Optical tracking system and scanning probe microscope

Abstract

This application relates to the field of scanning probe microscopy technology and discloses an optical tracking system, including: a scanner with a target position; and an optical path structure including a first reflecting mirror disposed at a preset position on the scanner. A first distance from the target position to a fixed end of the scanner and a second distance from the target position to the spot position of the first reflecting mirror satisfy a preset relationship, ensuring that the reflected light from the first reflecting mirror passes through the target position. When the scanner moves, the first reflecting mirror and the target position can move synchronously with the scanner. The change in the angle of the reflected light path, based on the preset relationship, precisely compensates for the displacement of the target position, thereby ensuring that the detection light emitted by the light source, after being reflected by the first reflecting mirror, always accurately passes through the moving target position. This eliminates the need for additional dynamic adjustment elements or closed-loop control systems, improving the reliability of the scanning probe microscopy optical tracking system. This application also discloses a scanning probe microscope.

Description

Technical Field

[0001] This application relates to the field of scanning probe microscopy technology, and for example to an optical tracking system and a scanning probe microscope. Background Technology

[0002] Currently, in the field of scanning probe microscopy, when the probe performs a large-scale scanning movement driven by the scanner, the laser optical path used to detect the slight deflection of the probe needs to follow the probe's movement in real time to ensure that the laser spot is always accurately illuminating the fixed position of the probe cantilever. The movement of the scanning tube is often not a pure translation, but is accompanied by rotation or an arc trajectory, which makes it difficult for the fixed light source to continuously align with the moving probe.

[0003] To address the optical path misalignment caused by probe scanning motion, the relevant technology employs a dynamically adjustable mirror system. One or more mirrors are mounted on a precision motor or piezoelectric actuator independent of the scanning tube. The probe's position information is obtained through a position sensor or an image-based recognition system and fed back to the control system in real time. The control system then drives the adjustable mirrors to make fine adjustments to their angle or position, thereby actively adjusting the laser beam path to ensure that the beam always tracks and illuminates the moving probe cantilever.

[0004] In the process of implementing the embodiments of this disclosure, at least the following problems were found in the related art:

[0005] The adoption of related technologies has improved the optical tracking effect to some extent. However, in practical applications, these technologies require the installation of corresponding motion actuators, position feedback sensors, and closed-loop control algorithms for the adjustable mirror. This not only increases the hardware cost, size, and maintenance difficulty of the system, but also introduces new potential error sources, such as actuator hysteresis, drift, and control delay, thereby affecting the system's response speed and measurement accuracy, and reducing the reliability of the optical tracking system in scanning probe microscopes.

[0006] The information disclosed in the background section is only intended to enhance the understanding of the background of this utility model, and therefore may contain information that does not constitute prior art known to those skilled in the art. Utility Model Content

[0007] To provide a basic understanding of some aspects of the disclosed embodiments, a brief summary is given below. This summary is not intended as a general commentary, nor is it intended to identify key / important components or describe the scope of protection of these embodiments, but rather as a prelude to the detailed description that follows.

[0008] This disclosure provides an optical tracking system and a scanning probe microscope to improve the reliability of the optical tracking system of the scanning probe microscope.

[0009] In some embodiments, the optical tracking system includes: a scanner, including a target position; an optical path structure, including a first reflector, the first reflector being disposed at a preset position of the scanner; wherein a first distance from the target position to a fixed end of the scanner and a second distance from the target position to the spot position of the first reflector satisfy a preset relationship, such that the reflected light from the first reflector passes through the target position.

[0010] Optionally, the preset relationship includes L1=A×L2; where L1 is the first distance, L2 is the second distance, and A is the calculation coefficient.

[0011] Optionally, the first reflector is perpendicular to the Z-axis of the scanner.

[0012] Optionally, the optical path structure further includes: a light source, wherein the detection light emitted by the light source illuminates the first reflecting mirror; and a detector, wherein the reflected light from the target position illuminates the detector.

[0013] Optionally, the optical path structure further includes a second reflector, wherein the detection light emitted by the light source illuminates the first reflector after passing through the second reflector.

[0014] Optionally, the detector may include: a position-sensitive detector; or a four-quadrant detector.

[0015] Optionally, the optical path structure also includes a lens, with the detector located on the focal plane of the lens, and the reflected light from the target location illuminating the detector after passing through the lens.

