Gap adjusting mechanism and film forming apparatus

Abstract

The disclosure provides a gap adjusting mechanism and a film forming device. The gap adjusting mechanism (100) is used in a film forming device (101), wherein the gap adjusting mechanism (100) comprises an execution unit (1) for adjusting a lip gap (G) of the film forming device (101) and a driving unit (2), wherein the driving unit (2) comprises a manipulation assembly (21), a motor assembly (22) for making the manipulation assembly (21) make a rotary motion, and an electric actuator (23) for making the manipulation assembly (21) make a linear motion, the manipulation assembly (21) can be connected to the execution unit (1) and drive the execution unit (1) to move to deform the film forming device (101). The gap adjusting mechanism of the disclosure can quickly and accurately control the lip gap, and is suitable for automatic control.

Description

Technical Field

[0001] This disclosure relates to the field of precision thin film manufacturing, and more specifically, to a gap adjustment mechanism and a thin film forming device. Background Technology

[0002] This section aims to provide background information relevant to understanding the various techniques described herein. As the title of this section implies, this is a discussion of related techniques that should in no way imply that they are necessarily prior art. Therefore, it should be understood that any statement in this section should be read in this context, rather than as an admission of any prior art.

[0003] In the field of precision thin film manufacturing, the coating process, as a core process that determines the functional characteristics of the film, directly affects the performance of the finished film. Currently, mainstream thin film forming equipment mainly relies on two traditional methods to adjust the lip gap: one is a temperature-controlled deformation system based on the principle of thermal expansion, which finely adjusts the lip gap by inducing local thermal deformation through zoned heating of the mold body; the other is a bolt-driven mechanical adjustment device that relies on manual intervention, requiring operators to perform multi-point manual position compensation through a secondary transmission mechanism.

[0004] However, temperature control has a significant thermal inertia hysteresis effect, with a response time of up to tens of minutes, and over time it can cause irreversible thermal stress deformation of the lip mold. Mechanical adjustment not only requires interrupting the production process for offline adjustment, but also results in low lip gap control accuracy due to the backlash error of the screw drive and the perception deviation of manual operation. Utility Model Content

[0005] The purpose of this disclosure is to provide a gap adjustment mechanism that can quickly and accurately control the lip gap and is suitable for automated control.

[0006] Furthermore, the purpose of this disclosure is to solve or at least alleviate one or more problems existing in the prior art.

[0007] This disclosure solves the above problems by providing a gap adjustment mechanism and a film forming apparatus. Specifically, according to one aspect of this disclosure, the following is provided:

[0008] A gap adjustment mechanism for a film forming apparatus, wherein the gap adjustment mechanism includes an execution unit for adjusting the lip gap of the film forming apparatus and a drive unit, wherein the drive unit includes an actuation component, a motor assembly for causing the actuation component to rotate, and an electric actuator for causing the actuation component to move linearly, the actuation component being able to engage with the execution unit and drive the execution unit to move to deform the film forming apparatus.

[0009] Optionally, according to one embodiment of the present disclosure, the execution unit includes a screw, the manipulation component includes a rotating head, the rotating head is configured with a plurality of first protrusion structures, the screw head of the screw is configured with a plurality of second protrusion structures, each first protrusion structure can respectively engage with the gap between two adjacent second protrusion structures, and the side surface of the first protrusion structure can form a surface-to-surface fit with the side surface of the second protrusion structure.

[0010] Optionally, according to one embodiment of the present disclosure, the gap adjustment mechanism includes a transverse unit, which can be disposed on one side of the film forming equipment, and the transverse unit is used to cause the drive unit to move linearly along the extension direction of the lip gap.

[0011] Optionally, according to one embodiment of the present disclosure, the gap adjustment mechanism includes a sensing unit, which can be disposed at the lip gap or the actuation unit, and the sensing unit is used to directly or indirectly sense the deformation of the thin film forming equipment.

[0012] Optionally, according to one embodiment of this disclosure, the gap adjustment mechanism includes a camera unit disposed at the drive unit, the camera unit being used to capture data from the manipulation component and the execution unit.

[0013] Optionally, according to one embodiment of the present disclosure, the execution unit is configured as a differential execution unit, wherein the screw is configured as a double-threaded screw, and the execution unit includes a first differential member and a second differential member that are threadedly engaged with the screw, wherein the first differential member (12) is fixedly disposed, and the second differential member is movable along the axial direction of the screw.

[0014] Optionally, according to one embodiment of the present disclosure, the execution unit includes a connecting block, a pull rod fixedly connected to the connecting block, and a pull claw fixedly connected to the pull rod. The second differential member is disposed in the connecting block, and the end of the pull rod and the end of the pull claw together form a gripping area. The film forming device is engaged with the gripping area.

[0015] Alternatively, according to one embodiment of this disclosure, the transverse unit is configured as a rack and pinion drive mechanism, a belt or chain drive mechanism, a linear motor drive mechanism, or a hydraulic drive mechanism.

