IPA Instant Heater

Abstract

This utility model discloses an IPA instantaneous heater, including a heater body and an insulation box. The insulation box is disposed outside the heater body, and a box cover is provided on the upper surface of the insulation box. A sealing sleeve is fitted on the upper surface of the insulation box. An air inlet pipe is connected to the outer surface of the insulation box, and a feed pipe and a discharge pipe are connected to the outer surface of the heater body. Two grooves are formed on the outer surface of the insulation box. This utility model, through the cooperation of components such as the heater body, insulation box, box cover, sealing sleeve, positioning rod, nut, air inlet pipe, groove, sealing block, slider, sealing ring, sealing gasket, positioning block, lead hole, wire protection tube, and threaded tube, achieves the function of sealing the heater body. By sealing the heater body, contact between the heater body and IPA vapor is prevented, thereby avoiding the possibility of combustion and explosion of the heater body, improving the practicality and safety of the heater.

Description

Technical Field

[0001] This utility model relates to the field of heater technology, and in particular to IPA instantaneous heater. Background Technology

[0002] In the wafer manufacturing process, IPA is used to dry the wafers. IPA has a strong water absorption and drying effect. However, IPA is flammable and explosive at high temperatures, which is quite risky. Although there are exhaust devices in the wafer manufacturing equipment to remove the volatilized IPA, some IPA vapor will inevitably remain in the equipment. At the same time, fluid heaters are also required in the wafer manufacturing equipment.

[0003] In existing technologies, most heaters are directly exposed to the outside environment without a sealing mechanism. This design allows the heater to come into direct contact with IPA vapor. When IPA leaks into the heater, the high temperature of the heater can easily lead to combustion and explosion, reducing the practicality and safety of the heater. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing an IPA instantaneous heater.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: an IPA instantaneous heater, comprising a heater body and an insulation box, wherein the insulation box is disposed outside the heater body, a box cover is provided on the upper surface of the insulation box, a sealing sleeve is fitted on the upper surface of the insulation box, an air inlet pipe is connected to the outer surface of the insulation box, a feed pipe and a discharge pipe are connected to the outer surface of the heater body, two grooves are formed on the outer surface of the insulation box, two sealing blocks are fixedly installed on the lower surface of the box cover, two sealing rings are provided inside each of the two grooves, two sealing gaskets are fixedly installed on the arc-shaped outer wall of the sealing rings, and a fixing component is provided inside the insulation box.

[0006] As a further description of the above technical solution:

[0007] Several positioning rods are fixedly installed on the upper surface of the heat insulation box. The positioning rods penetrate the inner wall of the sealing sleeve and the lower surface of the box cover and extend to the upper surface of the box cover. A nut is threaded onto the outer surface of the top of the positioning rod, and the nut abuts against the box cover.

[0008] As a further description of the above technical solution:

[0009] The feed pipe and the discharge pipe are respectively installed inside the corresponding grooves. Two sealing rings are respectively fitted on the outer surface of the feed pipe and the discharge pipe, and the two sealing gaskets are respectively attached to the inner wall and the outer wall of the heat insulation box.

[0010] As a further description of the above technical solution:

[0011] The two sealing blocks are slidably connected to the inner walls of the corresponding grooves. Slider blocks are fixedly installed on both sides of the sealing blocks. Slider grooves that match the sliders are opened on both sides of the inner walls of the grooves. Positioning blocks are fixedly installed on the arc-shaped outer wall of the sealing ring. Positioning grooves that are inserted into the positioning blocks are opened on the bottom wall of the groove and the lower surface of the sealing blocks.

[0012] As a further description of the above technical solution:

[0013] The outer surface of the heat insulation box is provided with a lead wire hole, and a protective tube is provided on the side wall of the heat insulation box near the lead wire hole. A threaded tube is fixedly installed at one end of the protective tube near the heat insulation box, and the threaded tube is threadedly connected to the inner wall of the lead wire hole.

[0014] As a further description of the above technical solution:

[0015] The fixing assembly includes a support base and a threaded rod. The support base is fixedly installed on the bottom wall of the heat insulation box. The threaded rod is rotatably connected to the inner walls of the front and rear sides of the heat insulation box. A sliding rod is fixedly connected to the inner walls of the front and rear sides of the heat insulation box. A turntable is fixedly installed at the rear end of the threaded rod. A drive plate is sleeved on the outer surface of both ends of the sliding rod. A clamping plate is fixedly installed at the top of the drive plate. There are two sets of the fixing assembly.

