Electrically heated water cooled exhaust treatment device

Abstract

The utility model relates to the technical field of semiconductor tail gas processing, especially electric heating water cooling tail gas processing equipment, including electric heating mechanism, the bottom of electric heating mechanism is installed with cooling mechanism, electric heating mechanism includes the shell, the inside fixed connection of shell has the outer tube, the inside installation of outer tube has the middle tube, the inside installation of middle tube has the inner tube, the inner tube and middle tube form the air guide chamber between, the top fixed connection of inner tube has the mounting bracket, the quantity of mounting bracket is a plurality, the inside all installation of plurality mounting bracket has electric heating rod, cooling mechanism includes the cooling cylinder, the cooling cylinder installs at the bottom of shell, the inside fixed connection of cooling cylinder has the fixed frame, cooling cylinder and fixed frame form the cooling chamber between, the inside fixed connection of fixed frame has the connecting pipe, and the quantity of connecting pipe is a plurality. The utility model can cool the tail gas after combustion treatment.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor exhaust gas treatment, and more particularly to an electrically heated water-cooled exhaust gas treatment device. Background Technology

[0002] The exhaust gas generated by gallium nitride epitaxy contains a variety of harmful substances, such as flammable gases like hydrogen, as well as toxic gases like silane, chlorine, and ammonia. If these gases are emitted directly, they will have an impact on the environment and need to be purified efficiently through combustion.

[0003] The temperature of the exhaust gas after combustion is usually as high as 700-800℃ (direct combustion). Directly discharging the exhaust gas at high temperature can cause material deformation, corrosion or failure of subsequent treatment equipment. Utility Model Content

[0004] In view of this, the present invention provides an electrically heated and water-cooled exhaust gas treatment device, the main technical problem to be solved is: to treat the exhaust gas generated by the gallium nitride epitaxial process, and to cool down the exhaust gas after combustion treatment.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: an electrically heated and water-cooled exhaust gas treatment device, comprising an electrically heated mechanism, a cooling mechanism installed at the bottom of the electrically heated mechanism, the electrically heated mechanism comprising a shell, an outer cylinder fixedly connected inside the shell, a middle cylinder installed inside the outer cylinder, an inner cylinder installed inside the middle cylinder, an air guiding cavity formed between the inner cylinder and the middle cylinder, a mounting frame fixedly connected to the top of the inner cylinder, the number of mounting frames being multiple, and an electrically heated rod installed inside each of the mounting frames; the cooling mechanism comprising a cooling cylinder, the cooling cylinder being installed at the bottom of the shell, a fixing frame fixedly connected inside the cooling cylinder, a cooling cavity formed between the cooling cylinder and the fixing frame, and a connecting pipe fixedly connected inside the fixing frame, the number of connecting pipes being multiple.

[0006] By adopting the above technical solution, when in use, the exhaust gas to be treated is added into the inner cylinder, and the exhaust gas is heated by an electric heating rod to reach its ignition point for combustion treatment in the inner cylinder. The combusted exhaust gas will enter the gas guiding chamber from the inside of the inner cylinder, and then enter the fixed frame from the gas guiding chamber. The gas in the fixed frame will pass through the connecting pipe located inside the cooling chamber, reach the bottom of the cooling cylinder, and finally enter the exhaust pipe for discharge. By injecting cooling water into the cooling chamber, the connecting pipe can be cooled, and the gas can be cooled when it passes through the connecting pipe.

[0007] As a further description of the above technical solution:

[0008] A protective sleeve is fixedly connected to the bottom of the mounting bracket. The surface of the protective sleeve has multiple through holes, and the electric heating rod is located inside the protective sleeve.

[0009] By adopting the above technical solution, the electric heating rod can be protected by the protective sleeve, and the through hole facilitates the electric heating rod to heat the exhaust gas.

[0010] As a further description of the above technical solution:

[0011] An air inlet pipe is fixedly connected to the top of the inner cylinder, and multiple mounting brackets are located around the air inlet pipe.

[0012] By adopting the above technical solution, exhaust gas and compressed air can be added into the inner cylinder in a certain proportion for combustion through the intake pipe.

[0013] As a further description of the above technical solution:

[0014] The bottom of the outer cylinder is fixedly connected to a flow guide frame, which has a conical structure.

[0015] By adopting the above technical solution, the gas passing through the gas guide cavity can be introduced into the fixed frame through the flow guide frame.

[0016] As a further description of the above technical solution:

[0017] A guide tube is fixedly connected to the bottom of the drainage frame, and the bottom of the guide tube is located in the middle of the fixed frame.

[0018] By adopting the above technical solution, it is easier for gas to enter the fixed frame.

[0019] As a further description of the above technical solution:

[0020] A collection seat is fixedly connected to the bottom of the cooling cylinder, and a discharge pipe is fixedly connected to the side wall of the collection seat.