[0016] Optionally, according to one embodiment of the present disclosure, when the traverse unit is configured as a belt drive mechanism, the traverse unit includes a servo motor, a synchronous pulley connected to the output shaft of the servo motor, a belt wound around the synchronous pulley, and a sliding component fixedly connected to the belt and capable of linear motion, the sliding component being fixedly connected to the drive unit.

[0017] Alternatively, according to one embodiment of this disclosure, when the traversing unit is configured as a linear motor drive mechanism, the traversing unit includes a dual-actuator linear motor for causing the drive unit to perform linear motion in a magnetically interactive manner.

[0018] Optionally, according to one embodiment of the present disclosure, the sensing unit can be disposed at the lip gap, and the sensing unit is configured as a resistance strain gauge, a pressure sensor, a piezoelectric sensor, or a capacitive plate sensor.

[0019] Optionally, according to one embodiment of the present disclosure, the sensing unit is disposed at the execution unit, and the sensing unit is configured as a displacement sensor for sensing the displacement of the execution unit.

[0020] Optionally, according to one embodiment of the present disclosure, the camera unit includes a camera and a deflecting prism, wherein the camera is capable of imaging the manipulation component and the execution unit via the deflecting prism, for acquiring the position of the manipulation component, the motion state of the execution unit, or the relative position of the manipulation component and the execution unit.

[0021] Optionally, according to one embodiment of the present disclosure, the execution unit includes a mounting assembly capable of being fixed to the film forming equipment, wherein one or more screws are accommodated within one of the mounting assemblies.

[0022] Alternatively, according to one embodiment of the present disclosure, when a plurality of the screws are housed within one of the mounting components, the sensing unit is used to sense the displacement of one of the screws.

[0023] Optionally, according to one embodiment of this disclosure, the motor assembly and the electric actuator are arranged axially parallel to each other with respect to the actuation assembly, or...

[0024] The electric actuator and the actuation component are arranged axially parallel to each other, and the motor assembly and the actuation component are arranged axially perpendicular to each other.

[0025] According to another aspect of this disclosure, this disclosure provides a film forming apparatus, wherein the film forming apparatus includes any of the above-described gap adjustment mechanisms. Attached Figure Description

[0026] Referring to the accompanying drawings, the above and other features of this disclosure will become apparent, wherein,

[0027] Figure 1 A perspective view of a first embodiment of the gap adjustment mechanism according to the present disclosure is shown;

[0028] Figure 2 A plan view of a drive unit according to the present disclosure is shown;

[0029] Figure 3 A partially enlarged view of a manipulation component and execution unit according to the present disclosure is shown;

[0030] Figure 4 A perspective view of a second embodiment of the gap adjustment mechanism according to the present disclosure is shown;

[0031] Figure 5 A perspective view of a third embodiment of the gap adjustment mechanism according to the present disclosure is shown;

[0032] Figure 6 A perspective view of an execution unit according to the present disclosure is shown;

[0033] Figure 7 A cross-sectional view of an execution unit according to the present disclosure is shown;

[0034] Figure 8 A perspective view of another execution unit according to this disclosure is shown;

[0035] Figure 9 A cross-sectional view of another execution unit according to this disclosure is shown;

[0036] Figure 10 A diagram showing the coordination relationship between a transverse movement unit and a drive unit according to the present disclosure is provided.

[0037] Figure 11 A cross-sectional view of a transverse unit and a drive unit according to the present disclosure is shown;

[0038] Figure 12 A diagram showing the interaction between a sensing unit and an execution unit according to this disclosure is provided.

[0039] Figure 13 A diagram showing the interaction between a drive unit, an execution unit, and a camera unit according to this disclosure is provided.

[0040] Figure 14 A perspective view of another drive unit according to this disclosure is shown; and

[0041] Figure 15 A diagram showing the interaction between an execution unit and a thin film forming apparatus according to the present disclosure is provided. Detailed Implementation

[0042] It is readily understood that, based on the technical solutions of this disclosure, those skilled in the art can propose various interchangeable structural methods and implementations without altering the essential spirit of this disclosure. Therefore, the following detailed embodiments and accompanying drawings are merely illustrative examples of the technical solutions of this disclosure and should not be considered as the entirety of this disclosure or as limitations or restrictions on the technical solutions of this disclosure.

[0043] The directional terms such as up, down, left, right, front, back, front, back, top, and bottom mentioned or possibly used in this specification are defined relative to the structures shown in the accompanying drawings. These are relative concepts and may therefore vary depending on their location and usage. Therefore, these or other directional terms should not be interpreted as restrictive. Furthermore, the terms "first," "second," "third," and similar expressions are used for descriptive and distinguishing purposes only and should not be construed as indicating or implying the relative importance of the corresponding components.

[0044] Figure 1 A perspective view of a first embodiment of the gap adjustment mechanism according to the present disclosure is shown. Figure 2 A plan view of a drive unit according to the present disclosure is shown.

