A semiconductor tank cleaning chamber assembly
By designing a semiconductor tank cleaning box assembly and combining a conveying device with an ultrasonic cleaner, the problems of inconvenient operation and low cleaning efficiency were solved, achieving convenient and efficient semiconductor cleaning.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SUZHOU HONGSHITAI MASCH CO LTD
- Filing Date
- 2025-05-27
- Publication Date
- 2026-06-19
AI Technical Summary
Existing semiconductor cleaning equipment is inconvenient to operate and has low cleaning efficiency.
A semiconductor tank cleaning box assembly was designed, comprising a conveyor belt, a conveying device, an adjusting device, a moving device, and an ultrasonic cleaner. The conveying device transports the semiconductor into the cleaning device, and the ultrasonic cleaner, in conjunction with a circulation device, improves the utilization rate of the cleaning solution.
This enables convenient semiconductor cleaning and improves cleaning efficiency.
Smart Images
Figure CN224372283U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor processing technology, specifically to a semiconductor tank cleaning box assembly. Background Technology
[0002] A semiconductor is a material whose conductivity lies between that of a conductor and an insulator. Its resistivity ranges from 10^-3 to 10^9 ohm-cm, and its resistivity exhibits a negative temperature coefficient. Characteristics of semiconductors include rectification, photosensitivity, thermosensitivity, and negative resistivity. Based on their chemical composition, semiconductors can be classified into elemental semiconductors (such as silicon and germanium) and compound semiconductors (such as gallium arsenide and indium phosphide).
[0003] A semiconductor cleaning device, as disclosed in publication number CN220456361U, includes a cleaning tank and a storage tank. A support frame is provided between the top of the storage tank and the cleaning tank. A liquid outlet pipe with a valve is provided at the bottom of the storage tank. A cleaning trough is provided at the top of the cleaning tank, and a cleaning frame with a drain hole is provided on the cleaning frame. An adjustment trough is provided inside the cleaning tank, and two connecting pipes are provided at the bottom of the adjustment trough. A drain pipe is provided at the bottom of the cleaning tank. This structure can efficiently rinse away residual chemical agents, particles, metals, and other impurities on the surface of semiconductor workpieces, and can filter the cleaning solution to facilitate the removal of impurities in the cleaning solution, thereby facilitating the recycling and treatment of the cleaning solution.
[0004] The aforementioned device is inconvenient to operate and has low cleaning efficiency; therefore, we propose a semiconductor tank cleaning box assembly to solve the problems mentioned above. Utility Model Content
[0005] The purpose of this invention is to provide a semiconductor tank cleaning box assembly to solve the problems of inconvenient operation and low cleaning efficiency mentioned in the background art.
[0006] To achieve the above objectives, this utility model provides the following technical solution: a semiconductor tank cleaning box assembly, including a conveyor belt, a conveying device at the front end of the conveyor belt, a second guide groove inside the conveying device, an adjusting device inside the second guide groove, the adjusting device including a threaded rod and a motor, the threaded rod being disposed in the second guide groove, the right side of the threaded rod penetrating and extending to the right side of the conveying device, the motor being disposed on the threaded rod, a moving device being disposed inside the threaded rod, a transport device being disposed at the lower end of the moving device, a cleaning device being disposed on the left side of the transport device, a water tank being disposed at the front end of the cleaning device, a water inlet being disposed at the upper end of the water tank, and a water outlet being disposed on the left side of the water tank.
[0007] Preferably, the front end of the conveyor belt is provided with an inclined guide block.
[0008] Preferably, the transport device includes a transport box, a filter baffle, a first guide groove, a handle groove, and a first guide block. The transport box has a first guide groove, and the first guide block is disposed in the first guide groove. A filter baffle is disposed between two sets of the first guide blocks, and a handle groove is disposed at the upper end of each filter baffle.
[0009] Preferably, the moving device includes a hydraulic cylinder, a telescopic rod, a connecting block, and a second guide block. The second guide block is provided in two sets, and both sets of the second guide blocks are provided on the threaded rod. The lower ends of the two sets of the second guide blocks are provided with hydraulic cylinders and telescopic rods. The lower ends of the hydraulic cylinders and telescopic rods are provided with connecting blocks, and they are symmetrically arranged on the left and right sides of the transport box.
[0010] Preferably, the cleaning device includes a cleaning tank, a filter plate, and an ultrasonic cleaner, wherein the ultrasonic cleaner is disposed inside the cleaning tank and a filter plate is disposed on the upper end of the ultrasonic cleaner.
[0011] Preferably, the ultrasonic cleaning machine includes a vibrating steel plate, ultrasonic transducers, connecting pipes, ultrasonic generators, drain pipes, and a control panel. The vibrating steel plate is located at the lower end of the filter plate, and a drain pipe is installed inside the vibrating steel plate. The lower end of the drain pipe passes through and extends to the outside of the cleaning tank. An ultrasonic transducer is installed at the lower end of the vibrating steel plate. There are four sets of ultrasonic transducers. Each of the four sets of ultrasonic transducers has a connecting pipe at its lower end. An ultrasonic generator is installed at the lower end of the connecting pipe. A control panel is installed at the front end of the ultrasonic generator. The control panel is located on the outside of the cleaning tank.
