A multi-directional moving device for measuring film thickness

Abstract

This utility model discloses a multi-directional moving device for film thickness measurement, including a chassis, a lateral moving mechanism, a test piece stage, a detector bracket, a longitudinal moving mechanism, a lifting mechanism, and a film thickness detector. The lateral moving mechanism includes a lateral drive unit and a lateral moving block; the lateral drive unit is installed inside the chassis and is driven by the lateral moving block. The test piece stage is arranged on the top surface of the chassis, and its bottom end is fixedly connected to the lateral moving block. The detector bracket is mounted on one side of the chassis. The longitudinal moving mechanism includes a longitudinal drive unit and a longitudinal moving block; the longitudinal drive unit is installed on the detector bracket and is driven by the longitudinal moving block. The lifting mechanism includes a lifting drive unit and a lifting block; the lifting drive unit is installed on the longitudinal moving block and is driven by the lifting block. The film thickness detector is fixed on the lifting block. This utility model can automatically measure the film thickness at multiple different points on the surface of the test piece.

Description

Technical Field

[0001] This utility model relates to the field of thin film thickness measurement equipment technology, and more specifically to a multi-directional moving device for thin film thickness measurement. Background Technology

[0002] Coating is a surface treatment technology that improves the performance and durability of a material by depositing a thin film on its surface. Coating processes are widely used in optics, electronics, automotive, aerospace, medical devices, and many other fields. For example, in semiconductor chip manufacturing, the thickness of the thin film directly affects the chip's electrical performance. After coating is completed, the film thickness needs to be measured using a thin film thickness measuring device to determine if it meets specifications.

[0003] Currently, when measuring the thickness of a thin film at multiple points on the surface of a sample, the sample needs to be placed on a testing platform, and then the sample needs to be moved manually so that multiple different measurement points on the sample surface are aligned with the probes of the measuring instrument for thickness measurement. This measurement method, which requires manual adjustment of the sample position multiple times, is cumbersome, inefficient, and may also result in significant errors in the measurement results due to human error.

[0004] Therefore, when measuring the thickness of a thin film deposited on the surface of a sample, how to provide a device that can automatically move the sample in multiple directions is a problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0005] In view of this, the purpose of this utility model is to provide a multi-directional moving device for film thickness measurement, which solves the technical problem that manual adjustment of the position of the sample to be measured on the film thickness detection platform is cumbersome, inefficient, and may cause large errors.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A multi-directional moving device for measuring film thickness includes a chassis, a lateral moving mechanism, a test piece stage, a measuring instrument bracket, a longitudinal moving mechanism, a lifting mechanism, and a film thickness measuring instrument. A strip-shaped through-hole is formed on the top surface of the chassis. The lateral moving mechanism includes a lateral drive unit and a lateral moving block. The lateral drive unit is installed inside the chassis corresponding to the strip-shaped through-hole, and is connected to the lateral moving block to drive the lateral moving block to move along the length of the strip-shaped through-hole. The test piece stage is arranged on the top surface of the chassis corresponding to the strip-shaped through-hole, and its bottom end is fixedly connected to the lateral moving block via a connector. The top of the test piece stage can be fitted with the test piece. The measuring instrument bracket... The equipment is assembled on one side of the chassis along the length of the strip-shaped through hole; the longitudinal moving mechanism includes a longitudinal moving drive and a longitudinal moving block, the longitudinal moving drive is mounted on the detector bracket, and the longitudinal moving drive is driven to drive the longitudinal moving block to move along a direction perpendicular to the length of the strip-shaped through hole; the lifting mechanism includes a lifting drive and a lifting block, the lifting drive is mounted on the longitudinal moving block, and the lifting drive is driven to drive the lifting block to lift along the height direction of the detector bracket; the film thickness detector is fixed on the lifting block by a mounting bracket, and its measuring probe at the measuring end corresponds to the surface of the workpiece on the workpiece stage to measure the film thickness.

[0008] Through the above technical solution, this utility model discloses a multi-directional moving device for measuring film thickness. The device places a sample with a deposited film on a test platform. The lateral position of the sample can be adjusted by a lateral moving mechanism, and the longitudinal position and height of the film thickness gauge can be adjusted by a longitudinal moving mechanism and a lifting mechanism. This allows the measuring probe of the film thickness gauge to be movably aligned with the sample and to measure the film thickness at different points on its surface. This multi-directional moving device for measuring film thickness is reasonably designed, easy to operate, and can automatically measure the film thickness at multiple different points on the surface of the sample.

