Piezoelectric fast mirror structure and optical system

Abstract

The utility model discloses a piezoelectric quick mirror structure and optical system, including base, outer tube, flexible hinge subassembly and mirror subassembly, wherein, the outer tube is fixed on the base, mirror subassembly is fixed at the outer tube top, the flexible hinge subassembly includes outer tube flexible hinge, deformation flexible hinge and center flexible hinge, wherein, outer tube flexible hinge sets up on the outer tube, and deformation flexible hinge includes the deformation flexible hinge stand column that arranges in the outer tube periphery, and the top of deformation flexible hinge stand column is connected with mirror subassembly, and the bottom of deformation flexible hinge stand column is connected with base, and in -line embedding piezoelectric ceramic actuator in each deformation flexible hinge stand column, center flexible hinge is located at the center in the inside of outer tube, and one end of center flexible hinge is connected with mirror subassembly, and the other end is fixed in the base center, the piezoelectric quick mirror structure of the utility model adopts the design of the combination of multiple flexible hinges, can improve the speed and accuracy of light angle adjustment.

Description

Technical Field

[0001] This utility model relates to the field of beam control device technology, and in particular to a piezoelectric fast-reflecting mirror structure and optical system. Background Technology

[0002] A piezoelectric fast reflector is a rapid micro / nano angle positioning mechanism driven by piezoelectric ceramics, used to control the direction of a light beam. Due to its high precision and fast response, piezoelectric fast reflectors play a crucial role in laser technology, optical communication, biomedical imaging, astronomical observation, military applications, and scientific research. The moving surface of the piezoelectric fast reflector is equipped with a clamping mechanism for mounting and fixing a load, enabling micro-angle adjustment of the load. It can be integrated into various high-precision equipment, providing micro-radius-level motion control and optical path control.

[0003] Flexible mechanisms, with their unique advantages such as high precision and ease of miniaturization, have been applied in multiple optical measurement fields. Utility Model Content

[0004] The main purpose of this invention is to provide a piezoelectric fast-reflecting mirror structure and optical system, which utilizes a combination of various flexible hinges to achieve rapid and precise adjustment of the light angle.

[0005] The technical solution adopted in this utility model is: a piezoelectric fast-reflecting mirror structure, comprising a base, an outer cylinder, a flexible hinge assembly, and a reflector assembly; wherein...

[0006] The outer cylinder is fixed to the base;

[0007] The reflector assembly is fixed to the top of the outer cylinder;

[0008] The flexible hinge assembly includes an outer cylinder flexible hinge, a deformation flexible hinge, and a central flexible hinge; wherein, the outer cylinder flexible hinge is disposed on the outer cylinder; the deformation flexible hinge includes deformation flexible hinge columns arranged circumferentially inside the outer cylinder, the top of the deformation flexible hinge columns is connected to the reflector assembly, the bottom of the deformation flexible hinge columns is connected to the base, and each deformation flexible hinge column is embedded with a piezoelectric ceramic actuator; the central flexible hinge is located at the center inside the outer cylinder, and one end of the central flexible hinge is connected to the reflector assembly, and the other end is fixed to the center of the base.

[0009] According to the above technical solution, the deformable hinge base is provided with a hole through which the bottom of the central hinge passes.

[0010] According to the above technical solution, there are four deformable hinge columns, which are evenly distributed around the inside of the outer cylinder; wherein, the top of the deformable hinge column is provided with a Hooke hinge, and the bottom of the deformable hinge column is provided with a hollow straight beam hinge, and the piezoelectric ceramic actuator is embedded in the hollow structure of the straight beam hinge.

[0011] According to the above technical solution, each piezoelectric ceramic actuator is connected to a top wire at its bottom to prevent relative movement.

[0012] According to the above technical solution, one end of the central hinge connecting the reflector assembly is provided with a Hooke hinge.

[0013] According to the above technical solution, the outer cylinder flexible hinge is a multi-layer thin-walled structure.

[0014] According to the above technical solution, the reflector assembly includes a mirror frame, a reflector horizontally embedded in the mirror frame, and a mirror pressing device for fixing the mirror surface.

