A brush roller for cleaning a wafer

Abstract

The utility model relates to the technical field of brush roller, and disclose a brush roller for cleaning wafer, including brush roller body, the outer wall fixed sleeve of brush roller body has the sleeve rod, the outer wall evenly distributed of sleeve rod has the lug, the outer wall movable sleeve of lug has the rubber sleeve, the lug is connected with sleeve rod movably through no. The outer end fixed mounting of lug has the arc plate. The utility model through the cooperation between brush roller body, no. The setting of installation component and no. 2 installation component, realize the connecting effect of brush roller body and brush hair body, effectively solve the problem of high replacement cost of brush hair body on brush roller in the above-mentioned disclosure technical content, adopt the change no. 2 installation component and the connection mode of no. 1 installation component and brush roller body or brush hair body, reduce the replacement cost of brush hair body, improve the utilization of brush hair body simultaneously.

Description

Technical Field

[0001] This utility model relates to the field of brush roller technology, specifically a brush roller for cleaning wafers. Background Technology

[0002] A wafer is a silicon wafer used to fabricate silicon semiconductor circuits, and its raw material is silicon. High-purity polycrystalline silicon is dissolved and doped with silicon crystal seeds, then slowly pulled out to form a cylindrical single-crystal silicon wafer. In the current wafer processing steps, cleaning is an indispensable step that directly affects the quality of the products that are subsequently supported.

[0003] To facilitate the cleaning of impurities adhering to the wafer surface, a patent document with publication number CN219979512U describes the use of a brush roller to remove dust and impurities adhering to the wafer surface, resulting in a cleaner wafer surface.

[0004] Based on the above-disclosed technical content, theoretically, the implementation of the relevant technical structure is beneficial for cleaning impurities on the wafer surface. However, according to the description in the above-disclosed technical content, in order to avoid wear caused by the brush roller contacting the wafer surface when cleaning impurities on the wafer surface, bristles are installed on the surface of the brush roller. The impurities on the wafer surface are cleaned by the bristles on the surface of the brush roller. However, as the bristles on the brush roller are in contact with the wafer surface for a long time, the bristles will wear down. The damaged bristles will affect the cleaning effect of the brush roller on the wafer surface. When the worn bristles are replaced, the entire brush roller needs to be replaced. At this time, the replacement of the entire brush roller not only increases the cost of brush roller replacement, but also wastes the undamaged bristles. Utility Model Content

[0005] In view of the shortcomings of the prior art, the present invention provides a brush roller for cleaning wafers, which has the advantages of facilitating the replacement of the brush bristles on the surface of the brush roller, reducing the replacement cost of the entire brush roller, and improving the cleaning effect of the brush roller on the wafer, thus solving the problems mentioned in the background art.

[0006] This utility model provides the following technical solution: a brush roller for cleaning wafers, comprising a brush roller body, a sleeve rod fixedly sleeved on the outer wall of the brush roller body, protrusions evenly distributed on the outer wall of the sleeve rod, a rubber sleeve movably sleeved on the outer wall of the protrusions, the protrusions being movably connected to the sleeve rod through a first mounting component, an arc-shaped plate fixedly installed on the outer end of the protrusions, a brush bristle body fixedly connected to the end of the arc-shaped plate away from the protrusions, and water guide grooves evenly formed on the outer wall of the sleeve rod.

[0007] Preferably, the outer wall of the sleeve is evenly distributed with grooves located on one side of the water guide groove, and the left and right ends of the sleeve are provided with a first limiting groove for installing the first installation component. The first limiting groove is provided with a first threaded hole, and the left and right ends of the sleeve are provided with a second limiting groove located inside the first limiting groove. The second limiting groove is provided with a second threaded hole.

[0008] Preferably, the left and right ends of the protrusion are respectively mounted on the left and right ends of the sleeve rod by a first mounting component, and the left and right ends of the protrusion are respectively movably mounted on the left and right ends of the sleeve rod by two second mounting components.

[0009] Preferably, the groove and the water guide groove are sequentially formed on the outer wall of the sleeve rod, and the inner wall of the groove is movably engaged with the protrusion by a rubber sleeve.

[0010] Preferably, the first mounting component includes a first mounting plate and a first fastening bolt. The two ends of the first mounting plate are respectively threaded onto the outer wall of the first fastening bolt. The outer wall of the first mounting plate is movably engaged with the inner wall of the first limiting groove. The first fastening bolt is threaded onto the inner wall of the first threaded hole. The first mounting plate is connected to the protrusion and the sleeve rod through the two first fastening bolts at both ends.

[0011] Preferably, the second mounting component includes a second mounting plate and a second fastening bolt. The inner wall of the second mounting plate is threadedly connected to the outer wall of the second fastening bolt. The outer wall of the second mounting plate is movably engaged with the inner wall of the second limiting groove. The outer wall of the second fastening bolt is threadedly connected to the inner wall of the second threaded hole. The second mounting plate connects the protrusion and the sleeve rod through the second fastening bolt.

