A liquid-cooled base plate mechanism

Abstract

This utility model discloses a liquid-cooled base plate mechanism, including a liquid-cooled base plate upper cover, a liquid-cooled base plate lower substrate, a hollow drive shaft, and a sealing ring. The liquid-cooled base plate upper cover and the liquid-cooled base plate lower substrate are stacked and sealed and fixedly connected. A liquid-cooling channel is provided on the side of the liquid-cooled base plate opposite to the liquid-cooled base plate upper cover. A water inlet hole communicating with the liquid-cooling channel is provided at the center of the liquid-cooling base plate lower substrate, and a water outlet hole communicating with the liquid-cooling channel is provided at the edge. A liquid inlet channel is provided inside the hollow drive shaft. The top of the hollow drive shaft is fixedly connected to the liquid-cooled base plate lower substrate, so that the liquid inlet channel aligns with the water inlet hole. The water inlet at the bottom of the hollow drive shaft and the water outlet hole of the liquid-cooled base plate lower substrate are respectively connected to the water inlet / outlet of an external liquid cooler to form a liquid-cooling circuit. This utility model, by providing a liquid-cooling channel inside the base plate, ensures good heat dissipation and uniform temperature in the working area of ​​the grinding / polishing disc during diamond wafer grinding and polishing operations.

Description

Technical Field

[0001] This utility model belongs to the field of diamond wafer processing technology, and relates to a liquid-cooled base plate mechanism. Background Technology

[0002] In the front-end processing of diamond wafers, the diamond wafers need to be thinned and polished. After coarse grinding, fine grinding and polishing, the diamond wafers are made into a substrate with a TTV of no more than 2 micrometers and a roughness of less than 1 nanometer, so as to facilitate the subsequent processing and production.

[0003] During the thinning and polishing process of diamond wafers, due to the high cost, high hardness, high temperature of the working area, and brittleness of the material, sufficient cooling is required to remove the high heat generated during processing, thereby improving processing efficiency, enhancing processing quality, and preventing material damage caused by high heat. Utility Model Content

[0004] Purpose of the utility model: The purpose of this utility model is to provide a liquid-cooled base plate mechanism with internal liquid-cooled flow channels.

[0005] Technical solution: A liquid-cooled base plate mechanism, wherein the liquid-cooled base plate includes a liquid-cooled base plate upper cover, a liquid-cooled base plate lower base plate, and a hollow transmission shaft;

[0006] The upper cover plate of the liquid-cooled base plate is stacked and sealed and fixedly connected with the lower base plate of the liquid-cooled base plate. A liquid cooling channel is provided on the side of the lower base plate of the liquid-cooled base plate opposite to the upper cover plate of the liquid-cooled base plate. A water inlet hole communicating with the liquid cooling channel is provided at the center of the lower base plate of the liquid-cooled base plate. A water outlet hole communicating with the liquid cooling channel is provided at the edge of the lower base plate of the liquid-cooled base plate.

[0007] The hollow drive shaft has a liquid inlet channel inside, and the top of the hollow drive shaft is fixedly connected to the lower substrate of the liquid-cooled base plate so that the liquid inlet channel is connected to the water inlet hole.

[0008] Furthermore, the upper surface of the liquid-cooled base plate is provided with a flat key and screw holes for fixing the grinding disc or polishing disc.

[0009] Furthermore, a sealing groove is provided on the edge of the lower substrate of the liquid-cooled base plate, and a sealing ring is provided in the sealing groove. The sealing ring is used to seal the outside of the liquid-cooled flow channel.

[0010] Furthermore, a retaining ring is provided at the bottom of the hollow drive shaft, which is then fixedly mounted to the motor.

[0011] Furthermore, one end of the liquid inlet channel at the bottom of the hollow drive shaft is a water inlet, and the other end of the liquid inlet channel is connected to the water inlet hole at the center of the lower substrate of the liquid-cooled base plate.

[0012] Furthermore, a sealing threaded hole is provided at the water inlet for connecting the water outlet connector of the external liquid cooler.

[0013] Furthermore, a positioning groove is provided on the side of the liquid-cooled base plate that is connected to the hollow drive shaft, and the positioning groove is connected to the top of the hollow drive shaft.

[0014] Beneficial effects: Compared with the prior art, the present invention has the following advantages: By setting a liquid cooling channel inside the base plate, the working area of ​​the grinding / polishing disc has good heat dissipation and uniform temperature during the grinding and polishing of diamond wafers, which reduces the impact of high heat on grinding and polishing, further improves processing efficiency and processing quality, and avoids material damage caused by high heat. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0016] Figure 2 This is an exploded structural diagram of the present invention.