[0015] According to the above technical solution, the eyeglass frame connects the deformation hinge and the central hinge.

[0016] According to the above technical solution, the pressure device includes a gasket and a pressure block.

[0017] Another aspect of this invention provides an optical system including the piezoelectric fast-reflecting mirror structure described above.

[0018] The beneficial effects of this invention are as follows: This invention provides a piezoelectric fast-reflecting mirror structure and optical system, employing a design combining deformation hinges, a central hinge, and an outer cylinder hinge. Each piezoelectric ceramic actuator in the deformation hinge undergoes different deformations due to varying voltages, causing each hinge column to displace at different distances in the direction perpendicular to the mirror surface, resulting in the deflection of the mirror surface. The deflected mirror surface drives the central hinge and the outer cylinder hinge to simultaneously achieve rotation parallel to the mirror surface and displacement perpendicular to the mirror surface, ensuring the rigidity of the piezoelectric fast-reflecting mirror structure while achieving minute displacements.

[0019] Furthermore, the deformable hinge in this utility model adopts a design that combines a straight beam type with a Hooke hinge, which can not only satisfy the differentiated translation of each deformable hinge column in the direction perpendicular to the mirror surface to realize the deflection of the mirror surface, but also suppress the lateral stress brought by the deflected mirror surface to each deformable hinge column.

[0020] Of course, any product implementing this utility model does not necessarily need to achieve all of the advantages described above at the same time. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a cross-sectional view of the piezoelectric fast-reflecting mirror structure according to an embodiment of the present invention;

[0023] Figure 2 This is a schematic diagram of the base structure of the piezoelectric fast-reflecting mirror structure according to an embodiment of the present invention;

[0024] Figure 3 This is a schematic diagram of the outer cylinder structure of the piezoelectric fast-reflecting mirror structure according to an embodiment of this utility model;

[0025] Figure 4 This is a schematic diagram of the deformation flexible hinge structure of the piezoelectric fast-reflecting mirror structure according to an embodiment of this utility model;

[0026] Figure 5 This is a schematic diagram of the central hinge structure of the piezoelectric fast-reflecting mirror structure according to an embodiment of the present invention;

[0027] Figure 6 This is a schematic diagram of the reflector assembly of the piezoelectric fast-reflecting mirror structure according to an embodiment of this utility model.

[0028] Figure 7 This is a schematic diagram illustrating the deformation-flexible hinge function principle of the piezoelectric fast-reflecting mirror structure according to an embodiment of this utility model.

[0029] Reference numerals: 1. Base; 2. Outer cylinder; 3. Deformation hinge; 301. Deformation hinge base; 302. Deformation hinge column; 4. Frame; 5. Gasket; 6. Pressure block; 7. Reflector; 8. Central hinge; 9. Piezoelectric ceramic actuator; 10. Set screw; 11. Outer cylinder hinge; 12. Light beam. Detailed Implementation

[0030] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain this utility model and are not intended to limit this utility model.

[0031] It should be noted that the illustrations provided in the embodiments of this utility model are only schematic representations of the basic concept of this utility model. Therefore, the drawings only show the components related to this utility model and are not drawn according to the number, shape and size of the components in actual implementation. In actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0032] In this utility model, it should also be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first" and "second" are used only for descriptive and distinguishing purposes and should not be construed as indicating or implying relative importance.

[0033] Example 1

[0034] This embodiment provides a piezoelectric fast-reflecting mirror structure, such as Figure 1 As shown, the structure includes a base 1, an outer cylinder 2, a flexible hinge assembly, and a reflector assembly. The natural frequency of the piezoelectric fast reflector depends on the mass and stiffness of the structure. In this embodiment, the overall natural frequency of the piezoelectric fast reflector is closely related to the thin-wall thickness of each flexible hinge.

[0035] The structure of base 1 is as follows Figure 2 As shown, it has a groove and multiple screw holes for screw connection.

[0036] Preferably, in order to effectively improve the overall natural frequency of the piezoelectric fast reflector, it is necessary to ensure that the bottom structure of each flexible hinge of the piezoelectric fast reflector is approximately a rigid body. In this embodiment, the thickness of the area of ​​the base 1 excluding the groove and the hole is set to 25mm.

