Multi-station combined automatic polishing machine

Abstract

The utility model relates to a kind of multi-station combined automatic polishing machine, including rack, manipulator being set on rack, multiple vertical in rack and with manipulator as center placement's tank;The manipulator includes rotating platform, Z-axis linear module being vertically set on rotating platform drive end, lifting frame for installing the product to be polished being set on Z-axis linear module drive end;Under the cooperation of rotating platform and Z-axis linear module, lifting frame can be driven to drive the product to be polished to transfer between multiple tanks;Multiple the tank at least includes chemical polishing tank, cleaning tank and electrolytic tank;The bottom of multiple the tank is uniformly provided with drainage pipeline, and top is uniformly provided with liquid inlet pipeline;Drainage solenoid valve is uniformly provided on the drainage pipeline;The utility model integrates chemical polishing and electro-polishing, supports single or combined process, and can shorten workpiece exposure time and improve polishing effect by automatic transfer of manipulator.

Description

Technical Field

[0001] This utility model relates to the field of surface treatment technology, and specifically to a multi-station combined automatic polishing machine. Background Technology

[0002] Polishing is a processing method that uses mechanical, chemical, or electrochemical processes to reduce the surface roughness of a workpiece in order to obtain a bright and smooth surface.

[0003] Currently, the surface polishing process for parts generally faces the following technical bottlenecks:

[0004] 1. Functional limitation: Mainstream equipment only supports a single process (such as a standalone chemical polishing machine or electrolytic polishing machine). When the workpiece requires a combination of processes (such as chemical polishing followed by electrolytic polishing), it must be transferred to different equipment multiple times, resulting in low efficiency.

[0005] 2. The transfer of workpieces between tanks relies on manual operation, and prolonged exposure to air can lead to secondary corrosion. Utility Model Content

[0006] The purpose of this invention is to overcome the shortcomings of the existing technology and provide a multi-station combined automatic polishing machine.

[0007] To achieve the above objectives, the technical solution adopted by this utility model is: a multi-station combined automatic polishing machine, comprising a frame, a robot arm mounted on the frame, and multiple troughs placed vertically on the frame with the robot arm as the center;

[0008] The robotic arm includes a rotating platform, a Z-axis linear module vertically mounted on the drive end of the rotating platform, and a lifting frame mounted on the drive end of the Z-axis linear module for mounting the product to be polished; with the joint cooperation of the rotating platform and the Z-axis linear module, the lifting frame can be driven to move the product to be polished between multiple tanks.

[0009] The plurality of said tanks include at least a chemical polishing tank, a cleaning tank, and an electrolytic tank;

[0010] Each of the tanks is equipped with a drain pipe at the bottom and a liquid inlet pipe at the top; each drain pipe is equipped with a drain solenoid valve.

[0011] Preferably, the chemical polishing tank is provided with a nitrogen stirring mechanism for stirring by introducing nitrogen gas; the nitrogen stirring mechanism includes an annular gas outlet pipe and nitrogen pipes for connecting the gas outlet pipe and the nitrogen supply device.

[0012] Preferably, the electrolytic cell is provided with an annular conductive mesh, and the workpiece is selectively dissolved in the electrolytic cell by direct current driven by electrochemical principles.

[0013] Preferably, the cleaning tank is equipped with a spray cleaning module for cleaning the chemical media or electrolyte on the surface of the workpiece.

[0014] Preferably, both the chemical polishing tank and the electrolytic tank are provided with a sampling and detection pipeline connected in parallel with the drain pipeline at the bottom; the sampling and detection pipeline is equipped with a sampling solenoid valve.

[0015] Preferably, both the chemical polishing tank and the electrolytic tank are equipped with exhaust gas collectors at their tops.

[0016] Preferably, the chemical polishing tank includes an alkaline polishing tank and an acidic polishing tank; two cleaning tanks are provided, one located between the alkaline polishing tank and the acidic polishing tank, and the other located between the acidic polishing tank and the electrolytic tank.

[0017] Preferably, the alkaline polishing tank is equipped with a heating tube; the heating tube is used to heat the chemical medium so that the chemical medium reaches the optimal dissolution temperature.

[0018] Due to the application of the above technical solution, this utility model has the following advantages compared with the prior art:

[0019] 1. This utility model adopts a multi-station integrated design, integrating alkaline chemical polishing, acidic chemical polishing, electrolytic polishing and cleaning into one device, supporting individual or combined processes;

[0020] 2. This utility model is equipped with a robotic arm structure consisting of a rotating platform and a Z-axis linear module, which enables precise transfer of workpieces between multiple tanks, significantly reducing manual intervention and exposure time, and suppressing the risk of workpiece corrosion.