[0009] Preferably, the lateral movement drive unit includes an elongated first lead screw mounting base, a first lead screw, and a lateral movement drive motor; the first lead screw mounting base is installed in the housing corresponding to the elongated through hole; the first lead screw is axially rotatably mounted in the first lead screw mounting base and arranged parallel to the elongated through hole; the lateral movement block is threadedly connected to the first lead screw; the lateral movement drive motor is installed at one end of the first lead screw mounting base, and its output shaft passes through the first lead screw mounting base and is drivenly connected to the first lead screw.

[0010] The beneficial effect of adopting the above technical solution is that the operation of the transverse drive motor can drive the first lead screw to rotate, so that the transverse moving block moves on the first lead screw corresponding to the strip-shaped through hole and along its length direction, thereby adjusting the transverse position of the test piece.

[0011] Preferably, a test piece assembly plate is detachably connected to the test piece platform, and the test piece assembly plate has positioning grooves for assembling the test piece. The test piece assembly plate is made of an easily cut material, and the positioning grooves can be cut into a shape that matches the contour lines of the test piece.

[0012] The beneficial effect of adopting the above technical solution is that when the test piece stage moves with the lateral moving block, the test piece will not slip out of the positioning groove.

[0013] Preferably, the longitudinal drive unit includes a long strip-shaped second lead screw mounting base, a second lead screw, and a longitudinal drive motor; the second lead screw mounting base is installed on the side of the testing instrument bracket near the test piece stage, and its length direction is arranged perpendicular to the length direction of the strip-shaped through hole; the second lead screw is axially rotatably installed in the second lead screw mounting base, and the longitudinal moving block is threadedly connected to the second lead screw; the longitudinal drive motor is installed at one end of the second lead screw mounting base, and its output shaft passes through the second lead screw mounting base and is drivenly connected to the second lead screw.

[0014] Preferably, the lifting drive unit includes an elongated third lead screw mounting base, a third lead screw, and a lifting motor; the third lead screw mounting base is fixed to the longitudinal moving block by a connecting plate, and its length direction is arranged perpendicular to the top surface of the chassis; the third lead screw is axially rotatably mounted in the third lead screw mounting base, and the lifting block is threadedly connected to the third lead screw; the lifting motor is mounted on the top of the third lead screw mounting base, and its output shaft passes through the third lead screw mounting base and is drivenly connected to the third lead screw.

[0015] The beneficial effects of adopting the above technical solution are that the operation of the longitudinal drive motor can drive the second lead screw to rotate, so that the longitudinal moving block moves linearly on the second lead screw in a direction perpendicular to the length of the strip-shaped through hole, thereby adjusting the longitudinal position of the film thickness detector; the operation of the lifting motor can drive the third lead screw to rotate, so that the lifting block moves up and down on the third lead screw, thereby adjusting the height of the film thickness detector.

[0016] Preferably, a multi-directional moving device for film thickness measurement further includes a dust cover, which is fixed to the top of the connecting plate by a U-shaped plate and covers the lifting motor.

[0017] The beneficial effect of adopting the above technical solution is that the dust cover can prevent external dust from entering the lifting motor and corroding it, thus extending the service life of the lifting motor.

[0018] Preferably, a multi-directional moving device for film thickness measurement further includes a controller, which is installed inside the housing and electrically connected to the transverse drive motor, the longitudinal drive motor and the lifting motor.

[0019] The beneficial effect of adopting the above technical solution is that the start and stop of the transverse drive motor, the longitudinal drive motor and the lifting motor are controlled by the controller, which makes the automation level of this device higher. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of the overall structure of a multi-directional moving device for measuring film thickness according to the present invention.

[0022] Figure 2 This is a schematic diagram showing the connection between the lateral moving mechanism and the test piece platform in this utility model.

[0023] Figure 3 for Figure 2 Side view of the middle structure;

[0024] Figure 4 This is a schematic diagram of the longitudinal moving mechanism and lifting mechanism of this utility model installed on the detector bracket;

[0025] Figure 5 This is a schematic diagram of the longitudinal moving mechanism in this utility model;

[0026] Figure 6 This is a top view of the lifting mechanism in this utility model;

[0027] Figure 7 This is a schematic diagram showing the connection between the lifting mechanism and the mounting frame in this utility model.

