Fluidized bed purification apparatus for clean room outside air

Abstract

The utility model provides a kind of fluidized bed purification equipment of outer air of dust-free room, mainly through a outer air, a fluidized bed purification equipment, a outer air air conditioning box and the combination design of a dust-free room, and the fluidized bed purification equipment is equipped with an adsorption device, so that the outer air can enter the adsorption device and contact with the adsorption material flowing on the fluidized bed plate, to filter out the micro-pollutant of outer air, then send into the outer air air conditioning box, and sent to the dust-free room by the outer air air conditioning box, so that the efficiency of greatly reducing the micro-pollutant entering the dust-free room is achieved, and the service life of chemical filter screen in the dust-free room is increased by reducing the filtration burden of chemical filter screen in the dust-free room.

Description

Technical Field

[0001] This utility model relates to the technical field of fluidized bed purification equipment for external air in cleanrooms, and more particularly to an equipment that can significantly reduce the amount of micro-polluting substances entering the cleanroom, reduce the filtration burden on the chemical filter in the cleanroom, and increase the service life of the chemical filter in the cleanroom. It is applicable to places or factories in the semiconductor, electronics, biotechnology, food processing, and precision instrument manufacturing fields. Background Technology

[0002] Wafer manufacturing requires cleanrooms, and with advancements in technology, wire diameters have reached the nanometer level. Therefore, in high-end semiconductor wafer fabrication plants, cleanrooms must not only filter particulate contaminants but also address the concentration of extremely small airborne molecular contaminants (AMCs). AMCs include four types of substances: VOCs (volatile organic compounds), acids, alkalis, and pods. Removal of AMCs is mandatory, requiring the use of chemical filters in cleanrooms. However, the sources of AMCs are quite diverse, making effective control a crucial challenge.

[0003] In addition to the aforementioned gaseous molecular contaminants (AMC), the cleanroom also has another source of micro-contamination: outside air, i.e., the surrounding atmospheric environment. The concentration of volatile organic compounds (VOCs) in outside air is very low, generally less than 1000 ppb, and the total volatile organic compound (TVOC) concentration is also approximately <1000 ppb. This includes gaseous contaminants such as isopropanol, acetone, and toluene. Because the TVOC concentration is low and does not exceed the hazard or acceptable standards set by the WHO or occupational health societies, the risk to human health is relatively small. However, for advanced wafer fabrication processes, it can affect the yield rate of products manufactured in the cleanroom, especially the yield rate of processes below 7 nanometers, such as 3-nanometer or 2-nanometer wafer fabrication processes.

[0004] Therefore, in view of the above-mentioned deficiencies, the applicant hopes to propose a cleanroom external air fluidized bed purification device that can significantly reduce the effectiveness of micro-contaminants entering the cleanroom, and make it easy for users to operate and assemble. Thus, the applicant has devoted itself to research, design and assembly to provide convenience for users, which is the creative motivation for the applicant's research and development. Utility Model Content

[0005] The main objective of this invention is to provide a fluidized bed purification device for outside air in a cleanroom. This device is designed as a combination of outside air, a fluidized bed purification unit, an outside air conditioning unit (MAU), and a cleanroom. The fluidized bed purification unit is equipped with an adsorption device, allowing the outside air to enter and contact the adsorption material flowing on the fluidized bed plate, thus filtering out micro-pollutants from the outside air. The air is then sent into the outside air conditioning unit (MAU) and subsequently to the cleanroom. This significantly reduces the amount of micro-pollutants entering the cleanroom, reduces the filtration burden on the cleanroom's chemical filters, increases their lifespan, and ultimately enhances the overall practicality.

[0006] Another objective of this invention is to provide a fluidized bed purification device for external air in a cleanroom. This device incorporates at least one fluidized bed plate within its adsorption unit. In practice, it can be designed with two, three, or four fluidized bed plates, or any other number of fluidized bed plates. The fluidized bed plate is designed to operate at a fixed fluidization velocity. For example, when the specific gravity of the adsorbent material is 0.6 g / cc, the optimal fluidization velocity is between 0.75 and 1.25 m / s. This prevents the adsorbent material from falling due to insufficient fluidization velocity or poor adsorption efficiency due to excessively fast fluidization velocity. Therefore, the adsorbent material achieves stable fluidization efficiency for adsorption, thereby increasing overall operability.