[0017] Figure 3 This is a schematic diagram of the installation structure of the present invention and the motor. Detailed Implementation

[0018] The technical solution of this utility model will be further described below with reference to the accompanying drawings.

[0019] like Figure 1-2 As shown in this embodiment, a liquid-cooled base plate mechanism includes an upper cover plate 1, a lower base plate 2, a hollow drive shaft 3, a retaining ring 4, and a sealing ring 5. The upper cover plate 1 is fixedly connected to the lower base plate 2. The surface of the upper cover plate 1 is provided with a flat key and screw holes for fixing a grinding disc or polishing disc. The lower base plate 2 has a liquid cooling channel 21 on the side opposite to the upper cover plate 1. The edge of the lower base plate 2 has a sealing groove 22, and a sealing ring 5 is provided in the sealing groove 22. The sealing ring 5 is used to seal the outside of the liquid cooling channel 21, thereby forming a sealed circuit.

[0020] A water inlet is located at the center of the liquid-cooled base plate 2, and water outlets are located at its edges. The top of the hollow drive shaft 3 is fixedly connected to the liquid-cooled base plate 2. An inlet channel 34 is located inside the hollow drive shaft 3. One end of the inlet channel 34 at the bottom of the hollow drive shaft 3 is the water inlet, and the other end of the inlet channel 34 connects to the water inlet at the center of the liquid-cooled base plate 2. The water inlet at the bottom of the hollow drive shaft 3 connects to the water outlet of the external liquid chiller, and the water outlet of the liquid-cooled base plate 2 connects to the water inlet of the external liquid chiller, forming a liquid cooling circuit. A sealing threaded hole 32 is provided at the water inlet at the bottom of the hollow drive shaft 3 for connecting the water outlet connector of the external liquid chiller.

[0021] In a specific embodiment, a positioning groove is provided on the side of the liquid-cooled base plate 2 that connects to the hollow drive shaft 3, and a positioning protrusion 31 is provided on the top of the hollow drive shaft 3. The positioning groove and the protrusion 31 cooperate to make the liquid-cooled base plate 2 and the hollow drive shaft 3 match and connect. Figure 3 The diagram shows the installation of the hollow drive shaft 3 and the geared motor 6. The hollow drive shaft 3 has a keyway 33 on its outside for mounting the geared motor 6. The bottom of the hollow drive shaft 3 has a retaining ring 4 for fixing.

Claims

1. A liquid-cooled baseplate mechanism, characterized by, The liquid-cooled base plate includes an upper cover plate (1), a lower base plate (2), and a hollow drive shaft (3). The liquid-cooled base plate (1) is stacked and sealed and fixedly connected with the liquid-cooled base plate (2). The side of the liquid-cooled base plate (2) opposite to the liquid-cooled base plate (1) is provided with a liquid-cooled flow channel (21). The center of the liquid-cooled base plate (2) is provided with a water inlet hole communicating with the liquid-cooled flow channel (21). The edge of the liquid-cooled base plate (2) is provided with a water outlet hole communicating with the liquid-cooled flow channel (21). The hollow drive shaft (3) has an inlet channel (34) inside. The top of the hollow drive shaft (3) is fixedly connected to the lower substrate (2) of the liquid-cooled base plate, so that the inlet channel (34) is connected to the water inlet hole.

2. The liquid cold plate mechanism of claim 1, wherein, The upper surface of the liquid-cooled base plate (1) is provided with a flat key and screw holes for fixing the grinding disc or polishing disc.

3. The liquid cold plate mechanism of claim 1, wherein, The edge of the liquid-cooled base plate (2) is provided with a sealing groove (22), and a sealing ring (5) is provided in the sealing groove (22). The sealing ring (5) is used to seal the outside of the liquid-cooled flow channel.

4. The liquid cold plate mechanism of claim 1, wherein, The hollow drive shaft (3) is provided with a retaining ring (4) at its bottom, and is fixedly installed on the motor by the retaining ring (4).

5. The liquid cold plate mechanism of claim 1, wherein, The liquid inlet channel (34) is located at the bottom of the hollow drive shaft (3) at one end, which is a water inlet. The other end of the liquid inlet channel (34) is connected to the water inlet hole at the center of the liquid-cooled base plate (2).

6. The liquid cold plate mechanism of claim 5, wherein, A sealing threaded hole (32) is provided at the water inlet.

7. The liquid cold plate mechanism of claim 5, wherein, The liquid-cooled base plate (2) is provided with a positioning groove on the side that is connected to the hollow drive shaft (3), and is connected to the top of the hollow drive shaft (3) through the positioning groove.

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