Film unwinding device for sintering furnace coating device

Abstract

The utility model belongs to chip packaging technical field, is used to solve the technical problem of traditional film -coating technology film feeding instability. Involve a kind of film unwinding device for sintering furnace film coating device, wherein the film feeding rubber cylinder, measuring roller and the both ends of guide roller are hinged with mounting bracket, driving device is fixedly connected with mounting bracket, its output end is transmission connection with film feeding rubber cylinder input end, pressing roller is fixedly connected with mounting bracket by pressing roller eccentric wheel, mounting bracket is fixedly connected with roller axle damping device, and roller axle damping device output end is transmission connection with roller axle;Guide roller is located at the side of mounting bracket away from film feeding rubber cylinder;Lifting device is fixedly connected with mounting bracket, and lifting device is fixedly connected with sintering furnace film coating device. The above-mentioned film unwinding device realizes the stable delivery of film.

Description

Technical Field

[0001] This utility model belongs to the field of chip packaging technology, and in particular relates to a thin film unwinding device for a sintering furnace coating device. Background Technology

[0002] Chip packaging technology is a crucial step in semiconductor manufacturing, with sintering furnaces used to connect chips to substrates at high temperatures. The coating process, a vital step before sintering, directly impacts the packaging quality and reliability of the chip. Currently, with increasing chip integration and shrinking package sizes, higher demands are placed on the precision and consistency of the coating process. The industry is moving towards automation and high precision, but existing coating systems still face bottlenecks in areas such as film uniformity and production efficiency.

[0003] Currently, common lamination technologies mainly include three methods: manual lamination, mechanical lamination, and vacuum adsorption lamination. Manual lamination relies on operator experience, using a scraper or rollers to adhere the film material to the chip surface. Its advantages are high flexibility, but it suffers from poor consistency and low efficiency. Vacuum adsorption lamination uses negative pressure to adsorb the film material onto the chip surface, reducing air bubbles, but the equipment is complex and has specific requirements for the film's permeability. Mechanical lamination uses a cylinder or motor-driven pressure head to apply uniform pressure, achieving a certain degree of automation. However, it lacks precise control over film tension, easily causing wrinkles. Deviations can also occur during the unwinding and rewinding process, leading to film misalignment, affecting the lamination effect, and reducing the quality of chip sintering.

[0004] Therefore, there is a need to provide a film unwinding device to ensure the stability of the film during unwinding and to avoid deviations in the film during the unwinding process. Utility Model Content

[0005] To address the aforementioned technical problems, this utility model provides a film unwinding device for a sintering furnace coating apparatus.

[0006] In a first aspect, this utility model provides a film unwinding device for a sintering furnace coating device, characterized in that it includes a mounting frame, a film feeding tube, a driving device, a roller, a guide roller, a measuring roller, a lifting device, a pressing roller, and a roller damping device.

[0007] The film feeding cylinder, the measuring roller, and the guide roller are hinged at both ends to the mounting frame. The driving device is fixedly connected to the mounting frame, and its output end is drivenly connected to the input end of the film feeding cylinder. The pressure roller is fixedly connected to the mounting frame through a pressure roller eccentric wheel. The roller shaft damping device is fixedly connected to the mounting frame, and its output end is drivenly connected to the roller shaft. The guide roller is located on the side of the mounting frame away from the film feeding cylinder.

[0008] The lifting device is fixedly connected to the mounting frame, and the lifting device is fixedly connected to the sintering furnace coating device.

[0009] Compared with the prior art, the present invention has the following technical effects:

[0010] The drive unit of the film unwinding device in this application can drive the film feeding cylinder to rotate, thereby releasing the film. The roller, in conjunction with the roller damping device, achieves stable and reliable unwinding power output, ensuring the smoothness of the unwinding process. The guide roller guides the film's direction, ensuring it is transported along a predetermined path and accurately reaches the sintering zone, improving the accuracy of the coating. The measuring roller measures the unwound length of the film, and the clamping roller ensures the film remains tightly adhered to the conveying device during unwinding, improving unwinding stability. The aforementioned film unwinding device achieves automatic film unwinding, ensuring a stable and precise coating process, improving the stability and reliability of equipment operation, and reducing labor costs. Attached Figure Description

[0011] The accompanying drawings, which are included to provide a further understanding of the present invention and constitute a part of this invention, illustrate exemplary embodiments of the present invention and, together with the description thereof, serve to explain the present invention and do not constitute an undue limitation thereof. In the drawings:

[0012] Figure 1 A schematic diagram of a film unwinding device for a sintering furnace coating apparatus provided in an embodiment of this utility model;

[0013] Figure 2 for Figure 1 A schematic diagram of the pressing roller side of the film unwinding device for the coating unit of the sintering furnace;

[0014] Figure 3 for Figure 1 Side view of the pressing roller side of the film unwinding device for the coating apparatus of the sintering furnace;

[0015] Figure 4 for Figure 1 Schematic diagram of the installation of the film unwinding device for the coating unit of the sintering furnace.

