A clean workshop capable of rapid temperature rise
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- WUXI CHENGYI PURIFICATION EQUIP CO LTD
- Filing Date
- 2025-06-16
- Publication Date
- 2026-06-12
AI Technical Summary
Traditional cleanroom heating equipment heats up slowly and requires preheating, leading to energy waste and pollution of the cleanroom environment. Furthermore, the long heating time can release VOCs or particulates.
The system employs a moving heating structure, including a drive motor, gears, lead screw, and heater. This allows for rapid heating by moving the heater, avoiding prolonged preheating and reducing contamination of the heater coating and sealant.
It achieves rapid heating, reduces heating time and pollution to the cleanroom environment, improves energy efficiency, and avoids the release of VOCs and particulates.
Smart Images

Figure CN224353287U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to a cleanroom, and more particularly to a cleanroom that can be rapidly heated, belonging to the field of cleanroom technology. Background Technology
[0002] Rapidly heated cleanrooms primarily address the high requirements of specific industries for clean environments and temperature control. For example, in chip manufacturing, processes such as photolithography and etching need to be carried out in a high-cleanliness environment. At the same time, some steps require rapid heating to 120-150℃ to accelerate chemical reactions or curing processes. In addition, in the bonding or curing processes of components such as optical lenses and sensors, rapid heating to 80-100℃ is required in an ISO Class 6 cleanroom to avoid accuracy deviations caused by thermal stress.
[0003] Traditional cleanrooms with rapid heating have a simple structure. Some heating equipment (such as resistance wires and steam coils) rely on heat conduction or convection heat transfer, and the heating rate is usually no more than 2°C / min. Preheating is required 1-2 hours in advance. The thermal efficiency of resistance heating is only 60%-70%, and about 30% of the energy is lost in the form of infrared radiation or heat conduction, resulting in energy waste. Furthermore, the long heating time of the heating equipment will cause the heater coating, sealant and other materials to release VOCs or particles, which will directly affect the cleanroom environment. Utility Model Content
[0004] In view of the shortcomings of existing technology, this utility model provides a cleanroom that can be rapidly heated.
[0005] The technical solution adopted by this utility model to solve the above-mentioned technical problems is as follows:
[0006] A cleanroom capable of rapid heating includes a main body and an entrance / exit. A movable heating structure is mounted on the main body. The movable heating structure includes a drive motor fixedly installed on one side of the main body. A first gear is fixedly installed at the output end of the drive motor. A lead screw is movably mounted on the main body. A second gear meshing with the first gear is fixedly installed at one end of the lead screw. A transmission block is mounted on the lead screw. A connecting block is fixedly installed at one end of the transmission block. A fixing frame is fitted onto the connecting block. A heater is fixedly installed at one end of the fixing frame.
[0007] Furthermore, the connecting block has multiple mounting holes, a first spring is fixedly installed inside the mounting holes, a locking block is fixedly installed at one end of the first spring, and the fixing frame has multiple locking holes that cooperate with the locking block.
[0008] Furthermore, multiple fixing plates are fixedly installed on the main body of the workshop, and a plug rod connected to the card block is movably installed on the fixing plate. The plug rod is provided with a second spring connected to the fixing plate, and the card block is provided with a plug hole adapted to the plug rod.
[0009] Furthermore, multiple window frames are fixedly installed inside and outside the main body of the workshop. A sealing door is provided on the window frame. A connecting frame is fixedly installed on the window frame. A buckle is fixedly installed at one end of the connecting frame. A locking handle is fixedly installed on the sealing door. A retaining ring that cooperates with the buckle is fixedly installed at one end of the locking handle.
[0010] Furthermore, a protective shell is fixedly installed on the outside of the drive motor, and the protective shell has multiple heat dissipation holes. One end of the protective shell is provided with a maintenance cover.
[0011] Furthermore, the main body of the workshop is provided with multiple exhaust holes, and a dust cover connected to the main body of the workshop is installed on the outside of the exhaust holes. Fixing blocks are fixedly installed on both sides of the dust cover, and bolts connected to the main body of the workshop are installed on the fixing blocks.
[0012] Compared with the prior art, the beneficial effects of this utility model are as follows:
[0013] Compared to traditional heating equipment that relies on heat conduction or convection heat transfer methods, such as fixed resistance wires and steam coils, this invention, through the setting of a movable heating structure, eliminates the need for long-term preheating and can also, to a certain extent, prevent the release of VOCs or particles from materials such as coatings and sealants due to excessively long heating time, thus helping to reduce the impact on the cleanroom environment. Attached Figure Description
[0014] Figure 1 This is a schematic diagram of the overall structure of this utility model;
[0015] Figure 2 This is a schematic diagram of the lead screw structure of this utility model;
[0016] Figure 3 This is a schematic diagram of the dust cover structure of this utility model;
[0017] Figure 4 For the present utility model Figure 2 Enlarged view of point A in the middle;
[0018] Figure 5 For the present utility model Figure 3 Enlarged view at point B in the middle;
[0019] Figure 6 For the present utility model Figure 1 Enlarged view at point C;
[0020] Figure 7 For the present utility model Figure 3 Enlarged view of point E in the middle.