[0028] Wherein: 1-Chassis, 2-Transverse moving mechanism, 3-Test piece platform, 4-Connector, 5-Test instrument bracket, 6-Vertical moving mechanism, 7-Lifting mechanism, 8-Film thickness tester, 9-Mounting bracket, 10-Dust cover, 11-Strip through hole, 21-Transverse moving drive unit, 22-Transverse moving block, 31-Test piece assembly plate, 61-Vertical moving drive unit, 62-Vertical moving block, 71-Lifting drive unit, 72-Lifting block, 81-Measuring probe, 211-First lead screw mounting seat, 212-First lead screw, 213-Transverse moving drive motor, 311-Positioning slot, 611-Second lead screw mounting seat, 612-Second lead screw, 613-Vertical moving drive motor, 711-Third lead screw mounting seat, 712-Connecting plate, 713-Third lead screw, 714-Lifting motor. Detailed Implementation

[0029] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0030] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0031] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0032] See appendix Figure 1 To be continued Figure 7According to an embodiment of the present invention, a multi-directional moving device for measuring film thickness includes a chassis 1, a lateral moving mechanism 2, a test piece platform 3, a detector bracket 5, a longitudinal moving mechanism 6, a lifting mechanism 7, and a film thickness detector 8. A strip-shaped through hole 11 is provided on the top surface of the chassis 1. The lateral moving mechanism 2 includes a lateral driving part 21 and a lateral moving block 22. The lateral driving part 21 is installed inside the chassis 1 corresponding to the strip-shaped through hole 11, and the lateral driving part 21 is connected to the lateral moving block 22 to drive the lateral moving block 22 to move along the length direction of the strip-shaped through hole 11. The test piece platform 3 is arranged on the top surface of the chassis 1 corresponding to the strip-shaped through hole 11, and its bottom end is fixedly connected to the lateral moving block 22 through a connector 4. The test piece can be assembled at the top of the test piece platform 3. The measuring instrument bracket 5 is mounted on one side of the housing 1 along the length of the strip-shaped through hole 11; the longitudinal moving mechanism 6 includes a longitudinal moving drive unit 61 and a longitudinal moving block 62. The longitudinal moving drive unit 61 is mounted on the measuring instrument bracket 5, and the longitudinal moving drive unit 61 is connected to the longitudinal moving block 62 to drive the longitudinal moving block 62 to move along the direction perpendicular to the length of the strip-shaped through hole 11; the lifting mechanism 7 includes a lifting drive unit 71 and a lifting block 72. The lifting drive unit 71 is mounted on the longitudinal moving block 62, and the lifting drive unit 71 is connected to the lifting block 72 to drive the lifting block 72 to rise and fall along the height direction of the measuring instrument bracket 5; the film thickness measuring instrument 8 is fixed on the lifting block 72 by the mounting bracket 9, and its measuring probe 81 at the measuring end corresponds to the surface of the workpiece on the workpiece stage 3 to measure the film thickness.

[0033] This utility model discloses a multi-directional moving device for measuring film thickness. Through the lateral moving mechanism 2, the longitudinal moving mechanism 6, and the lifting mechanism 7, the relative position of the measuring probe 81 of the film thickness detector 8 and the workpiece on the workpiece platform 3 can be adjusted, so that the film thickness detector 8 can measure the film thickness at multiple different points on the surface of the workpiece.

[0034] In some embodiments, the transverse drive unit 21 includes a long strip-shaped first lead screw mounting base 211, a first lead screw 212, and a transverse drive motor 213; the first lead screw mounting base 211 is installed in the housing 1 corresponding to the strip-shaped through hole 11; the first lead screw 212 is axially rotatably installed in the first lead screw mounting base 211 and arranged parallel to the strip-shaped through hole 11, and the transverse moving block 22 is threadedly connected to the first lead screw 212; the transverse drive motor 213 is installed at one end of the first lead screw mounting base 211, and its output shaft passes through the first lead screw mounting base 211 and is drivenly connected to the first lead screw 212.

[0035] The transverse drive motor 213 drives the first lead screw 212 to rotate, and the transverse moving block 22 moves on the first lead screw 212. The test piece platform 3, which is connected to the transverse moving block 22 through the connector 4, moves above the strip through hole 11, thereby adjusting the transverse position of the test piece.