[0021] 3. This invention introduces nitrogen gas for stirring during chemical polishing and uses a heating tube for precise temperature control, which can improve the polishing quality and stability. Attached Figure Description

[0022] The technical solution of this utility model will be further described below with reference to the accompanying drawings:

[0023] Appendix Figure 1 This is a schematic diagram of the overall structure of the multi-station combined automatic polishing machine described in this utility model;

[0024] Appendix Figure 2 This is a partial structural schematic diagram of the multi-station combined automatic polishing machine described in this utility model;

[0025] Appendix Figure 3 This is a cross-sectional view of the alkaline polishing tank in this utility model;

[0026] Appendix Figure 4 This is a cross-sectional view of the electrolytic cell in this utility model.

[0027] The components include: 1. Frame; 2. Robotic arm; 21. Rotary platform; 22. Z-axis linear module; 23. Lifting frame; 3. Alkaline polishing tank; 31. Drainage pipe; 32. Inlet pipe; 33. Sampling and testing pipe; 34. Nitrogen stirring mechanism; 341. Gas outlet pipe; 342. Nitrogen pipe; 35. Heating pipe; 4. First cleaning tank; 5. Acidic polishing tank; 6. Second cleaning tank; 7. Electrolytic cell; 71. Conductive mesh; 8. Waste gas collector; 9. Rod-shaped fixture. Detailed Implementation

[0028] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments.

[0029] Appendix Figure 1-2 The multi-station combined automatic polishing machine of this utility model includes a frame 1, a robot arm 2 mounted on the frame 1, and multiple troughs placed vertically on the frame 1 with the robot arm 2 as the center.

[0030] The robotic arm 2 includes a rotating platform 21, a Z-axis linear module 22 vertically mounted on the drive end of the rotating platform 21, and a lifting frame 23 mounted on the drive end of the Z-axis linear module 22 for mounting the product to be polished; with the joint cooperation of the rotating platform 21 and the Z-axis linear module 22, the lifting frame 23 can be driven to move the product to be polished between multiple tanks.

[0031] Each of the tanks is equipped with a drain pipe 31 at the bottom and a liquid inlet pipe 32 at the top; each drain pipe 31 is equipped with a drain solenoid valve.

[0032] The plurality of tanks include an alkaline polishing tank 3, a first cleaning tank 4, an acidic polishing tank 5, a second cleaning tank 6, and an electrolytic tank 7; the first cleaning tank 4 is located between the alkaline polishing tank 3 and the acidic polishing tank 5, while the second cleaning tank 6 is located between the acidic polishing tank 5 and the electrolytic tank 7;

[0033] During operation: The product to be polished is manually installed on the lifting frame 23. For example, when polishing semiconductor wafer cutting blades, several semiconductor wafer cutting blades can be first installed on the rod-shaped fixture 9, and then the rod-shaped fixture 9 can be vertically installed on the head of the lifting frame 23.

[0034] Because this application adopts a multi-station integrated design, it integrates alkaline chemical polishing, acidic chemical polishing, electrolytic polishing, and cleaning into one device, supporting individual or combined processes;

[0035] When performing chemical polishing alone: ​​The rotating platform 21 and the Z-axis linear module 22 of the robot arm 2 work together to first send the rod-shaped fixture 9 to the alkaline polishing tank 3 for 5 minutes. Through the dissolving effect of the alkaline chemical medium, the micro-protrusions on the metal surface are preferentially dissolved, thereby achieving surface leveling. Then, the rod-shaped fixture 9 is sent to the first cleaning tank 4 for cleaning, then to the acidic polishing tank 5 for acidic chemical polishing, then to the second cleaning tank 6 for cleaning, and finally to the unloading position for easy loading and unloading by the staff.

[0036] When electropolishing is performed alone: ​​the rotating platform 21 and the Z-axis linear module 22 in the robot arm 2 work together to first send the rod-shaped fixture 9 into the electrolytic cell 7. Using the principle of electrochemistry, the workpiece is selectively dissolved in the electrolytic cell 7 by direct current. Then the rod-shaped fixture 9 is sent to the second cleaning tank 6 for cleaning. Finally, it is sent to the unloading position for easy loading and unloading by the staff.

[0037] When performing combined polishing: the rotating platform 21 and the Z-axis linear module 22 of the robotic arm 2 work together to first send the rod-shaped fixture 9 to the alkaline polishing tank 3 for 5 minutes to soak. Through the dissolving effect of the alkaline chemical medium, the micro-protrusions on the metal surface are preferentially dissolved, thereby achieving surface leveling. Then, the rod-shaped fixture 9 is sent to the first cleaning tank 4 for cleaning, then to the acidic polishing tank 5 for acidic chemical polishing, then to the second cleaning tank 6 for cleaning, then to the electrolytic tank 7 for electropolishing, then to the second cleaning tank 6 for cleaning, and finally to the unloading position for easy loading and unloading by the staff.

[0038] Furthermore, such as Figure 2 As shown, the alkaline polishing tank 3 is equipped with a nitrogen stirring mechanism 34 for stirring by introducing nitrogen gas. When the workpiece is chemically polished in the alkaline polishing tank 3, stirring by introducing nitrogen gas can improve the polishing effect. Moreover, since nitrogen gas is chemically stable at room temperature and pressure, it does not easily react with chemical media and will not damage the chemical media.