[0016] Figure label:

[0017] Film unwinding device 1, roller 11, unwinding detection sensor 12, mounting bracket 13, bearing support seat 14, damper support plate 15, plum blossom coupling 16, magnetic damper 17, servo motor 18, parallel coupling 19, unwinding motor support column 110, film feeding tube 111, sensor support plate 112, cable chain 113, cable chain fixing plate 114, static eliminator bracket 115, static eliminator 116, guide roller 117, unwinding offset sensing device 11 8. Film-coated structure base plate 119, linear module 120, lifting baffle 121, screw support 122, synchronous pulley 123, measuring roller 124, film unwinding device support column 125, ball screw 126, pressure roller eccentric wheel 127, pressure roller locking device 128, pressure roller 129, cantilever tension sensor 130, pressure roller shaft 131, tension measuring roller 132, film winding device 2, film 3, synchronization device 4, sintering station 5. Detailed Implementation

[0018] To make the technical problem to be solved, the technical solution, and the beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain this utility model and are not intended to limit this utility model.

[0019] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0020] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified. "Several" means one or more, unless otherwise explicitly specified.

[0021] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0022] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0023] like Figures 1 to 4 As shown, the film unwinding device for the sintering furnace coating device provided by this utility model includes a mounting frame 13, a film feeding tube 111, a driving device, a roller 11, a guide roller 117, a measuring roller 124, a lifting device, a pressing roller 129, and a roller damping device.

[0024] The film feeding cylinder 111, measuring roller 124, and guide roller 117 are hinged to the mounting frame 13 at both ends. The drive device is fixedly connected to the mounting frame 13, and its output end is drivenly connected to the input end of the film feeding cylinder 111. The pressure roller 129 is fixedly connected to the mounting frame 13 through the pressure roller eccentric wheel 127. The roller shaft damping device is fixedly connected to the mounting frame 13, and the output end of the roller shaft damping device is drivenly connected to the roller shaft 11. The guide roller 117 is located on the side of the mounting frame 13 away from the film feeding cylinder 111.

[0025] The lifting device is fixedly connected to the mounting frame 13, and the lifting device is fixedly connected to the sintering furnace coating device.

[0026] In practice:

[0027] The film unwinding device 1 in this application is used on the film coating device of the sintering furnace. The mounting frame 13 serves as a basic support structure, providing an installation platform for other components, ensuring the relative position accuracy of each component, and solving the problems of component installation and overall structural stability. The lifting baffle 121 is a limiting device for the linear guide rail, preventing the mechanism from disengaging from the linear guide rail.

[0028] Mounting frame 13, bearing support seat 14, and seated bearing (not shown in the figure; multiple rollers can be mounted using seated bearings): These support the rotating components of the film feeding cylinder 111, roller shaft 11, and pressure roller 129, enabling them to rotate smoothly. This solves the support and positioning problems of the rotating components and achieves stability during the unwinding process.

[0029] The guide roller 117 guides the direction of the film, ensuring it is transported along a predetermined path. This solves the problem of uncontrollable film transport direction, ensuring the film accurately reaches the sintering zone and improving the accuracy of coating.

[0030] The measuring roller 124 can measure the unwinding length of the film, and the unwinding detection sensor 12 can monitor the unwinding status of the film in real time, such as whether the film is broken. This solves the technical problem of not being able to accurately grasp the unwinding amount and status of the film, and realizes precise monitoring of the unwinding process, which facilitates timely adjustment of the unwinding speed and handling of abnormal situations.

[0031] As a covering material, the film plays a role in isolation and protection during the sintering process, solving problems such as the sintering zone being susceptible to external pollution and preventing material volatilization during sintering, thus improving the quality of sintered products.

