A limit seat structure for a wafer transfer box unlocking and opening system

Abstract

This utility model relates to the technical field of wafer transfer box unlocking and opening structure, and in particular to a limiting seat structure for a wafer transfer box unlocking and opening system. It includes a limiting seat structure body, a slide plate and a belt conveyor of a motor belt, an assembly plate on the top of the seat body, an electric telescopic cylinder device on the bottom of the assembly plate, a connecting rod on the output rod of the electric telescopic cylinder device, a stud that is combined with the threaded hole at the bottom of the connecting rod and the threaded hole inside the frame rod of the connecting frame, a first shaft block installed with a pre-drilled hole on the outside of the connecting frame, a second shaft block installed with a pre-drilled hole on the outside of the slide plate, a third shaft block installed with a pre-drilled hole on the outside of the seat body, and the first shaft block installed inside the frame plate. Through the above-mentioned configuration, this utility model allows for convenient linkage installation and limiting of the connecting frame, frame plate, and slide plate, resulting in a better linkage installation effect.

Description

Technical Field

[0001] This utility model relates to the technical field of wafer transfer box unlocking and opening structure, specifically a limiting seat structure for a wafer transfer box unlocking and opening system. Background Technology

[0002] A wafer transfer box is a container used in semiconductor manufacturing processes to protect, transport, and store wafers. It typically holds a certain number of wafers, and its main component is a front-opening container that can hold 25 wafers, with a front-opening sealed door for opening and closing. It is an important transfer container used in automated transfer systems within wafer fabs. When wafers need to be loaded into process equipment for processing, a dedicated unlocking and opening system is required to open the sealed door of the front-opening wafer loading box before subsequent loading can proceed. The wafer transfer box unlocking and opening system includes a limit seat structure, a motor belt drive assembly, a door body, and a drive connection frame assembly. Taking the limit seat structure of the aforementioned wafer transfer box unlocking and opening system as an example...

[0003] The limiting seat structure of some wafer transfer box unlocking and opening systems is inconvenient for the linkage installation and limiting of the connecting frame, frame plate and slide plate, resulting in poor linkage installation effect of the connecting frame, frame plate and slide plate. Therefore, a limiting seat structure for wafer transfer box unlocking and opening systems is proposed to address the above problems. Utility Model Content

[0004] The purpose of this utility model is to provide a limiting seat structure for a wafer transfer box unlocking and opening system, which solves the problem that some limiting seat structures for wafer transfer box unlocking and opening systems are inconvenient to set up linkage installation limits for the connecting frame, frame plate and slide plate, resulting in poor linkage installation effect for the connecting frame, frame plate and slide plate.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A limiting seat structure for a wafer transfer box unlocking and opening system includes a limiting seat structure body. The limiting seat structure body includes a base, an assembly plate, an electric telescopic cylinder device, a connecting rod, a clamping plate, a first handle plate, a second handle plate, a rotating shaft, a first shaft block, a second shaft block, and a third shaft block. The assembly plate is installed on the top of the base, and the electric telescopic cylinder device is installed on the bottom of the assembly plate. The output rod of the electric telescopic cylinder device is equipped with a connecting rod. The clamping plate is fixedly installed at the rear end of the base. The first handle plate is provided at the right end of the limiting seat structure body, and the second handle plate is provided at the left end of the first handle plate. A rotating shaft is installed inside the first handle plate and the second handle plate. The first shaft block and the second shaft block are installed inside the first handle plate, and the third shaft block is installed inside the second handle plate.

[0007] Preferably, the threaded hole at the bottom of the connecting rod is installed in connection with the internal threaded hole of the connecting frame via a stud.

[0008] Preferably, the first shaft block is installed inside the frame plate.

[0009] Preferably, a sliding plate is provided below the main body of the limiting seat structure, and the sliding plate is installed with the belt of the motor belt conveyor.

[0010] Preferably, the first shaft block is installed with a pre-drilled hole on the outer side of the connecting frame, the second shaft block is installed with a pre-drilled hole on the outer side of the slide plate, and the third shaft block is installed with a pre-drilled hole on the outer side of the seat body.

