A guide rail inspection fixture

Abstract

This utility model relates to the field of high-precision guide rail equipment technology, specifically to a guide rail inspection fixture, including a base plate; an inspection slide rail fixed parallel to the top of the base plate, with a magnetic suction seat fixedly connected to the slide block of the inspection slide rail; a positioning frame fixedly connected to the base plate and located directly below the inspection slide rail; a support frame, including a support plate for fixing the parallel workpiece guide rail, the support plate being fixedly connected to the positioning frame; a connecting angle plate detachably connected to the guide rail slider; and a transition plate detachably connected to the front side of the connecting angle plate; wherein, the surfaces of the magnetic suction seat and the transition plate can both attract magnetic inspection gauges; this utility model achieves the detection of parallelism and flatness of dual rails on the same inspection fixture, ensuring high precision and low error of the workpiece guide rail.

Description

Technical Field

[0001] This utility model relates to the field of high-precision guide rail equipment technology, specifically to a guide rail testing fixture. Background Technology

[0002] In semiconductor manufacturing equipment (such as wafer transfer robots and lithography machine stages), high-precision linear guides are core components ensuring nanometer-level motion accuracy. Their parallelism, flatness, and sliding resistance directly affect wafer positioning accuracy. In particular, errors in the parallelism and flatness between dual-track linear guides can significantly impact manufacturing yield. During the manufacturing and debugging of linear guides, it is necessary to accurately calibrate the parallelism and flatness between the two workpiece guides. Existing guide inspection relies on inspection on a highly flat marble platform or the surface of a coordinate measuring machine. Parallelism and flatness need to be inspected step by step, and multiple clamping leads to accumulated errors, making it difficult to ensure the parallelism of the two tracks. Utility Model Content

[0003] In view of the shortcomings of the prior art, this utility model provides a guide rail inspection fixture to solve the above-mentioned problems in the prior art.

[0004] To achieve the above objectives, this utility model provides the following technical solution:

[0005] A guide rail inspection fixture for inspecting the levelness and flatness of a workpiece guide rail, comprising:

[0006] Base plate;

[0007] A detection slide rail is fixed parallel to the top of the base plate, and a magnetic base is fixedly connected to the slide block of the detection slide rail;

[0008] A positioning frame that is fixedly connected to the base plate and located directly below the detection slide rail;

[0009] A support frame, the support frame including a support plate for fixing a parallel workpiece guide rail, the support plate being fixedly connected to a positioning frame;

[0010] A connecting angle plate that is detachably connected to the guide rail slider;

[0011] A detachable adapter plate that is attached to the front of the connecting corner plate;

[0012] Both the magnetic base and the adapter plate can attract the magnetic detection meter.

[0013] Furthermore, the surface of the connecting angle plate is provided with mounting holes, which are coaxially opposite to the threaded holes pre-drilled on the surface of the workpiece guide slider. The connecting angle plate is fixed by bolts passing through the mounting holes and threadedly engaging with the threaded holes.

[0014] Furthermore, the surface of the connecting corner plate has four disassembly screw holes distributed in a rectangular shape, and one side of the adapter plate has a raised plate. The surface of the raised plate has two positioning through holes, which are coaxially opposite to the two disassembly screw holes located at opposite corners. The adapter plate is fixed by bolts that cooperate with the disassembly screw holes passing through the positioning through holes and connecting to the disassembly screw holes.

[0015] Furthermore, the support frame includes two parallel support plates, which are fixedly connected by a plurality of longitudinally arranged connecting rods; the magnetic base has magnetic surfaces extending to both sides of the detection slide rail for adsorbing the magnetic detection meter.

[0016] Furthermore, the positioning frame is pre-set with limiting protrusions on the structure on both sides of the support plate; limiting grooves are respectively opened on both sides of the adapter plate, and the adapter plate moves with the guide rail slider to both ends of the guide rail and makes the limiting protrusions engage in the limiting grooves.

[0017] This utility model provides a guide rail inspection fixture. It has the following beneficial effects:

[0018] By adjusting the level of the first workpiece guide rail with the detection slide rail as a reference, a travel reference plane is established. A second workpiece guide rail is installed above the adjusted first one. The magnetic chuck's probe is pressed against the inner wall of the groove of the second workpiece guide rail. The slide block is then driven to move along the entire length of the detection slide rail, and the change in the magnetic chuck's pointer reading is observed. If the change is consistent with the change when detecting the first guide rail, it indicates that the second workpiece guide rail is parallel to the inner wall of the groove of the first workpiece guide rail, thus ensuring strict consistency in the parallelism of the two workpiece guide rails. Furthermore, the magnetic chuck is magnetically attached to the adapter plate, with its probe perpendicularly against the surface of the detection slide rail as a reference plane. The guide rail slider is manually pushed along the workpiece guide rail from one end to the other. During this process, the jump value of the magnetic chuck's pointer directly reflects the undulation of the workpiece guide rail relative to the front of the detection slide rail. If the pointer jump exceeds the allowable value, it indicates that the flatness is unqualified, thus achieving flatness detection. This invention enables the detection of parallelism and flatness of dual rails on the same testing fixture, ensuring high precision and low error of the workpiece guide rail. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of this utility model;