[0016] Optionally, the scanner includes: a driving unit; a driven unit connected to the driving unit; wherein a first reflector is disposed on the driven unit.

[0017] Optionally, the driving unit includes a piezoelectric scanning tube for driving the movement of the slave unit.

[0018] Optionally, the driven unit includes: a mounting base for mounting the probe; wherein the target position is any position on the probe cantilever or the probe tip after the probe is mounted on the mounting base.

[0019] In some embodiments, the scanning probe microscope includes any of the optical tracking systems described above.

[0020] The optical tracking system and scanning probe microscope provided in this disclosure can achieve the following technical effects:

[0021] By setting the first reflector at a preset position on the scanner and constraining the first distance from the target position to the fixed end of the scanner and the second distance from the target position to the light spot position of the first reflector to satisfy a preset relationship, the first reflector and the target position can be synchronously displaced with the scanner when the scanner moves. The change in the angle of the reflected light path generated based on the preset relationship precisely compensates for the displacement of the target position, thereby ensuring that the detection light emitted by the light source always accurately passes through the moving target position after being reflected by the first reflector. This eliminates the need for additional dynamic adjustment elements or closed-loop control systems, improving the reliability of the scanning probe microscope optical tracking system.

[0022] The above general description and the description below are exemplary and illustrative only and are not intended to limit this application. Attached Figure Description

[0023] One or more embodiments are illustrated by way of example with reference to the accompanying drawings. These illustrations and drawings do not constitute a limitation on the embodiments. Elements having the same reference numerals in the drawings are shown as similar elements. The drawings are not to be scaled. And wherein:

[0024] Figure 1 This is a schematic diagram of an optical tracking system structure provided in an embodiment of this disclosure;

[0025] Figure 2 This is a schematic diagram of another optical tracking system structure provided in an embodiment of this disclosure;

[0026] Figure 3 This is a schematic diagram of another optical tracking system provided in an embodiment of this disclosure;

[0027] Figure 4 This is a schematic diagram of another optical tracking system provided in an embodiment of this disclosure;

[0028] Figure 5 This is a schematic diagram of another optical tracking system provided in an embodiment of this disclosure;

[0029] Figure 6 This is a schematic diagram of another optical tracking system provided in an embodiment of this disclosure.

[0030] Figure label:

[0031] 10: Light source; 11: First reflector; 12: Second reflector; 13: Probe; 14: Lens; 15: Detector; 16: Drive unit; 17: Slave unit; 18: Mounting base; 19: First deflection angle; 20: Second deflection angle; 21: Third deflection angle; 22: Fourth deflection angle; 22: Equivalent rotation center; L1: First distance; L2: Second distance. Detailed Implementation

[0032] To provide a more detailed understanding of the features and technical content of the embodiments of this disclosure, the implementation of the embodiments of this disclosure will be described in detail below with reference to the accompanying drawings. The accompanying drawings are for illustrative purposes only and are not intended to limit the embodiments of this disclosure. In the following technical description, for ease of explanation, several details are used to provide a full understanding of the disclosed embodiments. However, one or more embodiments may still be implemented without these details. In other cases, well-known structures and devices may be simplified in their depiction to simplify the drawings.

[0033] The terms "first," "second," etc., used in the specification, claims, and accompanying drawings of this disclosure are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate for the embodiments of this disclosure described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion.

[0034] In this disclosure, the terms "upper," "lower," "inner," "middle," "outer," "front," and "rear," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for better description of the embodiments of this disclosure and their implementations, and are not intended to limit the indicated devices, elements, or components to having a specific orientation, or to require them to be constructed and operated in a specific orientation. Furthermore, some of the aforementioned terms may be used to indicate other meanings besides orientation or positional relationship; for example, the term "upper" may in some cases indicate a dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in the embodiments of this disclosure according to the specific circumstances.

[0035] Furthermore, the terms "set up," "connect," and "fix" should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this disclosure according to the specific circumstances.

[0036] Unless otherwise stated, the term "multiple" means two or more.

[0037] In this embodiment of the disclosure, the character " / " indicates that the objects before and after it are in an "or" relationship. For example, A / B means: A or B.

