A dual-chamber vacuum helium leak detection device

Abstract

The utility model discloses a double -cavity vacuum helium leak detection detection device for carrying out air tightness detection to two product detection cavities, and the product is located in sealed container, include: frame body subassembly, vacuum subassembly, detection subassembly and recovery subassembly, vacuum subassembly, detection subassembly and recovery subassembly all are located on frame body subassembly, vacuum subassembly includes: outer cavity vacuum pump and inner cavity vacuum pump, outer cavity vacuum pump is used to carry out the vacuumization to sealed container, and inner cavity vacuum pump is used to carry out the vacuumization to product detection cavity, detection subassembly includes: helium supply pipeline and detection mechanism, one end of helium supply pipeline is communicated helium supply equipment, and the other end is communicated to detection cavity, is used to pass in helium into detection cavity after vacuumization, and detection mechanism is communicated with sealed container, is used for detecting the helium in sealed container. The utility model can carry out the rapid detection to two product detection cavities, and improve the detection efficiency.

Description

Technical Field

[0001] This utility model relates to the field of airtightness testing technology, and in particular to a dual-cavity vacuum helium leak detection device. Background Technology

[0002] Helium testing equipment is mainly used for airtightness testing of products. Currently, helium testing equipment can only test one channel of a product at a time, that is, only one channel of the product can be tested in one cycle. If the product has two channels and both need to be tested for airtightness, the product needs to be re-clamped after the test of one channel is completed and enter the next test cycle, which greatly increases the production cycle time of the product, resulting in a large workload for product testing and low testing efficiency. Summary of the Invention

[0003] According to an embodiment of the present invention, a dual-chamber vacuum helium leak detection device is provided for detecting the airtightness of two chambers of a product. The product is placed in a sealed container and includes: a frame assembly, a vacuum assembly, a detection assembly, and a recovery assembly.

[0004] The vacuum assembly, detection assembly, and recovery assembly are all mounted on the frame assembly;

[0005] The vacuum assembly includes: an external vacuum pump and an internal vacuum pump;

[0006] The external vacuum pump is used to evacuate the sealed container, and the internal vacuum pump is used to evacuate the cavity to be tested in the product.

[0007] The detection components include: a helium supply pipeline and a detection mechanism;

[0008] One end of the helium supply pipeline is connected to the helium supply equipment, and the other end is connected to the chamber to be tested, for introducing helium gas into the chamber to be tested after evacuation. The detection mechanism is connected to the sealed container for detecting the helium gas in the sealed container.

[0009] The recovery component is used to recover helium gas from the chamber to be tested.

[0010] Furthermore, the frame assembly includes: a frame body and partition panels;

[0011] The partition is located inside the frame, dividing the frame into an upper layer and a lower layer.

[0012] Furthermore, the external cavity vacuum pump includes: a first external cavity vacuum pump, a second external cavity vacuum pump, and a third external cavity vacuum pump;

[0013] The first external cavity vacuum pump is located on the upper layer of the frame body. Detection mechanisms and recovery components are respectively provided on both sides of the first external cavity vacuum pump. The second and third external cavity vacuum pumps are located on the lower layer of the frame body and are in the center position. An internal cavity vacuum pump is provided on one side of the third external cavity vacuum pump.

[0014] Furthermore, the frame assembly includes: a control frame and a control panel;

[0015] One end of the control frame is mounted on the frame body, and the other end is equipped with a control panel. The control panel is used to control the vacuum assembly, the detection assembly, and the recovery assembly.

[0016] Furthermore, the vacuum assembly also includes: a vacuum pump;

[0017] When the external cavity vacuum pump is used to evacuate multiple sealed containers, the maintenance vacuum pump is used to maintain the vacuum level of each sealed container.

[0018] Furthermore, the detection mechanism includes: a backing pump and a mass spectrometer;

[0019] One end of the forepump is connected to a mass spectrometer, which is used to detect helium gas in a sealed container.