[0020] Figure 2 This is a schematic diagram of the exploded decomposition structure of this utility model;

[0021] Figure 3 for Figure 2 A magnified view of part A in the middle;

[0022] Figure 4 for Figure 1A schematic diagram of the left-side view structure.

[0023] In the diagram: 1. Support bracket; 11. Support plate; 12. Connecting rod; 2. Positioning frame; 21. Limiting protrusion; 3. Workpiece guide rail; 4. Base plate; 5. Inspection slide rail; 6. Magnetic base; 61. Magnetic surface; 7. Connecting corner plate; 71. Mounting hole; 72. Removal screw hole; 8. Adapter plate; 81. Protruding plate; 82. Positioning through hole; 83. Limiting groove. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0025] See attached document Figure 1-4 A guide rail inspection fixture for inspecting the levelness and flatness of a workpiece guide rail 3 includes a base plate 4, an inspection slide rail 5 fixed parallel to the base plate 4, a positioning frame 2, a support frame 1, a connecting angle plate 7 detachably connected to the guide rail slider, and a transition plate 8 detachably connected to the front side of the connecting angle plate 7. A magnetic suction seat 6 is fixedly connected to the slide of the inspection slide rail 5. The positioning frame 2 is fixedly connected to the base plate 4 and located directly below the inspection slide rail 5. The support frame 1 includes a support plate 11 for fixing the parallel workpiece guide rail 3, and the support plate 11 is fixedly connected to the positioning frame 2. Both the magnetic suction seat 6 and the transition plate 8 are capable of attracting magnetic inspection gauges. The magnetic inspection gauge is a dial indicator or micrometer with a universal strong magnetic suction base.

[0026] The connecting angle plate 7 has a mounting hole 71 on its surface. The mounting hole 71 is coaxially opposite to the threaded hole pre-drilled on the surface of the workpiece guide rail 3 slider. The connecting angle plate 7 is fixed by bolts passing through the mounting hole 71 and threadedly connecting with the threaded hole.

[0027] In this embodiment, the surface of the connecting angle plate 7 has four rectangular disassembly screw holes 72. One side of the adapter plate 8 has a raised plate 81. The surface of the raised plate 81 has two positioning through holes 82. The positioning through holes 82 are coaxially opposite to the two disassembly screw holes 72 located at opposite corners. The adapter plate 8 is fixed by bolts that cooperate with the disassembly screw holes 72 passing through the positioning through holes 82. The disassembly adapter plate 8 can be fixed to the slider of the upper or lower workpiece guide rail 3 by bolts, thereby detecting the flatness of the two workpiece guide rails 3 respectively.

[0028] In this embodiment, the support frame 1 includes two parallel support plates 11, which are fixedly connected by a plurality of longitudinally arranged connecting rods 12; the magnetic base 6 has magnetic surfaces 61 extending to both sides of the detection slide rail 5 for adsorbing magnetic detection gauges. Two parallel workpiece slide rails 3 with qualified flatness can be set and detected on both sides of the support frame at the same time.

[0029] In this embodiment, the positioning frame 2 is pre-set with limiting protrusions 21 on the structure on both sides of the support plate 11; the two sides of the adapter plate 8 are respectively opened with limiting grooves 83, and the adapter plate 8 moves with the guide rail slider to both ends of the guide rail and makes the limiting protrusions engage in the limiting grooves 83, thereby determining the beginning and end of the sliding stroke of the slider to detect the flatness.

[0030] This invention uses a high-precision inspection slide rail 5 as an absolute reference. A magnetic measuring tool (dial indicator / micrometer) is used to measure the deviation of the workpiece guide rail 3 relative to this reference, thereby determining the parallelism and flatness of the workpiece guide rail 3. Specifically:

[0031] 1. Parallelism Detection Principle: ① Establishment of Reference Surface: The first workpiece guide rail 3 to be tested is mounted on the support plate. A magnetic chuck is attached to the magnetic chuck seat 6 of the detection slide rail 5, so that the detection head of the magnetic chuck presses against the inner wall of the groove of the first workpiece guide rail 3. The sliding seat drives the magnetic chuck to move along the entire length of the detection slide rail 5. The change in the reading of the magnetic chuck pointer directly reflects the deviation of the inner wall of the groove of the workpiece guide rail 3 from the high-precision detection slide rail 5 in the horizontal direction (i.e., parallelism error). If the change is zero, it means that they are perfectly parallel. By adjusting the levelness of the first workpiece guide rail 3, its parallelism with respect to the detection slide rail 5 is made to meet the requirements (the change in pointer is within the allowable tolerance or is zero). At this time, the inner wall of the groove of the first workpiece guide rail 3 is established as the "stroke reference surface". ② Parallelism determination: Install the second workpiece guide rail 3 above the adjusted first workpiece guide rail 3. Place the magnetic chuck test head against the inner wall of the groove of the second workpiece guide rail 3, and drive the slide block to move along the full length of the test slide rail 5 again. Observe the change in the reading of the magnetic chuck pointer. If the change is consistent with the change when testing the first guide rail (or both are within the tolerance), it means that the second workpiece guide rail 3 is parallel to the inner wall of the groove of the first workpiece guide rail 3. If they are inconsistent, it means that they are not parallel and the level of the second workpiece guide rail 3 needs to be adjusted until its reading change pattern is consistent with that of the first workpiece guide rail 3.

[0032] 2. Principle of flatness inspection of the assembly surface (i.e., the front side of the connecting corner plate 7):

[0033] Using the front surface of the high-precision inspection slide rail 5 as the reference surface for flatness measurement, the connecting angle plate 7 is fixed to the slider of the workpiece guide rail 3 with bolts. The adapter plate 8 is fixed diagonally to the front side of the connecting angle plate 7 with bolts. The magnetic chuck is attached to the adapter plate 8. The detection head of the magnetic chuck is adjusted so that it perpendicularly contacts the surface of the inspection slide rail 5 as the reference surface. The guide rail slider is manually pushed along the workpiece guide rail 3 from one end to the other. During this process, the jump value of the magnetic chuck pointer directly reflects the undulation of the workpiece guide rail 3 relative to the front surface of the inspection slide rail 5. If the pointer jump exceeds the allowable value, it indicates that the flatness is unqualified. By disassembling the adapter plate 8 and reinstalling it on the connecting angle plate 7 in other positions, the flatness of multiple workpiece guide rails 3 can be tested, thereby ensuring the consistency of the flatness of the workpiece guide rails 3.

[0034] 3. Pushing resistance measurement: After the levelness and flatness are checked, connect the two connecting angle plates 7 and push the sliders of the two workpiece guide rails 3 simultaneously. Use a thrust gauge to check the pushing resistance of the entire guide rail set. If the value is stable and less than 4 Newtons, it is considered qualified; otherwise, it is reworked.

[0035] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0036] The above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.

Claims

1. A guide rail inspection tool for inspecting the levelness and flatness of a workpiece guide rail, characterized by, include: Base plate; A detection slide rail is fixed parallel to the top of the base plate, and a magnetic base is fixedly connected to the slide block of the detection slide rail; A positioning frame that is fixedly connected to the base plate and located directly below the detection slide rail; A support frame, the support frame including a support plate for fixing a parallel workpiece guide rail, the support plate being fixedly connected to a positioning frame; A connecting angle plate that can be detachably connected to the guide rail slider; A detachable adapter plate that is attached to the front of the connecting corner plate; Both the magnetic base and the adapter plate can attract the magnetic detection meter.

2. The guide rail inspection tool of claim 1, wherein: The surface of the connecting angle plate is provided with a mounting hole, which is coaxially opposite to the threaded hole pre-drilled on the surface of the workpiece guide rail slider. The connecting angle plate is fixed by bolts passing through the mounting hole and threadedly connecting with the threaded hole.

3. The guide rail inspection fixture as described in claim 1, characterized in that: The connecting angle plate has four rectangular disassembly screw holes distributed on its surface. One side of the adapter plate has a raised plate with two positioning through holes. The positioning through holes are coaxially opposite to the two disassembly screw holes located at opposite corners. The adapter plate is fixed by bolts that mate with the disassembly screw holes passing through the positioning through holes and connecting to the disassembly screw holes.

4. A guide rail inspection fixture as described in any one of claims 1-3, characterized in that: The support frame includes two parallel support plates, which are fixedly connected by multiple longitudinally arranged connecting rods; the magnetic base has magnetic surfaces extending to both sides of the detection slide rail for adsorbing the magnetic detection gauge.

5. The guide rail inspection fixture as described in claim 1, characterized in that: The positioning frame is pre-set with limiting protrusions on the structure on both sides of the support plate; the two sides of the adapter plate are respectively opened with limiting grooves, and the adapter plate moves with the guide rail slider to both ends of the guide rail and makes the limiting protrusions engage in the limiting grooves.

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