A device for precisely adjusting Z-R axis of OLED substrate

The ZR axis precision adjustment device driven by a vacuum chuck and servo motor solves the problem of precision adjustment of large-size OLED substrates in the process equipment, realizes precise positioning and angle adjustment of the substrate, and improves processing accuracy and efficiency.

CN224419025UActive Publication Date: 2026-06-26HEFEI YINGSHENGTONG LASER TECHNOLOGY CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
HEFEI YINGSHENGTONG LASER TECHNOLOGY CO LTD
Filing Date
2025-08-06
Publication Date
2026-06-26

AI Technical Summary

Technical Problem

The challenge of precisely adjusting large-size OLED substrates in the Z and R directions within the process equipment has not been effectively solved.

Method used

The ZR axis precision adjustment device, composed of components such as vacuum chuck, servo motor, lead screw and cross roller guide, uses a servo motor to drive a wedge-shaped drive block to move in the X direction, and combines the cross roller guide and wedge-shaped lifting block to lift up and down in the Z direction, so as to achieve precise positioning and angle adjustment of the substrate.

Benefits of technology

It enables precise positioning and angle adjustment of OLED substrates within the process equipment, improving the processing accuracy and efficiency of large-size OLED substrates.

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Abstract

The application relates to the field of OLED substrates, and discloses a Z-R axis precision adjusting device for an OLED substrate. In the application, a vacuum chuck is arranged below a maintenance installation sheet metal, one side surface of the maintenance installation sheet metal is provided with a motor installation plate, one side surface of the motor installation plate is provided with a servo motor through a motor connecting shaft and the motor installation sheet metal, the output end of the servo motor is connected with a wedge-shaped driving block through a lead screw, the side surface of the wedge-shaped driving block is provided with a cross roller guide rail, the upper surface of the wedge-shaped driving block is provided with a wedge-shaped jacking block, one side of the wedge-shaped driving block and the wedge-shaped jacking block is provided with a Z-axis supporting block and a limit sensing sheet, a photoelectric installation plate and a photoelectric switch, the servo motor drives the wedge-shaped driving block to move in the X direction through the lead screw, the driving block inclined surface is provided with the cross roller guide rail, the inclined conduction is given to the wedge-shaped jacking block, the wedge-shaped jacking block is limited in the X direction and can only be jacked in the Z direction.
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Description

Technical Field

[0001] This application belongs to the field of OLED substrate technology, specifically a precision adjustment device for the ZR axis of an OLED substrate. Background Technology

[0002] OLED is one of the mainstream development directions of the new display industry in China, with the country investing over one trillion yuan in this field. To meet market demand for high-quality, large-size display products, global display panel manufacturers will accelerate the deployment of high-generation OLED production lines.

[0003] However, the precise adjustment of large-size OLED substrates in all directions within the process equipment has become a problem that needs to be solved in China. Before laser irradiation, the substrate needs to move in the Z and R directions. Utility Model Content

[0004] The purpose of this application is to provide a precision adjustment device for the ZR axis of an OLED substrate in order to solve the problems mentioned above.

[0005] The technical solution adopted in this application is as follows: A precision adjustment device for the ZR axis of an OLED substrate includes a vacuum suction cup, a maintenance mounting sheet metal, and a device fixing shaft. The maintenance mounting sheet metal is provided below the vacuum suction cup, and a motor mounting plate is provided on one side surface of the maintenance mounting sheet metal. A servo motor is mounted on one side surface of the motor mounting plate through a motor connecting shaft and the motor mounting sheet metal. The output end of the servo motor is connected to a wedge-shaped drive block through a lead screw. A cross roller guide is mounted on the side of the wedge-shaped drive block, and a wedge-shaped lifting block is provided on the upper surface of the wedge-shaped drive block. A Z-axis support block, a limit sensor, a photoelectric mounting plate, and a photoelectric switch are provided on one side of the wedge-shaped lifting block and the wedge-shaped drive block.