[0032] The unwinding motor support column 110, servo motor 18, and motor support plate (not shown in the figure) provide power to the film feeding cylinder 111. The motor support plate is used to mount the servo motor 18. The motor support plate is fixedly connected to the mounting frame 13 through the unwinding motor support column 110. The motor support plate and the unwinding motor support column 110 ensure that the motor is securely installed. This solves the problems of unwinding power source and installation stability, and achieves stable and reliable unwinding power output.

[0033] The cantilevered tension sensor 130, tension measuring roller 132, and tension sensor support plate 112 can detect the tension of the film in real time. When the tension is abnormal, it can provide feedback to the control system for adjustment. This solves the technical problem of unstable film tension affecting the coating quality, and enables the film to maintain appropriate tension during unwinding, thus improving the coating quality. During installation, one end of the tension measuring roller shaft is directly inserted into the sensor and tightened with bolts. A measuring roller shaft is fitted on the outside of the measuring roller shaft.

[0034] The cable chain fixing plate 114 and cable chain 113 are used to organize and protect electrical lines and air pipes, solving the problem of lines and pipes being easily tangled and damaged during equipment operation, and improving the safety and reliability of equipment operation.

[0035] The unwinding offset sensor 118 monitors the film offset and promptly feeds it back to the control system for correction, solving the problem of inaccurate coating caused by film offset during unwinding and improving coating accuracy. The static eliminator 116 eliminates static electricity on the film surface, solving the problem of dust and other impurities being attracted by static electricity affecting coating quality and improving the cleanliness and quality of coating.

[0036] The magnetic damper 17 provides a certain resistance, making the unwinding process smoother. The plum blossom coupling connects the unwinding shaft and the drive components to transmit torque. This solves the problems of difficult control of unwinding speed and stability of power transmission, achieving a smooth and controllable unwinding process.

[0037] The unwinding shaft of the film feeding tube 111 can assist in the unwinding of the film and work in conjunction with other components to solve the problem of smooth initial unwinding of the film and ensure that the unwinding process starts smoothly.

[0038] The system includes an eccentric wheel 127, a pressure roller 129, and a pressure roller locking device 128. The eccentric wheel 127 adjusts the pressure force of the pressure roller 129 on the film, and the locking device 128 fixes the position of the pressure roller 129. This solves the problem of film loosening during unwinding, ensuring the film remains tightly adhered to the conveying device during unwinding and improving unwinding stability.

[0039] like Figure 4 As shown, the sintering furnace coating mechanism includes a film unwinding device 1, a film winding device 2, a film 3, a synchronization device 4, and a sintering station 5. The film unwinding device 1 and the film winding device 2 release and retract the film 3. The film 3 passes through the sintering station 5 and is placed between the pressure head and the chip, providing consistent and uniform pressure. As a covering material, the film plays a role in isolation and protection during the sintering process, solving problems such as susceptibility to external contamination in the sintering zone and preventing material volatilization during sintering, thus improving the quality of the sintered product. The synchronization device 4 is used to synchronously adjust the horizontal height of the film unwinding device 1 and the film winding device 2, and also ensures that the relative positions of the film unwinding device 1 and the film winding device 2 remain constant despite their horizontal height difference.

[0040] like Figure 1 and 2 As shown:

[0041] The film unwinding device 1 includes a roller 11, an unwinding detection sensor 12, a mounting frame 13, a bearing support seat 14, a damper support plate 15, a plum blossom coupling 16, a magnetic damper 17, a servo motor 18, a parallel coupling 19, a servo motor support column 110, a film feeding tube 111, a sensor support plate 112, a drag chain 113, a drag chain fixing plate 114, an electrostatic eliminator bracket 115, an electrostatic eliminator 116, a guide roller 117, an unwinding offset sensing device 118, a film coating structure base plate 119, a linear module 120, a lifting baffle 121, a lead screw support 122, a synchronous pulley 123, a measuring roller 124, a film unwinding device support column 125, a ball screw 126, a pressure roller eccentric wheel 127, a pressure roller locking device 128, a pressure roller 129, and a cantilever tension sensor 130.

[0042] The lifting device includes a linear module 120, a lifting baffle 121, a lead screw support 122, a synchronous pulley 123, and a ball screw 126. The lead screw support 122 cooperates with the lead screw 126, and driven by the synchronous pulley 123, it can drive the entire film unwinding device 1 to move up and down along the linear guide rail in the linear module 120. The lifting baffle 121 is a limiting device for the linear module 120 to prevent the mechanism from disengaging from the linear guide rail. This structure solves the technical problem of how to accurately adjust the starting position of the film under different height requirements, and achieves the effect that the film can accurately cover the appropriate position when sintering products of different specifications.