[0021] By adopting the above technical solution, the gas passing through the connecting pipe will enter the collection seat.

[0022] As a further description of the above technical solution:

[0023] A water inlet pipe is fixedly connected to the outer surface of the cooling cylinder, and the water inlet pipe is connected to the cooling chamber.

[0024] By adopting the above technical solution, cooling water is injected into the cooling chamber through the water inlet pipe to cool the connecting pipe.

[0025] As a further description of the above technical solution:

[0026] An exhaust pipe is installed on the side wall of the collection seat.

[0027] By adopting the above technical solution, the exhaust gas after combustion is discharged through the exhaust pipe.

[0028] By means of the above technical solution, the electric heating and water cooling exhaust gas treatment equipment of this utility model has at least the following characteristics:

[0029] Beneficial effects:

[0030] 1. Compared with the existing technology, the electric heating water-cooled exhaust gas treatment equipment adds the exhaust gas to be treated into the inner cylinder, heats the exhaust gas to the ignition point by electric heating rods, and performs combustion treatment in the inner cylinder. The combusted exhaust gas enters the air guide chamber from the inside of the inner cylinder, and then enters the fixed frame from the air guide chamber. The gas in the fixed frame passes through the connecting pipe located inside the cooling chamber, reaches the bottom of the cooling cylinder, and finally enters the exhaust pipe for discharge.

[0031] 2. Compared with the existing technology, this electrically heated water-cooled exhaust gas treatment equipment can cool the connecting pipe by injecting cooling water into the cooling chamber, and can cool the gas when it passes through the connecting pipe. Attached Figure Description

[0032] Figure 1 This is a schematic diagram of the overall structure from a first-view perspective of the present invention.

[0033] Figure 2 This is a schematic diagram of the overall structure from a second perspective proposed in this utility model;

[0034] Figure 3 This is a cross-sectional view of the internal structure proposed in this utility model;

[0035] Figure 4 The present utility model proposes Figure 3 Enlarged view of the structure at point A in the middle.

[0036] Legend:

[0037] 1. Electric heating mechanism; 101. Outer shell; 102. Outer cylinder; 103. Middle cylinder; 104. Inner cylinder; 105. Mounting bracket; 106. Electric heating rod; 107. Air inlet pipe; 108. Drainage rack; 109. Guide pipe; 2. Cooling mechanism; 201. Cooling cylinder; 202. Fixing bracket; 203. Connecting pipe; 204. Collection seat; 205. Discharge pipe; 206. Water inlet pipe; 3. Exhaust pipe. Detailed Implementation

[0038] Reference Figure 1-4The electric heating and water cooling exhaust gas treatment equipment provided by this utility model includes an electric heating mechanism 1, a cooling mechanism 2 installed at the bottom of the electric heating mechanism 1, an outer shell 101, an outer cylinder 102 fixedly connected inside the outer shell 101, a middle cylinder 103 installed inside the outer cylinder 102, an inner cylinder 104 installed inside the middle cylinder 103, and a gas guiding chamber formed between the inner cylinder 104 and the middle cylinder 103. The gas after combustion treatment in the inner cylinder 104 is discharged to the outside of the outer shell 101 through the gas guiding chamber. A mounting bracket 105 is fixedly connected to the top of the inner cylinder 104. There are multiple mounting brackets 105, and electric heating rods 106 are installed inside each of the multiple mounting brackets 105. The electric heating rods 106 heat the exhaust gas to reach the ignition point for combustion treatment. The cooling mechanism 2 includes a cooling cylinder 201 installed at the bottom of the outer shell 101. A cooling mechanism 2 is fixedly connected inside the cooling cylinder 201. A cooling chamber is formed between the fixed frame 202, the cooling cylinder 201, and the fixed frame 202. A connecting pipe 203 is fixedly connected inside the fixed frame 202, and there are multiple connecting pipes 203. The cooling water inside the cooling chamber cools the connecting pipes 203, thereby cooling down the gas after combustion. In use, the exhaust gas to be treated is added into the inner cylinder 104, and the exhaust gas is heated by the electric heating rod 106 to reach the ignition point for combustion in the inner cylinder 104. The exhaust gas after combustion enters the gas guiding chamber from the inner cylinder 104, and then enters the fixed frame 202 from the gas guiding chamber. The gas in the fixed frame 202 passes through the connecting pipes 203 located inside the cooling chamber, reaches the bottom of the cooling cylinder 201, and finally enters the exhaust pipe 3 for discharge. By injecting cooling water into the cooling chamber, the connecting pipes 203 can be cooled down. When the gas passes through the connecting pipes 203, the gas can be cooled.

[0039] A protective sleeve is fixedly connected to the bottom of the mounting bracket 105. The surface of the protective sleeve has multiple through holes. The electric heating rod 106 is located inside the protective sleeve. The protective sleeve can protect the electric heating rod 106, and the through holes facilitate the electric heating rod 106 to heat the exhaust gas.

