An electrostatic chuck assembly / disassembly device

Abstract

This utility model discloses a disassembly and assembly device for an electrostatic chuck, including an adjusting bracket; a protective cover movably mounted on the adjusting bracket in a vertical direction, the protective cover being connected to the electrostatic chuck to drive the electrostatic chuck to move in the vertical direction; the protective cover having multiple operating holes, each corresponding to a screw of the electrostatic chuck; and multiple indicator parts, all located on the protective cover, each indicator part corresponding to one of the operating holes, to indicate the disassembly and assembly sequence of the screws. This utility model can ensure that the tools used for disassembling and assembling the electrostatic chuck are not easily bumped against the surface of the electrostatic chuck during the disassembly and assembly process, avoiding damage to the electrostatic chuck due to a lack of a fixed disassembly and assembly sequence.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a disassembly and assembly device for an electrostatic chuck. Background Technology

[0002] An electrostatic chuck is a tool used to hold wafers in place and is widely used in semiconductor processes in plasma and vacuum environments.

[0003] In existing technology, T-screws are used to install on both ends of the electrostatic chuck when disassembling and assembling it. Disassembly requires two people to work together. Due to the confined space at the work site, it is extremely easy to accidentally touch the surrounding operating chambers, causing the machine to crash. In addition, the difference in strength between the two people can easily cause the electrostatic chuck to tilt and hit the inner wall of the chamber during disassembly, damaging the electrostatic chuck. Furthermore, there is no fixed order for screw disassembly and assembly, which can easily lead to missing screws or insufficient torque when fixing the screws, resulting in damage to the electrostatic chuck.

[0004] Therefore, it is necessary to provide a new electrostatic chuck assembly and disassembly device to solve the above-mentioned problems existing in the prior art. Utility Model Content

[0005] The purpose of this utility model is to provide a disassembly and assembly device for electrostatic chucks, which can ensure that the tools used for disassembly and assembly of electrostatic chucks are not easily bumped against the surface of the electrostatic chucks during the disassembly and assembly process, and avoid damage to the electrostatic chucks due to the lack of a fixed order during disassembly and assembly.

[0006] To achieve the above objectives, the technical solution of this utility model is as follows:

[0007] An electrostatic chuck assembly / disassembly device includes an adjustment bracket;

[0008] A protective cover is movably mounted on the adjusting bracket in a vertical direction. The protective cover is used to connect with the electrostatic chuck to drive the electrostatic chuck to move in a vertical direction. The protective cover has multiple operating holes, each of which corresponds to a screw of the electrostatic chuck.

[0009] Multiple indicator sections are provided on the protective cover, and each indicator section corresponds to one of the operating holes to indicate the order of screw removal and installation.

[0010] By adopting the above technical solution, due to the installation of a protective cover and an indicator, during the assembly and disassembly of the electrostatic chuck, the protective cover and the electrostatic chuck are connected, and the screws at the operating holes are disassembled or installed according to the numerical sequence indicated by the indicator. During the assembly and disassembly process, the tools used to disassemble and assemble the electrostatic chuck are less likely to bump the surface of the electrostatic chuck. At the same time, there is a fixed sequence for disassembly and assembly, which avoids damage to the electrostatic chuck due to a lack of a fixed sequence, thus ensuring the stability of the electrostatic chuck assembly and disassembly process. In addition, the vertical movement of the protective cover can drive the electrostatic chuck to move, making it less likely to be bumped during the movement, avoiding the possibility of equipment downtime due to human error, and ensuring the normal production process of the equipment.

[0011] Optionally, the adjusting bracket includes a top plate;

[0012] Multiple positioning supports are fixedly mounted on the top plate, and the multiple positioning supports surround to form a receiving space to accommodate the electrostatic chuck;

[0013] A control component, inserted through the top plate and connected to the protective cover, drives the protective cover to move along the axial direction of the positioning support rod within the accommodating space.

