An evaporation boat

Abstract

The utility model discloses an evaporating boat relates to vacuum evaporation plating technical field, including evaporating boat main part, evaporating cavity, feed plate, protection mechanism and auxiliary mechanism, the evaporating cavity is seted up in the middle part of evaporating boat main part inner wall, the utility model discloses an evaporating boat, through setting up protection mechanism to aluminium drop is intercepted and will big granule's aluminium liquid is dispersed into small granule after, through the support plate heating metal protection net guide its reflux to evaporating cavity reutilization, improve heating efficiency to make aluminium drop heat to liquid state under the action of gravity and reflux to evaporating cavity, and further prevent aluminium drop adhesion, through the rotation screw rod cancel the location of metal protection net, and then convenient staff removes metal protection net from the lower portion of apron and changes, can further increase the service life of evaporating boat.

Description

Technical Field

[0001] This utility model relates to the field of vacuum evaporation coating technology, specifically to an evaporation boat. Background Technology

[0002] Vapor deposition is a physical vapor deposition technique widely used in industrial production and scientific research. Its core function is to deposit a high-quality, dense, and uniform thin film material on the surface of a substrate. In composite aluminum current collectors used in lithium batteries, evaporation deposition is one of the core processes in the preparation of the aluminum layer, and the evaporation boat is a key consumable for achieving aluminum evaporation deposition. In the resistance thermal evaporation process, the evaporation boat acts as a conductive heating carrier, directly passing electricity to generate high temperatures, causing aluminum wires or particles to melt and vaporize within the boat, ultimately depositing a dense aluminum layer on the surface of the polymer substrate.

[0003] Application No. 202321825486.3 discloses an evaporation boat assembly for preventing molten metal splashing. This patent includes: a boat body with a first clamping end and a second clamping end at both ends along its length for contacting and electrically conducting electrodes; an evaporation zone disposed on the evaporation side of the boat body; and at least one cover plate partially covering the evaporation zone, with a certain gap between the bottom of the cover plate and the surface of the evaporation zone. This invention reduces molten metal splashing and improves raw material utilization by partially covering the evaporation zone of the boat body with a cover plate. Furthermore, a cover plate is provided at the wire feeding point, and a wire feeding hole is provided at the cover plate to control aluminum splashing caused by the melting of the aluminum wire during wire feeding. Reinforcing members are added to increase the strength of the cover plate.

[0004] Although the above comparison documents can control the aluminum splashing caused by the melting of aluminum wire during the wire feeding process, the temperature is too high when the splashed aluminum droplets hit the cover plate. The aluminum droplets are easy to stick to the bottom of the cover plate and form aluminum nodules, which leads to temperature runaway and affects the coating quality. Utility Model Content

[0005] The purpose of this invention is to provide an evaporation boat to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution: an evaporation boat, comprising an evaporation boat body, an evaporation chamber, a feeding plate, a protective mechanism, and an auxiliary mechanism. The evaporation chamber is formed in the middle of the inner wall of the evaporation boat body, and the feeding plate is connected to the middle of the top of the evaporation boat body. The protective mechanism includes track grooves formed on both sides of the top of the evaporation boat body, and a support plate is connected inside the track grooves. The support plate is made of conductive material, and a cover plate is welded to the top of the outer wall of the support plate. A threaded rod is threadedly connected to the middle of the cover plate, and a threaded cylinder is threadedly connected to the bottom of the outer wall of the threaded rod. A metal protective mesh is connected to the bottom of the outer wall of the threaded cylinder. The metal protective mesh can absorb the kinetic energy of large aluminum droplets and disperse them.

[0007] By setting up a metal protective mesh to absorb the kinetic energy of large aluminum droplets, and by reducing the temperature of the aluminum droplets after impacting the metal protective mesh, the limiting effect on the metal protective mesh can be removed by rotating the threaded rod to disengage its bottom from the thread. This allows workers to easily remove the metal protective mesh from under the cover for replacement.

[0008] Preferably, the metal protective net is connected to side nets on both sides of its bottom end, and the side nets can expand the protective area of ​​the metal protective net. The support plate and the track groove are slidably connected.