[0020] Furthermore, the recycling assembly includes: a recycling pump and a recycling container;

[0021] The recovery pump is connected at one end to the chamber to be tested and at the other end to the recovery container. The recovery pump is used to pump the helium gas in the chamber to be tested into the recovery container, and the recovery container is used to store the recovered helium gas.

[0022] According to an embodiment of this utility model, a dual-chamber vacuum helium leak detection device is used. The product is placed in a sealed container, and the sealed container is evacuated using an external vacuum pump. The test chamber of the product is evacuated using an internal vacuum pump. Helium is introduced into the test chamber through a helium supply pipe. If there is a leak in the test chamber, the helium inside will enter the sealed container. The gas inside the sealed container is detected by a detection mechanism. If helium is detected, there is a leak in the test chamber. The helium in the test chamber is recovered using a recovery component. Then, the other test chamber of the product is evacuated, and helium is introduced for helium detection. This allows for rapid detection of both test chambers of the product, improving detection efficiency.

[0023] It should be understood that both the foregoing general description and the following detailed description are exemplary and intended to provide further illustration of the claimed technology. Attached Figure Description

[0024] Figure 1This is a structural diagram of a dual-cavity vacuum helium leak detection device according to an embodiment of the present invention;

[0025] Figure 2 This is a front view of a dual-cavity vacuum helium leak detection device according to an embodiment of the present invention;

[0026] Figure 3 This is a rear view of a dual-cavity vacuum helium leak detection device according to an embodiment of the present invention;

[0027] Figure 4 This is a partial structural diagram of a dual-cavity vacuum helium leak detection device according to an embodiment of the present invention;

[0028] Figure 5 This is a partial front view of a dual-cavity vacuum helium leak detection device according to an embodiment of the present invention;

[0029] Figure 6 This is a partial rear view of a dual-cavity vacuum helium leak detection device according to an embodiment of the present invention.

[0030] In the figure, the following labels are used: 1 is the frame assembly, 11 is the frame body, 12 is the partition plate, 13 is the control frame, 14 is the control panel, 2 is the vacuum assembly, 21 is the first external cavity vacuum pump, 22 is the second external cavity vacuum pump, 23 is the third external cavity vacuum pump, 24 is the internal cavity vacuum pump, 25 is the maintenance vacuum pump, 3 is the detection assembly, 31 is the backing pump, 32 is the mass spectrometer, 4 is the recovery assembly, 41 is the recovery pump, and 42 is the recovery container. Detailed Implementation

[0031] The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings, further illustrating the present invention.

[0032] like Figures 1-6 As shown, a dual-chamber vacuum helium leak detection device according to an embodiment of the present invention is used to perform airtightness detection on two chambers of a product. The product is placed in a sealed container and includes: a frame assembly 1, a vacuum assembly 2, a detection assembly 3, and a recovery assembly 4.

[0033] The vacuum component 2, the detection component 3, and the recovery component 4 are all mounted on the frame component 1;

[0034] The vacuum assembly 2 includes: an external vacuum pump and an internal vacuum pump 24;

[0035] The external vacuum pump is used to evacuate the sealed container, and the internal vacuum pump 24 is used to evacuate the cavity to be tested of the product.

[0036] The detection component 3 includes: a helium supply pipeline and a detection mechanism;

[0037] One end of the helium supply pipeline is connected to the helium supply equipment, and the other end is connected to the chamber to be tested, for introducing helium gas into the chamber to be tested after evacuation. The detection mechanism is connected to the sealed container for detecting the helium gas in the sealed container.

[0038] The recovery component 4 is used to recover helium gas from the chamber to be tested and the sealed container.