[0045] The gap adjustment mechanism 100 is used in the film forming equipment 101. The gap adjustment mechanism 100 includes an execution unit 1 for adjusting the lip gap G of the film forming equipment 101 and a drive unit 2. The drive unit 2 includes an operating component 21, a motor component 22 for rotating the operating component 21, and an electric actuator 23 for linearly moving the operating component 21. The operating component 21 can engage with the execution unit 1 and drive the execution unit 1 to move, causing the film forming equipment 101 to deform.

[0046] According to this technical solution, the drive unit uses its manipulation components to control the execution unit when needed, causing the execution unit to move accordingly, apply force to the film forming equipment, and deform it, thereby changing the lip gap or film thickness. Since the manipulation components are controlled by a motor assembly and an electric actuator, automated control is achieved, improving the level of intelligence and overcoming the shortcomings of imprecise manual control, exhibiting precise and rapid response. Furthermore, it avoids the risks associated with temperature control methods, such as thermal inertia hysteresis, long response time, and irreversible thermal stress deformation.

[0047] It is understood that, unless otherwise specified, this disclosure does not impose any particular limitation on the number of components. For example, there may be one or more drive units and multiple execution units, thereby enabling multiple adjustment regions to be arranged in rows along the extension direction of the gap in the film forming equipment, improving the resolution of the adjustment. Furthermore, the adjustment range of each adjustment region can also be different from each other, allowing the film forming equipment as a whole to form a linear or curved lip gap as needed, improving the flexibility and accuracy of the lip gap adjustment of the entire film forming equipment. Thus, in the event of uneven film thickness, the film thickness can be corrected by locally adjusting the lip gap as needed, ensuring the uniformity and consistency of the film thickness. Additionally, unless there is an obvious conflict, the elements illustrated in the corresponding embodiments can also be applied to other embodiments.

[0048] Additionally, the film forming equipment exemplarily includes an upper mold body 1011 and a lower mold body 1012, wherein the lower mold body is fixed and does not deform, thereby adjusting the entire lip gap or lip thickness by deforming the upper mold body. Of course, in some other embodiments, it is also possible to deform only the lower mold body, or both the upper and lower mold bodies can be deformed.

[0049] It is also understandable that the motor assembly is used to control the rotational movement of the control component, while the electric actuator is used to control the linear movement of the control component. Therefore, the two can be designed to perform their respective functions, resulting in a targeted approach and a high degree of integration. Furthermore, the dual motion mode of rotational and linear motion (i.e., lifting motion) also makes the control component more flexible. The linear motion can be used to adjust the position of the control component, while the rotational motion can be used to drive the control component to accurately engage with the actuator.

[0050] Therefore, this disclosure does not specifically limit the specific structure of the motor assembly and the electric actuator. Furthermore, the gap adjustment mechanism also includes a wire harness assembly 6, which is arranged parallel to, for example, the width direction (gap extension direction) of the extrusion die of the film forming equipment; the wire harness assembly is used for wire storage.

[0051] Figure 3 A partially enlarged view of a manipulation component and execution unit according to the present disclosure is shown.

[0052] The execution unit 1 includes a screw 11, and the operating component 21 includes a rotating head 211. The rotating head 211 is constructed with a plurality of first protrusion structures 2111, and the screw head 111 of the screw 11 is constructed with a plurality of second protrusion structures 1111. Each first protrusion structure 2111 can respectively engage with the gap between two adjacent second protrusion structures 1111, and the side of the first protrusion structure 2111 can form a surface-to-surface fit with the side of the second protrusion structure 1111.

[0053] In this design, rotational motion is transmitted through the engagement of the first and second protrusion structures, resulting in rapid engagement. During this process, the sides of the first and second protrusion structures form a surface-to-surface contact, increasing the contact area and thus making the motion transmission more stable and reliable, with a higher load-bearing capacity. In particular, compared to the transmission method of a hexagonal wrench (which is a line-to-surface transmission, requiring higher installation precision and thus more difficult to adjust), the surface-to-surface contact method offers a higher tolerance for error. For example, during the engagement process from the first to the second protrusion structure, their sides gradually come into contact, and this contact provides certain motion guidance and limiting effects, making the subsequent engagement process smoother and ensuring precise alignment. To further enhance the motion guidance effect, chamfers can be added to the first and second protrusion structures. Furthermore, the surface-to-surface contact design reduces wear on the contact surfaces, maintaining long-term positioning accuracy and service life.

[0054] For example, there are three first and three second bump structures, evenly distributed at an angle. Depending on cost and actual needs, other numbers and layouts of bump structures can also be used. Furthermore, the specific form of the bump structures is not particularly required; they can be, for example, trapezoidal cross-sections (with circular arc segments at the top and bottom), or rectangular, triangular, serrated, or arc-shaped cross-sections. Finally, in addition to a ring arrangement, the bump structures can also be staggered around the circumference, thereby making full use of space, increasing the number of contact points, and improving torque transmission stability.