[0009] The inclined side mesh can guide some of the molten aluminum back into the evaporation chamber, and the position of the cover plate can be adjusted by pushing the support plate along the track groove, thus improving the flexibility of use.

[0010] Preferably, the support plate and the cover plate have a "U" shaped structure, the outer wall of the cover plate has a locking groove on both sides, and the locking groove is connected to a limiting member, which has an "L" shaped structure.

[0011] By moving the side plate, the limiting component is inserted into the cover plate, thereby setting the side plate on both sides of the cover plate and facilitating subsequent disassembly.

[0012] Preferably, a side plate is welded to one side of the outer wall of the limiting member, and both the side plate and the side mesh are inclined.

[0013] The inclined side plate and side mesh increase the interception area and can guide aluminum droplets back to the evaporation chamber.

[0014] Preferably, a first drainage plate is connected to both sides of the bottom end of the cover plate, and a second drainage plate is connected to the bottom end of the side plate.

[0015] By setting up No. 1 and No. 2 diversion plates to improve heat dissipation efficiency, the aluminum liquid can bounce back into the evaporation chamber after cooling to a semi-solid state. When small aluminum droplets come into contact with the cover plate and side plate, the small droplets will be sheared and broken when they hit the edges of No. 1 and No. 2 diversion plates, thereby improving heat dissipation efficiency and cooling the aluminum liquid to a semi-solid state.

[0016] Preferably, the first and second diversion plates are evenly spaced, and the gap between the second diversion plates is a diversion groove.

[0017] The aluminum droplets are guided back through the No. 1 and No. 2 guide plates, and the cooled semi-solid aluminum liquid is guided back to the evaporation chamber.

[0018] Preferably, the auxiliary mechanism includes a base connected to the top of the evaporation boat body, and a fixing rod is connected to the middle of the bottom end of the base.

[0019] By connecting the base to the fixed rod, the movement of the base can move the fixed rod along with it.

[0020] Preferably, the evaporation boat body has fixing holes on both sides inside, and fixing rods extend into them to limit the base.

[0021] By making the base and the fixing rod form an "L" shape, when the base contacts the two sides of the evaporation boat body, the fixing rod is inserted into the two sides of the evaporation boat body. This allows the auxiliary mechanism to be set on the two sides of the evaporation boat body, and makes it easy for people to disassemble and improve flexibility.

[0022] Preferably, a barrier plate is connected to the center of the top of the base, and extension plates are connected to both sides of the outer wall of the barrier plate.

[0023] The baffle plate and extension plate block the molten aluminum in the evaporation chamber from splashing to both sides.

[0024] Preferably, the barrier plate and the extension plate have a "U" shaped structure, and a support rod is fixedly connected to the middle of the bottom end of the barrier plate, and the bottom end of the support rod is connected to the base.

[0025] By making the base, barrier plate and support rod form a triangular stabilizing mechanism, the structural stability of the barrier plate is improved.

[0026] As can be seen from the above, the evaporation boat provided by this utility model has the following beneficial effects.

[0027] 1. By setting up a protective mechanism to intercept splashed aluminum droplets multiple times, and dispersing large aluminum molten particles into small particles, the support plate heats the metal protective mesh to guide them back into the evaporation chamber for reuse. This improves heating efficiency, allowing the aluminum droplets to be heated to a liquid state and then flow back into the evaporation chamber under gravity, thereby preventing aluminum droplet adhesion.

[0028] 2. By rotating the threaded rod, the restriction on the metal protective net is removed, making it easier for workers to remove the metal protective net from under the cover for replacement, which can further increase the service life of the evaporation boat.

[0029] 3. By setting up an auxiliary mechanism, the aluminum liquid in the evaporation chamber is blocked from splashing to both sides, thus solving the problem of aluminum liquid splashing at the edge. Attached Figure Description

[0030] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0031] Figure 2 This is a side view of the three-dimensional cross-sectional structure of the present invention;

[0032] Figure 3 This is a schematic diagram of the main sectional view of the present invention;

[0033] Figure 4This is a three-dimensional structural diagram of the auxiliary mechanism of this utility model;

[0034] Figure 5 This is a schematic diagram of the main sectional view of the cover plate of this utility model;

[0035] Figure 6 This is a three-dimensional structural diagram of the metal protective mesh of this utility model, viewed from below.