[0007] Another objective of this invention is to provide a fluidized bed purification device for outside air in a cleanroom. The device heats the desorption chamber of the desorption unit via a heat source, which can be any one of an electric heater, an electric heating tube heater, an electric heating element heater, a gas fuel heater, a liquid fuel heater, or a heat exchanger. The adsorbent material flows downwards within the desorption chamber, generating temperature through the heat source. It then comes into contact with a desorption gas source supplied to the desorption chamber, allowing the adsorbent material to be desorbed by the gas source, thus filtering out micro-pollutants from the outside air. This provides effective filtration and desorption, thereby increasing overall usability.

[0008] To further understand the features, characteristics, and technical contents of this utility model, please refer to the following detailed description and accompanying drawings. The accompanying drawings are for reference and illustration only and are not intended to limit this utility model. Attached Figure Description

[0009] Figure 1 A schematic diagram of the first embodiment of installing a fluidized bed purification device upstream of an external air conditioning unit.

[0010] Figure 2 A schematic diagram of a second embodiment in which a fluidized bed purification device is installed upstream of the external air conditioning unit.

[0011] The annotations in the attached figures are explained as follows:

[0012] 1-Outside Air;

[0013] 2- Fluidized bed purification equipment;

[0014] 3-Outdoor air conditioning unit (MAU);

[0015] 4-Cleanroom;

[0016] 10-Adsorption device;

[0017] 11-Adsorbent material;

[0018] 12-Fluid inlet;

[0019] 121 - Fluid inlet valve;

[0020] 13-Fluid outlet;

[0021] 14-Fluid diffuser plate;

[0022] 141 - Hole;

[0023] 15-Fluidized bed plate;

[0024] 151 - Hole;

[0025] 152-Interval Channel;

[0026] 16 - Adsorption temporary storage tank;

[0027] 17 - Adsorption material output pipeline;

[0028] 18 - Adsorption material inlet pipe;

[0029] 20 - Desorption device;

[0030] 21-Desorption cavity;

[0031] 22-Desorption entrance;

[0032] 23-Desorption outlet;

[0033] 24-Heat source device;

[0034] 25 - Desorption gas source device;

[0035] 251 - Desorption gas source delivery pipeline;

[0036] 2511 - Desorption gas source control valve;

[0037] 31 - First container for adsorbent material;

[0038] 32 - Second container for adsorbent material;

[0039] 33 - Adsorbent material, third container;

[0040] 34 - Adsorbent material, fourth container;

[0041] 35 - First delivery pipeline;

[0042] 36 - Second delivery pipeline;

[0043] 37 - Third delivery pipeline;

[0044] 38 - Fourth delivery pipeline;

[0045] 39 - Gas source device;

[0046] 391 - First gas source delivery pipeline;

[0047] 3911 - First gas source control valve;

[0048] 392 - Second gas source delivery pipeline;

[0049] 3921 - Second gas source control valve;

[0050] 40 - Condensation unit;

[0051] 41 - Condensation Pipeline 1;

[0052] 42 - Second condenser pipe;

[0053] 43-Recycling equipment;

[0054] 50 - Incineration equipment;

[0055] 51-Chimney;

[0056] 60- Enclosure;

[0057] 601 - Entrance;

[0058] 602 - Export;

[0059] 61 - First filter screen device;

[0060] 62 - First temperature device;

[0061] 621 - Precooling coil;

[0062] 622 - Preheating coil;

[0063] 623 - Precooler;

[0064] 624 - Preheater;

[0065] 63-Water washing equipment;

[0066] 64 - Second temperature device;

[0067] 641 - Recooling coil;

[0068] 642 - Reheat Coil;

[0069] 643 - Recooler;

[0070] 644 - Reheater;

[0071] 65 - Second filter screen device;

[0072] 66-Fan. Detailed Implementation

[0073] Please see Figures 1-2 This is a schematic diagram of an embodiment of the present invention. The optimal implementation of the external air fluidized bed purification equipment for cleanrooms provided by the present invention is applicable to places or factories related to the semiconductor, electronics, biotechnology, food processing, and precision instrument manufacturing fields. Its main advantages are significantly reduced efficiency in decreasing micro-polluting substances entering the cleanroom, and reduced filtration burden on the chemical filters within the cleanroom, thereby increasing the service life of the chemical filters.

[0074] The cleanroom external air fluidized bed purification equipment provided by this utility model is mainly a combination design of an outside air unit 1, a fluidized bed purification device 2, an external air conditioning unit (MAU) 3, and a cleanroom 4 (e.g., Figure 1 and Figure 2 As shown), the outside air 1 contains at least one gas or combination thereof, mainly a mixture of 78.1% nitrogen, 21% oxygen, 0.9% argon and other impurities. The outside air 1 is also commonly known as air.

