A probe and a contact profilometer
By adjusting the position of the permanent magnet relative to the magnetic coil, the problem of uneven probe force caused by the permanent magnet deviating from the center of the magnetic field was solved, ensuring that the probe provides a constant probe force and improving the measurement accuracy of the contact profilometer.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- 无锡卓海科技股份有限公司
- Filing Date
- 2025-07-23
- Publication Date
- 2026-07-03
AI Technical Summary
The detection accuracy of existing contact profilometers has decreased because the permanent magnet is difficult to be accurately positioned at the center of the magnetic field of the magnetic coil, resulting in uneven probe force and an inability to provide a stable probe force.
By designing a probe structure, including a probe mounting base rotatably connected to a mounting frame, a permanent magnet located within the magnetic field of a magnetic coil, and using bolts and grooves to adjust the position of the permanent magnet relative to the magnetic coil so that it is as close as possible to the center of the magnetic field, the probe force is kept constant.
This achieves consistency between the probe force and the theoretical probe force, improving the measurement accuracy and stability of the contact profilometer.
Smart Images

Figure CN224455665U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of product testing technology, and in particular to a probe and a contact profilometer. Background Technology
[0002] Contact profilometers are used to measure the profile dimensions and roughness parameters of workpieces. When measuring workpieces with different hardness, they need to use the probe of the probe to sweep the surface of the workpiece with a constant probe force of different sizes.
[0003] In existing technologies, a permanent magnet is often connected to one end of the probe, while the other end of the permanent magnet is located within the magnetic field generated by a magnetic coil. When the magnetic coil is energized, it generates a magnetic force that repels or attracts the permanent magnet. The permanent magnet then transmits the force it receives to the probe, enabling it to scrape the surface of the workpiece. When the probe scrapes the workpiece, it needs to exert a constant probe force. Theoretically, the closer the permanent magnet is to the center of the magnetic field of the magnetic coil, the closer the force transmitted to the probe is to the theoretical value of the required probe force, and the magnetic force is uniform and stable. Therefore, when installing the permanent magnet and magnetic coil, their relative positions along the central axis of the magnetic coil need to be adjusted. However, due to limitations in machining and assembly precision, it is difficult for the permanent magnet to be positioned at the center of the magnetic field generated by the magnetic coil. The magnetic force experienced by the permanent magnet is uneven and less than the theoretical magnetic force, resulting in the actual probe force provided by the probe being less than the theoretical probe force, thus reducing the detection accuracy of the contact profilometer.
[0004] Therefore, there is an urgent need for a probe and a contact profilometer to solve the above problems. Utility Model Content
[0005] The purpose of this invention is to solve or at least alleviate some or all of the aforementioned problems. Therefore, the purpose of this invention is to provide a probe and a contact profilometer that allows the permanent magnet to be as close as possible to the center of the magnetic field generated by the magnetic coil, thereby improving the detection accuracy of the contact profilometer.
[0006] To achieve this objective, the present invention adopts the following technical solution:
[0007] In a first aspect, a probe is provided for providing probe force, the probe comprising:
[0008] Mounting rack;
[0009] A coil assembly includes a magnetic coil, a coil mounting base, and a first bolt. The central axis of the magnetic coil is arranged along a first direction and fixedly connected to the coil mounting base. The coil mounting base has a sliding groove extending along the first direction. The mounting bracket has at least two first threaded holes corresponding to the sliding groove. The first bolt passes through the sliding groove and is threadedly connected to the first threaded holes. The number of first threaded holes is the same as the number of first bolts and they correspond one-to-one. The thread of the first bolt is clearance-fitted with the inner sidewall of the sliding groove.
[0010] The probe assembly includes a probe mounting base, a probe head, and a permanent magnet. The probe mounting base is rotatably connected to the mounting frame via a rotating shaft. One end of the probe head is mounted on the probe mounting base and can be subjected to force to cause the probe mounting base to rotate along the rotating shaft. The permanent magnet is mounted on the probe mounting base and is located within the magnetic field space generated by the magnetic coil.
