A multi-module optical focus-pursuing device based on distance measurement compensation

Abstract

The utility model relates to a kind of multi-module optical focus-pursuing device based on ranging compensation, it is related to machine vision automation appearance defect detection field, mobile support assembly is used to make ranging module and image acquisition component relative transparent substrate move in X direction and Y direction;Image acquisition component includes multiple image acquisition modules, ranging module and at least one image acquisition module in it are located above transparent substrate, ranging module is located in front of image acquisition component along image acquisition line-changing direction, and the remaining at least one image acquisition module is located below transparent substrate, and image acquisition module includes Z direction moving mechanism and acquisition camera.Acquisition camera acquires the image of product on transparent substrate, for image analysis.Ranging module is located in front of image acquisition component, obtains the relative distance with product upper surface, according to ranging data, by adjusting each Z direction moving mechanism above transparent substrate, the independent adjustment of the Z axis height of each acquisition camera is realized, and the purpose of focus-pursuing is realized.

Description

Technical Field

[0001] This utility model relates to the field of automated appearance defect detection in machine vision, specifically to a multi-module optical tracking focus device based on range compensation. Background Technology

[0002] In the semiconductor manufacturing industry, the detection of minute features (such as scratches on precision parts or solder joints on chips) is crucial, and sharpness is paramount. The required inspection precision is constantly increasing, reaching the micrometer or even sub-micrometer level. Active focus tracking technology ensures that these minute features can be clearly captured even under high-speed motion.

[0003] This utility model's multi-module optical tracking focus device is mainly used in the field of TGV detection. TGV (Through GlassVia technology is a key process for achieving three-dimensional interconnection by creating vertical through-holes on glass substrates. Its core advantages are reflected in the following aspects: 1. Excellent high-frequency performance: The dielectric constant of glass is only 1 / 3 that of silicon, and the loss factor is 2-3 orders of magnitude lower, significantly reducing signal attenuation (e.g., signal loss is reduced by 30% in 5G millimeter-wave communication scenarios). The low dielectric loss characteristics of glass substrates are suitable for 5G base station RF antennas and terminal modules, improving signal integrity. 2. High thermal stability: The thermal expansion coefficient of glass (3-5ppm / ℃) is highly matched with that of silicon chips, avoiding warping and breakage problems during high-temperature packaging. The mechanical strength and sealing properties of glass are suitable for accelerometers, pressure sensors, etc., reducing volume and improving reliability through wafer-level packaging. 3. High-density interconnection: Laser-induced etching technology can achieve micro-hole processing with a diameter of 10μm and an aspect ratio of 1:15. Through anodic bonding, direct bonding and other technologies, sealed connections between glass and silicon / other glasses are achieved, achieving wafer-level packaging, with an interconnection density up to 10 times that of traditional organic substrates. For example, in high-bandwidth memory (HBM), multi-layer DRAM chip stacking is achieved through TGV vertical interconnects, combined with FinFET technology to improve storage density and speed. In AI chips and high-performance computing, TGV is combined with RDL (rerouting layer) to heterogeneously integrate chiplets of different processes, meeting the bandwidth and low latency requirements of AI chips.

[0004] Active focus tracking technology plays a crucial role in machine vision inspection. It specifically addresses the problem of clear imaging of high-speed moving objects or when there is relative motion between the camera and the object, significantly improving the accuracy, stability, and applicability of inspection. Machine vision inspection algorithms (such as edge detection, dimensional measurement, defect identification, OCR, and pattern matching) heavily rely on clear input images. Blurry images lead to feature loss, inaccurate edge localization, increased measurement errors, and higher false positives or false negatives. Active focus tracking provides the foundation for subsequent image analysis and algorithm processing, greatly improving detection accuracy (such as sub-pixel level measurement), repeatability, and overall reliability, while reducing false positives and false negatives caused by image quality issues.

[0005] During the TGV manufacturing process, it is essential to efficiently and accurately inspect the diameter and positional differences of holes on the front and back sides of TGV products after drilling, as well as to check for any missed holes. TGV technology utilizes various hole types, including "X"-shaped holes and trapezoidal holes. For "X"-shaped holes, the continuity, diameter, and roundness of the waist holes are also key processing parameters. To meet industry demands and improve inspection efficiency, TGV inspection equipment uses a transparent glass substrate to support TGV products, enabling simultaneous inspection of multiple surfaces, including the front, back, and waist hole surfaces, significantly increasing inspection efficiency.