[0006] By adopting the above technical solution, the servo motor 12 drives the wedge-shaped drive block 13 to move in the X direction via the lead screw 14. The drive block 13 is mounted with a cross roller guide 16 on its inclined surface, which transmits the signal obliquely to the wedge-shaped lifting block 17. The wedge-shaped lifting block 17 is limited in the X direction and can lift and move up and down in the Z direction. The limit sensor 20 and the photoelectric switch 22 provide feedback on the upper limit position of the wedge-shaped lifting block 17. The vacuum suction cup 1 adsorbs and fixes the OLED substrate, and the DD motor 3 is started, rotating it by a certain angle.

[0007] In a preferred embodiment, a suction cup connecting shaft is provided below the vacuum suction cup, and a DD motor is provided at the bottom end of the suction cup connecting shaft. An R-axis mounting plate is provided at the bottom end of the DD motor, and a lead screw mounting plate is provided between the R-axis mounting plate and the maintenance and installation sheet metal.

[0008] By adopting the above technical solution, the screw mounting plate and R-axis mounting plate not only facilitate the installation and fixation of the DD motor, suction cup connecting shaft and vacuum suction cup, but also facilitate subsequent work.

[0009] In a preferred embodiment, a Z-axis mounting plate is provided above the fixed axis of the device, and the maintenance mounting sheet metal is mounted on the surface of the Z-axis mounting plate. The R-axis mounting plate and the Z-axis mounting plate are respectively provided at both ends of the maintenance mounting sheet metal.

[0010] By adopting the above technical solution, the Z-axis mounting plate and device fixing axis facilitate the maintenance and installation of sheet metal and other structures, while also providing support.

[0011] In a preferred embodiment, a lead screw support A is provided on the surface of the lead screw, and a lead screw nut, a lead screw support B, and a coupling are sequentially provided on one side surface of the wedge-shaped drive block.

[0012] By adopting the above technical solution, and with the help of the lead screw nut, lead screw support B and coupling, the lead screw can drive the wedge-shaped drive block to slide when driven by the motor.

[0013] In a preferred embodiment, the lead screw support A, lead screw, wedge-shaped drive block, lead screw nut, lead screw support B, and coupling are fixedly installed on the surface of the wedge-shaped support block in sequence.

[0014] By adopting the above technical solution, the linkage mechanism is fixed on the wedge support block 18 in the following order: lead screw support A15—lead screw 14—wedge drive block 13—lead screw nut 23—lead screw support B24—coupling 35, so that the structural components can move or adjust in an orderly manner.

[0015] In summary, due to the adoption of the above technical solution, the beneficial effects of this application are:

[0016] In this application, after the OLED substrate is fed into the process equipment by the robotic arm, the adjustment device is already in a fixed position. After the linear camera positions the OLED substrate, the servo motor drives the wedge-shaped drive block to move in the X direction via a lead screw. The drive block is equipped with a cross roller guide on its inclined surface, which transmits the load obliquely to the wedge-shaped lifting block. The wedge-shaped lifting block is limited in the X direction and can only lift in the Z direction. The limit sensor and photoelectric switch provide feedback that the wedge-shaped lifting block has reached its limit position. At this time, the vacuum suction cup adsorbs and fixes the OLED substrate, the DD motor starts, and rotates it by a preset angle according to the angle data fed back by the linear camera above. After the adjustment is completed, the subsequent handling module performs the process steps, and so on. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of the ZR axis precision adjustment device of this application;

[0018] Figure 2 This is a schematic diagram of the exploded structure of the Z-axis structure in this application;

[0019] Figure 3 This is a schematic diagram of the Z-axis motion in this application.

[0020] The markings in the diagram are: 1. Vacuum suction cup; 2. Suction cup connecting shaft; 3. DD motor; 4. R-axis mounting plate; 5. Lead screw mounting plate; 6. Maintenance and installation sheet metal; 7. Z-axis mounting plate; 8. Device fixing shaft; 9. Motor mounting plate; 10. Motor connecting shaft; 11. Motor mounting sheet metal; 12. Servo motor; 13. Wedge-shaped drive block; 14. Lead screw; 15. Lead screw support seat A; 16. Cross roller guide; 17. Wedge-shaped lifting block; 18. Wedge-shaped support block; 19. Z-axis support block; 20. Limit sensor plate; 21. Photoelectric mounting plate; 22. Photoelectric switch; 23. Lead screw nut; 24. Lead screw support seat B; 25. Coupling. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions in the embodiments of this application will be clearly and completely described below in conjunction with the embodiments of this application. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0022] Example:

[0023] Reference Figure 1-3A precision adjustment device for the ZR axis of an OLED substrate includes a vacuum suction cup 1, a maintenance mounting sheet metal 6, and a device fixing shaft 8. The maintenance mounting sheet metal 6 is located below the vacuum suction cup 1, and a motor mounting plate 9 is provided on one side surface of the maintenance mounting sheet metal 6. A servo motor 12 is mounted on one side surface of the motor mounting plate 9 via a motor connecting shaft 10 and the motor mounting sheet metal 11. The output end of the servo motor 12 is connected to a wedge-shaped drive block 13 via a lead screw 14. A cross-shaped drive block 13 is mounted on the side of the wedge-shaped drive block 13. A forked roller guide 16 is provided, and a wedge-shaped lifting block 17 is provided on the upper surface of the wedge-shaped drive block 13. A Z-axis support block 19, a limit sensor 20, a photoelectric mounting plate 21, and a photoelectric switch 22 are provided on one side of the wedge-shaped drive block 13 and the wedge-shaped lifting block 17. The servo motor 12 drives the wedge-shaped drive block 13 to move in the X direction through the lead screw 14. The cross roller guide 16 is installed on the inclined surface of the drive block 13, which transmits the signal obliquely to the wedge-shaped lifting block 17. The wedge-shaped lifting block 17 is limited in the X direction and can lift and move up and down in the Z direction. The limit sensor 20 and the photoelectric switch 22 provide feedback on the upper limit position of the wedge-shaped lifting block 17. The vacuum suction cup 1 adsorbs and fixes the OLED substrate, and the DD motor 3 is started, rotating a certain angle.

[0024] Reference Figure 1 A suction cup connecting shaft 2 is provided below the vacuum suction cup 1, and a DD motor 3 is provided at the bottom end of the suction cup connecting shaft 2. An R-axis mounting plate 4 is provided at the bottom end of the DD motor 3, and a screw mounting plate 5 is provided between the R-axis mounting plate 4 and the maintenance and installation sheet metal 6. The screw mounting plate 5 and the R-axis mounting plate 4 not only facilitate the installation and fixation of the DD motor 3, the suction cup connecting shaft 2 and the vacuum suction cup 1, but also facilitate subsequent work.

[0025] Reference Figure 1 A Z-axis mounting plate 7 is provided above the device fixing shaft 8, and the maintenance and installation sheet metal 6 is installed on the surface of the Z-axis mounting plate 7. The R-axis mounting plate 4 and the Z-axis mounting plate 7 are respectively provided at both ends of the maintenance and installation sheet metal 6. The Z-axis mounting plate 7 and the device fixing shaft 8 facilitate the installation of the maintenance and installation sheet metal 6 and other structures, and can also provide support.

[0026] Reference Figure 1-2 The lead screw 14 is provided with a lead screw support seat A15, and the lead screw 14 is provided with a lead screw nut 23, a lead screw support seat B24 and a coupling 25 in sequence on one side surface of the wedge-shaped drive block 13. The lead screw nut 23, lead screw support seat B24 and coupling 25 are provided in a coordinated manner so that the lead screw 14 can drive the wedge-shaped drive block 13 to slide when driven by the motor.

[0027] Reference Figure 1-2The lead screw support A15, lead screw 14, wedge-shaped drive block 13, lead screw nut 23, lead screw support B24, and coupling 25 are fixedly installed on the surface of the wedge-shaped support block 18 in sequence. The linkage mechanism is fixed on the wedge-shaped support block 18 in the order of lead screw support A15—lead screw 14—wedge-shaped drive block 13—lead screw nut 23—lead screw support B24—coupling 35, so that the structural components can move or adjust in an orderly manner.