[0038] The term "and / or" describes an association between objects, indicating that three relationships can exist. For example, A and / or B means: A or B, or A and B.

[0039] It should be noted that, unless otherwise specified, the embodiments and features described in the present disclosure can be combined with each other.

[0040] Combination Figure 1-4 As shown, this disclosure provides an optical tracking system, including a scanner and an optical path structure. The scanner includes a target position. The optical path structure includes a first reflector 11, which is disposed at a preset position on the scanner. A first distance L1 from the target position to a fixed end of the scanner and a second distance L2 from the target position to the spot position of the first reflector 11 satisfy a preset relationship, such that the reflected light from the first reflector 11 passes through the target position.

[0041] In this embodiment, the preset position can be any position on the scanner, as long as it ensures that the reflected light from the first reflector 11 passes through the target position when the scanner moves. For example, the middle position on the first side of the scanner or the middle position on the second side of the scanner.

[0042] The optical tracking system provided in this embodiment of the present disclosure, by rigidly setting the first reflector 11 at a preset position of the scanner, and constraining the first distance L1 from the target position (such as the cantilever of probe 13 or other positions) to the fixed end of the scanner and the second distance L2 from the target position to the spot position of the first reflector 11 to satisfy a specific geometric relationship (preset relationship), allows the first reflector 11 and the target position to move synchronously as a rigid connection when the scanner moves. The change in the angle of the reflected light path generated by this geometric relationship can precisely compensate for the displacement of the target position, thereby ensuring that the detection light emitted by the light source 10 always accurately passes through the moving target position after being reflected by the first reflector 11. Based on the passive optical compensation mechanism, no additional dynamic adjustment elements or closed-loop control system are required, directly solving the problem of laser light path misalignment caused by the arc movement of the scanner in the scanning probe 13 microscope from a structural perspective, thus improving the stability and reliability of optical tracking.

[0043] Optionally, the preset relationship includes L1 = A × L2. Where L1 is the first distance L1, L2 is the second distance L2, and A is the calculation coefficient.

[0044] In this embodiment, the calculation coefficient is determined based on the position of the fixed end of the scanner and the position of the equivalent rotating center 22 of the scanner. When the fixed end of the scanner and the equivalent rotating center 22 of the scanner are located at different positions, the value of the calculation coefficient corresponding to the fixed end and / or the equivalent rotating center 22 of the scanner can be determined by calculation or querying a database. When the fixed end of the scanner and the equivalent rotating center 22 of the scanner are approximately located at the same position, the calculation coefficient A is approximately 2. Specifically, as shown... Figure 4 As shown, when the fixed end of the scanner and the equivalent rotation center 22 of the scanner are approximately at the same position, as the scanner moves, the free end of the scanner deflects along the equivalent rotation center 22 at a first deflection angle of 19, the first reflecting mirror 11 deflects at a second deflection angle of 20, the reflected light from the first reflecting mirror 11 deflects at a third deflection angle of 21, and the sample deflects at a fourth deflection angle of 22. Figure 4 It can be seen that the first deflection angle 19, the second deflection angle 20, and the fourth deflection angle 22 are all... θ Based on the law of reflection, the third deflection angle 21 is 2. θ Therefore, the offset a of the reflected light from the first mirror 11 at the target position is 2. θ ×L2. The offset of the scanner's target position is approximately b= θ Since L1 = 2 × L2, a = b = 2 × L1, θ ×L2. Therefore, the offset of the reflected light largely cancels out the offset of the target position caused by the movement of the scanner, thus ensuring that the reflected light from the first mirror 11 always illuminates the target position. When the fixed end of the scanner does not coincide with the equivalent rotation center 22, the scanner deflects around the equivalent rotation center 22 by an angle. θ At that time, the displacement of the target position is b= θ ×(L1+D)The reflected light offset a of the first reflecting mirror 11 is 2 θ ×L2, if a=b=2 is required θ ×L2= θ If we want to calculate L1 + D = 2L2, then we need A = (L1 + D) / L2.