[0075] The fluidized bed purification equipment 2 is equipped with an adsorption device 10, which can be any shape of a tower, bottle, box, column, or chamber. The adsorption device 10 is equipped with at least one adsorbent material 11 (such as...). Figure 1 and Figure 2As shown in the figure, the adsorbent 11 is made of any one of activated carbon, zeolite, alumina, or tubular membrane, and the adsorbent 11 is any one of the following shapes: spherical, circular, elliptical, conical, triangular, square, rectangular, pentagonal, hexagonal, or polygonal. The figures provided in this utility model are presented in the form of a sphere, but are not limited to the figures.

[0076] When the adsorbent 11 is made of a tubular membrane, it is made by combining at least one polymer (not shown in the figure) with at least one powdered adsorbent (not shown in the figure). The polymer is at least one of the following groups: polysulfone (PSF), polyethersulfone (PESF), polyvinylidene fluoride (PVDF), polyphenylsulfone (PPSU), polyacrylonitrile, cellulose acetate, cellulose diacetate, polyimide (PI), polyetherimide, polyamide, polyvinyl alcohol, polylactic acid, polyglycolic acid, poly(lactic-co-glycolic acid), polycaprolactone, polyvinyl pyrrolidone, ethylene vinyl alcohol, polydimethylsiloxane, polytetrafluoroethylene, and cellulose acetate (CA). The powder adsorbent is any one of zeolite powder, activated carbon powder, and resin powder. The powder of the adsorbent is any one of 1um to 20um. The mixture of the polymer and the powder adsorbent is dissolved in a solvent and then prepared by phase transfer method, which is a wet process.

[0077] When the adsorbent 11 is a tubular membrane adsorbent, it has multiple pore channels (not shown in the figure). These multiple pore channels are evenly distributed on the tubular membrane adsorbent, and their diameter is 0.5mm~1.5mm. The length of the tubular membrane adsorbent is more than 50 times the diameter of the pore channels. The surface area of ​​the tubular membrane adsorbent is greater than 500m2 / m3, and multiple micron-sized pores (not shown in the figure) are presented on the membrane wall of the pore channels. For most gas molecules, the diameter is about 0.1~1nm. These pores are large enough to form a large number of micron-sized pores, so its surface area is also large, allowing gas molecules to diffuse freely within them. The mass transfer effect is fast, and the tubular membrane adsorbent can withstand high temperatures of 150~220℃. Therefore, the tubular membrane adsorbent can be used for high-temperature desorption, and it is reusable, which is in line with the spirit of environmental protection and reuse.

[0078] The fluidized bed purification device 2, in addition to having at least one adsorbent material 11, also has a fluid inlet 12, a fluid outlet 13, a fluid diffuser plate 14, and at least one fluidized bed plate 15 (e.g., ...). Figure 1 and Figure 2 As shown, the fluid inlet 12 is below the adsorption device 10, and the fluid outlet 13 is above the adsorption device 10. A fluid diffuser plate 14 is positioned above the fluid outlet 13, forming a space. The fluid diffuser plate 14 has multiple holes 141, each with a size between 0.1 mm and 3 mm, designed to accommodate a fixed fluidized flow velocity. Furthermore, at least one fluidized bed plate 15 is located in the middle of the adsorption device 10. The fluidized bed plate 15 has multiple holes 151, each with a size between 0.1 mm and 3 mm, designed to accommodate a fixed fluidized flow velocity. The holes 151 of the fluidized bed plate 15 are smaller than the size of the adsorbent material 11, preventing the adsorbent material 11 from falling out of the holes 151. One end of the fluidized bed plate 15 is connected to the adsorption device 11, while the other end of the fluidized bed plate 15 is not connected to the adsorption device 11, forming a spaced channel 152. In practice, it can be designed with two, three, or four fluidized bed plates, or other numbers of fluidized bed plates 15. When there are two or more fluidized bed plates 15, they are arranged in an alternating manner, that is, one fluidized bed plate 15 is connected to the right side of the adsorption device 10, and another fluidized bed plate 15 is connected to the left side of the adsorption device 10, with one on top and the other on the bottom, to form a fluid flow path.