[0012] Preferably, a circulation device is provided on the other side of the drain pipe, and the other side of the circulation device is connected to the water tank. A water pumping device is provided at the upper end of the water tank, and a water inlet pipe is provided on the other side of the water pumping device. The other side of the water inlet pipe passes through and extends into the cleaning tank.
[0013] Compared with the prior art, the beneficial effects of this utility model are:
[0014] (1) This utility model solves the problem of inconvenient operation by setting a conveying device at the upper end of the cleaning device, and cooperating with the adjustment device and the moving device in the conveying device to transport the semiconductor conveyed by the conveyor belt to the cleaning device for cleaning.
[0015] (2) By installing an ultrasonic cleaner in the cleaning device and using a circulation device at the front of the cleaning tank to circulate the cleaning liquid, the utilization rate of the cleaning liquid is increased, and the cleaning efficiency is further increased, thereby solving the problem of low cleaning efficiency. Attached Figure Description
[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;
[0017] Figure 2 This is a front view of the present invention;
[0018] Figure 3 This is an enlarged, disassembled view of the transportation device of this utility model;
[0019] Figure 4 This is a cross-sectional view of the present invention;
[0020] In the diagram: 1. Conveyor belt; 2. Conveying device; 3. Transport device; 31. Transport box; 32. Filter baffle; 33. First guide groove; 34. Handle groove; 35. First guide block; 4. Cleaning device; 41. Cleaning box; 42. Vibrating steel plate; 43. Ultrasonic transducer; 44. Connecting pipe; 45. Ultrasonic generator; 46. Drain pipe; 47. Control panel; 5. Water tank; 6. Moving device; 61. Hydraulic cylinder; 62. Telescopic rod; 63. Connecting block; 64. Second guide block; 7. Inclined guide block; 8. Second guide groove; 9. Threaded rod; 10. Motor; 11. Circulation device; 12. Pumping device; 13. Inlet pipe; 14. Inlet; 15. Outlet; 16. Filter plate. Detailed Implementation
[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.
[0022] Please see Figure 1-4This utility model provides an embodiment of a semiconductor tank-type cleaning box assembly, including a conveyor belt 1, a conveying device 2 at the front end of the conveyor belt 1, a second guide groove 8 inside the conveying device 2, an adjusting device inside the second guide groove 8, the adjusting device including a threaded rod 9 and a motor 10, the threaded rod 9 being disposed in the second guide groove 8, the right side of the threaded rod 9 penetrating and extending to the right side of the conveying device 2, the motor 10 being disposed on the threaded rod 9, a moving device 6 being disposed inside the threaded rod 9, a transport device 3 being disposed at the lower end of the moving device 6, a cleaning device 4 being disposed on the left side of the transport device 3, and a water supply being disposed at the front end of the cleaning device 4. The water tank 5 has an inlet 14 at its upper end and an outlet 15 on its left side. A conveying device 2 is installed at the upper end of the cleaning device 4. The conveying device 2 works in conjunction with the adjusting device and the moving device 6 to transport the semiconductor conveyed by the conveyor belt 1 to the cleaning device 4 for cleaning. This solves the problem of inconvenient operation. An ultrasonic cleaner is installed in the cleaning device 4. The cleaning liquid is circulated in conjunction with the circulation device 11 at the front end of the cleaning tank 41. This increases the utilization rate of the cleaning liquid and further increases the cleaning efficiency, thus solving the problem of low cleaning efficiency.
[0023] Please see Figure 2 The front end of the conveyor belt 1 is equipped with an inclined guide block 7, which serves as a guide.
[0024] Please see Figure 3 The transport device 3 includes a transport box 31, a filter baffle 32, a first guide groove 33, a handle groove 34, and a first guide block 35. The transport box 31 has a first guide groove 33 inside, and a first guide block 35 is provided inside the first guide groove 33. A filter baffle 32 is provided between two sets of first guide blocks 35. A handle groove 34 is provided at the upper end of each filter baffle 32, which serves to transport semiconductors.
[0025] Please see Figure 2 The moving device 6 includes a hydraulic cylinder 61, a telescopic rod 62, a connecting block 63, and a second guide block 64. There are two sets of second guide blocks 64, both of which are mounted on the threaded rod 9. The lower ends of the two sets of second guide blocks 64 are provided with hydraulic cylinders 61 and telescopic rods 62. The lower ends of hydraulic cylinders 61 and telescopic rods 62 are provided with connecting blocks 63, and they are symmetrically arranged on the left and right sides of the transport box 31, so that the transport box 31 can be raised and lowered.
[0026] Please see Figure 4 The cleaning device 4 includes a cleaning tank 41, a filter plate 16, and an ultrasonic cleaner. The ultrasonic cleaner is installed inside the cleaning tank 41, and the filter plate 16 is installed on the upper end of the ultrasonic cleaner.