[0055] In some embodiments of this disclosure, the gap adjustment mechanism 100 includes a transverse unit 3, which can be disposed on one side of the film forming equipment 101. The transverse unit 3 is used to make the drive unit 2 move linearly along the extension direction of the lip gap G.

[0056] Therefore, the lateral movement unit enables the adjustment of the position of the drive unit and its manipulating components, allowing the manipulating components to individually manipulate each actuator as needed. Specifically, the lateral movement unit adjusts the lateral position of the manipulating components (or their position along the length of the film forming equipment), while the electric actuator adjusts the vertical position of the manipulating components (or their axial position), ensuring smooth engagement between the manipulating components and the actuators. Thus, even with only one drive unit, manipulation of all actuators can be supported, achieving full coverage. Of course, more drive units can be used to improve adjustment efficiency, provided cost is acceptable. Furthermore, the lateral movement unit can be fixed to the film forming equipment to reduce vibration transmission paths and maintain the motion stability of the drive units.

[0057] For the specific design of the transverse unit, for example, the transverse unit 3 is constructed as a gear and rack transmission mechanism, a belt or chain transmission mechanism, a linear motor transmission mechanism or a hydraulic transmission mechanism.

[0058] In a rack and pinion transmission mechanism, the rotational motion of the gears and the linear motion of the rack are mutually converted to achieve precise movement of the drive unit 2 along the extension direction of the lip gap G. The rack length can be determined according to the extension range of the lip gap, and high-precision gears can be selected. Linear guides can also be installed on both sides of the rack to ensure smooth transmission and rigidity. The rack and pinion transmission method features high precision, high rigidity, compact structure, and easy maintenance.

[0059] For a hydraulic transmission mechanism, the pressure energy of hydraulic oil drives the piston to move linearly, thereby moving the drive unit 2. Specifically, it may include a hydraulic pump and a hydraulic cylinder, wherein the specifications of the hydraulic cylinder are selected according to the load and the range of the lip clearance. A control valve (proportional valve or servo valve) can also be provided to achieve precise control of the hydraulic cylinder's speed and position. The characteristics of a hydraulic transmission mechanism include high thrust and shock resistance, as well as optional overload protection and buffering performance.

[0060] Belt drive mechanisms and linear motor drive mechanisms will be explained in detail below.

[0061] In some embodiments of this disclosure, the gap adjustment mechanism 100 includes a sensing unit 4, which can be disposed at the lip gap G or the execution unit 1, and the sensing unit 4 is used to directly or indirectly sense the deformation of the thin film forming equipment 101.

[0062] In this way, the deformation amount obtained through the sensing unit realizes a feedback mechanism, allowing relevant personnel to adjust the deformation amount of the thin film forming equipment in real time based on the difference between the actual deformation amount or the actual lip gap and the corresponding theoretical value, so as to ensure that the expected film thickness and uniformity are achieved. It is also possible to configure the use of several sensors based on different principles to achieve data cross-validation and improve redundancy.

[0063] Specifically, in some embodiments, the sensing unit 4 can be disposed at the lip gap G, and the sensing unit 4 is configured as a resistance strain gauge, a pressure sensor, a piezoelectric sensor or a capacitive plate sensor.

[0064] Resistance strain gauges operate based on the strain effect, meaning that their resistance changes when subjected to external force and deformed. By measuring this change in resistance, the deformation of the lip can be calculated. Therefore, strain gauges can be attached to the surface or interior of the lip using adhesive (such as epoxy resin). To improve measurement accuracy, multiple strain gauges can be attached symmetrically to the lip, forming a full-bridge or half-bridge circuit. The advantages of resistance strain gauges include high accuracy, small size, low cost, and ease of use.

[0065] Pressure sensors measure the pressure at the lip opening to reflect changes in the lip gap. For example, a pressure sensor can be constructed as a piezoresistive pressure sensor. It utilizes the piezoresistive effect to convert pressure changes into resistance changes. Therefore, the pressure sensor is embedded inside the lip, and the sensed pressure corresponds one-to-one with the lip deformation. This allows for the establishment of a lookup table to correlate pressure, deformation, and gap parameters, enabling the determination of deformation and gap from pressure during subsequent use. The advantages of pressure sensors include fast response and strong environmental adaptability.

[0066] Similarly, piezoelectric sensors utilize the piezoelectric effect of piezoelectric materials to convert pressure on the lip into an electrical charge output. By measuring the amount of charge, the deformation and lip gap can be obtained. They can be mounted, for example, on the surface or inside the lip. They are characterized by high sensitivity, wide frequency response, and strong anti-interference ability.

[0067] Capacitive plate sensors achieve non-contact measurement by measuring the change in capacitance caused by changes in the lip gap. When the gap decreases, the capacitance increases; conversely, the capacitance decreases. Therefore, the sensor can include a fixed plate and a movable plate. The fixed plate is mounted on a fixed part of the film forming equipment (e.g., the lower mold body), and the movable plate is connected to the lip (e.g., the lip of the upper mold body), thus allowing it to move with lip deformation. Furthermore, the movable plate is arranged parallel to the fixed plate. The characteristics of capacitive plate sensors include high resolution, strong resistance to contamination, and good long-term stability.