[0045] Thus, by defining the preset relationship as the first distance L1 equal to the calculated coefficient A multiplied by the second distance L2, the proportional constraint mechanism between the first distance L1 and the second distance L2 is clearly defined. This proportional relationship can be based on the angular change characteristics accompanying the scanner's movement, such as the arc displacement of the piezoelectric scanning tube, creating a mathematical correlation between the displacement of the target position and the offset of the light path reflected by the first reflector 11. When the coefficient A is adapted to the equivalent rotation center 22 position of the scanner, ideally A is 2, the displacement of the target position caused by the scanner's rotation is precisely compensated by the angular offset of the reflected light path. Through the quantitative setting of this proportional relationship, it is ensured that the reflected light path can accurately adapt to the motion characteristics of different scanners, effectively suppressing spot offset. Without relying on dynamic adjustment elements, the accuracy of optical tracking can be significantly improved simply through structural parameter optimization.

[0046] Optionally, the first reflector 11 is perpendicular to the Z-axis of the scanner.

[0047] In this embodiment of the disclosure, the Z-axis of the scanner refers to the direction that is generally perpendicular to the plane of the scanner fixed end and / or the sample surface and / or the sample holder, and is used to control the movement of the probe 13 in the height direction (i.e., the vertical direction).

[0048] In this embodiment of the disclosure, when the scanner performs a large-area scan, since the displacements at different positions of the scanner are not exactly the same, in addition to causing the first reflecting mirror 11 to rotate, the first reflecting mirror 11 may also experience a lateral displacement relative to the probe 13 beyond the synchronous displacement, thereby causing the reflected light from the first reflecting mirror 11 to experience a lateral displacement beyond the synchronous displacement of the probe 13. For example... Figure 5 As shown, the first reflecting mirror 11 generates a lateral displacement L other than the synchronous displacement with the probe 13, causing the reflected light from the first reflecting mirror 11 to shift laterally by L. Therefore, the first reflecting mirror 11 can be made parallel to the cantilever of the probe 13. Figure 6 As shown, when the first reflector 11 has a lateral displacement L relative to the probe 13 other than the synchronous displacement, since the first reflector 11 is parallel to the cantilever of the probe 13, even if the first reflector 11 has a lateral displacement L relative to the probe 13, the reflected light of the first reflector 11 will not have a lateral displacement relative to the probe 13 other than the synchronous displacement, so that the reflected light of the first reflector 11 can always illuminate the target position on the probe 13.

[0049] In this embodiment, besides making the first reflecting mirror 11 perpendicular to the Z-axis of the scanner, the first reflecting mirror 11 can also be parallel to the cantilever of the probe 13, or parallel to the tangent plane of the scanner's motion trajectory, or the mirror normal of the first reflecting mirror 11 can be directed towards the equivalent rotation center 22, etc. As long as the reflected light from the first reflecting mirror 11 can still pass through the target position when it undergoes a lateral displacement other than the synchronous displacement with the probe 13, that is, the lateral displacement of the reflected light is approximately zero or the lateral displacement is negligible relative to the size of the light spot at the target position (e.g., the lateral displacement is much smaller than the size of the light spot).

[0050] In this way, by ensuring that the first reflecting mirror 11 is parallel to the probe 13 cantilever, lateral drift of the reflected light path can be effectively suppressed when the scanner undergoes large-scale movement that causes non-uniform displacement (such as lateral offset caused by bending of the scanning tube). When the scanner movement causes a relative lateral displacement between the first reflecting mirror 11 and the probe 13 cantilever, since the mirror surface of the first reflecting mirror 11 is parallel to the plane of the probe 13 cantilever, according to the symmetry of optical reflection, the lateral displacement of the mirror surface will not change the positional relationship of the reflected beam relative to the probe 13 cantilever. This ensures that even if there is additional displacement caused by mechanical structural deformation, the reflected light can still accurately maintain the preset illumination position with the probe 13 cantilever, avoiding the superposition of spot offsets caused by non-ideal movement. Thus, while maintaining the core principle of the passive compensation mechanism, the robustness of the system to complex scanning movements is enhanced, further ensuring the stability of optical tracking.

[0051] Optionally, the optical path structure also includes a light source 10 and a detector 15. The detection light emitted by the light source 10 illuminates the first reflecting mirror 11. The reflected light from the target location illuminates the detector 15.