[0006] In summary, the role of active focus tracking technology in the field of machine vision inspection is to effectively eliminate image blur caused by high-speed relative motion by tracking moving targets in real time and dynamically adjusting imaging parameters (mainly precise triggering and / or focal length). This provides stable, clear, and high-quality image input for subsequent visual inspection algorithms, thereby significantly improving the detection accuracy, reliability, applicability, and production efficiency in high-speed and dynamic scenarios. It is one of the core enabling technologies for realizing online high-speed automated visual inspection and a key bottleneck problem for machine vision to move from static or low-speed scenarios to high-speed, continuous, and dynamic production environments.

[0007] Currently, mainstream active focusing modules incorporate high-sensitivity optical sensors to capture reflected light signals from the surface of the observed object in real time. These signals are converted into digital signals and then analyzed at high speed by an integrated semiconductor processing unit. By splitting the light beam through a microlens array on the sensor and comparing the phase difference between the left and right images, the defocus direction and distance are quickly calculated, driving a micromotor or piezoelectric ceramic to precisely adjust the lens position, achieving millisecond-level response. When inspecting glass products using a transparent substrate as a stage, the light spot signal collected by existing active focusing modules will form multiple signals after reflection and transmission on the upper and lower surfaces of the glass product and the transparent substrate stage. Due to the flatness of the stage and the warping of the sample itself, the focusing surface is prone to jumping between the upper and lower surfaces under high-speed operation, affecting the stability of image acquisition.

[0008] To meet the measurement and inspection needs of glass through-hole technology and improve inspection efficiency, this utility model proposes a multi-module optical tracking and focusing device based on distance compensation, which enables TGV product quantity inspection equipment using glass substrates to achieve efficient and stable image acquisition, greatly improving the WPH of TGV quantity inspection. Utility Model Content

[0009] The technical problem to be solved by this invention is how to perform image acquisition efficiently and stably.

[0010] The technical solution of this utility model to solve the above-mentioned technical problems is as follows: A multi-module optical tracking focus device based on range compensation includes an image acquisition component, a transparent substrate, a moving support component, and a range measuring module. The image acquisition component and the transparent substrate are both mounted on the moving support component. The moving support component is used to move the range measuring module and the image acquisition component relative to the transparent substrate in the X and Y directions. The image acquisition component includes multiple image acquisition modules. The range measuring module and at least one of the image acquisition modules are located above the transparent substrate. The range measuring module is located in front of the image acquisition component along the image acquisition turning direction. The remaining at least one image acquisition module is located below the transparent substrate. The image acquisition module includes a Z-axis moving mechanism mounted on the moving support component and an acquisition camera mounted on the Z-axis moving mechanism.

[0011] The beneficial effects of this invention are as follows: The movable support assembly allows the image acquisition component and the transparent substrate to move relative to each other in the X and Y directions. The acquisition camera in the image acquisition component acquires images of the TGV product on the transparent substrate for machine vision image analysis. Before the inspection begins, the Z-axis height of the acquisition camera can be adjusted through each Z-axis moving mechanism, ensuring that each acquisition camera can acquire a clear image from its initial position. The ranging module is located in front of the image acquisition component and can obtain its relative distance to the upper surface of the TGV product in advance. Based on the ranging data from the ranging module, the Z-axis height of each acquisition camera above the transparent substrate can be independently adjusted by adjusting each Z-axis moving mechanism, achieving the purpose of focusing.

[0012] Based on the above technical solution, the present invention can be further improved as follows.

[0013] Furthermore, the multiple image acquisition modules are distributed at intervals along the X-axis, and the ranging module is located on one side of the multiple image acquisition modules in the Y-axis direction.

[0014] The beneficial effect of adopting the above-mentioned further solution is that by installing the ranging module one row ahead of multiple image acquisition modules in the image acquisition line-changing direction, the ranging module can obtain the height information of the TGV product one row ahead, thereby enabling height compensation for ranging and image acquisition to be performed synchronously at all times.

[0015] Furthermore, the movable support assembly includes a base, an X-axis drive mechanism, an X-axis slide, a Y-axis drive mechanism, and a Y-axis slide. The X-axis slide is slidably connected to the base along the X-axis, and the X-axis drive mechanism is drive-connected to the X-axis slide. The transparent substrate is mounted on the X-axis slide. The Y-axis slide is slidably connected to the base along the Y-axis, and the Y-axis drive mechanism is drive-connected to the Y-axis slide. The image acquisition component and the ranging module are both fixed on the Y-axis slide.

