High-precision positioning table guide rail

Abstract

The utility model discloses a high -precision positioning platform guide rail, including base, setting on the linear guide rail of base, the slider of sliding connection on linear guide rail and setting on the positioning platform of slider, the end of linear guide rail is provided with stop piece, the stop piece includes setting in the stop pin of base top and with linear guide rail end corresponding, one side of stop pin is provided with piston hole groove, piston hole groove swing joint has piston disc, one side of piston disc is provided with and extends to the guide rod spare of stop pin outside, the one end of guide rod spare away from piston disc is provided with buffer block, buffer block and the lateral wall between stop pin are provided with first elastic part. This high -precision positioning platform guide rail, can realize flexible stop limit through the stop piece of setting, greatly weakened rigidity damage and vibration, improved the service life, also improved the machining precision of product on positioning platform.

Description

Technical Field

[0001] This utility model relates to the field of guide rails, and in particular to a high-precision positioning stage guide rail. Background Technology

[0002] In high-precision positioning stage guide rail systems, to prevent the slider from detaching from the guide rail when it reaches the end of its stroke, traditional designs generally use rigid limiting stop structures (such as mechanical blocks or screws). These structures achieve physical limiting through hard collision. Although they can prevent the slider from derailing, they have significant drawbacks. The rigid contact moment can easily cause wear or deformation of the slider and guide rail surfaces, affecting long-term accuracy stability. At the same time, the impact vibration generated by the collision will be transmitted to the entire positioning system. In micro-nano precision scenarios (such as wafer alignment in lithography machines or ultra-precision machining), this may lead to positioning deviations or deterioration of workpiece surface quality.

[0003] Therefore, it is necessary to propose a high-precision positioning stage guide rail to solve the above problems. Utility Model Content

[0004] The main purpose of this utility model is to provide a high-precision positioning stage guide rail, which can effectively solve the problems in the background art.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0006] A high-precision positioning stage guide rail includes a base, a linear guide rail disposed on the base, a slider slidably connected to the linear guide rail, and a positioning stage disposed on the slider.

[0007] The linear guide rail has a stop at its end, which includes a stop pin located on the top of the base and corresponding to the end of the linear guide rail. A piston groove is provided on one side of the stop pin, and a piston disc is movably connected to the piston groove. A guide rod extending to the outside of the stop pin is provided on one side of the piston disc, and a buffer block is provided at the end of the guide rod away from the piston disc. A first elastic element is provided between the buffer block and the side wall of the stop pin. Hydraulic oil is provided inside the piston groove, and a hole assembly for hydraulic oil to pass through is provided on the outer side wall of the piston disc.

[0008] Preferably, the hole assembly includes a first through hole and a second through hole disposed at one end of the periphery of the piston disc, wherein the inner diameter of the first through hole is larger than the inner diameter of the second through hole, and a one-way valve is disposed on the inner side of both the first through hole and the second through hole, wherein the hydraulic oil located on the side of the piston disc closer to the guide rod flows from the first through hole to the other side, and the hydraulic oil located on the side of the piston disc farther from the guide rod flows from the second through hole to the other side.

[0009] Preferably, the first elastic element is a spring, and the spring is sleeved on the outside of the guide rod.

[0010] Preferably, a flexible rubber pad is provided on the side of the buffer block away from the stop pin.

[0011] Preferably, the base has a threaded hole at the top, and the linear guide has a bolt with its lower end threaded into the threaded hole.

[0012] Preferably, the top of the base is provided with a positioning groove corresponding to the threaded hole, and the bottom of the linear guide is provided with a positioning block that is inserted and engaged with the positioning groove, and the cross-section of the positioning block and the positioning groove is conical.

[0013] Preferably, a second elastic element is provided at the bottom inner side of the positioning groove.

[0014] Compared with the prior art, this utility model provides a high-precision positioning stage guide rail, which has the following advantages:

[0015] 1. This high-precision positioning stage guide rail can achieve flexible stopping and limiting through the setting of stop components, which greatly reduces rigid damage and vibration, improves service life, and also improves the processing accuracy of products on the positioning stage.