[0068] Besides the placement at the lip gap, in other embodiments, the sensing unit 4 can also be located at the execution unit 1. The sensing unit 4 is configured as a displacement sensor to sense the displacement of the execution unit 1. This placement ensures that the sensing unit does not affect the operation of the thin film forming equipment itself, especially the thin film output process near the lip. Furthermore, since the displacement of the execution unit corresponds one-to-one with the deformation and gap size, the deformation and gap values ​​can be obtained by combining the displacement data measured by the sensing unit with a lookup table, thus ensuring the reliability of the measurement results. This placement will be explained in detail later with examples.

[0069] Figure 4 A perspective view of a second embodiment of the gap adjustment mechanism according to this disclosure is shown. The main differences between this embodiment and the first embodiment include the design of the traverse mechanism, the number of drive units, the layout of the drive units, and the arrangement of the camera unit. However, as previously mentioned, these structural arrangements are not limited to the corresponding embodiment (here, the second embodiment), but can be referenced and applied interchangeably.

[0070] As shown in the figure, the gap adjustment mechanism 100 includes a camera unit 5, which is located at the drive unit 2. The camera unit 5 is used to capture data from the manipulation component 21 and the execution unit 1.

[0071] Therefore, the camera unit provides monitoring and assurance for the normal operation of the manipulation and execution units. Monitoring can be implemented manually or through algorithm design. That is, subsequent operations can only proceed if the manipulation and execution units meet preset conditions (e.g., reaching a predetermined position, correct engagement, or moving as expected); if the preset conditions are not met, an alarm is triggered and the device operation is terminated. For this purpose, the camera unit can be exemplarily located at the drive unit, allowing the drive unit and camera unit to move together via a traverse unit, ensuring that the camera unit can easily capture data from the active manipulation and execution units. The specific design of the camera unit will be explained in more detail below.

[0072] Combination Figure 4 and Figure 5 ,in, Figure 5 A perspective view of a third embodiment of the gap adjustment mechanism according to this disclosure is shown. The main difference between the third embodiment and the second embodiment is that the third embodiment has three drive units.

[0073] Here, the lateral movement unit 3 is configured as a linear motor drive mechanism. Specifically, the lateral movement unit 3 includes a dual-actuator linear motor 35, which is used to cause the drive unit 2 to perform linear motion through magnetic interaction.

[0074] In this regard, it should be understood that the working principle of a linear motor is to achieve linear motion through the magnetic interaction between the stator and the mover. When the coil is energized, a magnetic field is generated. The interaction of these magnetic fields produces a linear thrust, driving the mover to perform linear motion, thereby directly or indirectly driving the drive unit to perform linear motion. For example, the linear motor is connected to the drive unit through a transmission component 36, and the linear motor is fixed to one side of the film forming equipment.

[0075] For dual-walker linear motors, the dual-walker structure means that the motor contains two independent walkers that can work independently or collaboratively to achieve more complex or combined motion control, thus effectively supporting the operation of multiple drive units. This technical solution leverages the characteristics of linear motors, such as high dynamic response, backlash-free transmission, high precision and reliability, large thrust, and good impact resistance. Furthermore, linear motors eliminate the risks of elastic deformation or dust contamination due to friction and are heat-resistant, making them particularly suitable for applications with multiple drive units.

[0076] Figure 6 A perspective view of an execution unit according to the present disclosure is shown; Figure 7 A cross-sectional view of an execution unit according to the present disclosure is shown; Figure 8 A perspective view of another execution unit according to this disclosure is shown; Figure 9 A cross-sectional view of another execution unit according to this disclosure is shown.

[0077] The execution unit 1 is configured as a differential execution unit, wherein the screw 11 is configured as a double-threaded screw, and the execution unit 1 includes a first differential member 12 and a second differential member 13 that are threadedly engaged with the screw 11. The first differential member 12 is fixedly disposed, and the second differential member 13 can move along the axial direction of the screw 11.

[0078] According to this technical solution, it should be understood that a double-threaded screw means that the screw has two threaded segments, and these two threaded segments respectively engage with the first differential member and the second differential member. Since the first differential member is fixed and the second differential member is movable, during the movement of the screw, the screw undergoes a mixed motion of rotation and axial movement, while the second differential member moves along the axial direction of the screw. Thus, the movement of the screw is converted into the lifting motion of the second differential member, which is then used to support the subsequent deformation of the film forming equipment. Here, differential motion refers to the fixed nature of the first differential member and the movable nature of the second differential member.

