A built-in flow channel polishing head
The polishing head design with built-in flow channels solves the problems of liquid supply contamination and the difficulty in timely application of polishing liquid, realizing an efficient and convenient polishing process and improving product quality and production efficiency.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SUZHOU REB ELECTROMECHANICAL TECH CO LTD
- Filing Date
- 2025-06-30
- Publication Date
- 2026-06-19
AI Technical Summary
The existing liquid supply methods for grinding and polishing operations have problems such as the polishing liquid being contaminated by external dust and difficulty in applying it to the work area in a timely manner, resulting in poor surface and material damage, and increasing production time and costs.
The polishing head design with built-in flow channels achieves central liquid supply by setting liquid outlet and air flow channels inside the polishing head, avoiding the risk of contamination from external liquid supply, and provides uniform gas pressure through vortex air flow channels to accelerate the action of polishing fluid.
It improves polishing quality, reduces production costs, increases production efficiency, and enables quick disassembly and installation of the polishing head, thus enhancing processing quality.
Smart Images
Figure CN224373697U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of grinding and polishing of semiconductor wafers, and relates to a grinding and polishing head with built-in flow channels. Background Technology
[0002] In the front-end processes of semiconductors, wafers and wafer materials need to undergo rough grinding, fine grinding, polishing and other processes to ensure that the materials meet the requirements of the back-end processes.
[0003] In the wafer grinding and thinning process, a substrate and a wafer of the same size are generally used. The wafer is bonded to the substrate material, and the substrate material is then adsorbed onto a special precision fixture. Grinding and thinning operations are performed using grinding and polishing equipment.
[0004] The current method of supplying polishing fluid to the work area involves external supply of the fluid to the material, with a drive ring at the bottom of the fixture diverting the fluid. This method suffers from several drawbacks: the polishing fluid is susceptible to contamination from external dust; and when polishing large materials, the fluid may not reach the work area promptly, resulting in surface defects and even material damage. To avoid these issues, additional polishing steps are added, which, while meeting quality requirements, increases production time and reduces efficiency. Utility Model Content
[0005] Purpose of the utility model: The purpose of this utility model is to provide a polishing head with a built-in flow channel.
[0006] Technical solution: This utility model discloses a grinding and polishing head with an internal flow channel, comprising a metal adapter plate, a grinding and polishing head base, an air film, a grinding and polishing head flange ring, and a grinding and polishing head working head;
[0007] The metal adapter plate is connected to the polishing head base, the polishing head flange ring is fixed on the polishing head base, the air film is fixed between the polishing head flange ring and the polishing head base, the polishing head working head is disposed inside the polishing head flange ring, and the polishing head working head is movable in the vertical direction; the bottom surface of the polishing head base is provided with an air passage communicating with the outside, and when air enters the air passage, the air film pressurizes the polishing head working head;
[0008] The polishing head has an internal liquid outlet channel with an outlet hole located at the center of the polishing head and an inlet hole located on the side of the polishing head. The inlet hole is used to introduce polishing liquid.
[0009] Furthermore, the side of the blasting head is provided with a sliding groove for quick installation and disassembly, and the side of the blasting head flange ring is provided with a lateral positioning pin. The blasting head can be disassembled and assembled by the cooperation of the sliding groove and the lateral positioning pin.
[0010] Furthermore, the gas flow path is vortex-shaped, which allows the gas to be applied evenly to the gas film.
[0011] Furthermore, the top surface of the polishing head flange ring is provided with a water ripple surface, which is used to tightly connect the air film to the polishing head base and improve air tightness.
[0012] Furthermore, the water ripple surface is located at the edge of the air film.
[0013] Furthermore, the polishing head flange ring, air film, and polishing head base are fixed by a threaded connection.
[0014] Furthermore, the polishing head base is connected to the metal adapter plate via a threaded connection.
[0015] Beneficial Effects: Compared with existing technologies, this invention has the following advantages: By incorporating a built-in flow channel within the polishing head housing, this invention enables the polishing head to achieve a central liquid supply function, avoiding the risk of material contamination associated with external liquid supply. Central liquid supply also eliminates the risk associated with polishing large materials where the polishing fluid cannot reach the work area in a timely manner. The polishing head can be quickly disassembled, and the air bladder within the working head cavity provides pressurization, resulting in faster removal rates and greater ease of use. This improves product quality, reduces production costs, and increases production efficiency. Attached Figure Description
[0016] Figure 1 This is an exploded cross-sectional view of the present invention.
[0017] Figure 2 This is a cross-sectional structural diagram of the present invention.
[0018] Figure 3 This is a schematic diagram of the overall structure of this utility model.
[0019] Figure 4 This is a schematic diagram of the structure of the grinding and polishing head of this utility model. Detailed Implementation
[0020] The technical solution of this utility model will be further described below with reference to the accompanying drawings.