[0016] 2. This high-precision positioning table guide rail can quickly position the linear guide rail through the positioning blocks and positioning grooves, which facilitates the mating of bolts and threaded holes and makes it easy to install and fix the linear guide rail. The setting of the second elastic element can increase the stability of the linear guide rail. The reverse force of the second elastic element acts on the positioning block, thereby the positioning block acts on the linear guide rail, increasing the axial pressure of the bolt and threaded hole threaded connection. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of this utility model;

[0018] Figure 2 This is a structural schematic diagram of the stop component of this utility model;

[0019] Figure 3 This is a cross-sectional structural diagram of the stop pin of this utility model;

[0020] Figure 4 This is a partial cross-sectional structural diagram of the connection between the linear guide rail and the base of this utility model.

[0021] In the diagram: 1. Base; 2. Positioning platform; 3. Slider; 4. Linear guide rail; 5. Stop pin; 6. Threaded connection end; 7. Buffer block; 8. Flexible rubber pad; 9. First elastic element; 10. Guide rod; 11. Piston disc; 12. First through hole; 13. Second through hole; 14. Piston hole groove; 15. Threaded hole; 16. Bolt; 17. Positioning block; 18. Positioning groove; 19. Second elastic element. Detailed Implementation

[0022] To make the technical means, creative features, objectives and effects of this utility model easier to understand, the present utility model will be further described below in conjunction with specific embodiments.

[0023] like Figure 1-4 As shown, a high-precision positioning stage guide rail includes a base 1, a linear guide rail 4 mounted on the base 1, a slider 3 slidably connected to the linear guide rail 4, and a positioning stage 2 mounted on the slider 3. A stop is provided at the end of the linear guide rail 4. The stop includes a stop pin 5 located on the top of the base 1 and corresponding to the end of the linear guide rail 4. A piston groove 14 is provided on one side of the stop pin 5, and a piston disc 11 is movably connected to the piston groove 14. A guide rod 10 extending to the outside of the stop pin 5 is provided on one side of the piston disc 11. A buffer block 7 is provided at the end of the guide rod 10 away from the piston disc 11. A first elastic element 9 is provided between the buffer block 7 and the side wall of the stop pin 5. The first elastic element 9 is preferably a spring, and the spring is sleeved on the outside of the guide rod 10. Hydraulic oil is provided inside the piston groove 14. The outer side wall of the piston disc 11 is provided with a hole assembly for the passage of hydraulic oil. The hole assembly includes a first through hole 12 and a second through hole 13 provided at one end of the outer periphery of the piston disc 11. The inner diameter of the first through hole 12 is larger than the inner diameter of the second through hole 13. A one-way valve is provided inside the first through hole 12 and the second through hole 13. The hydraulic oil on the side of the piston disc 11 closer to the guide rod 10 flows from the first through hole 12 to the other side, and the hydraulic oil on the side of the piston disc 11 away from the guide rod 10 flows from the second through hole 13 to the other side.

[0024] To further buffer and protect the slider 3, a flexible rubber pad 8 is provided on the side of the buffer block 7 away from the stop pin 5.

[0025] Furthermore, the base 1 has a threaded hole 15 on its top, and a bolt 16 is provided on the linear guide rail 4. The lower end of the bolt 16 is threaded to the inside of the threaded hole 15.

[0026] To facilitate the installation of the linear guide rail 4, the base 1 has a positioning groove 18 corresponding to the threaded hole 15 at the top, and the linear guide rail 4 has a positioning block 17 that is inserted into the positioning groove 18 at the bottom. The positioning block 17 and the positioning groove 18 have a tapered cross section. To increase the stability of the linear guide rail 4 installation, a second elastic element 19 is provided at the bottom inner side of the positioning groove 18.