[0027] Please see Figure 4The ultrasonic cleaner includes a vibrating steel plate 42, an ultrasonic transducer 43, a connecting pipe 44, an ultrasonic generator 45, a drain pipe 46, and a control panel 47. The vibrating steel plate 42 is located at the lower end of the filter plate 16. The drain pipe 46 is installed inside the vibrating steel plate 42, and its lower end extends through and to the outside of the cleaning tank 41. The ultrasonic transducer 43 is installed at the lower end of the vibrating steel plate 42. There are four sets of ultrasonic transducers 43. Each set of ultrasonic transducers 43 is connected to a connecting pipe 44 at its lower end. The ultrasonic generator 45 is installed at the lower end of the connecting pipe 44. The control panel 47 is installed at the front end of the ultrasonic generator 45. The control panel 47 is located on the outside of the cleaning tank 41 and serves to clean the semiconductor inside the transport box 31.
[0028] Please see Figure 4 A circulation device 11 is provided on the other side of the drain pipe 46. The other side of the circulation device 11 is connected to the water tank 5. A water pumping device 12 is provided at the upper end of the water tank 5. A water inlet pipe 13 is provided on the other side of the water pumping device 12. The other side of the water inlet pipe 13 passes through and extends into the cleaning tank 41 to play a circulation role.
[0029] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.
Claims
1. A semiconductor tank cleaning chamber assembly comprising a conveyor belt (1), characterized in that: The conveyor belt (1) is provided with a conveying device (2) at the front end. The conveying device (2) is provided with a second guide groove (8). The second guide groove (8) is provided with an adjusting device. The adjusting device includes a threaded rod (9) and a motor (10). The threaded rod (9) is provided in the second guide groove (8). The right side of the threaded rod (9) extends through and to the right side of the conveying device (2). The motor (10) is provided on the threaded rod (9). The moving device (6) is provided in the threaded rod (9). The lower end of the moving device (6) is provided with a transport device (3). The left side of the transport device (3) is provided with a cleaning device (4). The front end of the cleaning device (4) is provided with a water tank (5). The upper end of the water tank (5) is provided with a water inlet (14). The left side of the water tank (5) is provided with a water outlet (15).
2. The semiconductor tank cleaning box assembly according to claim 1, characterized in that: The conveyor belt (1) is provided with an inclined guide block (7) at its front end.
3. The semiconductor tank cleaning box assembly according to claim 2, characterized in that: The transport device (3) includes a transport box (31), a filter baffle (32), a first guide groove (33), a handle groove (34), and a first guide block (35). The transport box (31) has a first guide groove (33) inside, and a first guide block (35) is provided in the first guide groove (33). A filter baffle (32) is provided between two sets of first guide blocks (35). A handle groove (34) is provided on the upper end of each filter baffle (32).
4. A semiconductor tank cleaning chamber assembly according to claim 3, characterized in that: The moving device (6) includes a hydraulic cylinder (61), a telescopic rod (62), a connecting block (63), and a second guide block (64). There are two sets of the second guide blocks (64), and both sets of the second guide blocks (64) are set on the threaded rod (9). The lower ends of the two sets of the second guide blocks (64) are provided with a hydraulic cylinder (61) and a telescopic rod (62). The lower ends of the hydraulic cylinder (61) and the telescopic rod (62) are provided with a connecting block (63), and they are symmetrically arranged on the left and right sides of the transport box (31).
5. A semiconductor tank cleaning chamber assembly according to claim 4, characterized in that: The cleaning device (4) includes a cleaning tank (41), a filter plate (16) and an ultrasonic cleaner. The ultrasonic cleaner is installed inside the cleaning tank (41), and the filter plate (16) is installed on the upper end of the ultrasonic cleaner.
6. A semiconductor tank cleaning chamber assembly according to claim 5, characterized in that: The ultrasonic cleaner includes a vibrating steel plate (42), an ultrasonic transducer (43), a connecting pipe (44), an ultrasonic generator (45), a drain pipe (46), and a control panel (47). The vibrating steel plate (42) is located at the lower end of the filter plate (16). A drain pipe (46) is installed inside the vibrating steel plate (42). The lower end of the drain pipe (46) extends through and to the outside of the cleaning tank (41). An ultrasonic transducer (43) is installed at the lower end of the vibrating steel plate (42). There are four sets of ultrasonic transducers (43). A connecting pipe (44) is installed at the lower end of each of the four sets of ultrasonic transducers (43). An ultrasonic generator (45) is installed at the lower end of the connecting pipe (44). A control panel (47) is installed at the front end of the ultrasonic generator (45). The control panel (47) is located outside the cleaning tank (41).
7. A semiconductor tank cleaning chamber assembly according to claim 6, characterized in that: A circulation device (11) is provided on the other side of the drain pipe (46). The other side of the circulation device (11) is connected to the water tank (5). A water pumping device (12) is provided at the upper end of the water tank (5). A water inlet pipe (13) is provided on the other side of the water pumping device (12). The other side of the water inlet pipe (13) extends through and into the cleaning tank (41).