[0021] like Figure 1-4As shown, this embodiment of a polishing head with a built-in flow channel includes a metal adapter plate 1, a polishing head base 2, an air film 4, a polishing head flange ring 5, and a polishing head working head 6. The metal adapter plate 1 is connected to the power shaft via a locating pin. The metal adapter plate 1 and the polishing head base 2 are fixedly connected by a threaded connection. The polishing head flange ring 5 is fixed to the polishing head base 2. The air film 4 is fixed between the polishing head flange ring 5 and the polishing head base 2. The polishing head working head 6 is disposed within the polishing head flange ring 5 and is vertically movable. When pressurized by the air film 4, it can apply downward pressure. The bottom surface of the polishing head base 2 is provided with an air flow channel communicating with the outside. When no air enters the air flow channel, the air film 4 is in close contact with the polishing head base 2. When pressure is required, air enters through the air flow channel, causing the air film 4 to pressurize the polishing head working head 6, resulting in a faster removal rate. In a specific embodiment, the air passage is a vortex-shaped air passage. The vortex-shaped air passage can ensure that the gas is applied evenly to the air film 4, thereby providing the air film 4 with uniform and stable pressure to the grinding and polishing head 6, thus improving the processing quality.
[0022] The polishing head 6 has an internal liquid outlet channel. The liquid outlet hole 61 of the liquid outlet channel is located at the center of the polishing head 6, and the liquid inlet hole 62 is located on the side of the polishing head 6. The liquid inlet hole is used to introduce polishing fluid. This achieves central liquid supply during polishing, avoiding the risk of material contamination from external liquid supply. Central liquid supply also eliminates the risk of polishing fluid not being able to reach the working area in a timely manner when polishing large-sized materials.
[0023] like Figure 4 As shown, in a specific embodiment, the side of the polishing head 6 is provided with a groove 63 for quick installation and disassembly, and the side of the polishing head flange ring 5 is provided with a lateral positioning pin 3. The polishing head 6 is installed in the polishing head flange ring 5 by the cooperation of the groove 63 and the lateral positioning pin 3. Specifically, the groove 63 is a U-shaped groove, including a first groove 6301 and a third groove 6303 that are parallel in the vertical direction, and a second groove 6302 that connects the first groove 6301 and the third groove 6303 in the horizontal direction. The opening of the first groove 6301 is opened on the upper end face of the polishing head 6, and the end of the third groove 6303 is closed to form a snap-fit part. During installation, the lateral positioning pin 3 is slid into the opening of the first slide groove 6301. By pressing and rotating, it slides along the vertical first slide groove 6301 into the horizontal second slide groove 6302, and finally engages in the vertical third slide groove 6303. Disassembly is performed by reversing the operation. This design allows the polishing head 6 to be quickly disassembled or installed, making it more convenient to use and improving production efficiency. Furthermore, after installation, the polishing head 6 can move within the vertical groove of the slide groove 63.
[0024] In a specific embodiment, the polishing head flange ring 5 and the air film 4 are fixed to the polishing head base 2 by means of threaded connection, and the top surface of the polishing head flange ring 5 is provided with a water ripple surface, which is located at the edge of the air film 4. The water ripple can tightly connect the air film 4 to the polishing head base 2, thereby improving air tightness.
Claims
1. A polishing head with a built-in flow channel, characterized in that, Includes a metal adapter plate (1), a grinding head base (2), an air film (4), a grinding head flange ring (5), and a grinding head working head (6). The metal adapter plate (1) is connected to the grinding head base (2), the grinding head flange ring (5) is fixed on the grinding head base (2), the air film (4) is fixed between the grinding head flange ring (5) and the grinding head base (2), the grinding head working head (6) is disposed inside the grinding head flange ring (5), and the grinding head working head (6) is movable in the vertical direction; the bottom surface of the grinding head base (2) is provided with an air passage (21) communicating with the outside, and when air enters the air passage (21), the air film (4) pressurizes the grinding head working head (6); The polishing head (6) has an internal liquid outlet channel. The liquid outlet hole (61) of the liquid outlet channel is located at the center of the polishing head (6). The liquid inlet hole (62) of the liquid outlet channel is located on the side of the polishing head (6). The liquid inlet hole (62) is used to introduce polishing liquid.
2. The polishing head with a built-in flow channel according to claim 1, characterized in that, The side of the blasting head (6) is provided with a slide groove (63) for quick installation and disassembly, and the side of the blasting head flange ring (5) is provided with a lateral positioning pin (3). The blasting head (6) can be disassembled and assembled by the cooperation of the slide groove (63) and the lateral positioning pin (3).
3. The polishing head with a built-in flow channel according to claim 1, characterized in that, The air passage (21) is vortex-shaped.
4. The polishing head with built-in flow channel according to claim 1, characterized in that, The top surface of the polishing head flange ring (5) is provided with a water ripple surface.
5. The polishing head with a built-in flow channel according to claim 4, characterized in that, The water ripple surface is located at the edge of the air film (4).
6. The polishing head with a built-in flow channel according to claim 1, characterized in that, The polishing head flange ring (5), air film skin (4), and polishing head base (2) are fixed by threaded connection.
7. The polishing head with a built-in flow channel according to claim 1, characterized in that, The grinding head base (2) is connected to the metal adapter plate (1) by a threaded connection.