1222.

[0092] Continue to refer to Figure 4 In some examples, the slurry recovery assembly 120 also includes a second drive 123 connected to the nozzle 121 for driving the nozzle 121 to move in a second direction Y.

[0093] The second drive unit 123 and the suction nozzle 121 can be directly connected, or they can be indirectly connected through other structures.

[0094] The second driving member 123 can drive the suction nozzle 121 to move along the second direction Y, so that the suction nozzle 121 can absorb the slurry located at different positions in the slurry area M1 along the second direction Y into the receiving space Q, reducing the risk of slurry residue in the slurry area M1.

[0095] Continue to refer to Figure 4In some examples, the slurry recovery assembly 120 also includes a connecting pipe 124 through which the suction nozzle 121 is connected to the body 1221. The connecting pipe 124 is connected to the second drive member 123.

[0096] For example, the connecting tube 124 can be an anti-curing conduit to reduce the risk of the slurry curing within the connecting tube 124. Understandably, the second drive member 123 can drive the connecting tube 124 to move in the second direction Y, so that the connecting tube 124 can drive the nozzle 121 to move in the second direction Y.

[0097] In some examples, the position where the connecting pipe 124 is connected to the second driving member 123 is the first position, and the position where the connecting pipe 124 is connected to the storage box 122 is the second position. The pipe between the first position and the second position is a flexible pipe, and the pipe between the first position and the second position has a length margin so that the second driving member 123 can drive the first position to move along the second direction Y.

[0098] Understandably, the first position moves along the second direction Y, thereby driving the nozzle 121 to move along the second direction Y. The tubing between the first and second positions has a length margin to prevent it from affecting the movement of the nozzle 121 along the second direction Y.

[0099] Figure 6 This is a schematic diagram of the structure of a second driving component provided in some embodiments of this application. In some examples, such as... Figure 6 As shown, the second driving component 123 includes a motor (not shown), a conveyor belt 1232, and conveyor wheels 1231. There are multiple conveyor wheels 1231, spaced apart along a second direction Y. The motor drives the multiple conveyor wheels 1231 to rotate. The conveyor belt 1232 connects to the multiple conveyor wheels 1231. A connecting pipe 124 is connected to the conveyor belt 1232.

[0100] The number of conveyor wheels 1231 can be two, three, or more; the embodiments of this application do not further limit the number of conveyor wheels 1231. The conveyor belt 1232 is connected to the conveyor wheels 1231. The rotation of multiple conveyor wheels 1231 can drive the conveyor belt 1232 to move along the second direction Y. The connecting pipe 124 is connected to the conveyor belt 1232, enabling the conveyor belt 1232 to drive the connecting pipe 124 to move along the second direction Y, thereby driving the suction nozzle 121 to move along the second direction Y.

[0101] The second driving component 123 includes a motor, a conveyor belt 1232, and a conveyor wheel 1231. It can drive the connecting pipe 124 to move along the second direction Y without a complex structure, thereby driving the suction nozzle 121 to move along the second direction Y, which reduces the cost of the slurry recovery component 120.

[0102] For example, the second driving component 123 may also include a motor and a connector, with the connector connecting the motor and the connecting pipe 124. The connector can convert the rotation of the motor into linear motion, that is, the connector can drive the connecting pipe 124 to move along the second direction Y under the driving action of the motor.

[0103] The connector may include a lead screw, which comprises a threaded rod and a nut. The threaded rod extends along a second direction Y, and the nut is rotatably connected to the threaded rod. A motor is connected to the nut to drive the nut to rotate, enabling the nut to move relative to the threaded rod along the second direction Y. A connecting tube 124 is connected to the nut, allowing the nut to drive the connecting tube 124 to move along the second direction Y.

[0104] Alternatively, the connector may include a gear and a rack, with the rack extending along the second direction Y, and the gear and rack meshing. A motor is connected to the gear to drive its rotation, enabling the gear to move relative to the rack along the second direction Y. A connecting pipe 124 is connected to the gear, allowing the gear to drive the connecting pipe 124 to move along the second direction Y.

[0105] The second driving component 123 may also include a cylinder, which is connected to the connecting pipe 124 and drives the connecting pipe 124 to move along the second direction Y.

[0106] Continue to refer to Figure 4 In some examples, there are multiple storage boxes 122, and multiple connecting pipes 124. Any one of the storage boxes 122 is detachably connected. This configuration allows for the replacement of different storage boxes 122 as needed, improving the flexibility of the slurry recovery assembly 120.