[0021] In the diagram: 1. Main body of the workshop; 2. Entrance / exit gate; 3. Moving heating structure; 4. Drive motor; 5. First gear; 6. Lead screw; 7. Second gear; 8. Transmission block; 9. Connecting block; 10. Fixing frame; 11. Heater; 12. Mounting hole; 13. First spring; 14. Locking block; 15. Locking hole; 16. Fixing plate; 17. Insert rod; 18. Second spring; 19. Insertion hole; 20. Window frame; 21. Sealing door; 22. Connecting frame; 23. Buckle; 24. Locking handle; 25. Snap ring; 26. Protective shell; 27. Heat dissipation hole; 31. Exhaust hole; 32. Dust cover; 33. Fixing block; 34. Bolt. Detailed Implementation
[0022] The technical solution of this utility model will now be clearly and completely described in conjunction with the accompanying drawings and specific embodiments.
[0023] like Figures 1-7 As shown, a cleanroom capable of rapid heating includes a main body 1 and an entrance / exit 2. A movable heating structure 3 is installed on the main body 1. The movable heating structure 3 includes a drive motor 4 fixedly installed on one side of the main body 1. A first gear 5 is fixedly installed at the output end of the drive motor 4. A lead screw 6 is movably installed on the main body 1. A second gear 7 that meshes with the first gear 5 is fixedly installed at one end of the lead screw 6. A transmission block 8 is provided on the lead screw 6. A connecting block 9 is fixedly installed at one end of the transmission block 8. A fixing frame 10 is sleeved on the connecting block 9. A heater 11 is fixedly installed at one end of the fixing frame 10.
[0024] like Figure 5 As shown, the connecting block 9 has multiple mounting holes 12, and a first spring 13 is fixedly installed inside the mounting holes 12. A locking block 14 is fixedly installed at one end of the first spring 13. The fixing frame 10 has multiple locking holes 15 that cooperate with the locking block 14. During the process of inserting the connecting block 9 into the fixing frame 10, the locking block 14 will pop out from inside the locking hole 15 under the elastic action of the first spring 13, thereby fixing the connecting block 9 inside the fixing frame 10. When the locking block 14 is pressed to retract to the inside of the fixing frame 10, the connecting block 9 can be pulled out from inside the fixing frame 10, so that the heater 11 can be removed from the transmission block 8 for easy disassembly and maintenance of the heater 11.
[0025] like Figure 5As shown, multiple fixing plates 16 are fixedly installed on the main body 1 of the workshop. A plug rod 17 connected to the locking block 14 is movably installed on the fixing plate 16. The plug rod 17 is provided with a second spring 18 connected to the fixing plate 16. The locking block 14 is provided with a plug hole 19 adapted to the plug rod 17. When the locking block 14 is engaged inside the locking hole 15, the plug rod 17 can be engaged inside the locking block 14 under the elastic action of the second spring 18, thereby limiting the locking block 14 and making the locking block 14 stably engaged in the locking hole 15, avoiding the heater 11 from shaking or loosening.
[0026] like Figure 6 As shown, multiple window frames 20 are fixedly installed both inside and outside the main body 1 of the workshop. Each window frame 20 has a sealing door 21, and a connecting frame 22 is fixedly installed on it. A buckle 23 is fixedly installed at one end of the connecting frame 22. A locking handle 24 is fixedly installed on the sealing door 21, and a retaining ring 25 that cooperates with the buckle 23 is fixedly installed at one end of the locking handle 24. When personnel are debugging or repairing machines inside the main body 1 of the workshop, they can directly open the outer sealing door 21 to retrieve tools from the outside into the window frame 2, and then turn the lock... Tighten handle 24 to lock ring 25 onto buckle 23, then press lock handle 24 to tighten ring 25 onto buckle 23, fixing sealing door 21 to window frame 20 for sealing; after sealing door 21 is completely sealed to connecting frame 22, personnel inside workshop body 1 can open its internal sealing door 21, connecting the internal and external sealing doors 21. After the internal sealing door 21 is opened, tools placed in by external personnel can be retrieved or placed in. This structure can prevent external dust from entering the interior of workshop body 1 through connecting frame 22, thus avoiding impact on the cleanroom environment.