[0079] In addition, the adsorption device 10 is provided with an adsorption material storage tank 16 (such as...). Figure 1 and Figure 2As shown, the adsorbent storage tank 16 is located below the fluid flow path, and the adsorption device 10 is connected to an adsorbent output pipe 17 and an adsorbent input pipe 18. The adsorbent output pipe 17 is located at the position of the adsorbent storage tank 16 and communicates with the adsorbent storage tank 16. In addition, the adsorbent input pipe 18 is located above the fluidized bed plate 15, so that the adsorbent 11 enters through the adsorbent input pipe 18 and flows along the fluidized bed plate 15, and falls into the adsorbent storage tank 16 according to the fluid flow path, and is then output through the adsorbent output pipe 17. The fluidized bed plate 15 is designed to be compatible with a fixed fluidization flow velocity. For example, when the specific gravity of the adsorbent material 11 is 0.6 g / cc, the optimal fluidization flow velocity is between 0.75 and 1.25 m / s. This is to prevent the adsorbent material 11 from falling off due to insufficient fluidization flow or poor adsorption efficiency due to excessive fluidization flow. Therefore, the adsorbent material 11 is designed to have a stable fluidization flow performance for adsorption.

[0080] Furthermore, the fluid inlet 12 of the adsorption device 10 allows the outside air 1 to enter, and the fluid inlet 12 is equipped with a fluid inlet valve 121 (e.g., Figure 2 As shown), the fluid inlet valve 121 controls the fluid velocity and airflow of the outside air 1 entering the device. When the outside air 1 enters through the fluid inlet 12, it first passes through the holes 141 of the fluid diffuser plate 14 and drifts upwards, dispersing or diffusing to the fluidized bed plate 15. It then passes through the holes 151 of the fluidized bed plate 15 to contact the adsorbent material 11 flowing on the fluidized bed plate 15, allowing the outside air 1 to become purified gas after contact with the adsorbent material 11 flowing on the fluidized bed plate 15. This purified gas is then output from the fluid outlet 13 located above the adsorption device 10 (e.g., ...). Figure 1 and Figure 2 (As shown).

[0081] Furthermore, the external air conditioning unit (MAU) 3 is provided with an inlet 601 and an outlet 602. The inlet 601 of the external air conditioning unit (MAU) 3 is connected to the fluid outlet 13 of the adsorption device 10 (e.g., Figure 1 and Figure 2As shown), the cleanroom 4 is connected to the outlet 602 of the external air conditioning unit (MAU) 3, so that the outside air 1 can first pass through the adsorption device 10 of the fluidized bed purification equipment 2 to filter out the micro-pollutants in the outside air 1, and then be sent into the external air conditioning unit (MAU) 3, and then sent to the cleanroom 4 for use through the external air conditioning unit (MAU) 3.

[0082] The external air conditioning unit (MAU) 3 is provided with a housing 60, which contains a first filter device 61, a first temperature device 62, a water washing device 63, a second temperature device 64, and a second filter device 65 (e.g., Figure 1 and Figure 2 As shown), the external air conditioning unit (MAU) 3 has a fan 66 inside its housing 60. The fan 66 is located before the second filter device 65 and mainly provides airflow to ensure that the purified gas delivered through the fluid outlet 13 of the adsorption device 10 passes through the first filter device 61, the first temperature device 62, the water washing device 63, the second temperature device 64, and the second filter device 65 in sequence, thus ensuring the efficient operation of the external air conditioning unit (MAU) 3. The at least one first filter device 61 is either a pre-filter or a medium efficiency filter, or a combination thereof. The pre-filter is mostly plate-shaped and suitable for primary filtration, mainly used to filter dust particles larger than 5μm. The materials are primarily non-woven fabric, nylon mesh, activated carbon filter material, and metal mesh. In addition, the medium efficiency filter is mostly bag-shaped and widely used in intermediate filtration. It is mainly used to filter dust particles larger than 1-5μm, and the material is mainly synthetic fiber and non-woven fabric.

[0083] Furthermore, the first temperature device 62 is any one or a combination of the precooling coil 621 and the preheating coil 622 (e.g., Figure 2 As shown), the precooling coil 621 is supplied with either cooling water or ice water to effectively reduce the temperature of the purified gas output from the fluid outlet 13 of the adsorption device 10. The preheating coil 622 is supplied with either hot water or steam to transfer heat energy to the purified gas output from the fluid outlet 13 of the adsorption device 10, thereby increasing its temperature. Furthermore, the first temperature device 62 can also be any one or a combination of the precooler 623 and the preheater 624 (e.g., [example missing]). Figure 1As shown), the precooler 623 is any one of a shell-and-tube cooler, a finned tube cooler, or a plate heat exchanger cooler, and the preheater 624 is any one of an electric heater, a gas heater, a thermal oil heater, or a hot water heater.

[0084] In addition, the washing device 63 is a washing humidifier, mainly composed of at least one pressure pump, at least one nozzle, at least one water supply valve, at least one drain valve, and at least one pipeline (not shown in the figure). When the purified gas output through the fluid outlet 13 of the adsorption device 10 passes through the washing humidifier, the water molecules will fully absorb the heat in the purified gas and vaporize and evaporate, thereby increasing the humidity of the purified gas output through the fluid outlet 13 of the adsorption device 10 to form a humid gas.