[0043] The mounting frame 13 serves as a basic support structure, providing an installation platform for other components and ensuring the relative positional accuracy of each component, thus solving the problems of component installation and overall structural stability. Furthermore, the mounting frame 13 includes a first support plate, a second support plate, and a film unwinding device support column 125. The first and second support plates are fixedly connected via the film unwinding device support column 125. In addition, it includes a third support plate equipped with a lifting device, collectively forming the mounting frame 13.

[0044] The film 3 is fixed on the mounting frame 13 by the roller 11. The roller 11 is used to release the film. The unwinding detection sensor 12 is installed on the mounting frame 13. The bearing support seat 14, the damper support plate 15, the clover-type coupling 16, and the magnetic damper 17 are respectively installed on the side. The magnetic damper 17 is fixed on the damper support plate 15 and is connected to the roller 11 through the clover-type coupling 16 to eliminate the vibration of the film unwinding device 1 during the unwinding process and ensure the smooth unwinding of the film 3.

[0045] The servo motor 18 is the power unit of the film unwinding device 1. The servo motor 18 is mounted on the motor support plate through the servo motor support column 110. The output shaft of the servo motor 18 is connected to the film feeding tube 111 through the parallel coupling 19. The outer side of the film feeding tube 111 is the pressure roller 129. The pressure roller 129 is fixed on the pressure roller shaft 131. Pressure roller eccentric wheels 127 are provided at both ends of the pressure roller shaft 131. The pressure roller locking device 128 is mounted on the mounting frame 13. The pressure roller eccentric wheels 127 are used to adjust the distance between the film feeding tube 111 and the pressure roller 129. The pressure roller locking device 128 is used to position the pressure roller 129. The eccentric wheel 127 of the pressure roller is used to adjust the distance between the two rollers. The gap between the pressure rollers can be adjusted. The pressure roller locking device 128 is equipped with a spring adjustment. When the eccentric wheel 127 of the pressure roller rotates, the pressure roller locking device 128 can continue to press against the pressure roller shaft 131 after the adjustment is completed.

[0046] The servo motor 18 has a cantilever tension sensor 130 inside. The cantilever tension sensor 130 is fixed to the sensor support plate 112 by the motor support column 110. The cable chain fixing plate 114 is installed on the outside of the sensor support plate 112. The cable chain 113 passes through the cable chain fixing plate 114 and is used to store electrical connection wires. The cantilever tension sensor 130 is connected to the measuring roller 124 inside. Two guide rollers 117 are symmetrically arranged on the left side of the measuring roller 124 for film guidance. Two film unwinding device support columns 125 are set between the first support plate and the second support plate to enhance the stability of the overall structure.

[0047] The inner side of the cantilever tension sensor 130 is a static eliminator. The static eliminator bracket 115 is fixed on the mounting frame 13. The static eliminator 116 is installed on the static eliminator bracket 115 to eliminate static electricity on the film 3 passing through the film unwinding device 1. Two guide rollers 117 are set at the static eliminator 116, and an unwinding offset sensing device 118 is also set to keep the film entering the sintering station 5 from shifting.

[0048] The drive unit of the film unwinding device in this application can drive the film feeding cylinder to rotate, thereby releasing the film. The roller, in conjunction with the roller damping device, achieves stable and reliable unwinding power output, ensuring the smoothness of the unwinding process. The guide roller guides the film's direction, ensuring it is transported along a predetermined path and accurately reaches the sintering zone, improving the accuracy of the coating. The measuring roller measures the unwound length of the film, and the clamping roller ensures the film remains tightly adhered to the conveying device during unwinding, improving unwinding stability. The aforementioned film unwinding device achieves automatic film unwinding, ensuring a stable and precise coating process, improving the stability and reliability of equipment operation, and reducing labor costs.

[0049] As one possible implementation, the lifting device includes a linear module 120, a lead screw support 122, a synchronous pulley 123, a film-coated structural base plate 119, and a ball screw 126. The film-coated structural base plate 119 is fixedly connected to the mounting frame 13 via the linear module 120, the lead screw support 122 is fixedly connected to the film-coated structural base plate 119, the nut of the ball screw 126 is fixedly connected to the mounting frame 13, the screw of the ball screw 126 is rotatably connected to the lead screw support 122, and the synchronous pulley 123 is fixedly connected to the screw.

[0050] The film-coated structure base plate 119 is fixedly connected to the film-coating device of the sintering furnace, and the film unwinding device 1 and the film winding device 2 are located on both sides of the sintering station 5.