[0027] like Figure 6 As shown, a protective shell 26 is fixedly installed on the outside of the drive motor 4. The protective shell 26 has multiple heat dissipation holes 27 and a maintenance cover is provided at one end of the protective shell 26. The protective shell 26 can protect the drive motor 4. The multiple heat dissipation holes 27 on the protective shell 26 can dissipate the heat generated by the drive motor 4 in a timely manner. The maintenance cover helps to perform maintenance on the drive motor 4 without disassembling the protective shell 26.
[0028] like Figure 7 As shown, the main body of the workshop 1 is provided with multiple exhaust holes 31. A dust cover 32 connected to the main body of the workshop 1 is installed on the outside of the exhaust holes 31. Fixing blocks 33 are fixedly installed on both sides of the dust cover 32. Bolts 34 connected to the main body of the workshop 1 are installed on the fixing blocks 33. The multiple exhaust holes 31 can cooperate with the ventilation device for cleanrooms to allow air to circulate inside the main body of the workshop 1. The dust cover 32 can be fixed on the outside of the exhaust holes 31 by the connection of the multiple fixing blocks 33 to the main body of the workshop 1.
[0029] like Figures 1-7 As shown in the figure, the working process of the rapidly heating cleanroom provided in this embodiment is as follows:
[0030] When the interior of the workshop body 1 needs to be heated rapidly, the heater 11 is started first. At the same time as the heater 11 is started, the drive motor 4 starts running. Through the first gear 5 set at its output end and the second gear 7 meshing with the first gear 5, the lead screw 6 is driven by the second gear 7 to rotate. When the lead screw 6 rotates, the connecting block 9 drives the heater 11 to move on the lead screw 6, thereby greatly increasing the heating range of the heater 11 and helping to quickly raise the internal temperature of the workshop body 1. When the temperature reaches a suitable level, the drive motor 4 and the heater 11 can be stopped.
[0031] The foregoing description illustrates and describes preferred embodiments of the present invention. It should be understood that the present invention is not limited to the forms disclosed herein. Any modifications and variations made by those skilled in the art without departing from the spirit and scope of the present invention should be within the protection scope of the appended claims.
Claims
1. A cleanroom capable of rapid heating, comprising a main body (1) and an entrance / exit (2), characterized in that: The workshop body (1) is provided with a movable heating structure (3). The movable heating structure (3) includes a drive motor (4) fixedly installed on one side of the workshop body (1). A first gear (5) is installed at the output end of the drive motor (4). A lead screw (6) is movably installed on the workshop body (1). A second gear (7) meshing with the first gear (5) is fixedly installed at one end of the lead screw (6). A transmission block (8) is provided on the lead screw (6). A connecting block (9) is fixedly installed at one end of the transmission block (8). A fixing frame (10) is sleeved on the connecting block (9). A heater (11) is fixedly installed at one end of the fixing frame (10).
2. The cleanroom with rapid heating capability according to claim 1, characterized in that: The connecting block (9) has multiple mounting holes (12), and a first spring (13) is fixedly installed inside the mounting hole (12). A locking block (14) is fixedly installed at one end of the first spring (13). The fixing frame (10) has multiple locking holes (15) that cooperate with the locking block (14).
3. The cleanroom with rapid heating according to claim 2, characterized in that: Multiple fixing plates (16) are fixedly installed on the main body (1) of the workshop. A plug rod (17) connected to the card block (14) is movably installed on the fixing plate (16). A second spring (18) connected to the fixing plate (16) is provided on the plug rod (17). A plug hole (19) adapted to the plug rod (17) is opened on the card block (14).
4. The cleanroom with rapid heating according to claim 1, characterized in that: The workshop body (1) is equipped with multiple window frames (20) with sealed doors (21) both inside and outside.
5. The cleanroom with rapid heating according to claim 4, characterized in that: A connecting bracket (22) is fixedly installed on the window frame (20), and a buckle (23) is fixedly installed on one end of the connecting bracket (22). A locking handle (24) is fixedly installed on the sealing door (21), and a retaining ring (25) that cooperates with the buckle (23) is fixedly installed on one end of the locking handle (24).
6. The cleanroom with rapid heating according to claim 1, characterized in that: The drive motor (4) is fixedly mounted with a protective shell (26) having heat dissipation holes (27).
7. The cleanroom with rapid heating capability according to claim 1, characterized in that: The workshop body (1) is provided with multiple exhaust holes (31), and a dust cover (32) connected to the workshop body (1) is installed on the outside of the exhaust holes (31).
8. The cleanroom with rapid heating according to claim 7, characterized in that: Both sides of the dust cover (32) are fixedly installed with fixing blocks (33), and bolts (34) connected to the main body of the workshop (1) are installed on the fixing blocks (33).