[0016] The beneficial effect of adopting the above-mentioned further solution is that the X-axis slide moves along the X-axis with the transparent substrate, and the Y-axis slide moves along the Y-axis with the image acquisition component and the ranging module, thereby realizing the movement of the image acquisition component and the ranging module relative to the TGV product, so as to acquire images of various positions of the TGV product.

[0017] Furthermore, the multi-module optical tracking focus device based on range compensation also includes a stage, which is mounted on the X-axis slide and can rotate and be positioned around the Z-axis. The stage has a mounting hole through it in the Z-axis, and the transparent substrate is embedded in the mounting hole.

[0018] The beneficial effect of adopting the above-mentioned further solution is that the platform can rotate around the Z-axis, increasing the degree of freedom for the installation and movement of TGV products.

[0019] Furthermore, the platform is provided with multiple vacuum adsorption holes for communication with a vacuum pump.

[0020] The beneficial effect of adopting the above-mentioned further solution is that the vacuum pump is connected to the vacuum adsorption hole of the stage, and the TGV product on the stage is fixed by vacuum adsorption.

[0021] Furthermore, the X-axis slide has a clearance hole at the position corresponding to the transparent substrate.

[0022] The beneficial effect of adopting the above-mentioned further solution is that: a clearance hole is opened in the middle of the plate-shaped X-axis slide to facilitate the image acquisition module under the transparent substrate to detect the TGV product on the transparent substrate.

[0023] Furthermore, the image acquisition module comprises three modules: a front image acquisition module, a back image acquisition module, and a waist hole surface image acquisition module. The front image acquisition module and the waist hole surface image acquisition module are located above the transparent substrate, and the back image acquisition module is located below the transparent substrate.

[0024] The beneficial effects of adopting the above-mentioned further solution are as follows: the front image acquisition module is used to focus on the top surface of the TGV product and acquire the front image of the TGV product; the back image acquisition module is used to focus on the bottom surface of the TGV product and acquire the back image of the TGV product; the waist hole surface image acquisition module is used to focus on the middle plane of the TGV product and acquire the image of the waist hole surface of the TGV product.

[0025] Furthermore, the ranging module is a laser rangefinder.

[0026] The beneficial effects of adopting the above-mentioned further scheme are: the laser rangefinder uses laser triangulation to measure, with a range of ±1mm and a measurement accuracy of up to 0.0001mm.

[0027] Furthermore, the acquisition camera is a line scan monochrome camera.

[0028] Furthermore, a light source is also installed on the image acquisition component or the movable support component, the light source being used to illuminate the area above the transparent substrate. Attached Figure Description

[0029] Figure 1 This is a top view showing the relative positions of the multiple image acquisition modules and the ranging module of this utility model.

[0030] Figure 2 This is a schematic diagram showing the working height of the multiple image acquisition modules of this utility model;

[0031] Figure 3 One of the principle diagrams for correcting ranging data for different samples;

[0032] Figure 4 Schematic diagram two for correcting ranging data for different samples;

[0033] Figure 5 This is a three-dimensional diagram of a multi-module optical tracking focus device based on range compensation according to this utility model;

[0034] Figure 6 This is a structural diagram of the X-axis slide and the Y-axis slide of this utility model.

[0035] The attached diagram lists the components represented by each number as follows:

[0036] 1. Front image acquisition module; 2. Back image acquisition module; 3. Waist hole surface image acquisition module; 4. Distance measuring module; 100. Image acquisition component; 200. Transparent substrate; 300. Moving support component; 301. X-axis slide; 302. Y-axis slide. Detailed Implementation

[0037] The principles and features of this utility model are described below with reference to the accompanying drawings. The examples given are only for explaining this utility model and are not intended to limit the scope of this utility model.

[0038] like Figures 1-6 As shown, this embodiment provides a multi-module optical tracking focus device based on range compensation, including an image acquisition component 100, a transparent substrate 200, a moving support assembly 300, and a range measuring module 4. The image acquisition component 100 and the transparent substrate 200 are both mounted on the moving support assembly 300. The moving support assembly 300 is used to move the range measuring module 4 and the image acquisition component 100 relative to the transparent substrate 200 in the X and Y directions. The image acquisition component 100 includes multiple image acquisition modules. The range measuring module 4 and at least one of the image acquisition modules are located above the transparent substrate 200. The range measuring module 4 is located in front of the image acquisition component 100 along the image acquisition crossover direction. The remaining at least one image acquisition module is located below the transparent substrate 200. The image acquisition module includes a Z-axis moving mechanism mounted on the moving support assembly 300 and an acquisition camera mounted on the Z-axis moving mechanism.