[0016] As a further description of the above technical solution:

[0017] The outer surface of the threaded rod is provided with a forward thread and a reverse thread. The side walls of the two drive plates are respectively threaded to the threaded rod through the forward thread and the reverse thread. The shape of the clamping plate is an arc shape adapted to the heater body.

[0018] This utility model has the following beneficial effects:

[0019] 1. Compared with existing technologies, this IPA instantaneous heater achieves the function of sealing the heater body by setting up components such as heater body, heat insulation box, box cover, sealing sleeve, positioning rod, nut, air inlet pipe, feed pipe, discharge pipe, groove, sealing block, slider, sealing ring, sealing gasket, positioning block, lead hole, wire protection tube and threaded tube. By sealing the heater body, it prevents the heater body from coming into contact with IPA vapor, thereby avoiding the possibility of combustion and explosion of the heater body, and improving the practicality and safety of the heater.

[0020] 2. Compared with existing technologies, this IPA instantaneous heater achieves quick and convenient fixation of the heater body by setting up a support base, threaded rod, sliding rod, turntable, driving plate and clamping plate. By using the support base to support the heater body and using two arc-shaped clamping plates to clamp and fix the heater body, the firmness and stability of the heater body installation are improved. Attached Figure Description

[0021] Figure 1 This is a three-dimensional structural schematic diagram of the IPA instantaneous heater proposed in this utility model;

[0022] Figure 2 This is a schematic diagram of the sealing sleeve structure of the IPA instantaneous heater proposed in this utility model;

[0023] Figure 3 This is a schematic diagram of the sealing block structure of the IPA instantaneous heater proposed in this utility model;

[0024] Figure 4 This is a schematic diagram of the positioning block structure of the IPA instantaneous heater proposed in this utility model;

[0025] Figure 5 This is a schematic diagram of the fixed component structure of the IPA instantaneous heater proposed in this utility model.

[0026] Legend:

[0027] 1. Heater body; 2. Insulation box; 3. Box cover; 4. Sealing sleeve; 5. Positioning rod; 6. Nut; 7. Air inlet pipe; 8. Feed pipe; 9. Discharge pipe; 10. Groove; 11. Sealing block; 12. Sliding block; 13. Sealing ring; 14. Sealing gasket; 15. Positioning block; 16. Lead wire hole; 17. Wire protection tube; 18. Threaded tube; 19. Support base; 20. Threaded rod; 21. Slide rod; 22. Turntable; 23. Drive plate; 24. Clamping plate. Detailed Implementation

[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0029] Reference Figures 1 to 5The IPA instantaneous heater provided by this utility model includes a heater body 1 and a heat insulation box 2. The heat insulation box 2 is disposed outside the heater body 1. A box cover 3 is provided on the upper surface of the heat insulation box 2. A sealing sleeve 4 is fitted on the upper surface of the heat insulation box 2. Several positioning rods 5 are fixedly installed on the upper surface of the heat insulation box 2. The positioning rods 5 penetrate the inner wall of the sealing sleeve 4 and the lower surface of the box cover 3 and extend to the upper surface of the box cover 3. Nuts 6 are threadedly connected to the outer surface of the top of the positioning rods 5. The nuts 6 abut against the box cover 3. The outer surface of the heater body 1 is connected to the air inlet pipe 7, and the outer surface of the heater body 1 is connected to the feed pipe 8 and the discharge pipe 9. The outer surface of the heat insulation box 2 has two grooves 10. The feed pipe 8 and the discharge pipe 9 are respectively set inside the corresponding grooves 10. The lower surface of the box cover 3 is fixedly installed with two sealing blocks 11. The two sealing blocks 11 are slidably connected to the inner wall of the corresponding grooves 10. The two side walls of the sealing blocks 11 are fixedly installed with sliders 12. The inner walls of the two sides of the grooves 10 are provided with sliding grooves that are compatible with the sliders 12.