[0011] In some embodiments, the coil assembly further includes an adjusting member having a through hole, wherein the first bolt passes through the groove and the through hole in sequence and is threadedly connected to the first threaded hole.
[0012] In some embodiments, the coil assembly further includes an elastic washer, and the first bolt passes through the elastic washer, the groove, and the through hole in sequence to be threadedly connected to the first threaded hole.
[0013] In some embodiments, the coil assembly further includes a limiting member disposed on the mounting bracket and facing the coil mounting base in the first direction, the limiting member being used to limit the maximum displacement of the coil mounting base in the first direction away from the magnetic coil.
[0014] In some embodiments, the coil assembly further includes an isolator with an isolation cavity inside, and a through slot on the isolator for the coil mounting base to pass through, wherein the magnetic coil is mounted in the isolation cavity.
[0015] In some embodiments, the probe assembly further includes a protective member fixedly connected to the mounting bracket and having a protective groove, wherein the probe head is accommodated within the protective groove and spaced apart from the inner wall of the protective groove.
[0016] In some embodiments, the probe assembly further includes a connector and an elastic element, the pivot is mounted on the connector, and the connector is elastically connected to the mounting bracket via the elastic element.
[0017] In some embodiments, the probe further includes a displacement detection component, which includes a capacitor plate and an electrode. The two capacitor plates are respectively fixedly connected to the mounting bracket and clamped to form a capacitance space. One end of the electrode is fixedly connected to the probe mounting base, and the other end is located in the capacitance space.
[0018] Secondly, a contact profilometer is provided, including the probe described above. The contact profilometer includes a frame, and the mounting bracket is fixedly connected to the frame.
[0019] The beneficial effects of this utility model are:
[0020] The probe provided by this utility model is rotatably connected to the mounting frame via a rotating shaft of a probe mounting base. One end of the probe head is mounted on the probe mounting base and can be subjected to force, causing the probe mounting base to rotate along the rotating shaft. A permanent magnet is mounted on the probe mounting base and located within the magnetic field space generated by the magnetic coil, so that the permanent magnet can be transmitted to the probe head by the magnetic force generated by the magnetic coil, allowing the probe head to sweep and measure the workpiece with a constant probe force. The magnetic coil is arranged along a first direction and fixedly connected to the coil mounting base. The coil mounting base has a sliding groove extending along the first direction, and the mounting frame has at least two first threaded holes corresponding to the sliding groove. A first bolt passes through the sliding groove. The first threaded hole is threaded to the first threaded hole, and the number of the first threaded holes is the same as the number of the first bolts and they correspond one-to-one. This allows the relative position of the permanent magnet with respect to the magnetic coil on its central axis to be adjusted, thereby adjusting the magnitude of the magnetic force on the permanent magnet and thus the magnitude of the probe force. By making the screw of the first bolt fit with the inner wall of the groove with a clearance, the relative position of the permanent magnet with respect to the magnetic coil in the second direction (the second direction is perpendicular to the first direction) can be adjusted so that the permanent magnet can be as close as possible to the center of the magnetic field generated by the magnetic coil, thereby making the magnetic force on the permanent magnet as close as possible to the theoretical magnetic force, and the actual probe force of the probe is as equal as possible to the required theoretical probe force.
[0021] The contact profilometer provided by this invention can measure the contour dimensions and roughness parameters of a workpiece by applying the above-mentioned probe, and can ensure measurement accuracy. Attached Figure Description
[0022] Figure 1 This is a structural schematic diagram of the probe from the first perspective provided in this embodiment of the utility model;
[0023] Figure 2 This is a schematic diagram of the probe after removing the isolator from the first viewpoint provided in this embodiment of the utility model;
[0024] Figure 3 This is a cross-sectional schematic diagram of the probe provided in this embodiment of the utility model;
[0025] Figure 4 This is a schematic diagram of the second perspective of the probe provided in this embodiment of the utility model.