[0027] It should be noted that this utility model is a high-precision positioning stage guide rail. When the slider 3 reaches the end of the linear guide rail 4, it will contact the buffer block 7 on the side of the stop pin 5 and directly contact the flexible rubber pad 8. Then, the buffer block 7 is pressed and drives the guide rod 10 to move, the first elastic element 9 is compressed, the guide rod 10 drives the piston disc 11 to move, and the hydraulic oil on the side of the piston disc 11 away from the guide rod 10 will enter the other side through the second through hole 13. The flow of hydraulic oil generates resistance to the displacement of the guide rod 10, consumes some kinetic energy, and achieves a damping effect. Combined with the reverse force of the first elastic element 9, it achieves buffer protection for the slider 3. When the slider 3 separates from the buffer block 7, the first elastic element 9 resets, and the hydraulic oil on the side of the piston disc 11 close to the guide rod 10 flows to the other side through the second through hole 13. At this time, since the diameter of the first through hole 12 is larger than that of the second through hole 13, it is convenient for the guide rod 10 to drive the piston disc 11 to reset.

[0028] Furthermore, when installing the linear guide 4, the positioning block 17 at the bottom of the linear guide 4 is inserted into the positioning groove 18 to achieve pre-positioning. At this time, the threaded hole 15 corresponds to the bolt 16, and the bolt 16 can be screwed in, which improves the positioning efficiency. As the bolt 16 is screwed in, the linear guide 4 fits against the top wall of the base 1, and the positioning block 17 will gradually compress the second elastic element 19. The reverse force generated by the second elastic element 19 can increase the axial pressure at the threaded connection between the bolt 16 and the threaded hole 15, thereby reducing the possibility of loosening.

[0029] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claims. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A high-precision positioning stage guide rail, characterized in that: It includes a base (1), a linear guide rail (4) set on the base (1), a slider (3) slidably connected to the linear guide rail (4), and a positioning platform (2) set on the slider (3); The end of the linear guide (4) is provided with a stop member, the stop member including a stop pin (5) provided on the top of the base (1) and corresponding to the end of the linear guide (4), a piston groove (14) is provided on one side of the stop pin (5), a piston disk (11) is movably connected to the piston groove (14), a guide rod (10) extending to the outside of the stop pin (5) is provided on one side of the piston disk (11), a buffer block (7) is provided at the end of the guide rod (10) away from the piston disk (11), a first elastic member (9) is provided between the buffer block (7) and the side wall of the stop pin (5), hydraulic oil is provided inside the piston groove (14), and a hole assembly for hydraulic oil to pass through is provided on the outer side wall of the piston disk (11).

2. The high-precision positioning stage guide rail according to claim 1, characterized in that: The hole assembly includes a first through hole (12) and a second through hole (13) disposed at one end of the periphery of the piston disc (11). The inner diameter of the first through hole (12) is larger than the inner diameter of the second through hole (13). Both the first through hole (12) and the second through hole (13) are provided with one-way valves. The hydraulic oil on the side of the piston disc (11) near the guide rod (10) flows from the first through hole (12) to the other side, and the hydraulic oil on the side of the piston disc (11) away from the guide rod (10) flows from the second through hole (13) to the other side.

3. The high-precision positioning stage guide rail according to claim 1, characterized in that: The first elastic element (9) is a spring, and the spring is sleeved on the outside of the guide rod (10).

4. The high-precision positioning stage guide rail according to claim 1, characterized in that: A flexible rubber pad (8) is provided on the side of the buffer block (7) away from the stop pin (5).

5. A high-precision positioning stage guide rail according to claim 1, characterized in that: The base (1) has a threaded hole (15) at the top, and the linear guide (4) has a bolt (16) on it. The lower end of the bolt (16) is threaded to the inside of the threaded hole (15).

6. A high-precision positioning stage guide rail according to claim 5, characterized in that: The base (1) has a positioning groove (18) at the top corresponding to the threaded hole (15), and the linear guide (4) has a positioning block (17) at the bottom that is inserted into the positioning groove (18). The cross sections of the positioning block (17) and the positioning groove (18) are conical.

7. A high-precision positioning stage guide rail according to claim 6, characterized in that: A second elastic element (19) is provided on the inner bottom of the positioning groove (18).

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