[0036] Figure 7 This is a schematic diagram of the three-dimensional structure of the cover plate of this utility model.

[0037] In the diagram: 1. Evaporation boat body; 2. Evaporation chamber; 3. Feed plate; 4. Protective mechanism; 401. Track chute; 402. Support plate; 403. Cover plate; 404. Threaded rod; 405. Threaded cylinder; 406. Metal protective net; 407. Side net; 408. Limiting component; 409. Side plate; 410. No. 1 diversion plate; 411. No. 2 diversion plate; 5. Auxiliary mechanism; 501. Base; 502. Fixing rod; 503. Barrier plate; 504. Extension plate; 505. Support rod. Detailed Implementation

[0038] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0039] Please see Figures 1-6This utility model provides a technical solution: an evaporation boat, including an evaporation boat body 1, an evaporation chamber 2, a feed plate 3, a protective mechanism 4, and an auxiliary mechanism 5. The evaporation chamber 2 is located in the middle of the inner wall of the evaporation boat body 1, and the feed plate 3 is connected to the middle of the top of the evaporation boat body 1. The protective mechanism 4 includes track grooves 401 on both sides of the top of the evaporation boat body 1, and a support plate 402 is connected inside the track grooves 401. The support plate 402 is made of conductive material, and a cover plate 403 is welded to the top of the outer wall of the support plate 402. A threaded rod 404 is threadedly connected to the middle of the cover plate 403, and a threaded cylinder 405 is threadedly connected to the bottom of the outer wall of the threaded rod 404. A metal protective mesh 406 is connected to the bottom of the outer wall of the threaded cylinder 405. The metal protective mesh 406 can absorb the kinetic energy of large aluminum droplets and disperse them. Side meshes 407 are connected to both sides of the bottom of the metal protective mesh 406, and the side meshes 407 can expand the protective area of ​​the metal protective mesh 406. The support plate 402 and the track groove 401 are slidably connected. The support plate 402 and the cover plate 403 have a "U" shaped structure. The outer walls of the cover plate 403 have locking grooves on both sides, and the locking grooves are connected to limiting members 408, which have an "L" shaped structure. A side plate 409 is welded to one side of the outer wall of the limiting member 408, and both the side plate 409 and the side mesh 407 are inclined.

[0040] For specific implementation, please refer to Figure 1 and Figure 2 Beforehand, the aluminum wire is connected to the through hole at the top center of the feed plate 3. Then, the molten aluminum wire solution will fill the evaporation chamber 2, so that the aluminum liquid in the evaporation chamber 2 will evaporate into aluminum vapor. Then, the aluminum vapor will come into contact with the surface of the substrate for plating.

[0041] See Figure 1 , Figure 4 and Figure 5 When the molten aluminum in the evaporation chamber 2 is heated to a high power, it is easy for the molten aluminum to splash. The splashed aluminum droplets will first come into contact with the metal protective mesh 406. At this time, the metal protective mesh 406 blocks the molten aluminum, causing the large aluminum droplets to be dispersed into small particles, thereby absorbing the kinetic energy of the large aluminum droplets. After the aluminum droplets hit the metal protective mesh 406, the temperature will drop. The aluminum droplets are heated by the support plate 402 made of conductive material, and the protective area of ​​the metal protective mesh 406 is increased by the side mesh 407. The inclined side mesh 407 can guide some of the aluminum droplets to be heated into molten aluminum and flow back to the evaporation chamber 2 by gravity.

[0042] See Figure 5 Simply rotate the threaded rod 404 upwards to disengage its bottom from the threaded cylinder 405, thereby removing the restriction on the metal protective net 406 and making it easier for workers to remove the metal protective net 406 from under the cover plate 403 for replacement.

[0043] See Figure 4 and Figure 5 Because the side plate 409 is connected to the limiting member 408, the side plate 409 is moved in advance so that the limiting member 408 is inserted into the cover plate 403 and locked in place. Thus, the side plate 409 is set on both sides of the cover plate 403. When the large aluminum droplets are dispersed by the metal protective mesh 406, they will come into contact with the cover plate 403. At this time, the aluminum droplets are blocked a second time by the cover plate 403 and the side plate 409. The small and medium-sized aluminum droplets are heated by the support plate 402 made of conductive material, so that the small and medium-sized aluminum droplets become aluminum liquid and can drip back into the molten pool for reuse by gravity.