[0014] Optionally, a control hole is provided on the top plate, and a control component is rotatably disposed in the control hole. One end of the control component is connected to the protective cover so that when the control component rotates, it drives the protective cover to move along the axial direction of the positioning support rod. During operation, one person can control the rotation of the control component to raise the protective cover, thereby separating the electrostatic chuck from the machine base, ensuring the horizontal reference accuracy while facilitating the disassembly and assembly process.

[0015] Optionally, the adjusting bracket further includes a base plate, which is fixedly mounted on the positioning support rod and surrounds the protective cover. The base plate is used to contact the machine base to support the positioning support rod.

[0016] Optional, also includes:

[0017] A limiting ring is fixedly disposed on the side wall of the protective cover and movable on the positioning support rod along the axial direction of the positioning support rod; a connecting hole is provided on the limiting ring, the connecting hole corresponds to the locking pin hole of the electrostatic chuck, and penetrates the limiting ring and the side wall of the protective cover.

[0018] A connector, detachably disposed at the connection hole and the locking pin hole, is used to connect the protective cover to the electrostatic chuck.

[0019] Optionally, the indicator is a positive integer numerical structure, and each indicator represents a different numerical value.

[0020] Optionally, each pair of operating holes symmetrical about the protective cover axially forms a disassembly / assembly group, and multiple disassembly / assembly groups are distributed circumferentially along the protective cover; the values ​​indicated by the indicator corresponding to the two operating holes in each disassembly / assembly group are consecutive positive integers.

[0021] Optionally, the protective cover is divided into multiple disassembly and assembly areas, and the multiple disassembly and assembly areas are distributed circumferentially on the protective cover;

[0022] The disassembly / assembly area includes mutually perpendicular disassembly / assembly sections, and each disassembly / assembly section contains at least one disassembly / assembly group.

[0023] Optionally, the protective cover is provided with an alignment part for cooperating with an alignment mark to indicate the placement direction of the protective cover.

[0024] Optionally, it also includes symmetrically arranged transfer members, which are fixedly disposed on the top plate, and a gripping space is formed between the transfer members and the top plate for gripping. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the main structure of a disassembly and assembly device according to an embodiment of the present utility model;

[0026] Figure 2 This is a distribution diagram of the operating holes and indicator parts on the protective cover according to an embodiment of the present utility model;

[0027] Figure 3 This is a schematic diagram illustrating the division of a disassembly assembly on a protective cover according to an embodiment of the present utility model;

[0028] Figure 4 This is a schematic diagram showing a disassembly and assembly area on a protective cover according to an embodiment of the present utility model, wherein each disassembly and assembly area includes a disassembly and assembly group.

[0029] Figure 5 This is a schematic diagram showing a disassembly and assembly area on a protective cover according to an embodiment of the present utility model, wherein each disassembly and assembly area includes two disassembly and assembly groups.

[0030] Figure label:

[0031] 100. Adjusting bracket; 110. Top plate; 111. Control hole; 120. Positioning rod; 130. Control component; 140. Base plate; 200. Protective cover; 210. Operating hole; 220. Indicator; 300. Limiting ring; 400. Connecting hole; 500. Disassembly assembly; 600. Disassembly area; 610. Disassembly section; 700. Alignment part; 800. Transfer component. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions in the embodiments of this utility model will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art to which this utility model pertains. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but does not exclude other elements or objects.

[0033] The following is in conjunction with the appendix Figure 1-5 The specific embodiments of this utility model will be further described in detail below.

[0034] This utility model provides a disassembly and assembly device for disassembling and assembling an electrostatic chuck, which protects the surface of the electrostatic chuck from bumps and scratches during disassembly and assembly; it also indicates the disassembly and assembly sequence of screws to prevent omissions or insufficient torque during tightening. The disassembly and assembly device includes an adjusting bracket 100;

[0035] The protective cover 200 is movably mounted on the adjusting bracket 100 in the vertical direction. The protective cover 200 is used to connect with the electrostatic chuck to drive the electrostatic chuck to move in the vertical direction. The protective cover 200 has multiple operating holes 210, which correspond to the screws of the electrostatic chuck.

[0036] Multiple indicator sections 220 are provided on the protective cover 200, and each indicator section 220 corresponds to an operating hole 210 to indicate the order of screw removal and installation.