[0079] The key design feature of the double-threaded screw is that the displacement of the second differential component can be precisely calculated. This displacement depends on the pitch difference or sum of the pitches of the first and second differential components (depending on whether their threads have the same or opposite directions), and it precisely corresponds to the screw's movement. Therefore, the coating thickness can be precisely adjusted by regulating the screw's movement. Furthermore, the double-threaded design optimizes the transmission ratio, reduces energy loss, improves transmission efficiency, and allows for faster bidirectional movement of the second differential component.

[0080] Figure 6 and Figure 7 In this embodiment, the first and second differentials are separate nuts, and the first differential is fixed to the top surface of the upper mold body by mounting assembly 17; while Figure 8 and Figure 9 The implementation uses an L-shaped fixing block with internal threads or a part thereof as the first differential component, which is fixed to the end face of the upper mold body.

[0081] Besides differential rotation, other principles can be selected in other embodiments, such as ball screws or sliding screws, where the rotational motion of the screw drives the nut to perform linear motion. Ball screws offer high precision and high efficiency, while sliding screws have a simple structure and low cost. Those skilled in the art can select a suitable motion conversion method according to specific requirements (such as precision, speed, load, cost, etc.).

[0082] from Figure 6 and Figure 7 And combined Figure 15 (It shows a diagram of the cooperation relationship between an execution unit and a film forming device according to the present disclosure.) It can also be seen that the execution unit 1 includes a connecting block 14, a pull rod 15 fixedly connected to the connecting block 14, and a pull claw 16 fixedly connected to the pull rod 15. The second differential member 13 is disposed in the connecting block 14. The end of the pull rod 15 and the end of the pull claw 16 together form a gripping area GA. The film forming device 101 is engaged with the gripping area GA.

[0083] This technical solution can be used well with differential transmission. It converts the linear motion of the second differential component into synchronous linear motion of the connecting block, pull rod, and pull claw. The gripping area formed by the pull rod and pull claw applies force to the film forming equipment, for example, to the groove edge 10111 and groove bottom 10112 provided on the outer surface of the upper mold (wherein the groove edge engages with the gripping area, and the groove bottom abuts against the end of the pull claw). This allows for adjustment of the deformation of the film forming equipment using lifting motion, including increasing and decreasing the lip gap. The design of the gripping area provides a suitable engagement method for the film forming equipment, ensuring stable gripping and precise positioning of the lip mold, and preventing displacement or vibration of the lip mold during the casting process. The fixing method between the connecting block, pull rod, and pull claw is not particularly limited; for example, a detachable threaded connection can be used, or other methods such as bonding, snap-fit ​​connection, or welding can be selected.

[0084] In contrast, Figure 8 and Figure 9 In the differential actuator shown, the second differential member or the push rod 18 fixedly connected to the second differential member abuts against the bottom of the groove of the film forming equipment, such as the upper mold body. This design is mainly used to apply a thrust to the lip mold body to reduce the film thickness and gap. When it is necessary to increase the gap, the second differential member and the push rod can be retracted, and the elastic deformation characteristics of the lip mold body itself can be used to return to the initial position.

[0085] Figure 10 A diagram showing the coordination relationship between a transverse movement unit and a drive unit according to the present disclosure is provided. Figure 11 A cross-sectional view of a transverse unit and a drive unit according to the present disclosure is shown.

[0086] When the transverse unit 3 is configured as a belt drive mechanism, the transverse unit 3 includes a servo motor 31, a synchronous pulley 32 connected to the output shaft of the servo motor 31, a belt 33 wound around the synchronous pulley 32, and a sliding component 34 fixedly connected to the belt 33 and capable of linear motion. The sliding component 34 is fixedly connected to the drive unit 2.

[0087] It should be understood that although this embodiment is a belt-driven mechanism, it can also be compared to a chain-driven mechanism. Here, belt drive is cost-effective and suitable for motion control of individual drive units. Belt drive offers good displacement accuracy, the flexible transmission characteristics of the belt effectively absorb motor vibration, reduce noise levels, and provide a lightweight advantage. Therefore, the servo motor and synchronous pulley can be arranged at one end of the film forming equipment, while a driven pulley 37 is fixedly arranged at the opposite end of the film forming equipment. The belt is wound around the synchronous pulley and the driven pulley, forming a closed loop, and can support lateral movement control throughout the entire gap extension direction of the film forming equipment.

[0088] The sliding component serves to transmit the movement of the belt to the drive unit and also guides the movement. For example, the lateral unit further includes a fixed guide rail 38, and the sliding component includes a slider 341 movably arranged on the guide rail and a clamping block assembly 342 fixedly connected to the belt, clamping the belt between them. This clamping block assembly is fixedly connected to both the slider and the drive unit. Thus, the movement of the belt, via the clamping block assembly, drives the guided lateral movement of the slider on the guide rail, and simultaneously drives the drive unit to perform lateral movement via the clamping block assembly.