[0039] The movable support assembly 300 allows the image acquisition assembly 100 and the transparent substrate 200 to move relative to each other in the X and Y directions. The acquisition camera in the image acquisition assembly 100 acquires images of the TGV product on the transparent substrate 200 for machine vision image analysis. Before inspection begins, the Z-axis height of each acquisition camera can be adjusted via the Z-axis moving mechanism, ensuring that each camera can acquire a clear image from its initial position. The ranging module 4, located in front of the image acquisition assembly 100, can obtain its relative distance to the upper surface of the TGV product in advance. Based on the ranging data from the ranging module 4, the Z-axis height of each acquisition camera above the transparent substrate 200 can be independently adjusted by adjusting the Z-axis moving mechanism, achieving focus tracking during high-speed inspection.

[0040] The phrase "the ranging module 4 is located in front of the image acquisition component 100 along the image acquisition line-changing direction" means that the ranging module 4 passes through the position of the image to be acquired first, followed by the image acquisition component 100 passing through the position of the image to be acquired. Specifically, the image acquisition process is performed line by line. Figure 1Taking the direction shown as an example, the ranging module 4 is located on the positive Y-axis side of the image acquisition component 100. The image acquisition component 100 moves along the X-axis until it has acquired one row of images of the TGV product. Then, the image acquisition component 100 moves relative to the transparent substrate 200 in the positive Y-axis direction, and then moves along the X-axis to acquire the second row of images. In this way, the ranging module 4 can obtain the height of the product in advance, thereby allowing for timely adjustment of the Z-axis height of the acquisition camera during the scanning process, improving focusing efficiency.

[0041] The Z-axis movement mechanism is a linear drive mechanism such as a linear motor or a linear slide table.

[0042] The Z-axis movement mechanism is used to adjust the object distance of the acquisition camera based on the ranging data to ensure image clarity.

[0043] Based on the above technical solution, the multiple image acquisition modules are distributed at intervals along the Y direction, and the ranging module 4 is located on one side of the multiple image acquisition modules in the X direction.

[0044] By installing the ranging module 4 one row ahead of the multiple image acquisition modules along the image acquisition line wrapping direction, the ranging module 4 acquires the TGV product height information one row ahead, thus enabling synchronous height compensation for the next row's ranging and the current row's image acquisition. Multiple image acquisition modules installed in the same row can simultaneously utilize the height information acquired in advance by the ranging module 4 to perform Z-axis compensation simultaneously and separately.

[0045] Alternatively, the ranging module 4 can be installed in advance along the image acquisition line wrapping direction compared to multiple image acquisition modules.

[0046] Based on the above technical solution, the movable support assembly 300 only needs to enable the ranging module 4 and the image acquisition assembly 100 to move relative to the transparent substrate 200 in the X and Y directions. For example, the ranging module 4 and the image acquisition assembly 100 can be fixedly set, an X-direction linear movement mechanism is installed on the base, a Y-direction linear movement mechanism is installed on the X-direction linear movement mechanism, and the transparent substrate 200 is fixed on the Y-direction linear movement mechanism.

[0047] In one specific example, one embodiment of the movable support assembly 300 is as follows: the movable support assembly 300 includes a base, an X-axis drive mechanism, an X-axis slide 301, a Y-axis drive mechanism, and a Y-axis slide 302. The X-axis slide 301 is slidably connected to the base along the X-axis, the X-axis drive mechanism is driveably connected to the X-axis slide 301, the transparent substrate 200 is mounted on the X-axis slide 301, the Y-axis slide 302 is slidably connected to the base along the Y-axis, the Y-axis drive mechanism is drively connected to the Y-axis slide 302, and the image acquisition assembly 100 and the ranging module 4 are both fixed on the Y-axis slide 302.

[0048] The X-axis slide 301 moves along the X-axis with the transparent substrate 200, and the Y-axis slide 302 moves along the Y-axis with the image acquisition component 100 and the ranging module 4, thereby realizing the movement of the image acquisition component 100 and the ranging module 4 relative to the TGV product, so as to acquire images of various positions of the TGV product.