[0037] The adjusting bracket 100 serves as a support. By moving the position of the adjusting bracket 100, the protective cover 200 and the indicator 220 can be moved. When it is necessary to disassemble the electrostatic chuck, the adjusting bracket 100 can be moved to the machine platform and aligned with the electrostatic chuck, so as to disassemble or install the electrostatic chuck.

[0038] In some embodiments, refer to Figure 1 and Figure 2The protective cover 200 is used to connect with the electrostatic chuck. The movement of the protective cover 200 can drive the movement of the electrostatic chuck. In some specific embodiments, the protective cover 200 has the same shape as the electrostatic chuck and can cover the electrostatic chuck for connection. By moving the protective cover 200 vertically, the electrostatic chuck is also moved vertically, thus reducing the possibility of damage to the electrostatic chuck caused by tilting and colliding with the machine tool during installation or disassembly.

[0039] In some specific embodiments, the electrostatic chuck is equipped with multiple screws that connect the chuck to the machine tool. These screws are evenly distributed circumferentially on the chuck. To ensure that the connection between the protective cover 200 and the electrostatic chuck does not interfere with the screw removal or installation process, the protective cover 200 has multiple operating holes 210 that penetrate the cover. Each operating hole 210 corresponds to one of the screws on the electrostatic chuck, facilitating screw removal or installation. After connecting the protective cover 200 to the electrostatic chuck, the screws are exposed in their corresponding operating holes 210. A removal or installation tool can be inserted into the operating hole 210 to remove or install the screws.

[0040] In some more specific embodiments, the protective cover 200 is further provided with multiple indicator sections 220, each corresponding to a single operating hole 210. The indicator sections 220 indicate the sequence of screw removal or installation. During screw removal or installation, the screws are removed or installed according to the sequence indicated by the indicator sections 220 to prevent omissions or insufficient torque during installation, thereby avoiding damage to the electrostatic chuck due to a lack of a fixed sequence during removal and installation. The specific structure and indicating method of the indicator sections 220 will be described later.

[0041] The adjusting bracket 100 includes a top plate 110;

[0042] Multiple positioning support rods 120 are fixedly installed on the top plate 110, and the multiple positioning support rods 120 surround to form an accommodating space to accommodate the electrostatic chuck;

[0043] The control component 130 is installed in the top plate 110 and connected to the protective cover 200 to drive the protective cover 200 to move along the axial direction of the positioning support rod 120 in the accommodating space.

[0044] To facilitate the alignment of the support 100 with the electrostatic chuck and to facilitate the movement of the electrostatic chuck. (Refer to...) Figure 1 and Figure 2The adjusting bracket 100 also includes a top plate 110, on which multiple positioning rods 120 are fixedly mounted. The fixing method can be adhesive, snap-fit, or bolted, etc., without limitation, as long as the position of the positioning rods 120 on the top plate 110 does not move. The multiple positioning rods 120 surround to form a receiving space for accommodating the electrostatic chuck. When the adjusting bracket 100 is placed on the machine tool, the multiple positioning rods 120 surround the electrostatic chuck, allowing the electrostatic chuck to be accommodated within the receiving space. In some embodiments, to facilitate observation of the protective cover 200 and the electrostatic chuck, multiple holes are provided in the top plate 110, making the top plate 110 hollow to facilitate observation of the protective cover 200 and the electrostatic chuck, and also facilitating screw removal or installation.

[0045] In some specific embodiments, the multiple positioning rods 120 are of the same length so that after the adjusting bracket 100 is placed on the machine, the multiple positioning rods 120 are in contact with the machine. The top plate 110 and the protective cover 200 are both set horizontally to ensure the horizontal reference of the adjusting bracket 100.

[0046] In some embodiments, the control member 130 is connected to the protective cover 200, and the control member 130 can drive the protective cover 200 to move along the axial direction of the positioning support rod 120 within the accommodating space, that is, to move in the vertical direction. Thus, after the protective cover 200 is connected to the electrostatic chuck, the control member 130 drives the electrostatic chuck to move by driving the protective cover 200 to move.