[0089] As mentioned earlier, the sensing unit can also be located at the execution unit. The sensing unit is configured as a displacement sensor to sense the displacement of the execution unit. Specifically, the sensing unit can sense the displacement of the screw, or the displacement of the second differential, push rod, pull rod, pull claw, or connecting block driven by the screw. For example, the displacement sensor can be configured as a potentiometer-type sensor, a grating-type sensor, a laser interferometer sensor, or an ultrasonic sensor.

[0090] Figure 13 A diagram showing the interaction between a drive unit, an execution unit, and a camera unit according to this disclosure is provided.

[0091] The camera unit 5 includes a camera 51 and a deflecting prism 52. The camera 51 can image the manipulation component 21 and the execution unit 1 via the deflecting prism 52, and is used to collect the position of the manipulation component 21, the motion state of the execution unit 1, or the relative position of the manipulation component 21 and the execution unit 1.

[0092] Therefore, the camera unit, as a visual inspection device, is used to monitor the normal operation of the manipulation components and execution units. The deflecting prism deflects light, allowing for more flexible camera placement to meet various spatial constraints. Furthermore, the prism design improves the camera's acquisition range. For example, a 90-degree deflecting prism allows the camera to be oriented parallel to the axis of the manipulation components and execution units (e.g., their screws), resulting in a compact configuration roughly in the y-direction (x-direction is the height direction, z-direction is the gap extension direction).

[0093] Specifically, monitoring the position of the control component can be used to determine whether the control component (e.g., its protrusion structure) is in place before engaging with the execution unit; monitoring the movement state of the execution unit can be used to determine whether the execution unit (e.g., its screw) is rotating; and monitoring the relative position of the control component and the execution unit can be used to determine whether the control component is correctly engaged with the execution unit (e.g., its screw). Thus, through multi-faceted monitoring, the correct operation of the clearance adjustment mechanism is ensured. As mentioned earlier, the specific judgment methods can be implemented manually or through algorithms, which will not be elaborated upon here.

[0094] Combination Figure 1 and Figure 8 It can also be seen that the execution unit 1 includes a mounting assembly 17 that can be fixed to the film forming equipment 101, and one or more screws 11 are accommodated in one of the mounting assemblies 17.

[0095] When the execution unit is configured as a differential execution unit, the mounting assembly can be a first differential element or a part of the mounting assembly serving as the first differential element. The mounting assembly can, for example, be fixed to the upper mold body of a film forming apparatus. As can be seen by comparison, different embodiments employ different grouping methods for the screws of the execution unit. Figure 1 It's a set of screws. Figure 8 Screws are used in sets of three (other numbers can also be used). The advantage of using multiple screws in a set is that installation is relatively simple, and the number of parts is reduced. The advantage of using a single screw in a set is a more refined modular design, facilitating more targeted maintenance.

[0096] Regarding the sensing unit, when multiple screws 11 are housed within a mounting assembly 17, the sensing unit 4 is used to sense the displacement of one of the screws 11. For example, the sensing unit is used to directly or indirectly sense the displacement of the middle screw. This technical solution is mainly based on cost considerations, using the displacement of the middle screw to obtain the lip deformation amount, thereby approximating the deformation amount of the lip portion corresponding to all screws in a single group.

[0097] Figure 14 A perspective view of another drive unit according to this disclosure is shown.

[0098] The motor assembly 22 and the electric actuator 23 are arranged axially parallel to each other with respect to the actuation assembly 21. This achieves compactness in the direction perpendicular to the motor shaft. Conversely, combined with... Figure 2 As can be seen, the electric actuator 23 and the operating component 21 are arranged axially parallel to each other, and the motor assembly 22 and the operating component 21 are arranged axially perpendicular to each other. This achieves compactness in the direction perpendicular to the motor shaft. Those skilled in the art can adaptively adjust the orientation of the motor assembly, electric actuator, and operating component according to the characteristics of the installation space of the clearance adjustment mechanism.

[0099] According to another aspect of this disclosure, a film forming apparatus is provided, wherein the film forming apparatus includes any of the above-described gap adjustment mechanisms 100. Thus, the film forming apparatus of this disclosure can inherit various implementation methods of gap adjustment mechanisms and obtain corresponding technical effects, which will not be elaborated further here.

[0100] For example, a film forming apparatus includes a feeding system for providing raw materials, an extrusion system for extruding melt, a forming system (including a gap adjustment mechanism) for extruding film, a cooling system for cooling the film, a traction system for film traction and tension control, and a winding system for film collection.

[0101] It should be understood that all the above preferred embodiments are exemplary and not restrictive, and various modifications or variations made by those skilled in the art to the specific embodiments described above under the concept of this disclosure should be within the legal protection scope of this disclosure.

Claims

1. A gap adjustment mechanism (100) for use in a film forming apparatus (101), characterized in that, The gap adjustment mechanism (100) includes an execution unit (1) for adjusting the lip gap (G) of the film forming equipment (101) and a drive unit (2). The drive unit (2) includes an actuation component (21), a motor assembly (22) for rotating the actuation component (21), and an electric actuator (23) for linearly moving the actuation component (21). The actuation component (21) can engage with the execution unit (1) and drive the execution unit (1) to move, causing the film forming equipment (101) to deform.