[0049] Specifically, the Y-axis drive mechanism and the Y-axis slide 302 constitute the Y-axis linear movement mechanism. A Y-axis linear movement mechanism is provided on each of the upper and lower sides of the transparent substrate 200. The ranging module 4 and the image acquisition module located above the transparent substrate 200 are mounted on the upper Y-axis linear movement mechanism, and the image acquisition module located below the transparent substrate 200 is mounted on the lower Y-axis linear movement mechanism.

[0050] More specifically, the base is provided with two X-guide rails extending in the X direction and spaced apart in the Y direction. The two ends of the X-axis slide 301 are slidably connected to the two X-guide rails respectively. A gantry frame spanning above the two X-guide rails is also fixed on the base. One Y-axis linear movement mechanism is fixed on the gantry frame beam, and another Y-axis linear movement mechanism is fixed on the base below the gantry frame and located between the two X-guide rails.

[0051] Based on the above technical solution, the multi-module optical tracking focus device based on range compensation also includes a stage, which is mounted on the X-axis slide 301 and can rotate and be positioned around the Z-axis. The stage has a mounting hole through it in the Z-axis in the middle, and the transparent substrate 200 is embedded in the mounting hole.

[0052] The platform can rotate around the Z-axis, increasing the freedom of installation and movement of TGV products.

[0053] Optionally, the X-axis slide 301 is equipped with a positioning fixture. After the platform is rotated around the Z-axis to adjust its position, it is clamped by the positioning fixture. Alternatively, a Z-axis rotary motor is installed on the X-axis slide 301. The Z-axis rotary motor is connected to the platform for transmission, driving the platform to rotate or stop.

[0054] Based on the above technical solution, the platform is provided with multiple vacuum adsorption holes for communication with the vacuum pump.

[0055] The beneficial effect of adopting the above-mentioned further solution is that the vacuum pump is connected to the vacuum adsorption hole of the stage, and the TGV product on the stage is fixed by vacuum adsorption.

[0056] Based on the above technical solution, the X-axis slide 301 has a clearance hole at the position corresponding to the transparent substrate 200.

[0057] An clearance hole is provided in the middle of the plate-shaped X-axis slide 301 to facilitate the image acquisition module below the transparent substrate 200 to inspect the TGV product on the transparent substrate 200.

[0058] Based on the above technical solution, the image acquisition module is provided with three modules, namely the front image acquisition module 1, the back image acquisition module 2, and the waist hole surface image acquisition module 3. The front image acquisition module 1 and the waist hole surface image acquisition module 3 are located above the transparent substrate 200, and the back image acquisition module 2 is located below the transparent substrate 200.

[0059] The front image acquisition module 1 focuses on the top surface of the TGV product and acquires an image of the front of the TGV product; the back image acquisition module 2 focuses on the bottom surface of the TGV product and acquires an image of the back of the TGV product; the waist hole surface image acquisition module 3 focuses on the middle plane of the TGV product and acquires an image of the waist hole surface of the TGV product. This solution achieves real-time tracking and focusing on the three detection surfaces during the detection process based on data from a single ranging module 4.

[0060] Of course, if more planes need to be captured, more image acquisition modules can be set up to achieve AOI detection of more planes in a single scan process.

[0061] Based on the above technical solution, the ranging module 4 is a laser rangefinder.

[0062] Specifically, the laser rangefinder uses laser triangulation for measurement, with a range of ±1mm and a measurement accuracy of up to 0.0001mm.

[0063] Based on the above technical solution, the acquisition camera is a line scan monochrome camera.

[0064] Specifically, each acquisition camera is also equipped with a lens. In one specific example, based on the accuracy requirements of TGV measurement, the acquisition camera is a TDI 9K line scan monochrome camera with a pixel size of 5um. It uses a 4X telecentric lens with high resolution, high contrast, large depth of field, and low distortion, and a pixel accuracy of 1.25μm. While meeting the accuracy requirements of measurement, the large depth of field can cope with the 1mm change in sample surface height during high-speed detection.

[0065] Based on the above technical solution, a light source is also installed on the image acquisition component 100 or the movable support component 300, and the light source is used to illuminate the area above the transparent substrate 200.

[0066] The light source uses a white point light source and a white parallel backlight source, and the light source is set to a constant-on mode for image acquisition.

[0067] The following describes the specific operation of a multi-module optical tracking focus device based on range compensation.