[0039] This application places the product in a sealed container, evacuates the sealed container using an external vacuum pump, and evacuates the product's test chamber using an internal vacuum pump 24. Helium gas is then introduced into the test chamber through a helium supply pipeline. If there is a leak in the test chamber, the helium gas inside will enter the sealed container. The gas inside the sealed container is detected by a detection mechanism. If helium gas is detected, there is a leak in the test chamber. The helium gas in the test chamber is then recovered using a recovery component 4. The other test chamber of the product is then evacuated, and helium gas is introduced for helium gas detection. This allows for rapid detection of both test chambers of the product, improving detection efficiency.

[0040] In use, the product is placed in a sealed container, the two test chambers are sealed, the container is evacuated, and a large leakage test and background test are performed on the two test chambers. After the background test is passed, helium is introduced into the first test chamber for an airtightness test. After the airtightness test is passed, another background test is performed, and the helium in the first test chamber is recovered. Helium is then introduced into the second test chamber for an airtightness test. After the second test chamber is passed, the helium in the second test chamber is recovered.

[0041] like Figures 1-3 As shown, the frame assembly 1 includes: a frame body 11 and a partition plate 12;

[0042] The partition plate 12 is disposed inside the frame body 11, dividing the frame body 11 into an upper layer and a lower layer.

[0043] The external cavity vacuum pump includes: a first external cavity vacuum pump 21, a second external cavity vacuum pump 22 and a third external cavity vacuum pump 23;

[0044] The first external cavity vacuum pump 21 is located on the upper layer of the frame body 11. The first external cavity vacuum pump 21 is provided with a detection mechanism and a recovery component 4 on both sides. The second external cavity vacuum pump 22 and the third external cavity vacuum pump 23 are located on the lower layer of the frame body 11 and are in the center position. The third external cavity vacuum pump 23 is provided with an internal cavity vacuum pump 24 on one side.

[0045] The frame assembly 1 includes: a control frame 13 and a control panel 14;

[0046] One end of the control frame 13 is mounted on the frame body 11, and the other end is equipped with a control panel 14. The control panel 14 is used to control the vacuum assembly 2, the detection assembly 3, and the recovery assembly 4.

[0047] In this embodiment, three external vacuum pumps can simultaneously evacuate multiple sealed containers, enabling simultaneous airtightness testing of multiple products and improving testing efficiency. The control panel 14 facilitates the control of the vacuum assembly 2, the testing assembly 3, and the recovery assembly 4.

[0048] like Figures 4-6 As shown, the vacuum assembly 2 further includes: a vacuum pump 25;

[0049] When the external cavity vacuum pump is used to evacuate multiple sealed containers, the maintaining vacuum pump 25 is used to maintain the vacuum level of each sealed container.

[0050] In this embodiment, after the three external vacuum pumps evacuate multiple sealed containers, the vacuum level of the sealed containers is maintained by the vacuum pump 25.

[0051] like Figures 4-6 As shown, the detection mechanism includes: a back pump 31 and a mass spectrometer 32;

[0052] One end of the fore-pump 31 is connected to the mass spectrometer 32, which is used to detect helium gas in a sealed container.

[0053] The gas in the sealed container is introduced into the mass spectrometer 32 through the pre-pump 31. The mass spectrometer 32 detects the gas, and if helium is detected, it proves that there is an airtightness problem.

[0054] like Figures 4-6 As shown, the recycling component 4 includes: a recycling pump 41 and a recycling container 42;

[0055] The recovery pump 41 is connected at one end to the chamber to be tested and at the other end to the recovery container 42. The recovery pump 41 is used to pump the helium gas in the chamber to be tested into the recovery container 42, and the recovery container 42 is used to store the recovered helium gas.

[0056] In this embodiment, the helium gas in the chamber to be tested is recovered to the recovery container 42 by the recovery pump 41, and the recovery container 42 stores the helium gas.