[0026] In the picture:
[0027] 1. Mounting bracket; 11. First threaded hole;
[0028] 2. Coil assembly; 21. Magnetic coil; 211. Magnetic field space; 22. Coil mounting base; 221. Slide groove; 23. First bolt; 24. Limiting component; 25. Elastic washer; 26. Isolating component; 261. Isolation cavity;
[0029] 3. Probe assembly; 31. Probe mounting base; 311. Rotating shaft; 32. Probe head; 33. Permanent magnet; 34. Connector; 35. Elastic component; 36. Protective component; 361. Protective groove;
[0030] 4. Displacement detection component; 41. Capacitor plate; 42. Electrode. Detailed Implementation
[0031] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.
[0032] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0033] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.
[0034] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.
[0035] Due to limitations in machining and assembly precision, permanent magnets are difficult to position at the center of the magnetic field generated by the magnetic coil. The uneven magnetic force experienced by the permanent magnet is less than the theoretical magnetic force, resulting in a lower actual probe force than the theoretical probe force, thus reducing the detection accuracy of the contact profilometer. Therefore, adjusting the position of the permanent magnet relative to the magnetic coil according to actual needs, so that the permanent magnet is as close as possible to the center of the magnetic field generated by the magnetic coil, is the key to solving the above technical problems. The following section will discuss this further. Figures 1 to 4 The probe and contact profilometer provided in this embodiment are described.
[0036] Figure 1 A schematic diagram of the probe's first-view perspective provided in this embodiment is shown. Figure 2 The diagram shows the structure of the probe after removing the isolator 26 from the first viewpoint provided in this embodiment. Figure 3 A cross-sectional schematic diagram of the probe provided in this embodiment is shown. For example... Figures 1 to 3 As shown, the probe provided in this embodiment is used to scan the surface of the workpiece to be tested, including a mounting frame 1, a coil assembly 2, and a probe assembly 3; the coil assembly 2 includes a magnetic coil 21, a coil mounting base 22, and a first bolt 23. The central axis of the magnetic coil 21 is arranged along a first direction and fixedly connected to the coil mounting base 22. The coil mounting base 22 has a groove 221 extending along the first direction. The mounting frame 1 has at least two first threaded holes 11 corresponding to the groove 221. The first bolt 23 passes through the groove 221 and is threadedly connected to the first threaded holes 11. The number of first threaded holes 11 is the same as the number of first bolts 23 and they correspond one-to-one. The screw of the first bolt 23 is clearance-fitted with the inner sidewall of the slide groove 221. The probe assembly 3 includes a probe mounting base 31, a probe head 32 and a permanent magnet 33. The rotating shaft 311 of the probe mounting base 31 is rotatably connected to the mounting frame 1. One end of the probe head 32 is mounted on the probe mounting base 31 and can be subjected to force to make the probe mounting base 31 rotate along the rotating shaft 311. The permanent magnet 33 is mounted on the probe mounting base 31 and is located in the magnetic field space 211 generated by the magnetic coil 21.
[0037] The probe provided in this embodiment is rotatably connected to the mounting frame 1 via the rotating shaft 311 of the probe mounting base 31. One end of the probe head 32 is mounted on the probe mounting base 31 and can be subjected to force to make the probe mounting base 31 rotate along the rotating shaft 311. The permanent magnet 33 is mounted on the probe mounting base 31 and is located within the magnetic field space 211 generated by the magnetic coil 21, so that the permanent magnet 33 can be transmitted to the probe head 32 by the magnetic force generated by the magnetic coil 21, so that the probe head 32 can sweep and measure the workpiece with a constant probe force. The central axis of the magnetic coil 21 is arranged along the first direction and fixedly connected to the coil mounting base 22. The coil mounting base 22 has a sliding groove 221 extending along the first direction. The mounting frame 1 has at least two first threaded holes 11 corresponding to the sliding groove 221. A bolt 23 passes through the groove 221 and is threaded into the first threaded hole 11. The number of first threaded holes 11 is the same as the number of first bolts 23 and they correspond one-to-one. This allows the relative position of the permanent magnet 33 with respect to the magnetic coil 21 on its central axis to be adjusted, thereby adjusting the magnitude of the magnetic force on the permanent magnet 33 and thus adjusting the magnitude of the probe force. By making the screw of the first bolt 23 fit with the inner wall of the groove 221 with a clearance, the relative position of the permanent magnet 33 with respect to the magnetic coil 21 in the second direction (the second direction is perpendicular to the first direction) can be adjusted so that the permanent magnet 33 can be as close as possible to the center of the magnetic field generated by the magnetic coil 21, thereby making the magnetic force on the permanent magnet 33 as close as possible to the theoretical magnetic force, and the actual probe force of the probe as equal as possible to the required theoretical probe force.