[0068] Taking a multi-module optical tracking focus device for three-dimensional detection of an "X"-shaped aperture as an example, the 9K TDI line scan camera and 4X telecentric lens of the image acquisition module for the front, back, and waist aperture surfaces are respectively mounted on three Z-axis moving mechanisms. These Z-axis moving mechanisms allow for Z-axis height adjustment of the acquisition camera and also include a ranging module 4. Based on different product models and tolerances, the image sharpness can be adjusted in real time to ensure clear image imaging. The main contents of the tracking focus technology in this embodiment are as follows:

[0069] 1. Installation and Relative Position Calibration of Distance Measurement and Image Acquisition Modules: Using a line scan camera, and through mechanism installation and ROI parameter settings of the line scan camera, the image acquisition modules for the front, back, and waist hole surfaces are installed at the same coordinate position on the Y-axis (arranged in a straight line along the X-axis). The ROI range of the line scan camera is used to ensure that the three modules achieve the same field of view in the Y direction. The difference in slide coordinates in the X and Y directions when the three modules achieve the same field of view is determined by comparing the movement of the X-axis slide 301, the movement of the Y-axis slide 302, and the acquired images (i.e., establishing the relative coordinate relationship of the three image acquisition modules through the Y-axis slide 302 coordinate and the ROI range of the line scan camera, enabling the three image acquisition modules to acquire product images of the same field of view sequentially). This is used for coordinate calculations during the initial working height calibration of the image acquisition modules and for retrieving distance measurement data during image acquisition. The distance measurement module is installed one row ahead of the three image acquisition modules (along the image acquisition line-changing direction), allowing the distance measurement module to acquire TGV product height information one row ahead, ensuring synchronized distance measurement and image acquisition working height compensation.

[0070] 2. Initial working height calibration of the image acquisition module: During the initial calibration, the TGV product is placed on the transparent substrate 200, and a point on the product is selected as the calibration point. By adjusting the moving bracket assembly 300, multiple image acquisition modules are made to reach the calibration point in sequence. The Z-axis moving mechanism of the corresponding module is adjusted to make the image of the module clear. The Z-axis height of each module at the calibration point when the image is clear is taken as their initial position.

[0071] like Figure 2 As shown, Z1 is the working height of the front image acquisition module 1 when focusing the front image; Z2 is the working height of the back image acquisition module 2 when focusing the back image; Z3 is the working height of the waist hole surface image acquisition module 3 when focusing the waist hole surface image; H is the initial working height measured by the ranging module 4.

[0072] 3. Zeroing setting of distance measurement readings: In order to directly use the distance measurement values ​​obtained by the distance measurement module 4 for Z-axis compensation under high-speed motion and reduce the delay of calculation values, the measurement value of the distance measurement module 4 is set to zero at the initial working height calibration point of the image acquisition module. After that, the distance measurement readings can be directly used for Z-axis compensation of multiple modules. The distance measurement readings thereafter are the height change ∆h.

[0073] Specifically, when the height of the product surface on the transparent substrate 200 changes, ∆h can be obtained through distance measurement. After calibrating the initial working height, the relative positions of multiple modules are fixed. Therefore, when the height of the product surface undulates, the amount of height adjustment required for each module is consistent. This is equivalent to the initial focusing heights of multiple modules forming a plane. Simultaneous focusing compensation for multiple modules is achieved through the Z-axis compensation value ∆h of the image acquisition module. It should be noted that since the product is placed on the transparent substrate 200 and its bottom height remains constant, the image acquisition module located below the transparent substrate 200 typically does not require height adjustment.

[0074] 4. After the initial ranging reading is zeroed, when testing with a different TGV product model, the surface height of the product may change. Therefore, a correction value needs to be added to the relationship between the module's working height and the ranging reading. For example... Figure 3 As shown, Figure 3 The diagram shown is a schematic of the ranging module 4 measuring products at different heights.

[0075] At the same location on the stage (transparent substrate), distance measurements were obtained for different products, yielding values ​​H1 and H2 respectively. The working height of the rear module remained unchanged; the working height of the front module was ∆h1 = H2 - H1; and the working height of the side panel module was ∆h2 = (H2 - H1) / 2. Adding the correction value to the height change ∆h obtained from the distance measurements completes the correction of the distance measurement data for different TGV products.