[0057] Above, refer to Figures 1-6This invention describes a dual-chamber vacuum helium leak detection device according to an embodiment of the present invention. The product is placed in a sealed container, and the sealed container is evacuated using an external vacuum pump. The test chamber of the product is evacuated using an internal vacuum pump 24. Helium gas is introduced into the test chamber through a helium supply pipe. If there is a leak in the test chamber, the helium gas in the test chamber will enter the sealed container. The gas in the sealed container is detected by a detection mechanism. If helium gas is detected, there is a leak in the test chamber. The helium gas in the test chamber is recovered using a recovery component 4. Then, the other test chamber of the product is evacuated, and helium gas is introduced for helium gas detection. This allows for rapid detection of both test chambers of the product, improving detection efficiency.

[0058] It should be noted that, in this specification, the terms "comprising," "including," or any other variations thereof are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "comprising..." does not exclude the presence of additional identical elements in the process, method, article, or apparatus that includes said element.

[0059] Although the present invention has been described in detail through the above preferred embodiments, it should be understood that the above description should not be considered as a limitation of the present invention. Various modifications and substitutions to the present invention will be apparent to those skilled in the art after reading the above content. Therefore, the scope of protection of the present invention should be defined by the appended claims.

Claims

1. A dual-chamber vacuum helium leak detection device, used to perform airtightness testing on two chambers of a product, wherein the product is disposed within a sealed container, characterized in that, include: Frame assembly, vacuum assembly, detection assembly, and recovery assembly; The vacuum assembly, detection assembly, and recovery assembly are all mounted on the frame assembly; The vacuum assembly includes: an external vacuum pump and an internal vacuum pump; The external vacuum pump is used to evacuate the sealed container, and the internal vacuum pump is used to evacuate the cavity to be tested in the product. The detection components include: a helium supply pipeline and a detection mechanism; One end of the helium supply pipeline is connected to the helium supply equipment, and the other end is connected to the chamber to be tested, for introducing helium gas into the chamber to be tested after evacuation. The detection mechanism is connected to the sealed container for detecting the helium gas in the sealed container. The recovery component is used to recover helium gas from the chamber to be tested.

2. The dual-chamber vacuum helium leak detection device as described in claim 1, characterized in that, The frame assembly includes: a frame body and partition panels; The partition is located inside the frame, dividing the frame into an upper layer and a lower layer.

3. The dual-chamber vacuum helium leak detection device as described in claim 2, characterized in that, The external cavity vacuum pump includes: a first external cavity vacuum pump, a second external cavity vacuum pump, and a third external cavity vacuum pump; The first external cavity vacuum pump is located on the upper layer of the frame body. Detection mechanisms and recovery components are respectively provided on both sides of the first external cavity vacuum pump. The second and third external cavity vacuum pumps are located on the lower layer of the frame body and are in the center position. An internal cavity vacuum pump is provided on one side of the third external cavity vacuum pump.

4. The dual-chamber vacuum helium leak detection device as described in claim 2, characterized in that, The frame assembly includes: a control frame and a control panel; One end of the control frame is mounted on the frame body, and the other end is equipped with a control panel. The control panel is used to control the vacuum assembly, the detection assembly, and the recovery assembly.

5. The dual-chamber vacuum helium leak detection device as described in claim 1, characterized in that, The vacuum assembly also includes: a vacuum maintenance pump; When the external cavity vacuum pump is used to evacuate multiple sealed containers, the maintenance vacuum pump is used to maintain the vacuum level of each sealed container.

6. The dual-chamber vacuum helium leak detection device as described in claim 1, characterized in that, The detection mechanism includes: a backing pump and a mass spectrometer; One end of the forepump is connected to a mass spectrometer, which is used to detect helium gas in a sealed container.

7. The dual-chamber vacuum helium leak detection device as described in claim 1, characterized in that, The recycling components include: a recycling pump and a recycling container; The recovery pump is connected at one end to the chamber to be tested and at the other end to the recovery container. The recovery pump is used to pump the helium gas in the chamber to be tested into the recovery container, and the recovery container is used to store the recovered helium gas.

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