[0037] The structure of outer cylinder 2 is as follows Figure 3 As shown, it has an annular outer cylinder hinge 11. The outer cylinder 2 is used to wrap and protect the internal structure. At the same time, the preload provided by the outer cylinder hinge 11 allows the outer cylinder 2 to have translational motion freedom in the direction perpendicular to the mirror surface and rotational motion freedom in the direction parallel to the mirror surface.

[0038] Preferably, the outer cylinder flexible hinge 11 is designed as a multi-layer thin-walled structure. While ensuring the overall natural frequency of the piezoelectric fast reflector, the thickness of the outer cylinder 2 should be as small as possible to reduce the overall weight of the piezoelectric fast reflector. In this embodiment, the thickness of the outer cylinder 2 is set to 5mm.

[0039] The flexible hinge assembly includes a deformable flexible hinge 3 and a central flexible hinge 8.

[0040] The structure of the deformation flexible hinge 3 is as follows Figure 4 As shown, it includes a flexible hinge base 301 and four flexible hinge columns 302 extending from the flexible hinge base 301. The four flexible hinge columns 302 are centrally symmetrically distributed, and each has a piezoelectric ceramic actuator 9 embedded inside. Each piezoelectric ceramic actuator 9 is connected to a control box for adjusting voltage via a wire, and a set screw 10 is also connected to the bottom to prevent relative movement between them.

[0041] Furthermore, the flexible hinge column 302 is provided with a Hooke hinge at the end away from the flexible hinge base 301, and a straight beam hinge at the end closer to the flexible hinge base 301.

[0042] The flexible hinge column 302 adopts a combination of a straight beam and a Hooke hinge, which allows for both free extension and contraction in the direction perpendicular to the mirror surface and free rotation in the direction parallel to the mirror surface, while avoiding excessive lateral force on the piezoelectric ceramic caused by the deflection of the flexible hinge column 302. Furthermore, while ensuring the natural frequency of the piezoelectric fast-reflecting mirror as a whole and the deflection angle of the mirror 7, the lateral stress generated by the deflection of the mirror 7 on the flexible hinge 302 can be reduced by changing the stiffness of the Hooke hinge on the flexible hinge column 302.

[0043] The structure of the central flexible hinge 8 is as follows Figure 5 As shown, a Hooke's hinge is provided at one end.

[0044] The structure of the reflector assembly is as follows Figure 6 As shown, it includes a mirror frame 4, a reflector 7, and a mirror pressing device, which includes a gasket 5 and a pressing block 6.

[0045] The connection methods of the above-mentioned devices are as follows: Figure 1 As shown:

[0046] The mirror assembly is fixed to the outer cylinder 2 by the mirror frame 4 and the connection method is by screw connection.

[0047] The outer cylinder 2 is fixed to the base 1 with screws.

[0048] The flexible hinge assembly is located inside the outer cylinder 2. Each flexible hinge column 302 of the flexible hinge 3 is locked to the frame 4 by screws. The flexible hinge base 301 of the flexible hinge 3 is connected to the base 1 by screws. The central flexible hinge 8 has a Hooke hinge at one end connected to the frame 4 and the other end fixed to the center of the base 1.

[0049] The working principle of the deformable hinge 3 in this embodiment is as follows: Figure 7 As shown, when the voltage of the piezoelectric ceramic actuator 9 inside the deformable hinge 3 is adjusted, each piezoelectric ceramic actuator 9 will produce different deformations due to different voltages, causing each deformable hinge column 302 to make different displacements in the direction perpendicular to the mirror surface, causing the mirror surface of the mirror 7 to deflect.

[0050] Furthermore, the deflecting mirror 7 drives the central flexible hinge 8 and the outer cylinder flexible hinge 11 connected to the mirror frame 4 to transmit rotational motion and torque to drive the load. At the same time, it realizes rotation in the direction parallel to the mirror surface of the mirror 7 and displacement in the direction perpendicular to the mirror surface of the mirror 7. Under the premise of realizing small displacement, the rigidity of the piezoelectric fast reflector structure is guaranteed, and fast and precise beam control is achieved.