[0012] Compared with the prior art, the present invention has the following beneficial effects:

[0013] 1. This utility model achieves the connection between the brush roller body, the first mounting component, the second mounting component, and the bristle body through the cooperation between the brush roller body, the first mounting component, and the second mounting component. This effectively solves the problem of high replacement cost of the bristle body on the brush roller in the above-disclosed technical content. By changing the connection method between the first mounting component and the second mounting component and the brush roller body or the bristle body, the replacement cost of the bristle body is reduced, and the utilization rate of the bristle body is improved.

[0014] 2. This utility model, through the cooperation between the brush roller body, the bristle body, the protrusion and the rubber sleeve, utilizes the elasticity of the rubber sleeve itself to fill the gap between the protrusion and the groove, effectively solving the problem of unstable use of the bristle body. Installing the rubber sleeve between the protrusion and the groove strengthens the stability of the bristle body after installation. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of this utility model;

[0016] Figure 2 This is a right-side view of the brush roller body of this utility model;

[0017] Figure 3 This is a left-side view of the brush roller body of this utility model;

[0018] Figure 4 This is a side view of the groove of this utility model;

[0019] Figure 5 This is a side view of the No. 1 mounting component of this utility model;

[0020] Figure 6 This is a side view of the second mounting component of this utility model.

[0021] In the diagram: 1. Brush roller body; 2. Sleeve rod; 3. Protrusion; 4. Rubber sleeve; 5. Mounting component No. 1; 501. Mounting plate No. 1; 502. Fastening bolt No. 1; 6. Arc plate; 7. Brush body; 8. Water guide groove; 9. Groove; 10. Limiting groove No. 1; 11. Threaded hole No. 1; 12. Limiting groove No. 2; 13. Threaded hole No. 2; 14. Mounting component No. 2; 141. Mounting plate No. 2; 142. Fastening bolt No. 2. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] Please see Figure 1 and Figure 6 A brush roller for cleaning wafers includes a brush roller body 1. A sleeve rod 2 is fixedly sleeved on the outer wall of the brush roller body 1. The installation of the sleeve rod 2 provides space and platform for the installation of bumps 3. Bumps 3 are evenly distributed on the outer wall of the sleeve rod 2. A rubber sleeve 4 is movably sleeved on the outer wall of the bumps 3. The bumps 3 are movably connected to the sleeve rod 2 through a first mounting component 5. By connecting the first mounting component 5 to the sleeve rod 2 or the bumps 3, the bumps 3 can be disassembled or installed, thereby achieving the effect of replacing the worn brush bristle body 7. An arc plate 6 is fixedly installed on the outer end of the bumps 3. The arc plate 6 is set to connect the brush bristle body 7 and the bumps 3. The end of the arc plate 6 away from the bumps 3 is fixedly connected to the brush bristle body 7. Water guide grooves 8 are evenly opened on the outer wall of the sleeve rod 2.

[0024] The outer wall of the sleeve rod 2 is evenly distributed with grooves 9 located on one side of the water guide groove 8. The grooves 9 provide space for the installation of the protrusion 3. The left and right ends of the sleeve rod 2 are provided with first limiting grooves 10 for installing the first installation component 5. The first limiting groove 10 is provided with a first threaded hole 11. The left and right ends of the sleeve rod 2 are provided with second limiting grooves 12 located inside the first limiting groove 10. The second limiting groove 12 is provided with a second threaded hole 13.

[0025] Please see Figure 2 and Figure 3 The left and right ends of the protrusion 3 are respectively installed on the left and right ends of the sleeve rod 2 through the first mounting component 5, and the left and right ends of the protrusion 3 are respectively movably installed on the left and right ends of the sleeve rod 2 through two second mounting components 14.

[0026] The groove 9 and the water guide groove 8 are sequentially formed on the outer wall of the sleeve rod 2. The inner wall of the groove 9 is movably engaged with the protrusion 3 through the rubber sleeve 4. The rubber sleeve 4 is installed between the protrusion 3 and the groove 9, so that the rubber sleeve 4 can fill the gap between the protrusion 3 and the groove 9, thereby strengthening the stability of the protrusion 3 after it is installed in the groove 9.

[0027] Please see Figure 4 and Figure 5 The first mounting component 5 includes a first mounting plate 501 and a first fastening bolt 502. The two ends of the first mounting plate 501 are threadedly connected to the outer wall of the first fastening bolt 502. The outer wall of the first mounting plate 501 is movably engaged with the inner wall of the first limiting groove 10. The opening of the first limiting groove 10 provides space for the installation of the first mounting plate 501. The first fastening bolt 502 is threadedly connected to the inner wall of the first threaded hole 11. The first mounting plate 501 is connected to the protrusion 3 and the sleeve rod 2 through the two first fastening bolts 502 at both ends. The first fastening bolt 502 is used to connect the first mounting plate 501 and the protrusion 3.