[0085] Furthermore, the second temperature device 64 is any one or a combination of the recooling coil 641 and the reheating coil 642 (e.g., Figure 2 As shown), the recooling coil 641 is supplied with either cooling water or chilled water to effectively reduce the temperature of the purified gas output from the fluid outlet 13 of the adsorption device 10. The reheating coil 642 is supplied with either hot water or steam to transfer heat energy to the purified gas output from the fluid outlet 13 of the adsorption device 10, thereby increasing its temperature. Furthermore, the second temperature device 64 can also be any one or a combination of the recooler 643 and the reheater 644 (e.g., ...). Figure 1 As shown), the recooler 643 is any one of a shell-and-tube cooler, a finned tube cooler, or a plate heat exchanger cooler, and the reheater 644 is any one of an electric heater, a gas heater, a thermal oil heater, or a hot water heater.

[0086] The second filter device 65 is either a High Efficiency Particulate Air Filter (HEPA) or an Ultra Low Penetration Air Filter (ULPA), or a combination thereof. The HEPA filter is suitable for end-point filtration, achieving an efficiency of 99.998% for particles of 0.1 microns and 0.3 microns, and a removal efficiency of over 99.7% for particles larger than 0.3 microns in diameter (1 / 200th the diameter of a human hair). It is the most effective filtration medium for pollutants such as smoke, dust, and bacteria, and its material is primarily ultra-fine glass fiber paper or composite filter paper. The ULPA filter is mainly used to remove particles larger than 0.12µm (120 nanometers), with a filtration efficiency of approximately 99.995% or higher (DOP), and its material is primarily special ultra-fine glass fiber paper.

[0087] In addition to the adsorption device 10, the fluidized bed purification equipment 2 of this utility model can also be equipped with a desorption device 20 and a condensation device 40 (e.g., Figure 1 and Figure 2 As shown in the figure), the desorption device 20 and the condensation device 40 can be any shape of a tower, bottle, box, column, or chamber, mainly to cooperate with the adsorption device 10. Alternatively, the adsorption device 10, the desorption device 20, and the condensation device 40 can be designed with different shapes, not limited to this specification or the accompanying drawings. When the fluidized bed purification equipment 2 is equipped with a desorption device 20, the fluidized bed purification equipment 2 is also equipped with a first adsorption material container 31, a second adsorption material container 32, a third adsorption material container 33, a fourth adsorption material container 34, a first conveying pipeline 35, a second conveying pipeline 36, a third conveying pipeline 37, and a fourth conveying pipeline 38 (e.g., ...). Figure 1 and Figure 2As shown in the diagram, the desorption device 20 includes a desorption chamber 21, a desorption inlet 22, and a desorption outlet 23. The first delivery pipe 35 is connected to the first adsorbent container 31 and the second adsorbent container 32, respectively, allowing the adsorbent from the first container 31 to be transported to the second container 32 via the first delivery pipe 35. The fourth delivery pipe 38 is connected to the third adsorbent container 33 and the fourth adsorbent container 34, respectively, allowing the adsorbent from the third container 33 to be transported to the fourth container via the fourth delivery pipe 38. 34. Furthermore, the second conveying pipeline 36 is connected to the second container 32 of the adsorbent material and the desorption inlet 22 of the desorption device 20, respectively, so that the second container 32 of the adsorbent material can be conveyed to the desorption inlet 22 of the desorption device 20 via the second conveying pipeline 36. The third conveying pipeline 37 is connected to the desorption outlet 23 of the desorption device 20 and the third container 33 of the adsorbent material, respectively, so that the desorption outlet 23 of the desorption device 20 can convey the adsorbent material to the third container 33. In addition, the first container 31 of the adsorbent material is connected to the adsorbent material output pipeline 17 (e.g., ...). Figure 1 and Figure 2 (as shown), and the fourth container 34 of the adsorbent material is connected to the adsorbent material inlet pipe 18.

[0088] Furthermore, the first container 31 of the adsorbent material is connected to a gas source device 39 (e.g., ...). Figure 1 and Figure 2 As shown), the gas source device 39 is provided with a first gas source delivery pipeline 391. The gas source device 39 is an air pump or a pump with a motor, and the gas source of the gas source device 39 is air, nitrogen, or other gases. The gas source device 39 is connected to the first adsorbent container 31 through the first gas source delivery pipeline 391, so that the gas source device 39 can deliver gas to the first adsorbent container 31 through the first gas source delivery pipeline 391, and drive the adsorbent 11 located in the first adsorbent container 31 to enter the second adsorbent container 32 through the first delivery pipeline 35, and push the adsorbent 11 in the second adsorbent container 32 to the desorption inlet 22 of the desorption device 20. The first gas source delivery pipeline 391 is provided with a first gas source control valve 3911 (e.g., Figure 2 As shown), to control the air volume of the first air source delivery pipeline 391.