[0040] An air inlet pipe 107 is fixedly connected to the top of the inner cylinder 104, and multiple mounting brackets 105 are located around the air inlet pipe 107. Through the air inlet pipe 107, exhaust gas and compressed air can be added into the inner cylinder 104 for combustion in a certain proportion.

[0041] A flow guide 108 is fixedly connected to the bottom of the outer cylinder 102. The flow guide 108 has a conical structure. The flow guide 108 can guide the gas passing through the gas guide cavity into the fixed frame 202. A guide tube 109 is fixedly connected to the bottom of the flow guide 108. The bottom of the guide tube 109 is located in the middle of the fixed frame 202, which facilitates the gas to enter the fixed frame 202.

[0042] A collection seat 204 is fixedly connected to the bottom of the cooling cylinder 201. An exhaust pipe 205 is fixedly connected to the side wall of the collection seat 204. Gas passing through the connecting pipe 203 will enter the collection seat 205. An exhaust pipe 3 is installed on the side wall of the collection seat 204 to discharge the exhaust gas after combustion treatment through the exhaust pipe 3.

[0043] A water inlet pipe 206 is fixedly connected to the outer surface of the cooling cylinder 201. The water inlet pipe 206 is connected to the cooling chamber, and cooling water is injected into the cooling chamber through the water inlet pipe 206 to cool the connecting pipe 203.

[0044] Working principle: During use, the exhaust gas to be treated is added into the inner cylinder 104. The exhaust gas is heated by the electric heating rod 106 to reach its ignition point and is burned in the inner cylinder 104. The burned exhaust gas enters the air guide chamber from the inner cylinder 104, and then enters the fixed frame 202. The gas in the fixed frame 202 passes through the connecting pipe 203 located inside the cooling chamber, reaches the bottom of the cooling cylinder 201, and finally enters the exhaust pipe 3 for discharge. Cooling water is injected into the cooling chamber to cool the connecting pipe 203. When the gas passes through the connecting pipe 203, the gas is cooled.

[0045] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. An electrically heated water-cooled exhaust gas treatment device, comprising an electrically heated mechanism (1), characterized in that: A cooling mechanism (2) is installed at the bottom of the electric heating mechanism (1). The electric heating mechanism (1) includes a shell (101). An outer cylinder (102) is fixedly connected inside the shell (101). A middle cylinder (103) is installed inside the outer cylinder (102). An inner cylinder (104) is installed inside the middle cylinder (103). An air guide cavity is formed between the inner cylinder (104) and the middle cylinder (103). A mounting bracket (105) is fixedly connected to the top of the inner cylinder (104). The number of heating elements is multiple, and each of the multiple mounting brackets (105) is equipped with an electric heating rod (106). The cooling mechanism (2) includes a cooling cylinder (201), which is installed at the bottom of the outer shell (101). A fixing frame (202) is fixedly connected inside the cooling cylinder (201). A cooling cavity is formed between the cooling cylinder (201) and the fixing frame (202). A connecting pipe (203) is fixedly connected inside the fixing frame (202), and the number of connecting pipes (203) is multiple.

2. The electrically heated water-cooled exhaust gas treatment equipment according to claim 1, characterized in that: The bottom of the mounting bracket (105) is fixedly connected to a protective sleeve. The surface of the protective sleeve has multiple through holes, and the electric heating rod (106) is located inside the protective sleeve.

3. The electrically heated water-cooled exhaust gas treatment equipment according to claim 1, characterized in that: An air inlet pipe (107) is fixedly connected to the top of the inner cylinder (104), and a plurality of mounting brackets (105) are located around the air inlet pipe (107).

4. The electrically heated water-cooled exhaust gas treatment equipment according to claim 1, characterized in that: The bottom of the outer cylinder (102) is fixedly connected to a flow guide (108), which has a conical structure.

5. The electrically heated water-cooled exhaust gas treatment equipment according to claim 4, characterized in that: The bottom of the drainage frame (108) is fixedly connected to a guide tube (109), and the bottom of the guide tube (109) is located in the middle of the fixed frame (202).

6. The electrically heated water-cooled exhaust gas treatment equipment according to claim 1, characterized in that: The bottom of the cooling cylinder (201) is fixedly connected to a collection seat (204), and the side wall of the collection seat (204) is fixedly connected to a discharge pipe (205).

7. The electrically heated water-cooled exhaust gas treatment equipment according to claim 1, characterized in that: A water inlet pipe (206) is fixedly connected to the outer surface of the cooling cylinder (201), and the water inlet pipe (206) is connected to the cooling chamber.

8. The electrically heated water-cooled exhaust gas treatment equipment according to claim 6, characterized in that: An exhaust pipe (3) is installed on the side wall of the collection seat (204).

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