[0052] In this way, the detection light emitted by the light source 10 directly illuminates the first reflecting mirror 11, while the light reflected from the target position directly enters the detector 15, constructing a complete passive optical detection loop. The fixed setting of the light source 10 ensures the stability of the initial beam path, and the detector 15 directly receives the light reflected from the target position without the need for an additional reflecting mirror, reducing optical path relay links and lowering the risk of signal distortion. This ensures that the light reflected by the first reflecting mirror 11 from the light source 10 always tracks the target position, and the slight deflection information of the target position is directly transmitted to the detector 15 through the reflected light, thereby directly obtaining the motion state of the probe 13, improving displacement detection accuracy and system response efficiency.

[0053] Optionally, such as Figure 2 As shown, the optical path structure also includes a second reflector 12. The detection light emitted by the light source 10 illuminates the first reflector 11 after passing through the second reflector 12.

[0054] In this way, the fixed setting of the second reflector 12 can change the propagation direction of the initial beam, allowing the light source 10 and detector 15 to spatially avoid the scanner's movement area, thereby preventing mechanical interference. Simultaneously, it allows the detection light energy to more accurately enter the preset area of ​​the first reflector 11, enhancing the stability of beam positioning and further ensuring the compensation effect of the reflected light path generated by the first reflector 11 based on geometric relationships. This optical path relay design does not rely on dynamic adjustment, improving the system's adaptability to different equipment layouts while maintaining the passive compensation mechanism.

[0055] Optionally, detector 15 may include a position-sensitive detector or a four-quadrant detector.

[0056] In this way, the position-sensitive detector outputs an analog signal based on the continuous positional change of the light spot on the photosensitive surface, enabling continuous capture of nanometer-level deflection of the target position. The four-quadrant detector, on the other hand, divides the light spot into four regions and calculates the center offset of the light spot using differential signals, exhibiting fast response and strong anti-interference capabilities. Both types of detectors 15 can effectively resolve changes in the angle of reflected light from the target position caused by scanner movement, converting the optically compensated probe 13 deflection information into a high-precision electrical signal, thereby improving the resolution and real-time performance of surface topography measurement. This fully matches the detection accuracy requirements of the passive compensation optical path, achieving reliable signal output without additional complex processing.

[0057] Optionally, such as Figure 3 and Figure 4 As shown, the optical path structure also includes a lens 14. The detector 15 is located on the focal plane of the lens 14, and the reflected light from the target position illuminates the detector 15 after passing through the lens 14.

[0058] In other embodiments, lens 14 may be omitted. By omitting the lens 14 assembly, the reflected light from the target position directly enters detector 15, simplifying the optical path structure and reducing system complexity. In scenarios with a small scanning range, the maximum offset of the light spot caused by the displacement of probe 13 on the photosensitive surface of detector 15 is small, still within the effective detection range of conventional detector 15, and will not cause signal loss. Furthermore, for a four-quadrant detector, the light spot offset at each position of probe 13 is fixed, and the true deflection can be restored through a pre-calibrated mapping relationship combined with a differential algorithm. For position-sensitive detectors, their continuous position resolution characteristics allow for direct output of the offset signal. While maintaining basic detection functions, this approach reduces the use of optical components, lowers assembly difficulty and manufacturing costs, and is particularly suitable for accuracy requirements in small to medium scanning ranges.

[0059] In this way, by adding lens 14 and positioning detector 15 on its focal plane, the reflected light from the target position is focused by lens 14 and then illuminates detector 15, effectively suppressing the influence of spot shift caused by scanner movement. Utilizing the optical focusing characteristics of lens 14, the divergent beam reflected from the target position is converted into a collimated or converged beam, resulting in a smaller and more stable spot size on the focal plane of detector 15. Even if there is a slight displacement of the target position during scanner movement, lens 14 can significantly reduce its imaging shift on the photosensitive surface of detector 15, reducing the risk of signal distortion caused by spot drift. While maintaining the passive compensation mechanism, the stability and reliability of the detector 15's output signal are further improved, allowing it to adapt to a wider range of scanning movements without relying on software compensation.

[0060] Optionally, the scanner includes a driving unit 16 and a driven unit 17. The driven unit 17 is connected to the driving unit 16. The first reflector 11 is disposed on the driven unit 17.