[0047] In some embodiments, the control element 130 may be a cylinder or an electric cylinder, etc., fixedly mounted on the top plate 110 to drive the protective cover 200 to move; it may also be other devices capable of driving the protective cover 200 to move. Specifically, the top plate 110 is provided with a control hole 111, and the control element 130 is rotatably mounted in the control hole 111. One end of the control element 130 is connected to the protective cover 200 so that when the control element 130 rotates, it drives the protective cover 200 to move along the axial direction of the positioning support rod 120.

[0048] The control hole 111 passes through the top plate 110 in a vertical direction. The control member 130 is rod-shaped and passes through the control hole 111. The control member 130 can rotate around its own axis within the control hole 111. At the same time, one end of the control member 130 is connected to the protective cover 200 so that when the control member 130 rotates, it drives the protective cover 200 to move along the axial direction of the positioning support rod 120 within the accommodating space.

[0049] In some embodiments, the control member 130 is threadedly connected to the inner wall of the control hole 111, and one end of the control member 130 is connected to the protective cover 200, while the other end is provided with a control handle. During use, because the control member 130 is threadedly connected to the inner wall of the control hole 111, rotating the control member 130 allows it to rise or fall vertically within the control hole 111, thereby moving the protective cover 200. More specifically, since the other end of the control member 130 is provided with a control handle, rotating the control handle will cause the control member 130 to rotate.

[0050] In some specific embodiments, the control component 130 and the protective cover 200 are coaxially arranged. The connection between the control component 130 and the protective cover 200 can be a fixed connection or a rotatable connection. To facilitate alignment between the protective cover 200 and the electrostatic chuck, the control component 130 is rotatably mounted on the protective cover 200. To facilitate the rotation of the control component 130 by the control handle, the control handle is fixedly mounted on the other end of the control component 130. The fixing method can be adhesive, snap-fit, or bolted, etc., without limitation, with the primary goal of ensuring that the control handle and the control component 130 can rotate synchronously.

[0051] The adjusting bracket 100 also includes a base plate 140, which is fixedly mounted on the positioning support rod 120 and surrounds the protective cover 200. The base plate 140 is used to contact the machine tool to support the positioning support rod 120.

[0052] In some embodiments, multiple positioning rods 120 are fixed to the base plate 140. To facilitate the accommodation of the electrostatic chuck, the base plate 140 is annular. After the adjusting bracket 100 is placed on the machine tool, the base plate 140 contacts the machine tool, thereby ensuring the horizontal reference of the adjusting bracket 100. Simultaneously, the base plate 140 supports the positioning rods 120. It is worth noting that the positioning rods 120 should have sufficient length so that the distance between the top plate 110 and the base plate 140 is sufficient for the movement of the protective cover 200. In actual use, the length of the positioning rods 120 is set according to operational requirements and is not limited here.

[0053] The disassembly and assembly device also includes:

[0054] The limiting ring 300 is fixedly installed on the side wall of the protective cover 200 and is movable on the positioning support rod 120 along the axial direction of the positioning support rod 120; the limiting ring 300 is provided with a connecting hole 400, which corresponds to the locking pin hole of the electrostatic chuck and penetrates the limiting ring 300 and the side wall of the protective cover 200.

[0055] A connector, detachably provided in the connection hole 400 and the locking pin hole, is used to connect the protective cover 200 to the electrostatic chuck.

[0056] In some embodiments, the locking pin holes on the sidewall of the electrostatic chuck are existing technologies and will not be described in detail here.

[0057] In some embodiments, refer to Figure 1 and Figure 2 To facilitate the fixing of the protective cover 200 and the electrostatic chuck, a limiting ring 300 is fixed to the side wall of the protective cover 200. The limiting ring 300 is annular, and its inner wall fits against the outer wall of the protective cover 200, thus fixing the two together. The fixing method can be adhesive, snap-fit, or bolt fixing, etc., without limitation, as long as there is no relative movement between the two. At the same time, a connecting hole 400 is opened on the limiting ring 300, which penetrates horizontally through the limiting ring 300 and the side wall of the protective cover 200. The connecting hole 400 corresponds to the locking pin hole on the side wall of the electrostatic chuck. In the process of connecting the protective cover 200 and the electrostatic chuck, the position of the connecting hole 400 is first adjusted to correspond to the position of the locking pin hole, and then the positions of the connecting hole 400 and the locking pin hole are fixed.