[0051] This embodiment also provides an optical system including the piezoelectric fast reflector structure described above. Based on the piezoelectric fast reflector, it provides micro-radius-level motion control and optical path control, enabling multi-degree-of-freedom motion, rapid adjustment of the optical path and beam direction, and rapid tracking of moving targets.

[0052] Example 2

[0053] This embodiment provides another piezoelectric fast-reflecting mirror structure. The difference between this embodiment and the piezoelectric fast-reflecting mirror structure described in Embodiment 1 is that this embodiment changes the thickness of the elastic sheets in the deformation hinge 3, the central hinge 8, and the outer cylinder hinge 11 based on the change of the inherent frequency of the piezoelectric fast-reflecting mirror.

[0054] In summary, this utility model provides a piezoelectric fast-reflecting mirror structure and optical system, which adopts a combination of various flexible hinges to improve the speed and accuracy of light angle adjustment.

[0055] It should be noted that, depending on the implementation needs, the various steps / components described in this application can be broken down into more steps / components, or two or more steps / components or parts of the operation of steps / components can be combined into new steps / components to achieve the purpose of this utility model.

[0056] The order of the steps in the above embodiments does not imply the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of this application.

[0057] It should be understood that those skilled in the art can make improvements or modifications based on the above description, and all such improvements and modifications should fall within the protection scope of the appended claims.

Claims

1. A piezoelectric fast-reflecting mirror structure, characterized in that, Includes a base (1), an outer cylinder (2), a flexible hinge assembly, and a reflector assembly; wherein, The outer cylinder (2) is fixed on the base (1); The reflector assembly is fixed to the top of the outer cylinder (2); The flexible hinge assembly includes an outer cylinder flexible hinge (11), a deformation flexible hinge (3), and a central flexible hinge (8); wherein, the outer cylinder flexible hinge (11) is disposed on the outer cylinder; the deformation flexible hinge (3) includes a deformation flexible hinge column (302) arranged circumferentially inside the outer cylinder (2), the top of the deformation flexible hinge column (302) is connected to the reflector assembly, the bottom of the deformation flexible hinge column (302) is connected to the base (1), and each deformation flexible hinge column (302) is embedded with a piezoelectric ceramic actuator (9); the central flexible hinge (8) is located at the center inside the outer cylinder (2), and one end of the central flexible hinge (8) is connected to the reflector assembly, and the other end is fixed to the center of the base (1).

2. The piezoelectric fast-reflecting mirror structure according to claim 1, characterized in that, The deformable hinge base (301) is provided with a hole through which the bottom of the central hinge (8) passes.

3. The piezoelectric fast-reflecting mirror structure according to claim 1, characterized in that, There are four deformable hinge columns (302), which are evenly distributed around the inside of the outer cylinder; the top of the deformable hinge column (302) is provided with a Hooke hinge, and the bottom of the deformable hinge column (302) is provided with a hollow straight beam hinge, and the piezoelectric ceramic actuator (9) is embedded in the hollow structure of the straight beam hinge.

4. The piezoelectric fast-reflecting mirror structure according to claim 1, characterized in that, Each piezoelectric ceramic actuator (9) is connected at its bottom to a set screw (10) to prevent relative motion.

5. The piezoelectric fast-reflecting mirror structure according to claim 1, characterized in that, The central hinge (8) is connected to a Hooke hinge at one end of the reflector assembly.

6. The piezoelectric fast-reflecting mirror structure according to claim 1, characterized in that, The outer cylinder flexible hinge (11) has a multi-layer thin-walled structure.

7. The piezoelectric fast-reflecting mirror structure according to claim 1, characterized in that, The mirror assembly includes a frame (4), a mirror (7) horizontally embedded in the frame (4), and a pressure device for fixing the mirror surface of the mirror (7).

8. The piezoelectric fast-reflecting mirror structure according to claim 7, characterized in that, The frame (4) connects the deformable hinge (3) and the central hinge (8).

9. The piezoelectric fast-reflecting mirror structure according to claim 7, characterized in that, The pressure device includes a gasket (5) and a pressure block (6).

10. An optical system, characterized in that, Includes the piezoelectric fast-reflecting mirror structure as described in any one of claims 1-9.

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