[0044] The bottom of the cover plate 403 is connected to the first flow guide plate 410 on both sides, and the bottom of the side plate 409 is connected to the second flow guide plate 411; the first flow guide plate 410 and the second flow guide plate 411 are evenly distributed, and the gap between the second flow guide plates 411 is a flow guide groove.

[0045] See Figure 3 , Figure 4 and Figure 5 Because the No. 1 guide plate 410 and the No. 2 guide plate 411 are distributed at equal intervals, when the small aluminum droplets come into contact with the cover plate 403 and the side plate 409, the small particles will be sheared and broken when they hit the edges of the No. 1 guide plate 410 and the No. 2 guide plate 411. The heating efficiency is improved by the support plate 402 made of conductive material, so that the aluminum droplets are heated to liquid state and then flow back to the evaporation chamber 2 under the action of gravity. The No. 1 guide plate 410 and the No. 2 guide plate 411 can guide the aluminum liquid to flow back.

[0046] See Figure 2 and Figure 3 Because the top of the support plate 402 is connected to the cover plate 403, people only need to move the support plate 402 into the track groove 401 to complete the setting of the protective mechanism 4. The support plate 402 can be pushed along the track groove 401 to adjust the position of the cover plate 403. The cover plate 403 can be moved up to disengage the support plate 402 from the track groove 401, and the protective mechanism 4 can be removed, thereby improving the flexibility of use.

[0047] By setting up a protective mechanism 4 to intercept aluminum droplets multiple times, and dispersing large aluminum droplets into smaller particles, the aluminum droplets are heated into molten aluminum by the support plate 402 heating the metal protective mesh 406, and then guided back into the evaporation chamber 2 for reuse. In addition, the heating efficiency is improved so that after the aluminum droplets are heated to a liquid state, they can flow back into the evaporation chamber 2 under the action of gravity, thereby preventing aluminum droplets from adhering.

[0048] See Figure 1 , Figure 3 and Figure 4The auxiliary mechanism 5 includes a base 501 connected to the top of the evaporation boat body 1, and a fixing rod 502 connected to the middle of the bottom end of the base 501; fixing holes are opened inside both sides of the evaporation boat body 1, and the fixing rod 502 extends into them to limit the base 501; a baffle plate 503 is connected to the middle of the top end of the base 501, and extension plates 504 are connected to both sides of the outer wall of the baffle plate 503; the baffle plate 503 and the extension plates 504 form a "U" shape, and a support rod 505 is fixedly connected to the middle of the bottom end of the baffle plate 503, and the bottom end of the support rod 505 is connected to the base 501.

[0049] For specific implementation, please refer to Figure 6 and Figure 7 Since the base 501 is connected to the fixing rod 502, the base 501 is moved first so that the fixing rod 502 is inserted into both sides of the evaporation boat body 1, thereby setting the baffle plate 503 on both sides of the evaporation boat body 1. The baffle plate 503 can be removed simply by moving the base 501 upward, which improves the flexibility during use. At this time, the base 501, the baffle plate 503 and the support rod 505 form a triangular stabilizing mechanism, thereby improving the structural stability of the baffle plate 503. Then, when the aluminum liquid in the evaporation chamber 2 splashes to both sides, it is blocked by the baffle plate 503 and the extension plate 504, and guided back to the evaporation chamber 2 by the inclined baffle plate 503. Thus, the problem of aluminum liquid splashing at the edge is solved by setting the auxiliary mechanism 5.

[0050] Specifically, the surfaces of the feed plate 3, the barrier plate 503, and the extension plate 504 are coated with ceramic coatings, which can further improve the anti-sticking effect.