[0038] It should be noted that at least two first bolts 23 are spaced apart along the first direction, and the number of first threaded holes 11 is the same as the number of first bolts 23, with each hole corresponding to the other in a threaded connection. This improves the stability of the coil mounting base 22 on the mounting frame 1, preventing relative sliding between the probe mounting base 31 and the mounting frame 1 during probe use, which could lead to the probe failing to provide a constant probe force. Simultaneously, when adjusting the permanent magnet 33 to be as close as possible to the center of the magnetic field generated by the magnetic coil 21, the first bolts 23 can be partially tightened, and then the coil mounting base 22 can be pushed to adjust the relative position of the permanent magnet 33 with respect to the magnetic coil 21 in the second direction, allowing the permanent magnet 33 to be as close as possible to the center of the magnetic field generated by the magnetic coil 21. Finally, the first bolts 23 are tightened to complete the adjustment. It should be noted that the number of first bolts 23 can be one, two, three, or even more, and those skilled in the art can reasonably select the number of first bolts 23 according to actual requirements.
[0039] In this embodiment, two first bolts 23 are spaced apart along a first direction, and two first threaded holes 11 correspond one-to-one with the first bolts 23 and are threadedly connected to each other, so as to prevent the probe mounting base 31 from sliding relative to the mounting bracket 1 during the use of the probe.
[0040] The closer the permanent magnet 33 is to the center of the magnetic field generated by the magnetic coil 21, the closer the magnetic force borne by the permanent magnet 33 is to the theoretical magnetic force, and the closer the actual probe force of the probe is to the theoretical probe force. However, if the permanent magnet 33 can be located at the center of the magnetic coil 21, the magnetic force borne by the permanent magnet 33 can be directly equal to the theoretical magnetic force, and the actual probe force of the probe can be equal to the theoretical probe force. In order to make the permanent magnet 33 located at the center of the magnetic field generated by the magnetic coil 21, the coil assembly 2 also includes an adjusting member. The adjusting member has a through hole. The first bolt 23 passes through the slide groove 221 and the through hole in sequence and is threadedly connected to the first threaded hole 11. Thus, the relative position of the permanent magnet 33 with respect to the magnetic coil 21 in the third direction (the third direction is perpendicular to both the first and second directions) can be adjusted by utilizing the thickness of the adjusting member itself. In addition, the relative position of the permanent magnet 33 with respect to the magnetic coil 21 in the second and third directions can be adjusted simultaneously, so that the permanent magnet 33 is located at the center of the magnetic field generated by the magnetic coil 21, and the actual probe force of the probe is equal to the theoretical probe force. Specifically, the adjusting component is a shim. By placing the shim at the connection position between the coil mounting base 22 and the mounting bracket 1, the relative position of the permanent magnet 33 with respect to the magnetic coil 21 in the third direction can be adjusted.
[0041] Preferably, the coil assembly 2 further includes an elastic washer 25, and the first bolt 23 passes through the elastic washer 25, the groove 221 and the through hole in sequence and is threaded to the first threaded hole 11, thereby increasing the friction between the first bolt 23 and the coil mounting base 22 to improve the stability of the coil mounting base 22 on the mounting frame 1, and preventing the probe mounting base 31 from sliding relative to the mounting frame 1 during the use of the probe, which would make it difficult for the probe to provide a constant probe force.