[0089] The third container 33 of the adsorbent material is connected to a gas source device 39 (e.g., ...). Figure 1 and Figure 2(As shown), the gas source device 39 is provided with a second gas source delivery pipe 392. The gas source device 39 is an air pump or a pump with a motor, and the gas source of the gas source device 39 is air, nitrogen, or other gases. The gas source device 39 is connected to the adsorbent material third container 33 through the second gas source delivery pipe 392, so that the gas source device 39 can deliver gas to the adsorbent material third container 33 through the second gas source delivery pipe 392, and drive the adsorbent material 11 located in the adsorbent material third container 33 to enter the adsorbent material fourth container 34 through the fourth delivery pipe 38, and push the adsorbent material 11 in the adsorbent material fourth container 34 into the adsorbent material input pipe 18 so that it can be delivered to the adsorption device 10. The second gas source delivery pipe 392 is provided with a second gas source control valve 3921 (e.g., Figure 2 (as shown), to control the air volume of the second air source delivery pipeline 392.

[0090] In addition, the desorption chamber 21 of the desorption device 20 is equipped with at least one heat source device 24 (such as...). Figure 1 and Figure 2 As shown in the diagram, the heat source device 24 is any one of an electric heater, an electric heating tube heater, an electric heating element heater, a gas fuel heater, a liquid fuel heater, or a heat exchanger. The heat source device 24 is mainly used to heat the desorption chamber 21 of the desorption device 20, allowing the desorption chamber 21 to undergo desorption through the heat source device 24. Furthermore, the desorption chamber 21 of the desorption device 20 is connected to a desorption gas source device 25 (e.g., ...). Figure 1 and Figure 2 As shown), the desorption gas source device 25 is an air pump or a pump with a motor, and the desorption gas source of the desorption gas source device 25 is air, nitrogen, or other gases. The desorption gas source device 25 is provided with a desorption gas source delivery pipeline 251, and the desorption gas source device 25 is connected to the desorption chamber 21 of the desorption device 20 through the desorption gas source delivery pipeline 251, so that the desorption gas source device 25 can deliver the desorption gas source to the desorption chamber 21 through the desorption gas source delivery pipeline 251, and allow the desorption gas source to contact the adsorbent material 11 entering the desorption chamber 21, so as to desorb the micro-pollutants adsorbed by the adsorbent material 11 in the adsorption device 10. The desorption gas source delivery pipeline 251 is provided with a desorption gas source control valve 2511 (e.g., Figure 2 As shown), to control the air volume of the desorbed gas supply pipeline 251.

[0091] When the outside air 1 in the adsorption device 10 comes into contact with the adsorbent material 11 flowing on the fluidized bed plate 15, the adsorbent material 11 adsorbs the micro-pollutants in the outside air 1. The adsorbent material 11 containing the micro-pollutants then flows along the fluid flow path and falls into the adsorbent material storage tank 16, and is then output to the first adsorbent material container 31 via the adsorbent material output pipe 17 (e.g., Figure 2 As shown), the gas source supplied by the gas source device 39 through the first gas source delivery pipeline 391 to the first adsorbent container 31 pushes the adsorbent 11 containing micro-pollutants in the first adsorbent container 31 into the second adsorbent container 32 through the first delivery pipeline 35. Then, the adsorbent 11 in the second adsorbent container 32 is pushed to the desorption inlet 22 of the desorption device 20, so that the adsorbent 11 containing micro-pollutants can enter the desorption chamber 21 of the desorption device 20 for heating and contact with the desorption gas source to desorb the adsorbent 11 containing micro-pollutants.

[0092] Furthermore, after the adsorbent material 11 containing micropollutants is desorbed, the adsorbent material 11 without micropollutants flows to the desorption outlet 23 of the desorption device 20 (e.g., Figure 2 As shown), the adsorbent 11, which is free of micro-pollutants, is transported to the adsorbent third container 33 via the third conveying pipeline 37, and then to the adsorbent third container 33 via the second gas source conveying pipeline 392 through the gas source device 39. This gas source pushes the adsorbent 11, which is free of micro-pollutants, located in the adsorbent third container 33, into the adsorbent fourth container 34 via the fourth conveying pipeline 38, and finally to the adsorption device 10 via the adsorbent input pipeline 18 for further adsorption.