[0028] The implementation principle of an embodiment of a precision adjustment device for the ZR axis of an OLED substrate in this application is as follows:

[0029] Servo motor 12 drives wedge-shaped drive block 13 to move in the X direction via lead screw 14. Cross roller guide rail 16 is mounted on the inclined surface of drive block 13, transmitting the signal obliquely to wedge-shaped lifting block 17. Wedge-shaped lifting block 17 is limited in the X direction and can lift and move up and down in the Z direction. Limit sensor 20 and photoelectric switch 22 provide feedback on the upper limit position of wedge-shaped lifting block 17. Vacuum suction cup 1 adsorbs and fixes the OLED substrate, and DD motor 3 starts, rotating it by a certain angle.

[0030] Figure 1 In the middle, the vacuum suction cup 1 is mounted on the DD motor 3 via the suction cup connecting shaft 2. The DD motor 3 is mounted on the R-axis mounting plate 4. The lead screw mounting plate 5 and the motor mounting plate 9 are fixed on the Z-axis mounting plate 7. The servo motor 12 is mounted on the motor mounting plate 9 via the motor connecting shaft 10. The maintenance mounting sheet metal 6 and the motor mounting sheet metal 11 are designed to be removable for periodic maintenance.

[0031] Figure 2 In this configuration, the linkage mechanism is fixed on the wedge-shaped support block 18 in the following order: lead screw support A15—lead screw 14—wedge-shaped drive block 13—lead screw nut 23—lead screw support B24—coupling 35. The wedge-shaped lifting block 17 is mounted on the wedge-shaped drive block 13, and the photoelectric switch 22 is mounted on the Z-axis support block 19 via the photoelectric mounting plate 21. The limit sensor 20 moves up and down with the wedge structure. The displacement and limit in each direction mentioned in the working principle are achieved through the crossed roller guide 16.

[0032] The above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application.

Claims

1. A precision adjustment device for the ZR axis of an OLED substrate, comprising a vacuum chuck (1), a maintenance and mounting sheet metal (6), and a device fixing shaft (8), characterized in that: Below the vacuum suction cup (1) is a maintenance mounting sheet metal (6), and a motor mounting plate (9) is provided on one side surface of the maintenance mounting sheet metal (6). A servo motor (12) is mounted on one side surface of the motor mounting plate (9) through a motor connecting shaft (10) and a motor mounting sheet metal (11). The output end of the servo motor (12) is connected to a wedge-shaped drive block (13) through a lead screw (14). A cross roller guide rail (16) is installed on the side of the wedge-shaped drive block (13). A wedge-shaped lifting block (17) is provided on the upper surface of the wedge-shaped drive block (13). A Z-axis support block (19), a limit sensor (20), a photoelectric mounting plate (21), and a photoelectric switch (22) are provided on one side of the wedge-shaped lifting block (17) and the wedge-shaped drive block (13).

2. The precision adjustment device for the ZR axis of an OLED substrate as described in claim 1, characterized in that: A suction cup connecting shaft (2) is provided below the vacuum suction cup (1), and a DD motor (3) is provided at the bottom end of the suction cup connecting shaft (2). An R-axis mounting plate (4) is provided at the bottom end of the DD motor (3), and a lead screw mounting plate (5) is provided between the R-axis mounting plate (4) and the maintenance and installation sheet metal (6).

3. The precision adjustment device for the ZR axis of an OLED substrate as described in claim 2, characterized in that: A Z-axis mounting plate (7) is provided above the fixed shaft (8) of the device, and the maintenance mounting sheet metal (6) is installed on the surface of the Z-axis mounting plate (7). The R-axis mounting plate (4) and the Z-axis mounting plate (7) are respectively provided at both ends of the maintenance mounting sheet metal (6).

4. The precision adjustment device for the ZR axis of an OLED substrate as described in claim 3, characterized in that: The surface of the lead screw (14) is provided with a lead screw support seat A (15), and the lead screw (14) is provided with a lead screw nut (23), a lead screw support seat B (24) and a coupling (25) in sequence on one side surface of the wedge-shaped drive block (13).

5. The precision adjustment device for the ZR axis of an OLED substrate as described in claim 4, characterized in that: The lead screw support A (15), lead screw (14), wedge drive block (13), lead screw nut (23), lead screw support B (24) and coupling (25) are fixedly installed on the surface of wedge support block (18) in sequence.