The invention relates to a
semiconductor device
manufacturing technology, and aims to provide a preparation method of refined
coke powder and high-purity isostatic pressing
graphite. The method comprises the following steps: by taking calcined
petroleum coke or calcined
pitch coke as a
raw material, crushing and
grinding to obtain primary coke
powder, then carrying out high-temperature
halogen impurity removal treatment in a continuous heating manner, and introducing
Freon gas in the process; cooling to obtain
impurity-removed coke
powder; and carrying out dispersion,
grinding, shaping treatment,
airflow classification and
magnetic separation to obtain refined coke powder. According to the method, the
impurity content is greatly reduced from the
raw material end, the situation that a large number of
metal impurities generated during smashing and
grinding treatment cannot be eliminated in the graphitization process due to the fact that the
metal impurities are located below the
surface layer of a blank can be avoided, and the internal impurity content of a final
graphite product is smaller than 20 ppm; higher tap density can be obtained, and a better mixing and kneading effect is realized; the
porosity of an isostatic pressing
graphite product can be reduced, the
microstructure of a graphite material is effectively improved, and the
corrosion resistance of the graphite material is effectively improved.