[0036] In some specific examples, a test piece assembly plate 31 is detachably connected to the test piece stage 3, and the test piece assembly plate 31 has a positioning groove 311 for assembling the test piece.

[0037] The assembly plate 31 for the test piece is made of an easily cut material, and the positioning groove 311 can be cut into a shape that matches the outline of the test piece, thereby realizing the placement and positioning of the test piece.

[0038] In other embodiments, the longitudinal drive unit 61 includes a long strip-shaped second lead screw mounting base 611, a second lead screw 612, and a longitudinal drive motor 613; the second lead screw mounting base 611 is mounted on the side of the test instrument bracket 5 near the test piece stage 3, and its length direction is arranged perpendicular to the length direction of the strip-shaped through hole 11; the second lead screw 612 is axially rotatably mounted in the second lead screw mounting base 611, and the longitudinal moving block 62 is threadedly connected to the second lead screw 612; the longitudinal drive motor 613 is mounted at one end of the second lead screw mounting base 611, and its output shaft passes through the second lead screw mounting base 611 and is drivenly connected to the second lead screw 612.

[0039] The longitudinal drive motor 613 drives the second lead screw 612 to rotate, and the longitudinal moving block 62 drives the lifting drive unit 71 to move on the second lead screw 612, thereby adjusting the longitudinal position of the film thickness detector 8.

[0040] In other embodiments, the lifting drive unit 71 includes a long strip-shaped third lead screw mounting base 711, a connecting plate 712, a third lead screw 713, and a lifting motor 714; the third lead screw mounting base 711 is fixed to the longitudinal moving block 62 by the connecting plate 712, and its length direction is arranged perpendicular to the top surface of the housing 1; the third lead screw 713 is axially rotatably mounted in the third lead screw mounting base 711, and the lifting block 72 is threadedly connected to the third lead screw 713; the lifting motor 714 is mounted on the top of the third lead screw mounting base 711, and its output shaft passes through the third lead screw mounting base 711 and is driven by the third lead screw 713.

[0041] The lifting motor 714 drives the third lead screw 713 to rotate, and the lifting block 72 drives the film thickness detector 8 to rise and fall through the mounting frame 9, thereby adjusting the height of the film thickness detector 8.

[0042] In another specific example, a multi-directional moving device for film thickness measurement also includes a dust cover 10, which is fixed to the top of the connecting plate 712 by a U-shaped plate and covers the lifting motor 714.

[0043] The dust cover 10 can protect the lifting motor 714 and prevent dust from entering the interior of the lifting motor 714.

[0044] In another specific example, a multi-directional moving device for film thickness measurement also includes a controller, which is installed in the housing 1 and electrically connected to the transverse drive motor 213, the longitudinal drive motor 613 and the lifting motor 714.

[0045] Specifically, a multi-directional moving device for measuring film thickness also includes a remote controller, which is communicatively connected to the controller.

[0046] In use, the device first starts by controlling the transverse drive motor 213 to rotate. The output shaft of the transverse drive motor 213 rotates, causing the first lead screw 212 to rotate, which in turn causes the transverse moving block 22 to move on the first lead screw 212. The test piece platform 3, which is connected to the transverse moving block 22 via the connecting piece 4, moves above the strip-shaped through hole 11 to adjust the transverse position of the test piece on the test piece platform 3. Next, the longitudinal drive motor 613 is started, and the output shaft of the longitudinal drive motor 613 rotates, causing the second lead screw 612 to rotate, which in turn causes the longitudinal moving block 62 to move on the second lead screw 612. The lifting drive unit 71, connected to the longitudinal moving block 62, moves along the length of the vertical strip-shaped through hole 11 to adjust the longitudinal position of the film thickness detector 8. Then, the lifting motor 714 is started, and the output shaft of the lifting motor 714 rotates, driving the third lead screw 713 to rotate. The film thickness detector 8, connected to the lifting block 72 via the mounting bracket 9, is raised and lowered to adjust the height of the measuring probe 81 and to measure the film thickness at one point on the surface of the workpiece. Finally, the above operation is repeated until the film thickness at all points on the surface of the workpiece is measured.