[0107] Figure 7 This diagram illustrates the connection relationship between the connecting pipe and the multi-way valve provided in some embodiments of this application. In some examples, such as... Figure 4 As shown, there are multiple storage boxes 122. Figure 7 As shown, the connecting pipe 124 includes a main connecting pipe 1241 and multiple connecting branch pipes 1242. The slurry recovery assembly 120 also includes a multi-way valve 125. The multiple connecting branch pipes 1242 are respectively connected to the main connecting pipe 1241 through the multi-way valve 125.

[0108] The main connecting pipe 1241 is connected to the suction nozzle 121, and multiple connecting branch pipes 1242 are connected to multiple storage boxes 122 in a corresponding manner. The multi-way valve 125 is used to connect the main connecting pipe 1241 and any one of the connecting branch pipes 1242.

[0109] Understandably, by setting different valve ports of the multi-way valve 125 to connect, the main connecting pipe 1241 can be connected to any connecting branch pipe 1242, that is, the suction nozzle 121 can be connected to any storage box 122. Thus, the suction nozzle 121 can be connected to different storage boxes 122 according to the needs, which improves the flexibility of use of the slurry recovery component 120.

[0110] Continue to refer to Figure 4 In some examples, the slurry recovery assembly 120 also includes a vision sensor 126 located on the side of the slurry zone M1 away from the support stage 210, for acquiring image information of the slurry zone M1. For example, the vision sensor 126 may include a visual inspection camera, an infrared camera, or a scanner, enabling the vision sensor 126 to acquire image information of the slurry zone M1.

[0111] Understandably, Figure 4 To illustrate the positional relationship between the vision sensor 126 and the nozzle 121, the nozzle 121 located between the vision sensor 126 and the slurry zone M1 is shown.

[0112] The screen printing apparatus 200 also includes a controller (not shown in the figure), which is electrically connected to the vision sensor 126 and the second drive unit 123, and is used to control the drive nozzle 121 of the second drive unit 123 to move along the second direction Y according to the image information acquired by the vision sensor 126.

[0113] For example, the controller can be a programmable logic controller (PLC), or it can be other types of control or processing devices, such as a central processing unit. The embodiments of this application do not further limit the type of controller.

[0114] For example, the vision sensor 126 can acquire image information of the slurry area M1, convert the image information of the slurry area M1 into an electrical signal, and then send it to the controller. The controller can determine whether there are differences in color and temperature of the slurry area M1 based on the received electrical signal, thereby determining whether there is residual slurry in the slurry area M1.

[0115] When the controller determines that there is residual slurry in the slurry zone M1, the controller can control the second drive member 123 to drive the suction nozzle 121 to move along the second direction Y to the position where the slurry is residual, so that the suction nozzle 121 can absorb the residual slurry into the receiving space Q, thereby reducing the risk of slurry residue in the slurry zone M1 and improving the reliability of the slurry recovery component 120.

[0116] In some examples, the slurry recovery assembly 120 also includes a third drive unit connected to the vision sensor 126 for driving the vision sensor 126 to move along the second direction Y.

[0117] For example, the third driving component may include a motor. The slurry recovery assembly 120 may also include a connector that connects the motor and the vision sensor 126. The connector is capable of converting the rotation of the motor into linear motion, that is, the connector can drive the vision sensor 126 to move along the second direction Y under the drive of the motor.

[0118] The connector may include a lead screw, which includes a threaded rod and a nut. The threaded rod extends along a second direction Y, and the nut is movably connected to the threaded rod. A motor is connected to the nut to drive the nut to rotate, enabling the nut to move relative to the threaded rod along the second direction Y. A vision sensor 126 is connected to the nut, allowing the nut to drive the vision sensor 126 to move along the second direction Y.

[0119] Alternatively, the connector may include a gear and a rack, with the rack extending along the second direction Y, and the gear and rack meshing. A motor is connected to the gear to drive its rotation, enabling the gear to move relative to the rack along the second direction Y. A vision sensor 126 is connected to the gear, allowing the gear to drive the vision sensor 126 to move along the second direction Y.

[0120] The third driving component may also include a cylinder connected to the vision sensor 126, which drives the vision sensor 126 to move along the second direction Y.

[0121] Understandably, the third driving component drives the vision sensor 126 to move along the second direction Y, enabling the vision sensor 126 to acquire image information of different positions of the slurry area M1 along the second direction Y, and to send the image information of different positions of the slurry area M1 along the second direction Y to the controller, thereby reducing the risk of slurry residue in the slurry area M1 and improving the reliability of the slurry recovery component 120.