[0051] The film unwinding device 1 moves up and down along the linear guide rail in the linear module 120, thereby adjusting the height of the film unwinding device 1.

[0052] As one possible implementation, the lifting device also includes a lifting baffle 121; the lifting baffle 121 is fixedly connected to the membrane structure base plate 119 and is located on top of the linear module 120.

[0053] The lifting baffle 121 is a limiting device for the linear module 120 to prevent the mechanism from disengaging from the linear guide rail.

[0054] As one possible implementation, the drive device includes a servo motor 18 and a parallel coupling 19; the servo motor 18 is fixedly connected to the mounting bracket 13, and the output end of the servo motor 18 is connected to the film feeding cylinder 111 through the parallel coupling 19.

[0055] The servo motor 18 and the mounting bracket 13 are actually installed on the first support plate or the second support plate, which can better transmit the power of the servo motor 18 to the film feeding cylinder 111 and ensure the film feeding effect.

[0056] As one possible implementation, the roller damping device includes a damper support plate 15, a plum blossom coupling 16, and a magnetic damper 17; the damper support plate 15 is fixedly connected to the mounting frame 13, the magnetic damper 17 is fixedly connected to the damper support plate 15, and the magnetic damper 17 is connected to the roller 11 through the plum blossom coupling 16.

[0057] The magnetic damper 17 is fixed on the damper support plate 15 and connected to the roller shaft 11 through the plum blossom coupling 16 to eliminate the vibration of the film unwinding device 1 during the unwinding process and ensure the smooth unwinding of the film.

[0058] As one possible implementation, the film unwinding device 1 also includes a pressure roller locking device 128; the pressure roller locking device 128 is fixedly connected to the mounting frame 13 and abuts against the pressure roller shaft 131.

[0059] The clamping roller locking device 128 is mounted on the mounting bracket 13 and is used to position the clamping roller 129.

[0060] As one possible implementation, the film unwinding device 1 also includes an unwinding detection sensor 12; the unwinding detection sensor 12 is fixedly connected to the mounting frame 13 and faces the roller 11.

[0061] The unwinding detection sensor 12 can monitor the unwinding status of the film in real time, such as whether the film is broken, thus ensuring the stability of unwinding.

[0062] As one possible implementation, the film unwinding device 1 also includes a cantilever tension sensor 130, a sensor support plate 112, and a tension measuring roller 132; the tension measuring roller 132 is hinged to the mounting frame 13, the sensor support plate 112 is fixedly connected to the mounting frame 13 through a mounting column, the cantilever tension sensor 130 is fixedly connected to the sensor support plate 112, and the cantilever tension sensor 130 is drive-connected to the tension measuring roller 132.

[0063] The cantilevered tension sensor 130 and tension measuring roller 132 detect the film tension in real time. When the tension is abnormal, it can provide feedback to the control system for adjustment. This solves the technical problem of unstable film tension affecting coating quality, enabling the film to maintain appropriate tension during unwinding and improving coating quality. The tension measuring roller 132 is installed inside the measuring roller 124. The tension measuring roller 132 is tightened with bolts after the sensor is inserted into its shaft end. The specific layout is as follows: Figure 3 As shown.

[0064] In one possible implementation, the film unwinding device 1 further includes a drag chain 113, a drag chain fixing plate 114, an electrostatic eliminator bracket 115, and an electrostatic eliminator 116; the drag chain fixing plate 114 is fixedly connected to the sensor support plate 112, both ends of the drag chain 113 are fixedly connected to the drag chain fixing plate 114 and the mounting frame 13 respectively, the electrostatic eliminator bracket 115 is fixedly connected to the mounting frame 13, and the electrostatic eliminator 116 is fixedly connected to the electrostatic eliminator bracket 115.

[0065] The static eliminator bracket 115 enables the installation of the static eliminator 116, which can eliminate static electricity in the device; the cable chain 113 can be used to organize and protect electrical lines and air pipes, etc., solving the problem of lines and pipes being easily tangled and damaged during equipment operation, and improving the safety and reliability of equipment operation.

[0066] As one possible implementation, the film unwinding device 1 also includes an unwinding offset sensing device 118; the unwinding offset sensing device 118 is fixedly connected to the mounting frame 13 and is located between the guide rollers 117, which are two rollers arranged in parallel on the side away from the film feeding tube 111.