[0093] Furthermore, when the fluidized bed purification equipment 2 is equipped with a condensing device 40, the condensing device 40 can be any one of a shell-and-tube condenser, an air cooler, a plate condenser, and a spiral plate condenser. Commonly used condensing media include cold water and brine. The condensing device 40 is provided with a first condensing pipe 41 and a second condensing pipe 42 (e.g., ...). Figure 1 and Figure 2As shown), the condensing device 40 is connected to the desorption chamber 21 of the desorption device 20 via the first condensing pipe 41, so that the desorbed gas after being desorbed from the adsorbent material 11 by the desorption gas source in the desorption chamber 21 of the desorption device 20 can enter the first condensing pipe 41 and be transported to the condensing device 40. The condensing device 40 condenses the desorbed gas containing micropollutants (the gaseous state changes to the liquid state), so that the desorbed gas containing micropollutants can produce a condensed gas without micropollutants and a condensed liquid containing micropollutants after the condensation. The condensing device 40 is also connected to a recovery device 43 (e.g., Figure 1 and Figure 2 As shown in the figure, the recycling device 43 can be any of a container, tank, box, or barrel. When the condensation device 40 produces condensate containing micro-polluting substances, it can be recycled through the recycling device 43.

[0094] The condenser second pipe 42 of the condenser device 40 has two implementations. The first implementation is that the condenser second pipe 42 is directly connected to the outside air 1 (e.g., Figure 1 As shown), the condensed gas, free of micro-polluting substances, is directly introduced to the outside via the second condenser pipe 42 to mix with the outside air 1. Furthermore, in a second embodiment, the second condenser pipe 42 is connected to an incineration device 50 (e.g., Figure 2 As shown, the incineration equipment 50 is any one of a direct-fired incinerator (TO), a catalytic incinerator, or a regenerative thermal oxidizer (RTO). The incineration equipment 50 is connected to a chimney 51, through which condensed gas free of micro-pollutants is transported to the incineration equipment 50 for combustion via the second condensation pipe 42, and then discharged through the chimney 51.

[0095] Therefore, this utility model mainly utilizes a combination design of an outside air unit 1, a fluidized bed purification device 2, an outside air conditioning unit (MAU) 3, and a cleanroom 4 (e.g., Figure 1 and Figure 2 As shown), the fluidized bed purification equipment 2 is equipped with an adsorption device 10, which allows the outside air 1 to enter the adsorption device 10 and contact the adsorption material 11 flowing on the fluidized bed plate 15 to filter out the micro-pollutants in the outside air 1. Then, it is sent into the outside air conditioning unit (MAU) 3 and then sent to the cleanroom 4 for use through the outside air conditioning unit (MAU) 3. Therefore, it has the efficiency of greatly reducing the micro-pollutants entering the cleanroom 4, and can reduce the filtration burden of the chemical filter in the cleanroom 4, thereby increasing the service life of the chemical filter in the cleanroom 4 and increasing the overall practicality.

[0096] Through the above detailed description, those skilled in the art can understand that this utility model can indeed achieve the aforementioned objectives and has met the requirements of the Patent Law, therefore a patent application is filed.

[0097] The above description is merely a preferred embodiment of the present utility model and should not be construed as limiting the scope of the present utility model. Therefore, any simple equivalent changes and modifications made in accordance with the claims and the description of the present utility model should still fall within the scope of the claims of the present utility model.

Claims

1. A fluidized bed purification device for external air in a cleanroom, characterized in that, include: An external gas, which contains at least one or more gases or combinations thereof; A fluidized bed purification device is provided, which includes an adsorption device, an adsorption device, an adsorption material, a fluid inlet, a fluid outlet, a fluid diffuser plate, and at least a fluidized bed plate. The fluid inlet allows the outside gas to enter, and the outside gas is dispersed to the fluidized bed plate through the fluid diffuser plate, so that the outside gas can come into contact with the adsorption material flowing on the fluidized bed plate and become a purified gas, which is then output from the fluid outlet. An outdoor air conditioning unit is provided, having an inlet and an outlet. The inlet of the outdoor air conditioning unit is connected to the fluid outlet of the adsorption device to allow the purified gas to enter; and A cleanroom is connected to the outlet of the external air conditioning unit.

2. The cleanroom external air fluidized bed purification equipment according to claim 1, characterized in that, The adsorption device is further connected to an adsorption material output pipe and an adsorption material input pipe, respectively. The adsorption material is input into the adsorption material through the adsorption material input pipe and output through the adsorption material output pipe.

