Evaporation chamber structure capable of autonomously controlling sealing

Abstract

The utility model discloses an evaporation chamber structure capable of being automatically controlled to be closed. Wire plate frames are arranged in a closed cavity in a box type closed shell side by side in a positioned mode. The box-type closed shell comprises a detachable front side panel; a plurality of wire penetrating through openings are formed in the positions, corresponding to the wire plate frames, of a top panel of the box type closed shell, target material sealing guide assemblies are arranged in the wire penetrating through openings in a positioned mode, and detachable sealing cover plates are further arranged on the wire penetrating through openings. A left side panel or a right side panel of the box-type closed shell is provided with a ventilation opening and an inflation opening which are communicated with the closed cavity, the ventilation opening is provided with a sealing blocking plate matched with the ventilation opening in a sealing mode, and the inflation opening is connected with an inert gas supply source through a control valve and a pipeline. According to the vapor deposition chamber structure capable of being autonomously controlled to be closed, anti-oxidation protection on the target material wire disc can be achieved, and then the surface quality of vapor deposition film materials is improved.