[0047] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A multi-azimuth mobile device for thin film thickness measurement, characterized by, include: The chassis (1) has a strip-shaped through hole (11) on its top surface. A lateral movement mechanism (2) includes a lateral movement drive unit (21) and a lateral movement block (22). The lateral movement drive unit (21) is installed inside the chassis (1) corresponding to the strip-shaped through hole (11). The lateral movement drive unit (21) is connected to the lateral movement block (22) to drive the lateral movement block (22) to move along the length direction of the strip-shaped through hole (11). Test piece platform (3), the test piece platform (3) is arranged on the top surface of the chassis (1) corresponding to the strip through hole (11), its bottom end is fixedly connected to the transverse moving block (22) through the connector (4), and the test piece can be assembled on the top of the test piece platform (3); The detector bracket (5) is correspondingly mounted on one side of the chassis (1) along the length direction of the strip-shaped through hole (11); The longitudinal moving mechanism (6) includes a longitudinal moving drive unit (61) and a longitudinal moving block (62). The longitudinal moving drive unit (61) is mounted on the detector bracket (5). The longitudinal moving drive unit (61) is connected to the longitudinal moving block (62) to drive the longitudinal moving block (62) to move along the direction perpendicular to the length of the strip-shaped through hole (11). The lifting mechanism (7) includes a lifting drive unit (71) and a lifting block (72). The lifting drive unit (71) is mounted on the longitudinal moving block (62). The lifting drive unit (71) is connected to the lifting block (72) to drive the lifting block (72) to move up and down along the height direction of the detector bracket (5). A thin film thickness measuring instrument (8) is fixed on the lifting block (72) by a mounting bracket (9). The measuring probe (81) at its measuring end corresponds to the surface of the workpiece on the workpiece stage (3) to measure the film thickness.

2. A multi-azimuth motion device for thin film thickness measurement according to claim 1, wherein, The lateral drive unit (21) includes: A long strip-shaped first lead screw mounting seat (211) is installed inside the chassis (1) corresponding to the strip-shaped through hole (11); The first lead screw (212) is axially rotatably mounted in the first lead screw mounting seat (211) and arranged parallel to the strip-shaped through hole (11). The transverse moving block (22) is threadedly connected to the first lead screw (212). A transverse drive motor (213) is installed at one end of the first lead screw mounting base (211), and its output shaft passes through the first lead screw mounting base (211) and is connected to the first lead screw (212) for transmission.

3. A multi-directional movement device for thin film thickness measurement according to claim 1, wherein, The test piece platform (3) is detachably connected to a test piece assembly plate (31), and the test piece assembly plate (31) is provided with a positioning groove (311) for assembling the test piece.

4. A multi-directional movement device for thin film thickness measurement according to claim 2, wherein, The longitudinal movement drive unit (61) includes: The second lead screw mounting base (611) is a long strip. The second lead screw mounting base (611) is installed on the side of the detector bracket (5) near the test piece stage (3), and its length direction is arranged perpendicular to the length direction of the strip through hole (11). The second lead screw (612) is axially rotatably mounted in the second lead screw mounting seat (611), and the longitudinal moving block (62) is threadedly connected to the second lead screw (612). A longitudinal drive motor (613) is mounted on one end of the second lead screw mounting base (611), and its output shaft passes through the second lead screw mounting base (611) and is connected to the second lead screw (612) for transmission.

5. A multi-azimuth motion device for thin film thickness measurement according to claim 4, wherein, The lifting drive unit (71) includes: A long strip-shaped third lead screw mounting base (711) is fixed on the longitudinal moving block (62) by a connecting plate (712), and its length direction is arranged perpendicular to the top surface of the chassis (1). The third lead screw (713) is axially rotatably mounted in the third lead screw mounting base (711), and the lifting block (72) is threadedly connected to the third lead screw (713). A lifting motor (714) is installed at the top of the third lead screw mounting base (711), and its output shaft passes through the third lead screw mounting base (711) and is connected to the third lead screw (713) for transmission.

6. A multi-azimuth motion device for thin film thickness measurement according to claim 5, wherein, It also includes a dust cover (10), which is fixed to the top of the connecting plate (712) by a U-shaped plate and covers the lifting motor (714).

7. A multi-azimuth motion device for thin film thickness measurement according to claim 5, wherein, It also includes a controller, which is installed inside the chassis (1) and electrically connected to the transverse drive motor (213), the longitudinal drive motor (613) and the lifting motor (714).

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