3. The cleanroom external air fluidized bed purification equipment according to claim 2, characterized in that, The adsorption device is equipped with an adsorption material storage tank for temporarily storing the adsorption material.

4. The cleanroom external air fluidized bed purification equipment according to claim 1, characterized in that, The fluidized bed purification equipment further includes a desorption device, a first adsorbent container, a second adsorbent container, a third adsorbent container, a fourth adsorbent container, a first conveying pipeline, a second conveying pipeline, a third conveying pipeline, and a fourth conveying pipeline. The desorption device includes a desorption chamber, a desorption inlet, and a desorption outlet. The first adsorbent container is connected to the adsorbent output pipeline. The first conveying pipeline is connected to both the first and second adsorbent containers. The second conveying pipeline is connected to both the second adsorbent container and the desorption inlet of the desorption device. The third conveying pipeline is connected to both the desorption outlet of the desorption device and the third adsorbent container. The fourth conveying pipeline is connected to both the third and fourth adsorbent containers. The fourth adsorbent container is connected to the adsorbent input pipeline.

5. The cleanroom external air fluidized bed purification equipment according to claim 4, characterized in that, The first container of the adsorbent material is further connected to a gas source device, which is provided with a first gas source delivery pipeline. The gas source device is connected to the first container of the adsorbent material through the first gas source delivery pipeline.

6. The cleanroom external air fluidized bed purification equipment according to claim 5, characterized in that, The first gas source delivery pipeline is further equipped with a first gas source control valve to control the air volume of the first gas source delivery pipeline.

7. The cleanroom external air fluidized bed purification equipment according to claim 4, characterized in that, The third container of the adsorbent material is further connected to a gas source device, which is provided with a second gas source delivery pipeline. The gas source device is connected to the third container of the adsorbent material through the second gas source delivery pipeline.

8. The cleanroom external air fluidized bed purification equipment according to claim 7, characterized in that, The second gas source delivery pipeline is further equipped with a second gas source control valve to control the air volume of the second gas source delivery pipeline.

9. The cleanroom external air fluidized bed purification equipment according to claim 4, characterized in that, The desorption chamber of the desorption device is further equipped with at least one heat source device, which can heat the desorption chamber of the desorption device.

10. The cleanroom external air fluidized bed purification equipment according to claim 9, characterized in that, The heat source device is further comprising any one of an electric heater, an electric heating tube heater, an electric heating element heater, a gas fuel heater, a liquid fuel heater, or a heat exchanger.

11. The cleanroom external air fluidized bed purification equipment according to claim 4, characterized in that, The desorption chamber of the desorption device is further connected to a desorption gas source device, which is provided with a desorption gas source delivery pipeline. The desorption gas source device is connected to the desorption chamber of the desorption device through the desorption gas source delivery pipeline.

12. The cleanroom external air fluidized bed purification equipment according to claim 11, characterized in that, The desorbed gas supply pipeline is further equipped with a desorbed gas supply control valve to control the air volume of the desorbed gas supply pipeline.

13. The cleanroom external air fluidized bed purification equipment according to claim 4, characterized in that, The desorption device is further equipped with a condensation device, which has a first condensation pipe and a second condensation pipe. The condensation device is connected to the desorption chamber of the desorption device through the first condensation pipe.

14. The cleanroom external air fluidized bed purification equipment according to claim 13, characterized in that, The condensation unit is further connected to a recovery device.

15. The cleanroom external air fluidized bed purification equipment according to claim 13, characterized in that, The second condenser line of the desorption device is further connected to an incineration unit, which is any one of a direct-fired incinerator, a catalytic incinerator, or a regenerative thermal incinerator.

16. The cleanroom external air fluidized bed purification equipment according to claim 13, characterized in that, The second condenser line of the desorption device is further connected to the outside gas.

17. The cleanroom external air fluidized bed purification equipment according to claim 1, characterized in that, The external air conditioning unit is further provided with a housing, which contains a first filter device, a first temperature device, a water washing device, a second temperature device, and a second filter device.

18. The cleanroom external air fluidized bed purification equipment according to claim 17, characterized in that, The first temperature device is further comprising any or a combination of a precooling coil, a precooler, a preheating coil, and a preheater.

19. The cleanroom external air fluidized bed purification equipment according to claim 17, characterized in that, The second temperature device is further comprising any one or a combination of a recooling coil, a recooler, a reheating coil, and a reheater.

20. The cleanroom external air fluidized bed purification equipment according to claim 17, characterized in that, A fan is further installed inside the box.

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