[0011] Compared with the prior art, the beneficial effects of this utility model are:

[0012] In this utility model, the slide plate and the belt of the motor belt conveyor are installed together. An assembly plate is installed on the top of the base, and an electric telescopic cylinder is installed at the bottom of the assembly plate. A connecting rod is installed on the output rod of the electric telescopic cylinder. The connecting rod is assembled with the threaded hole at the bottom of the connecting rod and the internal threaded hole of the frame rod of the connecting frame through studs. The first handle plate, the second handle plate, the rotating shaft, the first shaft block, the second shaft block, and the third shaft block are integrated as a whole. The first shaft block is installed with the pre-drilled hole on the outside of the connecting frame, the second shaft block is installed with the pre-drilled hole on the outside of the slide plate, and the third shaft block is installed with the pre-drilled hole on the outside of the base. The first shaft block is installed inside the frame plate. Through the above arrangement, the main structure can easily perform linkage installation and limit setting of the connecting frame, the frame plate, and the slide plate, and the linkage installation effect of the connecting frame, the frame plate, and the slide plate is good. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0014] Figure 2 This is a schematic diagram of the combined structure of the limiting seat structure and the connecting frame of this utility model;

[0015] Figure 3 This utility model Figure 2 A schematic diagram of the rear view structure;

[0016] Figure 4 This is a schematic diagram of the internal structure of the limiting seat structure of this utility model;

[0017] Figure 5 This utility model Figure 4 A schematic diagram of the rear view structure;

[0018] Figure 6 This is a schematic diagram of the combined structure of the limiting seat structure, frame plate and sliding plate of this utility model;

[0019] Figure 7 This is a schematic diagram of the combined structure of the first handle plate and the second handle plate of this utility model;

[0020] Figure 8 This is a schematic diagram of the installation position of the first handle plate and frame plate of this utility model.

[0021] In the diagram: 1. Main body of the limiting seat structure; 101. Seat body; 102. Assembly plate; 103. Electric telescopic cylinder device; 104. Connecting rod; 105. Clamping plate; 106. First handle plate; 107. Second handle plate; 108. Rotating shaft; 109. First shaft block; 110. Second shaft block; 111. Third shaft block; 2. Connecting frame; 3. Frame plate; 4. Slide plate. Detailed Implementation

[0022] The technical solutions of the utility model embodiments will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the utility model, and not all embodiments. Based on the embodiments of the utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the utility model.

[0023] In the embodiments of the utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the position or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations of the utility model. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. Similarly, words such as "an," "a," or "the" do not indicate a quantity limitation, but rather indicate the presence of at least one. Words such as "comprising" or "including" mean that the element or object preceding the word covers the element or object listed after the word and its equivalents, without excluding other elements or objects.

[0024] Furthermore, in the embodiments of the utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. For those skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0025] Please see Figure 1-8 This utility model provides a technical solution:

[0026] A limiting seat structure for a wafer transfer box unlocking and opening system includes a limiting seat structure body 1. The limiting seat structure body 1 includes a base 101, an assembly plate 102, an electric telescopic cylinder device 103, a connecting rod 104, a clamping plate 105, a first handle plate 106, a second handle plate 107, a rotating shaft 108, a first shaft block 109, a second shaft block 110, and a third shaft block 111. The assembly plate 102 is installed on the top of the base 101, and the electric telescopic cylinder device 103 is installed on the bottom of the assembly plate 102. The output rod of the electric telescopic cylinder device 103 is equipped with a connecting rod 104. The rear end of the seat body 101 is fixedly equipped with a clamping plate 105. The right end of the main body 1 of the limiting seat structure is equipped with a first handle plate 106. The left end of the first handle plate 106 is equipped with a second handle plate 107. The first handle plate 106 and the second handle plate 107 are equipped with rotating shafts 108. The first handle plate 106 is equipped with a first shaft block 109 and a second shaft block 110. The second handle plate 107 is equipped with a third shaft block 111.

[0027] The threaded hole at the bottom of the connecting rod 104 is installed in connection with the internal threaded hole of the connecting frame 2 via a stud. Through the above arrangement, the electric telescopic cylinder device 103 is used to control the driving settings of the connecting rod 104 and the connecting frame 2.

[0028] The first shaft block 109 is installed inside the frame plate 3. Through the above arrangement, the frame plate 3 is used to install and distribute the first shaft block 109.

[0029] A sliding plate 4 is provided below the main body 1 of the limiting seat structure. The sliding plate 4 is installed with the belt of the motor belt conveyor. Through the above arrangement, the motor assembly of the motor belt conveyor starts and drives the belt and the sliding plate 4 to move.