[0042] Continue as Figures 1 to 3As shown, the coil assembly 2 also includes a limiting member 24, which is disposed on the mounting bracket 1 and faces the coil mounting base 22 in the first direction. The limiting member 24 is used to limit the maximum displacement of the coil mounting base 22 in the first direction away from the magnetic coil 21. This prevents excessive adjustment when the permanent magnet 33 moves away from the coil mounting base 22 in the first direction to adjust the magnetic force generated by the magnetic coil 21, thus preventing the permanent magnet 33 from directly leaving the magnetic field space 211 and becoming unable to withstand the magnetic force, causing the probe head 32 to fail and unable to provide probe force. Specifically, the limiting member 24 is a limiting bolt. The mounting bracket 1 has a second threaded hole, which faces the coil mounting base 22 in the first direction and is located on the side of the coil mounting base 22 away from the permanent magnet 33. This allows the limiting bolt to abut against the coil mounting base 22 and limit the maximum displacement of the coil mounting base 22 in the first direction away from the magnetic coil 21. It should be noted that the specific type of the limiting member 24 is not limited here. It can be a limiting block or a limiting pin, as long as it can limit the maximum displacement of the coil mounting base 22 in the first direction away from the magnetic coil 21. It will not be described in detail here.
[0043] Continue as Figures 1 to 3 As shown, the coil assembly 2 also includes an isolator 26, which has an isolation cavity 261 inside. The isolator 26 has a through slot for the coil mounting base 22 to pass through. The magnetic coil 21 is installed inside the isolation cavity 261, thereby preventing external ferromagnetic materials from affecting the magnetic field generated by the magnetic coil 21, which could alter the magnetic force on the permanent magnet 33 and adversely affect the probe force provided by the probe. Specifically, the isolator 26 is a lead sleeve, with its inner wall fitted onto the outer wall of the magnetic coil 21, thus isolating the magnetic coil 21 and preventing the magnetic field generated by the magnetic coil 21 from being affected by external ferromagnetic materials.
[0044] Continue as Figures 1 to 3 As shown, the probe assembly 3 also includes a protective member 36, which is fixedly connected to the mounting bracket 1 and has a protective groove 361. The probe head 32 is housed in the protective groove 361 and is spaced apart from the inner wall of the protective groove 361. This prevents the probe head 32 from being excessively deformed and plastically deformed when it presses against the workpiece, thus preventing the probe head 32 from becoming unusable and extending its service life.
[0045] Figure 4 A schematic diagram of the second viewpoint of the probe provided in this embodiment is shown. Figure 4 Combination Figures 1 to 2As shown, the probe assembly 3 also includes a connector 34 and an elastic element 35. A rotating shaft 311 is mounted on the connector 34, which is elastically connected to the mounting bracket 1 via the elastic element 35. When the probe head 32 presses against the workpiece, the connector 34 rotates forward with the rotating shaft 311. When the probe head 32 no longer presses against the workpiece, the elastic element 35 causes the connector 34 to rotate in the opposite direction due to its elasticity, driving the coil mounting base 22 to rotate. This allows the probe head 32 to return to its original pressing position, enabling it to continue pressing against the workpiece, thereby improving the probe's detection efficiency. Specifically, the elastic element 35 is a spring. The second bolt is fixedly connected to the mounting bracket 1. The connector 34 has a second through hole through which the screw of the second bolt passes. The spring is sleeved on the screw of the second bolt and located between the connector 34 and the mounting bracket 1. When the probe head 32 presses against the workpiece, the connector 34 rotates forward and is compressed. When the probe head 32 no longer presses against the workpiece, the spring releases its elastic force, causing the connector 34 to rotate in the opposite direction.