[0030] To improve the sealing performance of the heat insulation box 2, two sealing rings 13 are provided inside the two grooves 10. Two sealing gaskets 14 are fixedly installed on the arc-shaped outer wall of the sealing rings 13. Two sealing rings 13 are respectively fitted on the outer surface of the feed pipe 8 and the discharge pipe 9. The two sealing gaskets 14 are respectively in contact with the inner wall and the outer wall of the heat insulation box 2. A positioning block 15 is fixedly installed on the arc-shaped outer wall of the sealing rings 13. The bottom wall of the groove 10 and the lower surface of the sealing block 11 are both provided with positioning grooves that can be inserted into the positioning block 15. A lead wire hole 16 is provided on the outer surface of the heat insulation box 2. A wire protection tube 17 is provided on the side wall of the heat insulation box 2 near the lead wire hole 16. A threaded tube 18 is fixedly installed on one end of the wire protection tube 17 near the heat insulation box 2. The threaded tube 18 is threadedly connected to the inner wall of the lead wire hole 16.

[0031] By setting up heater body 1, heat insulation box 2, box cover 3, sealing sleeve 4, positioning rod 5, nut 6, air inlet pipe 7, feed pipe 8, discharge pipe 9, groove 10, sealing block 11, slider 12, sealing ring 13, sealing gasket 14, positioning block 15, lead wire hole 16, wire protection tube 17 and threaded tube 18, the heater body 1 is sealed. By sealing the heater body 1, contact between the heater body 1 and IPA vapor is prevented, thereby avoiding the possibility of combustion and explosion of the heater body 1, and improving the practicality and safety of the heater.

[0032] The heat insulation box 2 is equipped with a fixing assembly, which includes a support base 19 and a threaded rod 20. The support base 19 is fixedly installed on the bottom wall of the heat insulation box 2. The threaded rod 20 is rotatably connected to the inner walls of the front and rear sides of the heat insulation box 2. A slide rod 21 is fixedly connected to the inner walls of the front and rear sides of the heat insulation box 2. A turntable 22 is fixedly installed at the rear end of the threaded rod 20. A drive plate 23 is sleeved on the outer surface of both ends of the slide rod 21. The outer surface of the threaded rod 20 has a forward thread and a reverse thread. The side walls of the two drive plates 23 are threaded to the threaded rod 20 through the forward thread and the reverse thread, respectively. A clamping plate 24 is fixedly installed at the top of the drive plate 23. The shape of the clamping plate 24 is an arc shape adapted to the heater body 1. There are two sets of fixing assemblies.

[0033] By setting up a support base 19, a threaded rod 20, a sliding rod 21, a turntable 22, a driving plate 23, and a clamping plate 24, the function of quickly and conveniently fixing the heater body 1 is realized. By using the support base 19 to support the heater body 1, and using the two arc-shaped clamping plates 24 to clamp and fix the heater body 1, the firmness and stability of the heater body 1 installation are improved.

[0034] Working principle: Before using the heater, first install the heater inside the heat insulation box 2. Then, place a sealing ring 13 inside each of the two grooves 10, so that the positioning block 15 is inserted into the positioning groove on the bottom wall of the groove 10. The two sealing gaskets 14 are respectively attached to the inner and outer walls of the heat insulation box 2. Then, place the heater body 1 inside the heat insulation box 2, so that the heater body 1 is placed in the arc-shaped groove of the two support seats 19, and the feed pipe 8 and the discharge pipe 9 are respectively set inside the two grooves 10. Then, put the other two sealing rings 13 on the outer surface of the feed pipe 8 and the discharge pipe 9. The two sealing rings 13 on the outer surface of the feed pipe 8 and the discharge pipe 9 are in contact with each other at the ends, connecting to form a ring and fitting against the feed pipe. The outer surfaces of the feed pipe 8 and the discharge pipe 9 are sealed between the feed pipe 8 and the discharge pipe 9 and the groove 10. Then, the turntable 22 is rotated. When the turntable 22 rotates, it drives the threaded rod 20 to rotate on the inner wall of the heat insulation box 2. When the threaded rod 20 rotates, it drives the driving plate 23 to move. Under the restriction of the slide rod 21, the two driving plates 23 move along the outer surface of the slide rod 21 from both ends of the threaded rod 20 to the middle position of the threaded rod 20, thereby driving the arc-shaped clamping plate 24 to move closer to the heater body 1. When both clamping plates 24 are in contact with the outer wall of the heater body 1, the heater body 1 is clamped. The above operation is repeated so that another set of fixing components also clamps the heater body 1, thus completing the fixing of the heater body 1.