[0076] Using the aforementioned multi-module optical tracking focus device based on range compensation for machine vision inspection of TGV products has the following beneficial effects:

[0077] (1) High detection reliability. Machine vision inspection can achieve long-term stable operation, which greatly promotes production efficiency. It can automatically detect defects for different sizes and hole types.

[0078] (2) High detection efficiency, improving production efficiency and automation level. Active focus tracking allows the production line to perform reliable visual inspection while maintaining or even increasing the design speed. It reduces manual intervention and avoids situations where manual re-inspection or equipment downtime is required due to image blurring, thereby improving the continuous operation time and automation level of the production line.

[0079] (3) High accuracy: The results of manual visual inspection are subjective, and individual differences and eye fatigue can affect the results. In contrast, machine vision inspection is objective and can output specific inspection values ​​and results, making it convenient to flexibly modify the inspection standards.

[0080] (4) Reduce the labor intensity of workers;

[0081] (5) Saves certain operating costs;

[0082] In the description of this utility model, it should be noted that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0083] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0084] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0085] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0086] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0087] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A multi-module optical focus-pursuing device based on distance measurement compensation, characterized in that, The system includes an image acquisition component (100), a transparent substrate (200), a movable support assembly (300), and a ranging module (4). The image acquisition component (100) and the transparent substrate (200) are both mounted on the movable support assembly (300). The movable support assembly (300) is used to move the ranging module (4) and the image acquisition component (100) relative to the transparent substrate (200) in the X and Y directions. The image acquisition component (100) includes multiple image acquisition modules. The ranging module (4) and at least one of the image acquisition modules are located above the transparent substrate (200). The ranging module (4) is located in front of the image acquisition component (100) along the image acquisition rotation direction. The remaining at least one image acquisition module is located below the transparent substrate (200). The image acquisition module includes a Z-axis moving mechanism mounted on the movable support assembly (300) and an acquisition camera mounted on the Z-axis moving mechanism.

2. The multi-module optical focus-pursuing device based on distance measurement compensation according to claim 1, characterized in that, The multiple image acquisition modules are distributed at intervals along the X-direction, and the ranging module (4) is located on one side of the multiple image acquisition modules in the Y-direction.

3. The multi-module optical focus-pursuing device based on distance measurement compensation according to claim 1, characterized in that, The movable support assembly (300) includes a base, an X-axis drive mechanism, an X-axis slide (301), a Y-axis drive mechanism, and a Y-axis slide (302). The X-axis slide (301) is slidably connected to the base along the X-axis. The X-axis drive mechanism is drivenly connected to the X-axis slide (301). The transparent substrate (200) is mounted on the X-axis slide (301). The Y-axis slide (302) is slidably connected to the base along the Y-axis. The Y-axis drive mechanism is drivenly connected to the Y-axis slide (302). The image acquisition assembly (100) and the ranging module (4) are both fixed on the Y-axis slide (302).

4. The multi-module optical focus-pursuing device based on distance measurement compensation according to claim 3, characterized in that, It also includes a stage, which is mounted on the X-axis slide (301) and can rotate and be positioned around the Z-axis. The stage has a mounting hole through it in the Z-axis, and the transparent substrate (200) is embedded in the mounting hole.

5. The multi-module optical focus-pursuing device based on distance measurement compensation according to claim 4, characterized in that, The platform is provided with multiple vacuum adsorption holes for communication with a vacuum pump.

6. The multi-module optical focus-pursuing device based on distance measurement compensation according to claim 3, characterized in that, The X-axis slide (301) has a clearance hole at the position corresponding to the transparent substrate (200).

7. The multi-module optical focus-pursuing device based on distance measurement compensation according to claim 1, characterized in that, The image acquisition module is provided in three parts, namely the front image acquisition module (1), the back image acquisition module (2), and the waist hole surface image acquisition module (3). The front image acquisition module (1) and the waist hole surface image acquisition module (3) are located above the transparent substrate (200), and the back image acquisition module (2) is located below the transparent substrate (200).

8. The multi-module optical focus-pursuing device based on distance measurement compensation according to claim 1, characterized in that, The ranging module (4) is a laser rangefinder.

9. A multi-module optical tracking focus device based on range compensation according to claim 1, characterized in that, The acquisition camera is a line scan monochrome camera.

10. A multi-module optical tracking focus device based on range compensation according to any one of claims 1-9, characterized in that, The image acquisition component (100) or the movable support component (300) is also equipped with a light source, which is used to illuminate the area above the transparent substrate (200).

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