[0058] In some embodiments, in order to facilitate fixing the positions of the connecting hole 400 and the locking pin hole, a connector is also provided. The connector can be inserted into both the connecting hole 400 and the locking pin hole at the same time, thereby fixing the relative position of the protective cover 200 and the electrostatic chuck, and connecting the protective cover 200 and the electrostatic chuck through the connector.

[0059] In some more specific embodiments, a limiting part is also included. The limiting part is plate-shaped and has a limiting hole. The limiting hole is used to pass through the positioning support rod 120, so that the limiting part can move along the axial direction of the positioning support rod 120. At the same time, the limiting part is connected to the limiting ring 300. Specifically, the limiting part is connected to the limiting ring 300 through a connecting rod, so that there is a gap between the limiting part and the limiting ring 300 in the vertical direction. By setting the limiting part, the movement direction of the protective cover 200 can be further restricted, reducing the possibility of the protective cover 200 deviating from its movement direction.

[0060] The indicator section 220 is a positive integer numerical structure, and each indicator section 220 represents a different numerical value.

[0061] In some embodiments, refer to Figure 2 The indicator 220 is a numerical structure that can indicate a value, and the indicated value is a positive integer. Each indicator 220 represents a different value. During the disassembly or installation of screws, the disassembly or installation can be carried out from the smallest to the largest value indicated by the indicator 220, or from the largest to the smallest value indicated by the indicator 220. For example, if the indicator 220 indicates 1, 2, and 3 respectively, the disassembly process is to first disassemble the screw indicated at position 1, then the screw indicated at position 2, then the screw indicated at position 3, and so on. The installation process is the same as described above.

[0062] Each pair of operation holes 210 symmetrical about the protective cover 200 forms a disassembly and assembly group 500, and multiple disassembly and assembly groups 500 are distributed circumferentially along the protective cover 200; the values ​​indicated by the indicator 220 corresponding to the two operation holes 210 in each disassembly and assembly group 500 are consecutive positive integers.

[0063] In some embodiments, refer to Figure 3 , Figure 4 and Figure 5 Taking the disassembly process as an example, to ensure stress balance on the electrostatic chuck during disassembly, every two axially symmetrical operating holes 210 about the protective cover 200 are divided into a disassembly / reassembly group 500. The indicator 220 corresponding to the two operating holes 210 within each disassembly / reassembly group 500 indicates a continuous positive integer value. That is, during disassembly, the screws corresponding to the two operating holes 210 within a disassembly / reassembly group 500 are disassembled one at a time. Within the disassembly / reassembly group 500, the screws corresponding to the two operating holes 210 are disassembled sequentially or simultaneously. More specifically, multiple disassembly / reassembly groups 500 are distributed circumferentially around the protective cover 200, and the screws corresponding to the operating holes 210 within a specific disassembly / reassembly group 500 are disassembled one at a time to ensure stress balance on the electrostatic chuck during disassembly.

[0064] The protective cover 200 is divided into multiple disassembly and assembly areas 600, which are distributed circumferentially on the protective cover 200.

[0065] The disassembly / assembly area 600 includes mutually perpendicular disassembly / assembly sections 610, each disassembly / assembly section 610 containing at least one disassembly / assembly assembly 500.