[0061] In this way, by dividing the scanner into a driving unit 16 and a rigidly connected driven unit 17, and fixing the first reflector 11 onto the driven unit 17, the physical basis of the optical compensation mechanism is ensured. When the driving unit 16 is displaced, the driven unit 17 moves synchronously, causing the first reflector 11 fixed thereon to form a rigid connection with the target position, maintaining their relative positions unchanged. This ensures that the first distance L1 from the target position to the fixed end of the scanner and the second distance L2 from the target position to the first reflector 11 always satisfy a preset relationship during the movement, guaranteeing accurate passive compensation for the displacement of the target position due to changes in the angle of the reflected light path.

[0062] Optionally, the drive unit 16 includes a piezoelectric scanning tube. The piezoelectric scanning tube is used to drive the driven unit 17 to move.

[0063] In this way, by limiting the drive unit 16 to use a piezoelectric scanning tube to drive the driven unit 17, the requirements of the scanning probe 13 microscope for precise displacement control are fully met.

[0064] Optionally, the driven unit 17 includes a mounting base 18. The mounting base 18 is used to mount the probe 13. The target position is any position on the cantilever of the probe 13 or on the tip of the probe 13 after the probe 13 is mounted on the mounting base 18.

[0065] In this way, by setting a dedicated mounting base 18 for mounting the probe 13 in the driven unit 17, and specifying the target position as any position on the cantilever or tip of the probe 13 after installation, the physical reference point for optical tracking is determined. Both the mounting base 18 and the first reflector 11 are rigidly fixed to the same driven unit 17, ensuring that the probe 13 and the first reflector 11 maintain a preset relationship during movement. When the drive unit 16 drives the driven unit 17, regardless of whether the target position is selected as the reflection area of ​​the cantilever or a specific point on the tip, the geometric relationship between this position and the scanner's fixed end and the first reflector 11 strictly adheres to preset constraints. By directly integrating the physical position of the probe 13 into the optical path compensation mechanism, the reflected light from the first reflector 11 can accurately track the movement trajectory of the probe 13, ensuring the consistency of the displacement detection reference and the accuracy of the compensation.

[0066] In some embodiments, the scanning probe 13 microscope includes any of the optical tracking systems described above.

[0067] The foregoing description and accompanying drawings fully illustrate embodiments of the present disclosure to enable those skilled in the art to practice them. Other embodiments may include structural and other changes. The embodiments represent only possible variations. Individual components and functions are optional unless explicitly required, and the order of operation may vary. Parts and features of some embodiments may be included or substituted for parts and features of other embodiments. Embodiments of the present disclosure are not limited to the structures described above and shown in the accompanying drawings, and various modifications and changes may be made without departing from its scope. The scope of the present disclosure is limited only by the appended claims.

Claims

1. An optical tracking system, characterized by include: Scanner, including target location; The optical path structure includes a first reflecting mirror, which is positioned at a preset location on the scanner. The first distance from the target position to the fixed end of the scanner and the second distance from the target position to the spot position of the first reflector satisfy a preset relationship, so that the reflected light from the first reflector passes through the target position.

2. The system according to claim 1, characterized in that, The predefined relationships include L1 = A × L2; Where L1 is the first distance, L2 is the second distance, and A is the calculation coefficient.

3. The system according to claim 1, characterized in that, The first mirror is perpendicular to the Z-axis of the scanner.

4. The system of claim 1, wherein, The optical path structure also includes: The light source emits detection light that illuminates the first reflecting mirror; The detector is illuminated by reflected light from the target location.

5. The system of claim 4, wherein, The optical path structure also includes: The detection light emitted by the light source passes through the second mirror and then illuminates the first mirror.

6. The system of claim 4, wherein, The optical path structure also includes: The lens and detector are located on the focal plane of the lens. The reflected light from the target location passes through the lens and then illuminates the detector.

7. The system of any one of claims 1 to 6, wherein, The scanner includes: Drive unit; The driven unit is connected to the driving unit; wherein, the first reflector is disposed on the driven unit.

8. The system of claim 7, wherein, The drive unit includes: A piezoelectric scanning tube is used to drive the movement of the slave unit.

9. The system according to claim 7, characterized in that, The driven unit includes: Mounting bracket for mounting probes; The target location is any position on the probe cantilever or probe tip after the probe is installed on the mounting base.

10. A scanning probe microscope, characterized by, Including the optical tracking system as described in any one of claims 1 to 9.

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