2. The lash adjustment mechanism (100) of claim 1, characterized in that, The execution unit (1) includes a screw (11), and the operating component (21) includes a rotating head (211). The rotating head (211) is constructed with a plurality of first protrusion structures (2111), and the screw head (111) of the screw (11) is constructed with a plurality of second protrusion structures (1111). Each first protrusion structure (2111) can be engaged with the gap between two adjacent second protrusion structures (1111), and the side of the first protrusion structure (2111) can be in surface contact with the side of the second protrusion structure (1111).

3. The lash adjustment mechanism (100) of claim 1, wherein, The gap adjustment mechanism (100) includes a transverse unit (3), which can be disposed on one side of the film forming equipment (101). The transverse unit (3) is used to make the drive unit (2) move linearly along the extension direction of the lip gap (G).

4. The lash adjustment mechanism (100) of claim 2, characterized in that, The gap adjustment mechanism (100) includes a sensing unit (4), which can be disposed at the lip gap (G) or the execution unit (1). The sensing unit (4) is used to directly or indirectly sense the deformation of the film forming equipment (101).

5. The lash adjustment mechanism (100) of claim 1, wherein, The gap adjustment mechanism (100) includes a camera unit (5), which is located at the drive unit (2) and is used to capture images of the manipulation component (21) and the execution unit (1).

6. The lash adjustment mechanism (100) of claim 2, wherein, The execution unit (1) is configured as a differential execution unit, wherein the screw (11) is configured as a double-threaded screw, and the execution unit (1) includes a first differential member (12) and a second differential member (13) that are threadedly engaged with the screw (11). The first differential member (12) is fixedly disposed, and the second differential member (13) can move along the axial direction of the screw (11).

7. The lash adjustment mechanism (100) of claim 6, characterized by The execution unit (1) includes a connecting block (14), a pull rod (15) fixedly connected to the connecting block (14), and a pull claw (16) fixedly connected to the pull rod (15). The second differential member (13) is disposed in the connecting block (14). The end of the pull rod (15) and the end of the pull claw (16) together form a gripping area (GA). The film forming device (101) is engaged with the gripping area (GA).

8. The lash adjustment mechanism (100) of claim 3, wherein, The transverse unit (3) is configured as a gear and rack transmission mechanism, a belt or chain transmission mechanism, a linear motor transmission mechanism or a hydraulic transmission mechanism.

9. The lash adjustment mechanism (100) of claim 8, characterized in that, When the transverse unit (3) is configured as a belt drive mechanism, the transverse unit (3) includes a servo motor (31), a synchronous pulley (32) connected to the output shaft of the servo motor (31), a belt (33) wound around the synchronous pulley (32), and a sliding component (34) fixedly connected to the belt (33) and capable of linear motion. The sliding component (34) is fixedly connected to the drive unit (2).

10. The lash adjustment mechanism (100) of claim 8, wherein, When the transverse unit (3) is configured as a linear motor drive mechanism, the transverse unit (3) includes a double-acting linear motor (35) for causing the drive unit (2) to move linearly by means of magnetic interaction.

11. The lash adjustment mechanism (100) of claim 4, wherein, The sensing unit (4) can be disposed at the lip gap (G), and the sensing unit (4) is configured as a resistance strain gauge, a pressure sensor, a piezoelectric sensor or a capacitive plate sensor.

12. The lash adjustment mechanism (100) of claim 4, wherein, The sensing unit (4) is disposed at the execution unit (1), and the sensing unit (4) is configured as a displacement sensor for sensing the displacement of the execution unit (1).

13. The lash adjustment mechanism (100) of claim 5, wherein, The camera unit (5) includes a camera (51) and a deflecting prism (52). The camera (51) can image the manipulation component (21) and the execution unit (1) via the deflecting prism (52) to collect the position of the manipulation component (21), the motion state of the execution unit (1), or the relative position of the manipulation component (21) and the execution unit (1).

14. The lash adjustment mechanism (100) of claim 4, characterized by, The execution unit (1) includes a mounting assembly (17) that can be fixed to the film forming equipment (101), and one or more screws (11) are housed within the mounting assembly (17).

15. The lash adjustment mechanism (100) of claim 14, characterized by When multiple screws (11) are housed within a mounting assembly (17), the sensing unit (4) is used to sense the displacement of one of the screws (11).

16. The lash adjustment mechanism (100) of claim 1, wherein, The motor assembly (22) and the electric actuator (23) are arranged axially parallel to each other with respect to the operating assembly (21), or The electric actuator (23) and the operating component (21) are arranged axially parallel to each other, and the motor assembly (22) and the operating component (21) are arranged axially perpendicular to each other.

17. A film forming apparatus, characterized by comprising: The film forming equipment includes a gap adjustment mechanism (100) according to any one of claims 1 to 16.

Images