[0028] The second mounting component 14 includes a second mounting plate 141 and a second fastening bolt 142. The inner wall of the second mounting plate 141 is threadedly connected to the outer wall of the second fastening bolt 142. The outer wall of the second mounting plate 141 is movably engaged with the inner wall of the second limiting groove 12. The opening of the second limiting groove 12 provides space for the installation of the second mounting plate 141. The outer wall of the second fastening bolt 142 is threadedly connected to the inner wall of the second threaded hole 13. The second mounting plate 141 connects the protrusion 3 and the sleeve rod 2 through the second fastening bolt 142. The setting of the second fastening bolt 142 serves to connect the protrusion 3 and the sleeve rod 2.

[0029] Working principle: In use, first, put the rubber sleeve 4 on the protrusion 3 and insert the protrusion 3 into the groove 9. At this time, the rubber sleeve 4 can fill the gap between the protrusion 3 and the groove 9, thereby reinforcing the stability of the bristle body 7. Then, insert the first mounting plate 501 into the first limiting groove 10, and then use the first fastening bolt 502 to pass through the first mounting plate 501 and install it into the first threaded hole 11, so that the protrusion 3 can be fixed inside the groove 9. Finally, to reinforce the protrusion 3 in the groove To ensure internal stability, the second mounting plate 141 is secured inside the second limiting groove 12, and the second fastening bolt 142 is inserted through the second fastening bolt 142 and then installed into the second threaded hole 13. This ensures the stability of the connection between the second mounting component 14, the protrusion 3, and the groove 9. When it is necessary to replace or install the worn brush body 7, the connection between the second mounting component 14 and the protrusion 3 or the groove 9 is changed. This allows the protrusion 3 to be removed from the inside of the groove 9 or installed inside the groove 9.

[0030] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Additionally, in the accompanying drawings of this utility model, the fill patterns are merely for distinguishing layers and do not constitute any other limitation.

[0031] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A brush roller for cleaning wafers, comprising a brush roller body (1), characterized in that: The outer wall of the brush roller body (1) is fixedly sleeved with a sleeve rod (2). The outer wall of the sleeve rod (2) is evenly distributed with protrusions (3). The outer wall of the protrusions (3) is movably sleeved with a rubber sleeve (4). The protrusions (3) are movably connected to the sleeve rod (2) through a first mounting component (5). An arc plate (6) is fixedly installed at the outer end of the protrusions (3). The end of the arc plate (6) away from the protrusions (3) is fixedly connected to a brush body (7). The outer wall of the sleeve rod (2) is evenly provided with water guide grooves (8).

2. The brush roller for cleaning wafers according to claim 1, characterized in that: The outer wall of the sleeve (2) is evenly distributed with grooves (9) located on one side of the water guide groove (8). The left and right ends of the sleeve (2) are provided with a first limiting groove (10) for installing the first installation component (5). The first limiting groove (10) is provided with a first threaded hole (11). The left and right ends of the sleeve (2) are provided with a second limiting groove (12) located inside the first limiting groove (10). The second limiting groove (12) is provided with a second threaded hole (13).

3. A brush roller for cleaning wafers according to claim 1, characterized in that: The left and right ends of the protrusion (3) are respectively installed on the left and right ends of the sleeve rod (2) by the first mounting component (5), and the left and right ends of the protrusion (3) are respectively movably installed on the left and right ends of the sleeve rod (2) by two second mounting components (14).

4. A brush roller for cleaning wafers according to claim 2, characterized in that: The groove (9) and the water guide groove (8) are sequentially opened on the outer wall of the sleeve rod (2), and the inner wall of the groove (9) is movably engaged with the protrusion (3) through the rubber sleeve (4).

5. A brush roller for cleaning wafers according to claim 2, characterized in that: The first mounting assembly (5) includes a first mounting plate (501) and a first fastening bolt (502). The two ends of the first mounting plate (501) are respectively threaded onto the outer wall of the first fastening bolt (502). The outer wall of the first mounting plate (501) is movably engaged with the inner wall of the first limiting groove (10). The first fastening bolt (502) is threaded onto the inner wall of the first threaded hole (11). The first mounting plate (501) is connected to the protrusion (3) and the sleeve rod (2) through the two first fastening bolts (502) at both ends.

6. A brush roller for cleaning wafers according to claim 3, characterized in that: The second mounting assembly (14) includes a second mounting plate (141) and a second fastening bolt (142). The inner wall of the second mounting plate (141) is threadedly connected to the outer wall of the second fastening bolt (142). The outer wall of the second mounting plate (141) is movably engaged with the inner wall of the second limiting groove (12). The outer wall of the second fastening bolt (142) is threadedly connected to the inner wall of the second threaded hole (13). The second mounting plate (141) connects the protrusion (3) and the sleeve rod (2) through the second fastening bolt (142).

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