[0066] In some embodiments, during disassembly, in addition to ensuring stress balance in the area corresponding to each disassembly / assembly assembly 500, it is also necessary to further ensure stress balance of the electrostatic chuck as a whole. Therefore, the protective cover 200 is divided into multiple disassembly / assembly areas 600, each including mutually perpendicular disassembly / assembly intervals 610, and each disassembly / assembly interval 610 containing at least one disassembly / assembly assembly 500. During disassembly, the screws corresponding to the operating holes 210 in each disassembly / assembly area 600 are disassembled sequentially. Specifically, within each disassembly / assembly area 600, the screws corresponding to the operating holes 210 in one disassembly / assembly interval 610 are disassembled first, and then the screws corresponding to the operating holes 210 in the other disassembly / assembly interval 610 are disassembled. Since the two disassembly / assembly intervals 610 are perpendicular to each other, this disassembly process ensures stress balance within the same disassembly / assembly area 600. More specifically, two disassembly / assembly zones 610 are defined as the first zone and the second zone, which are perpendicular to each other. During disassembly, the screws corresponding to the operating holes 210 in the first zone are disassembled first, and then the screws corresponding to the operating holes 210 in the second zone are disassembled. Since there are multiple disassembly / assembly areas 600, which are circumferentially distributed on the protective cover 200, it can be understood that the first zone rotates clockwise or counterclockwise to ensure that the multiple disassembly / assembly areas 600 are circumferentially distributed on the protective cover 200. During disassembly, after the screws corresponding to the operating holes 210 in one of the disassembly / assembly areas 600 are disassembled, the screws corresponding to the operating holes 210 in the adjacent disassembly / assembly areas 600 are disassembled to ensure that the stress and torque on the electrostatic chuck remain balanced during the screw disassembly process.

[0067] In some specific embodiments, each disassembly / assembly section 610 may contain one disassembly / assembly group 500 or multiple disassembly / assembly groups 500. There is no limitation here. In actual use, the groups are allocated according to the disassembly requirements, so that the stress and torque on the electrostatic chuck are kept in balance during the screw disassembly process.

[0068] The protective cover 200 is provided with an alignment part 700, which is used to align the markings to indicate the placement direction of the protective cover 200.

[0069] To facilitate the alignment of the connecting hole 400 and the locking pin hole, refer to... Figure 2 An alignment part 700 is provided on the protective cover 200. The alignment part 700 serves as an indicator. Since the electrostatic chuck is equipped with an alignment mark, when the alignment part 700 is aligned with the alignment mark during use, the connecting hole 400 is aligned with the locking pin hole, so as to facilitate the installation process of the connector.

[0070] In some embodiments, when there is no alignment mark on the electrostatic chuck, an alignment mark can be set on the machine. Here, the shape of the alignment part 700 and the alignment mark is not limited. For example, both can be arrow-shaped, so as to ensure that the connecting hole 400 and the locking pin hole are aligned when the alignment part 700 and the alignment mark are aligned.

[0071] The disassembly and assembly device also includes symmetrically arranged transfer members 800, which are fixedly mounted on the top plate 110, and a gripping space is formed between the transfer members 800 and the top plate 110 for gripping.

[0072] In some embodiments, refer to Figure 1 The transfer component 800 is arranged in a "C" shape, and both ends of the transfer component 800 are fixed to the top plate 110. The fixing method can be adhesive, snap-fit, or bolt fixing, etc., without limitation. The main point is that the transfer component 800 can be stably connected to the top plate 110. A gripping space is formed between the transfer component 800 and the top plate 110 to facilitate gripping. Moving the transfer component 800 can move the adjusting bracket 100, avoiding the problem of the electrostatic chuck tilting and bumping due to the difference in force when two people control the adjustment bracket 100. That is, one person can control the movement of the adjusting bracket 100, thereby improving the problem of bumping and facilitating transportation.

[0073] The implementation principle of the electrostatic chuck disassembly and assembly device in this application embodiment is as follows: the adjusting bracket 100 is placed on the machine tool, and the connecting hole 400 on the protective cover 200 is aligned with the locking pin hole on the electrostatic chuck. The connector is inserted into the connecting hole 400 and the locking pin hole to connect the protective cover 200 and the electrostatic chuck. The screws at the operating hole 210 are disassembled or installed according to the numerical sequence indicated by the indicator 220. During the disassembly and assembly process, the tools for disassembling and assembling the electrostatic chuck are less likely to bump the surface of the electrostatic chuck. At the same time, there is a fixed sequence for disassembly and assembly, which avoids damage to the electrostatic chuck due to the lack of a fixed sequence. In addition, since the transfer member 800 is set, the movement of the adjusting bracket 100 can be controlled by one person, which avoids the electrostatic chuck being tilted and bumped due to uneven force when disassembling the electrostatic chuck caused by the difference in strength between two people.