[0122] In some examples, the slurry recovery assembly 120 also includes a first guide located on the side of the slurry zone M1 away from the support platform 210 and extending along a second direction Y. A vision sensor 126 is slidably connected to the first guide, and a third drive is used to drive the vision sensor 126 to slide relative to the first guide along the second direction Y.

[0123] For example, the first guide may include a guide rail extending along a first direction X. The slurry removal assembly may also include a slider connected to the vision sensor 126. The slider is embedded in and slidably connected to the guide rail, allowing the vision sensor 126 to slide relative to the first guide along the first direction X.

[0124] Alternatively, the first guide may also include a groove extending along a first direction X. The slurry removal assembly may also include a pulley connected to the vision sensor 126. The pulley is embedded in and slidably connected to the groove, allowing the vision sensor 126 to slide relative to the first guide along the first direction X.

[0125] Understandably, the first guide member can guide and limit the vision sensor 126, enabling the vision sensor 126 to move along the second direction Y under the driving action of the third drive member, thereby reducing the risk of the vision sensor 126 deviating relative to the second direction Y during the movement.

[0126] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A screen printing apparatus, characterized in that, include: A support platform is used to support silicon wafers; A screen is disposed on the side of the silicon wafer away from the support stage; a printed pattern is disposed on the screen, the printed pattern penetrating the screen along the thickness direction of the screen; the surface of the screen away from the support stage is a first surface, the first surface including a paste area, the paste area not having the printed pattern disposed thereon; as well as, A slurry removal assembly includes a scraper and a first drive member; the scraper is located on the side of the screen away from the support table; the first drive member is connected to the scraper; the first drive member is used to drive the scraper to move so that the scraper is located on one side of the slurry area along a first direction and in contact with the first surface; The first driving member is also used to drive the scraper to move closer to the slurry area along the first direction, so that the scraper removes the slurry located on the first surface into the slurry area; the first direction is parallel to the first surface.

2. The screen printing apparatus according to claim 1, characterized in that, The length of the scraper along the second direction is greater than or equal to the length of the screen along the second direction; the second direction is parallel to the first surface, and the second direction is perpendicular to the first direction.

3. The screen printing apparatus according to claim 1, characterized in that, The scraper includes a contact surface for contacting the first surface; the contact surface is parallel to the first surface.

4. The screen printing apparatus according to any one of claims 1 to 3, characterized in that, The scraper also includes an inclined surface, which is connected to the contact surface and is closer to the slurry area than the contact surface; the angle between the inclined surface and the contact surface is an obtuse angle.

5. The screen printing apparatus according to claim 1, characterized in that, It also includes a slurry recovery assembly, which comprises: The suction nozzle is located on the side of the slurry area away from the support platform; A storage box is connected to the suction nozzle; the storage box encloses a receiving space, and the suction nozzle is used to absorb the slurry located in the slurry area into the receiving space.

6. The screen printing apparatus according to claim 5, characterized in that, The storage box includes: The body portion encloses the receiving space, and the suction nozzle is connected to the body portion; The piston contacts the body portion along its circumferential direction; along its axial direction, the piston can move within the receiving space so that the suction nozzle absorbs the slurry located in the slurry zone into the receiving space.

7. The screen printing apparatus according to claim 6, characterized in that, The slurry recovery assembly further includes a second driving member, which is connected to the suction nozzle and is used to drive the suction nozzle to move along a second direction; the second direction is parallel to the first surface and perpendicular to the first direction.

8. The screen printing apparatus according to claim 7, characterized in that, The slurry recovery assembly further includes a connecting pipe, through which the suction nozzle is connected to the main body; the connecting pipe is also connected to the second driving component. The position where the connecting pipe is connected to the second driving component is the first position, and the position where the connecting pipe is connected to the storage box is the second position. The pipe between the first position and the second position is a flexible pipe, and the pipe between the first position and the second position has a length margin so that the second driving component can drive the first position to move along the second direction.

9. The screen printing apparatus according to claim 8, characterized in that, The second driving component includes a motor, a conveyor belt, and conveyor wheels; there are multiple conveyor wheels, which are spaced apart along the second direction; the motor drives the multiple conveyor wheels to rotate; the conveyor belt connects the multiple conveyor wheels; and the connecting pipe is connected to the conveyor belt.

10. The screen printing apparatus according to any one of claims 7 to 9, characterized in that, The slurry recovery assembly also includes a vision sensor located on the side of the slurry area away from the support platform, for acquiring image information of the slurry area; The screen printing apparatus further includes a controller, which is electrically connected to the vision sensor and the second driving component, and is used to control the second driving component to drive the suction nozzle to move along the second direction based on the image information acquired by the vision sensor.

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