[0051] In summary, when using this evaporation boat, the aluminum wire is first connected to the through hole at the top center of the feed plate 3. Then, the aluminum wire melts and fills the entire evaporation chamber 2. At this time, the aluminum liquid in the evaporation chamber 2 evaporates into aluminum vapor. Then, the aluminum vapor contacts the substrate surface for plating. This is existing technology and will not be elaborated on here. By setting up a protective mechanism 4 to intercept the aluminum droplets multiple times, and dispersing large aluminum liquid particles into small particles, the support plate 402 heats the metal protective mesh 406 to heat the aluminum droplets into aluminum liquid and guides it back into the evaporation chamber 2 for reuse. This improves the heating efficiency so that the aluminum liquid can flow back into the evaporation chamber 2 under gravity after being heated to a liquid state, thereby preventing aluminum droplets from adhering. By rotating the threaded rod 404, the limitation on the metal protective mesh 406 is removed, making it easier for the staff to remove the metal protective mesh 406 from under the cover plate 403 for replacement, which can further increase the service life of the evaporation boat. By setting up an auxiliary mechanism 5, the aluminum liquid in the evaporation chamber 2 is blocked when it splashes to both sides, thereby solving the problem of aluminum liquid splashing at the edge.

[0052] The above description is merely a preferred embodiment of this utility model, but the protection scope of this utility model is not limited thereto. The substitutions may be replacements of some structures, devices, or method steps, or they may be complete technical solutions. Equivalent substitutions or modifications made based on the technical solution and inventive concept of this utility model should all be covered within the protection scope of this utility model.

Claims

1. An evaporation boat, comprising an evaporation boat body (1), an evaporation chamber (2), a feed plate (3), a protective mechanism (4), and an auxiliary mechanism (5), wherein the evaporation chamber (2) is provided in the middle of the inner wall of the evaporation boat body (1), and the feed plate (3) is connected to the middle of the top of the evaporation boat body (1), characterized in that: The protective mechanism (4) includes track grooves (401) opened on both sides of the top of the evaporation boat body (1), and a support plate (402) is connected inside the track groove (401). The support plate (402) is made of conductive material, and a cover plate (403) is welded to the top of the outer wall of the support plate (402). A threaded rod (404) is threadedly connected to the middle of the cover plate (403), and a threaded cylinder (405) is threadedly connected to the bottom of the outer wall of the threaded rod (404). A metal protective net (406) is connected to the bottom of the outer wall of the threaded cylinder (405). The metal protective net (406) can absorb the kinetic energy of large aluminum droplets and disperse them.

2. The evaporation boat according to claim 1, characterized in that: The metal protective net (406) has side nets (407) connected to both sides of its bottom end, and the side nets (407) can expand the protective area of ​​the metal protective net (406). The support plate (402) and the track groove (401) are slidably connected.

3. The evaporation boat according to claim 2, characterized in that: The support plate (402) and the cover plate (403) have a "U" shaped structure. The outer walls of the cover plate (403) are provided with locking grooves on both sides, and the locking grooves are connected with limiting members (408), which have an "L" shaped structure.

4. The evaporation boat according to claim 3, characterized in that: The limiting member (408) has a side plate (409) welded to one side of its outer wall, and both the side plate (409) and the side mesh (407) are inclined.

5. The evaporation boat according to claim 4, characterized in that: The bottom of the cover plate (403) is connected to a first drainage plate (410) on both sides, and the bottom of the side plate (409) is connected to a second drainage plate (411).

6. The evaporation boat according to claim 5, characterized in that: The first diversion plate (410) and the second diversion plate (411) are equally spaced, and the gap between the second diversion plates (411) is a diversion groove.

7. The evaporation boat according to claim 1, characterized in that: The auxiliary mechanism (5) includes a base (501) connected to the top of the evaporation boat body (1), and a fixing rod (502) is connected to the middle of the bottom end of the base (501).

8. The evaporation boat according to claim 7, characterized in that: The evaporation boat body (1) has fixing holes on both sides, and the fixing rod (502) extends into the limiting base (501).

9. The evaporation boat according to claim 8, characterized in that: A barrier plate (503) is connected to the middle of the top of the base (501), and extension plates (504) are connected to both sides of the outer wall of the barrier plate (503).

10. The evaporation boat according to claim 9, characterized in that: The barrier plate (503) and the extension plate (504) have a "U" shaped structure, and a support rod (505) is fixedly connected to the middle of the bottom end of the barrier plate (503), and the bottom end of the support rod (505) is connected to the base (501).

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