[0035] After the heater body 1 is fixed, the sealing sleeve 4 is placed on the top of the heat insulation box 2, and then the box cover 3 is placed on the upper surface of the heat insulation box 2. At this time, the two sealing blocks 11 slide into the interior of the two grooves 10 respectively, and the slider 12 slides inside the groove. When the positioning rod 5 passes through the sealing sleeve 4 and the box cover 3, the box cover 3 contacts the heat insulation box 2. The positioning block 15 on the sealing ring 13, which is above the inlet pipe 8 and the outlet pipe 9, is inserted into the positioning groove on the lower surface of the sealing block 11. Then, the nut 6 is screwed to the top of the positioning rod 5 to press and fix the box cover 3, thereby completing the sealing of the heater body 1. After the heater body 1 is sealed, the air inlet pipe 7 is connected to the nitrogen storage equipment to introduce nitrogen into the interior of the heat insulation box 2. After the inlet pipe 8 and the outlet pipe 9 are connected to the corresponding equipment, the heater can be started to heat.

[0036] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. IPA instantaneous heater comprising a heater body (1) and a thermally insulated tank (2), characterized in that: The heat insulation box (2) is located outside the heater body (1). The upper surface of the heat insulation box (2) is provided with a box cover (3). The upper surface of the heat insulation box (2) is fitted with a sealing sleeve (4). The outer surface of the heat insulation box (2) is connected to an air inlet pipe (7). The outer surface of the heater body (1) is connected to a feed pipe (8) and a discharge pipe (9). The outer surface of the heat insulation box (2) has two grooves (10). The lower surface of the box cover (3) is fixedly installed with two sealing blocks (11). The interior of each of the two grooves (10) is provided with two sealing rings (13). The arc-shaped outer wall of the sealing rings (13) is fixedly installed with two sealing gaskets (14). The interior of the heat insulation box (2) is provided with a fixing component.

2. The IPA transient heater of claim 1, wherein: Several positioning rods (5) are fixedly installed on the upper surface of the heat insulation box (2). The positioning rods (5) penetrate the inner wall of the sealing sleeve (4) and the lower surface of the box cover (3) and extend to the upper surface of the box cover (3). The outer surface of the top of the positioning rod (5) is threaded with a nut (6), and the nut (6) abuts against the box cover (3).

3. The IPA transient heater of claim 1, wherein: The feed pipe (8) and the discharge pipe (9) are respectively set inside the corresponding groove (10). The outer surfaces of the feed pipe (8) and the discharge pipe (9) are respectively fitted with two sealing rings (13). The two sealing gaskets (14) are respectively attached to the inner wall and the outer wall of the heat insulation box (2).

4. The IPA transient heater of claim 1, wherein: The two sealing blocks (11) are slidably connected to the inner wall of the corresponding groove (10). The two side walls of the sealing block (11) are fixedly installed with sliders (12). The inner walls of the two sides of the groove (10) are provided with sliding grooves that are adapted to the sliders (12). The arc-shaped outer wall of the sealing ring (13) is fixedly installed with a positioning block (15). The bottom wall of the groove (10) and the lower surface of the sealing block (11) are both provided with positioning grooves that are inserted into the positioning block (15).

5. The IPA transient heater of claim 1, wherein: The outer surface of the heat insulation box (2) is provided with a lead wire hole (16). A protective tube (17) is provided on the side wall of the heat insulation box (2) near the lead wire hole (16). A threaded tube (18) is fixedly installed on one end of the protective tube (17) near the heat insulation box (2). The threaded tube (18) is threadedly connected to the inner wall of the lead wire hole (16).

6. The IPA instantaneous heater according to claim 1, characterized in that: The fixing assembly includes a support base (19) and a threaded rod (20). The support base (19) is fixedly installed on the bottom wall of the heat insulation box (2). The threaded rod (20) is rotatably connected to the inner walls of the front and rear sides of the heat insulation box (2). A slide rod (21) is fixedly connected to the inner walls of the front and rear sides of the heat insulation box (2). A turntable (22) is fixedly installed at the rear end of the threaded rod (20). A drive plate (23) is sleeved on the outer surface of both ends of the slide rod (21). A clamping plate (24) is fixedly installed at the top of the drive plate (23). The number of fixing assemblies is two sets.

7. The IPA transient heater of claim 6, wherein: The outer surface of the threaded rod (20) is provided with a forward thread and a reverse thread. The side walls of the two drive plates (23) are respectively threaded to the threaded rod (20) through the forward thread and the reverse thread. The shape of the clamping plate (24) is an arc shape that is adapted to the heater body (1).

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