[0074] Although the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as described in the claims. Moreover, the utility model described herein may have other embodiments and can be implemented or realized in various ways.

Claims

1. A device for disassembling and assembling an electrostatic chuck, characterized in that, Includes an adjustment bracket (100); A protective cover (200) is movably disposed on the adjusting bracket (100) in the vertical direction. The protective cover (200) is used to connect with the electrostatic chuck to drive the electrostatic chuck to move in the vertical direction. The protective cover (200) is provided with a plurality of operating holes (210), and the plurality of operating holes (210) correspond to the screws of the electrostatic chuck respectively. Multiple indicator sections (220) are provided on the protective cover (200), and each indicator section (220) corresponds to one of the operating holes (210) to indicate the order of disassembly and assembly of the screws.

2. The disassembly and assembly device according to claim 1, characterized in that, The adjusting bracket (100) includes a top plate (110); Multiple positioning rods (120) are fixedly mounted on the top plate (110), and the multiple positioning rods (120) surround each other to form a receiving space to accommodate the electrostatic chuck; A control element (130) is inserted through the top plate (110) and connected to the protective cover (200) to drive the protective cover (200) to move along the axial direction of the positioning support rod (120) in the accommodating space.

3. The disassembly and assembly device according to claim 2, characterized in that, The top plate (110) has a control hole (111), and the control component (130) is rotatably disposed in the control hole (111). One end of the control component (130) is connected to the protective cover (200) so that when the control component (130) rotates, it drives the protective cover (200) to move along the axial direction of the positioning support rod (120).

4. The disassembly and assembly device according to claim 2, characterized in that, The adjusting bracket (100) also includes a base plate (140), which is fixedly mounted on the positioning support rod (120) and surrounds the protective cover (200). The base plate (140) is used to contact the machine base to support the positioning support rod (120).

5. The disassembly and assembly device according to claim 2, characterized in that, Also includes: A limiting ring (300) is fixedly disposed on the side wall of the protective cover (200) and movable along the axial direction of the positioning support rod (120); a connecting hole (400) is provided on the limiting ring (300), the connecting hole (400) corresponds to the locking pin hole of the electrostatic chuck, and penetrates the limiting ring (300) and the side wall of the protective cover (200); A connector is detachably provided at the connection hole (400) and the locking pin hole to connect the protective cover (200) to the electrostatic chuck.

6. The disassembly and assembly device according to claim 1, characterized in that, The indicator (220) is a positive integer numerical structure, and each indicator (220) represents a different numerical value.

7. The disassembly and assembly device according to claim 1, characterized in that, Each pair of operation holes (210) symmetrical about the protective cover (200) forms a disassembly group (500), and multiple disassembly groups (500) are distributed circumferentially along the protective cover (200); the values ​​indicated by the indicator (220) corresponding to the two operation holes (210) in each disassembly group (500) are consecutive positive integers.

8. The disassembly and assembly device according to claim 7, characterized in that, The protective cover (200) is divided into multiple disassembly and assembly areas (600), which are circumferentially distributed on the protective cover (200); The disassembly / assembly area (600) includes mutually perpendicular disassembly / assembly sections (610), each of the disassembly / assembly sections (610) containing at least one of the disassembly / assembly groups (500).

9. The disassembly and assembly device according to claim 1, characterized in that, The protective cover (200) is provided with an alignment part (700) for cooperating with an alignment mark to indicate the placement direction of the protective cover (200).

10. The disassembly and assembly device according to claim 2, characterized in that, It also includes symmetrically arranged transfer members (800), which are fixedly disposed on the top plate (110), and a gripping space is formed between the transfer members (800) and the top plate (110) for gripping.

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