[0030] The first shaft block 109 is installed in the pre-drilled hole on the outside of the connecting frame 2, the second shaft block 110 is installed in the pre-drilled hole on the outside of the slide plate 4, and the third shaft block 111 is installed in the pre-drilled hole on the outside of the seat 101. Through the above arrangement, it is convenient to install the integrated assembly consisting of the first handle plate 106, the second handle plate 107, the rotating shaft 108, the first shaft block 109, the second shaft block 110, and the third shaft block 111.

[0031] Work process: The utility model provides a limiting seat structure for a wafer transfer box unlocking and opening system. The main body of the structure facilitates the linkage installation and limiting setting of the connecting frame 2, frame plate 3 and slide plate 4, and the linkage installation effect of the connecting frame 2, frame plate 3 and slide plate 4 is good.

[0032] The electric telescopic cylinder device 103 and the motor assembly of the motor belt conveyor are controlled by an external controller, and the electric telescopic cylinder device 103 and the motor assembly of the motor belt conveyor are powered by an external power source. The slide plate 4 is installed on the belt of the motor belt conveyor. An assembly plate 102 is installed on the top of the base 101, and the electric telescopic cylinder device 103 is installed on the bottom of the assembly plate 102. A connecting rod 104 is installed on the output rod of the electric telescopic cylinder device 103, and a threaded hole at the bottom of the connecting rod 104 is connected by a stud. The frame 2 is assembled with internal threaded holes in the frame rod. The first handle plate 106, the second handle plate 107, the rotating shaft 108, the first shaft block 109, the second shaft block 110, and the third shaft block 111 are an integral assembly. The first shaft block 109 is installed with the pre-drilled hole on the outside of the connecting frame 2, the second shaft block 110 is installed with the pre-drilled hole on the outside of the slide plate 4, and the third shaft block 111 is installed with the pre-drilled hole on the outside of the seat 101. The first shaft block 109 is installed inside the frame plate 3, forming a linkage installation limit between the main body 1 of the limiting seat structure, the connecting frame 2, the frame plate 3, and the slide plate 4.

[0033] Although embodiments of the utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A limiting seat structure of a wafer transfer box unlocking door opening system, comprising a limiting seat structure main body (1), characterized in that: The main body (1) of the limiting seat structure includes a seat body (101), an assembly plate (102), an electric telescopic cylinder device (103), a connecting rod (104), a clamping plate (105), a first handle plate (106), a second handle plate (107), a rotating shaft (108), a first shaft block (109), a second shaft block (110), and a third shaft block (111). The assembly plate (102) is installed on the top of the seat body (101), and the electric telescopic cylinder device (103) is installed on the bottom of the assembly plate (102). The output rod of the electric telescopic cylinder device (103) is installed... A connecting rod (104) is installed, and a clamping plate (105) is fixedly installed at the rear end of the seat body (101). A first handle plate (106) is provided at the right end of the main body (1) of the limiting seat structure, and a second handle plate (107) is provided at the left end of the first handle plate (106). A rotating shaft (108) is installed inside the first handle plate (106) and the second handle plate (107). A first shaft block (109) and a second shaft block (110) are installed inside the first handle plate (106), and a third shaft block (111) is installed inside the second handle plate (107).

2. The limiting seat structure of the wafer transfer box unlocking and opening system according to claim 1, characterized in that: The bottom threaded hole of the connecting rod (104) is installed by a stud and the internal threaded hole of the frame rod provided by the connecting bracket (2).

3. The limiting seat structure of the wafer transfer box unlocking and opening system according to claim 1, characterized in that: The first shaft block (109) is installed inside the frame plate (3).

4. The limiting seat structure of the wafer transfer box unlocking and opening system according to claim 1, characterized in that: The limiting seat structure (1) is provided with a sliding plate (4) below it, and the sliding plate (4) is installed with the belt of the motor belt conveyor.

5. The limiting seat structure of the wafer transfer box unlocking and opening system according to claim 1, characterized in that: The first shaft block (109) is installed in the pre-drilled hole on the outside of the connecting frame (2), the second shaft block (110) is installed in the pre-drilled hole on the outside of the slide plate (4), and the third shaft block (111) is installed in the pre-drilled hole on the outside of the seat (101).

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