[0046] like Figure 3 Combination Figure 1 As shown, the probe also includes a displacement detection component 4, which includes a capacitor plate 41 and an electrode 42. The two capacitor plates 41 are fixedly connected to the mounting bracket 1 and clamped together to form a capacitance space. One end of the electrode 42 is fixedly connected to the probe mounting base 31, and the other end is located in the capacitance space. Thus, when the probe mounting base 31 rotates, the electrode 42 moves simultaneously, causing a change in capacitance between the capacitor plates 41. By detecting the change in capacitance between the two capacitor plates 41, the degree of rotation of the coil mounting base 22 can be determined, thereby deriving the theoretical probe force that the probe should provide.
[0047] This embodiment also provides a contact profilometer, including the probe described above, and a frame. The mounting bracket 1 of the probe is fixedly connected to the frame, thereby enabling the contact profilometer to measure the contour dimensions and roughness parameters of the workpiece and ensuring measurement accuracy.
[0048] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.
Claims
1. A probe for providing a probe force, characterized in that The probe includes: Mounting bracket (1); The coil assembly (2) includes a magnetic coil (21), a coil mounting base (22), and a first bolt (23). The central axis of the magnetic coil (21) is arranged along a first direction and fixedly connected to the coil mounting base (22). The coil mounting base (22) has a groove (221) extending along the first direction. The mounting bracket (1) has at least two first threaded holes (11) corresponding to the groove (221). The first bolt (23) passes through the groove (221) and is threadedly connected to the first threaded hole (11). The number of first threaded holes (11) is the same as the number of first bolts (23) and they correspond one-to-one. The screw of the first bolt (23) is clearance-fitted with the inner wall of the groove (221). The probe assembly (3) includes a probe mounting base (31), a probe head (32), and a permanent magnet (33). The rotating shaft (311) of the probe mounting base (31) is rotatably connected to the mounting frame (1). One end of the probe head (32) is mounted on the probe mounting base (31) and can be subjected to force to make the probe mounting base (31) rotate along the rotating shaft (311). The permanent magnet (33) is mounted on the probe mounting base (31) and is located in the magnetic field space (211) generated by the magnetic coil (21).
2. The probe of claim 1, wherein, The coil assembly (2) also includes an adjusting member with a through hole. The first bolt (23) passes through the slide groove (221) and the through hole in sequence and is threadedly connected to the first threaded hole (11).
3. The probe of claim 2, wherein, The coil assembly (2) further includes an elastic washer (25), and the first bolt (23) passes through the elastic washer (25), the groove (221) and the through hole in sequence to be threadedly connected to the first threaded hole (11).
4. The probe of claim 2, wherein, The coil assembly (2) further includes a limiting member (24), which is disposed on the mounting bracket (1) and faces the coil mounting base (22) in the first direction. The limiting member (24) is used to limit the maximum displacement of the coil mounting base (22) in the first direction away from the magnetic coil (21).
5. The probe of claim 2, wherein, The coil assembly (2) further includes an isolator (26), which has an isolation cavity (261) inside. The isolator (26) has a through slot for the coil mounting base (22) to pass through, and the magnetic coil (21) is installed in the isolation cavity (261).
6. The probe of claim 1, wherein, The probe assembly (3) further includes a protective member (36), which is fixedly connected to the mounting bracket (1) and has a protective groove (361). The probe head (32) is housed in the protective groove (361) and is spaced apart from the inner wall of the protective groove (361).
7. The probe of claim 1, wherein, The probe assembly (3) further includes a connector (34) and an elastic element (35). The rotating shaft (311) is mounted on the connector (34), and the connector (34) is elastically connected to the mounting bracket (1) through the elastic element (35).
8. The probe of any one of claims 1-7, wherein, The probe also includes a displacement detection component (4), which includes a capacitor plate (41) and an electrode (42). The two capacitor plates (41) are respectively fixedly connected to the mounting bracket (1) and sandwiched to form a capacitor space. One end of the electrode (42) is fixedly connected to the probe mounting base (31), and the other end is located in the capacitor space.
9. A contact profilometer comprising a probe as claimed in any one of claims 1 to 8, characterized in that, The contact profilometer includes a frame, and the mounting bracket (1) is fixedly connected to the frame.