[0067] The unwinding offset sensor 118 can detect the conveyed film and keep the film entering the sintering station 5 from shifting.

[0068] The above description is merely a preferred embodiment of this utility model, and this utility model should not be limited to the content disclosed in this embodiment and the accompanying drawings. Any equivalent or modified versions made without departing from the spirit of this utility model shall fall within the protection scope of this utility model.

[0069] In the description of the above embodiments, specific features, structures, materials, or characteristics may be combined in any suitable manner in one or more embodiments or examples.

[0070] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the protection scope of the claims.

Claims

1. A film unwinding device for a sintering furnace coating apparatus, characterized in that, It includes a mounting frame, film feeding tube, drive unit, rollers, guide rollers, measuring rollers, lifting device, pressing rollers, and roller damping device; The film feeding cylinder, the measuring roller, and the guide roller are hinged at both ends to the mounting frame. The driving device is fixedly connected to the mounting frame, and its output end is drivenly connected to the input end of the film feeding cylinder. The pressure roller is fixedly connected to the mounting frame through a pressure roller eccentric wheel. The roller shaft damping device is fixedly connected to the mounting frame, and its output end is drivenly connected to the roller shaft. The guide roller is located on the side of the mounting frame away from the film feeding cylinder. The lifting device is fixedly connected to the mounting frame, and the lifting device is fixedly connected to the sintering furnace coating device.

2. The film unwinding device for the sintering furnace coating apparatus according to claim 1, characterized in that, The lifting device includes a linear module, a lead screw support, a synchronous pulley, a film-coated base plate, and a ball screw. The film-coated structure base plate is fixedly connected to the mounting frame via the linear module, the lead screw support is fixedly connected to the film-coated structure base plate, the nut of the ball screw is fixedly connected to the mounting frame, the screw of the ball screw is rotatably connected to the lead screw support, and the synchronous pulley is fixedly connected to the screw.

3. The film unwinding device for the sintering furnace coating apparatus according to claim 2, characterized in that, The lifting device also includes a lifting baffle; The lifting baffle is fixedly connected to the base plate of the membrane structure and is located on top of the linear module.

4. The film unwinding device for the sintering furnace coating apparatus according to claim 1, characterized in that, The drive unit includes a servo motor and a parallel coupling; The servo motor is fixedly connected to the mounting bracket, and the output end of the servo motor is connected to the film feeding cylinder via the parallel coupling.

5. The film unwinding device for the sintering furnace coating apparatus according to claim 1, characterized in that, The roller damping device includes a damper support plate, a plum blossom coupling, and a magnetic damper. The damper support plate is fixedly connected to the mounting bracket, the magnetic damper is fixedly connected to the damper support plate, and the magnetic damper is connected to the roller shaft via the plum blossom coupling.

6. The film unwinding device for the sintering furnace coating apparatus according to claim 1, characterized in that, The film unwinding device also includes a pressure roller locking device; The clamping roller locking device is fixedly connected to the mounting frame and abuts against the clamping roller shaft of the clamping roller.

7. The film unwinding device for the sintering furnace coating apparatus according to claim 1, characterized in that, The film unwinding device also includes an unwinding detection sensor; The unwinding detection sensor is fixedly connected to the mounting frame and faces the roller.

8. The film unwinding device for the sintering furnace coating apparatus according to claim 1, characterized in that, The film unwinding device also includes a cantilever tension sensor, a sensor support plate, and a tension measuring roller; The tension measuring roller is hinged to the mounting frame, the sensor support plate is fixedly connected to the mounting frame via a mounting column, the cantilever tension sensor is fixedly connected to the sensor support plate, and the cantilever tension sensor is drivenly connected to the tension measuring roller.

9. The film unwinding device for the sintering furnace coating apparatus according to claim 8, characterized in that, The film unwinding device also includes a drag chain, a drag chain fixing plate, an electrostatic eliminator bracket, and an electrostatic eliminator. The cable chain fixing plate is fixedly connected to the sensor support plate, the two ends of the cable chain are fixedly connected to the cable chain fixing plate and the mounting bracket respectively, the static eliminator bracket is fixedly connected to the mounting bracket, and the static eliminator is fixedly connected to the static eliminator bracket.

10. The film unwinding device for the sintering furnace coating apparatus according to claim 1, characterized in that, The film unwinding device also includes an unwinding offset sensing device; The unwinding offset sensing device is fixedly connected to the mounting frame and located between the guide rollers. There are two guide rollers, which are arranged in parallel on the side away from the film feeding tube.

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