[0039] Furthermore, such as Figure 3 As shown, the nitrogen stirring mechanism 34 includes an annular outlet pipe 341 and a nitrogen pipeline 342 for connecting the outlet pipe 341 and the nitrogen supply device. By using an annular outlet pipe 341, this application makes the nitrogen stirring more uniform and improves the consistency of the workpiece surface treatment. Both the outlet pipe 341 and the nitrogen pipeline 342 are made of materials that are not easily corroded by chemical media, such as glass fiber.

[0040] Furthermore, such as Figure 3 As shown, a heating tube 35 is provided inside the alkaline polishing tank 3; the heating tube 35 is used to heat the chemical medium so that the chemical medium reaches the optimal dissolution temperature.

[0041] Furthermore, such as Figure 4 As shown, an annular conductive mesh 71 is provided inside the electrolytic cell 7 to improve the uniformity of electrolysis, ensure uniform distribution of electrolytic polishing current, and improve the consistency of workpiece surface treatment.

[0042] Furthermore, the cleaning tank is equipped with a spray cleaning module for cleaning the chemical media or electrolyte on the surface of the workpiece; the spray cleaning method used in this application can effectively avoid secondary contamination of the workpiece and improve the cleaning effect.

[0043] Furthermore, such as Figure 2 As shown, both the chemical polishing tank and the electrolytic tank 7 are equipped with sampling and detection pipes 33 connected in parallel with the drain pipe 31 at their bottoms; the sampling and detection pipes 33 are equipped with sampling solenoid valves; during operation, the chemical medium can be automatically sampled through the sampling and detection pipes 33 and tested periodically; when the chemical medium does not meet the polishing requirements, the drain solenoid valve is automatically controlled to open the drain pipe 31 to discharge the chemical medium that does not meet the polishing requirements, and the liquid is replenished through the inlet pipe 32, realizing automatic detection and replacement of the chemical medium without manual intervention, and has the advantages of high automation and safety.

[0044] Furthermore, such as Figure 1-2 As shown, both the chemical polishing tank and the electrolytic tank 7 are equipped with exhaust gas collectors 8 at their top, which can collect exhaust gas to reduce pollution and achieve efficient and environmentally friendly production.

[0045] Furthermore, the rotating platform 21, the Z-axis linear module 22, and the spray cleaning module are all existing technologies, so their structures will not be described in detail.

[0046] The above are merely specific application examples of this utility model and do not constitute any limitation on the scope of protection of this utility model. All technical solutions formed by equivalent transformations or equivalent substitutions fall within the scope of protection of this utility model.

Claims

1. A multi-station combined automatic polishing machine, characterized in that: It includes a frame, a robotic arm mounted on the frame, and multiple vertical slots placed on the frame with the robotic arm at the center; The robotic arm includes a rotating platform, a Z-axis linear module vertically mounted on the drive end of the rotating platform, and a lifting frame mounted on the drive end of the Z-axis linear module for mounting the product to be polished; with the joint cooperation of the rotating platform and the Z-axis linear module, the lifting frame can be driven to move the product to be polished between multiple tanks. The plurality of said tanks include at least a chemical polishing tank, a cleaning tank, and an electrolytic tank; Each of the tanks is equipped with a drain pipe at the bottom and a liquid inlet pipe at the top; each drain pipe is equipped with a drain solenoid valve.

2. The multi-station combined automatic polishing machine according to claim 1, characterized in that: The chemical polishing tank is equipped with a nitrogen stirring mechanism for stirring by introducing nitrogen gas; the nitrogen stirring mechanism includes an annular gas outlet pipe and nitrogen pipelines for connecting the gas outlet pipe and the nitrogen supply device.

3. The multi-station combined automatic polishing machine according to claim 1, characterized in that: The electrolytic cell is equipped with a ring-shaped conductive mesh.

4. The multi-station combined automatic polishing machine according to claim 1, characterized in that: The cleaning tank is equipped with a spray cleaning module for cleaning the chemical media or electrolyte on the surface of the workpiece.

5. The multi-station combined automatic polishing machine according to claim 1, characterized in that: Both the chemical polishing tank and the electrolytic tank are equipped with sampling and testing pipes connected in parallel with the drain pipes at their bottoms; the sampling and testing pipes are equipped with sampling solenoid valves.

6. The multi-station combined automatic polishing machine according to claim 1, characterized in that: Both the chemical polishing tank and the electrolytic cell are equipped with exhaust gas collectors at their tops.

7. The multi-station combined automatic polishing machine according to any one of claims 1-6, characterized in that: The chemical polishing tank includes an alkaline polishing tank and an acidic polishing tank; there are two cleaning tanks, one located between the alkaline polishing tank and the acidic polishing tank, and the other located between the acidic polishing tank and the electrolytic tank.

8. The multi-station combined automatic polishing machine according to claim 7, characterized in that: The alkaline polishing tank is equipped with a heating tube; the heating tube is used to heat the chemical medium so that the chemical medium reaches the optimal dissolution temperature.

Images