An integrated multi-target independent shutter device

Abstract

The utility model provides a kind of integrated multi-target independent baffle device. Its structure includes the track of annular being arranged in cavity, and the rolling mechanism corresponding to the target one-one in cavity is arranged on track, and each rolling mechanism is connected with a drive mechanism and a baffle;Drive mechanism includes motor and the driving gear connected with motor output shaft;Rolling mechanism includes the rolling body movable along track and the driven rack connected with rolling body and engaged with driving gear. The utility model solves the target pollution caused by traditional baffle not full shielding, shielding not strict, and further affects the uniformity and stability of coating and target short-circuit problem by the design of the circumferential layout of baffle and the movement form of baffle relative to track along with rolling mechanism, supplemented with ingenious mechanical structure control. At the same time, the baffle is arranged along the circumference of the top of the cavity, which does not occupy the space in the center, solves the problem of installation space, increases the use and operation space of the whole device, and simplifies the internal structure of the device.

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