A probe station with a sample stage

Abstract

The utility model discloses a kind of probe station with object table, it is related to object table field, including rack, the top of the rack is rotatably installed with carousel, and installation groove is provided on carousel, and the inside movable mounting of installation groove is with object table, the inside sliding installation of installation groove is with abutment block, and the lower end of abutment block is fixedly installed with U-shaped frame, and U-shaped frame is slid inside the sliding slot reserved in carousel, the inner wall of sliding slot is rotatably connected with threaded rod.The utility model makes four groups of object table cyclic use by carousel rotation, guarantee the use efficiency of probe station, simultaneously, twist threaded rod to mobilize U-shaped frame to move inside sliding slot, abutment block is driven to move in turn and realize the installation or disengagement of object table, so that the dismounting operation of object table is facilitated, the inside lubricating oil of oil tank is dropped into oiling groove inside and contacted with threaded rod by oil outlet, realize the lubricating processing of U-shaped frame and threaded rod, guarantee abutment block to move smoothly, so that the installation of object table is convenient.

Description

Technical Field

[0001] This utility model relates to the field of stages, specifically to a stage for a probe station. Background Technology

[0002] A probe station is a key device used for electrical performance testing of semiconductor devices. The stage is an important component in the probe station system used to place and fix the chip, and the wafer to be tested is placed on the stage for testing.

[0003] The existing probe station stage has the following problems when used: the existing probe station only has one stage, so when testing wafer materials, the operation steps of placement, testing and picking must be followed in sequence, resulting in low testing efficiency of the materials to be tested on the stage, and thus low utilization efficiency of the probe station.

[0004] Therefore, it is necessary to invent a stage for a probe station to solve the above problems. Utility Model Content

[0005] The purpose of this invention is to provide a stage for a probe station, in order to solve the problem mentioned in the background art that existing probe stations only have one stage when in use. This requires sequential placement, detection, and retrieval of wafer materials, resulting in low detection efficiency of the materials to be tested on the stage and low utilization efficiency of the probe station.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a stage for a probe station, comprising a frame, a turntable rotatably mounted on the top of the frame, and a mounting groove provided on the turntable, with the stage movably mounted inside the mounting groove, an abutment block slidably mounted inside the mounting groove, and a U-shaped frame fixedly mounted at the lower end of the abutment block, the U-shaped frame sliding inside a pre-reserved sliding groove inside the turntable, a threaded rod rotatably connected to the inner wall of the sliding groove, the threaded rod being threadedly connected to the U-shaped frame, and an oiling assembly provided inside the sliding groove for lubricating the threaded rod.

[0007] Preferably, there are four mounting slots, which are arranged in a ring at equal angles. Each mounting slot has a movable stage installed inside, so that the four stages can be used in a cycle to ensure the efficiency of the probe station.

[0008] Preferably, the mounting groove is U-shaped, and the straight inner wall of the mounting groove is attached to the outer wall of the abutment block to achieve a sliding connection, which facilitates the abutment block to abut against the platform after it moves, thereby realizing the installation of the platform and the mounting groove.

[0009] Preferably, the oiling assembly includes an oil tank fixedly installed inside the sliding groove. The oil tank passes through the internal gap of the U-shaped frame and is slidably connected to the U-shaped frame. An oil outlet is provided at the bottom of the oil tank. A plug is movably installed at the oil outlet. An extension rod installed on the top of the plug and a top plate installed on the top of the extension rod are elastically connected to the outer wall of the oil tank through a spring. Under the pressure applied by the spring, the plug seals the oil outlet.

[0010] Preferably, the oiling assembly further includes an oiling groove pre-installed inside the U-shaped frame, and a pointed cone block is fixedly installed inside the oiling groove via a connecting block. In this way, the movement of the U-shaped frame causes the pointed cone block to move and come into contact with the block, which can lift the block, so that the lubricating oil inside the oil tank drips into the oiling groove through the oil outlet and comes into contact with the threaded rod to achieve lubrication of the U-shaped frame and the threaded rod.

[0011] Preferably, the oil filling groove is inverted conical in shape and is connected to the threaded groove reserved inside the U-shaped frame. The inner wall of the oil filling groove does not contact the pointed cone block, ensuring that the lubricating oil can flow into the oil filling groove through the oil outlet along the pointed cone block.

[0012] Preferably, the top of the cone block is attached to the bottom wall of the oil tank and slidably connected, and the tip of the cone block contacts the plane reserved at the lower end of the block and slidably connected. The lower end of the block extends outside the oil tank. In this way, after the cone block moves and contacts the block, it can lift the block, so that the lubricating oil can flow into the oil filling groove through the oil outlet to lubricate the U-shaped frame and the threaded rod.

[0013] The technical effects and advantages provided by this utility model in the above technical solution are as follows:

[0014] 1. This utility model uses a turntable to rotate so that four sets of platforms can be used in a cycle, ensuring the efficiency of the probe station. At the same time, the twisting threaded rod moves the U-shaped frame inside the sliding groove, which in turn moves the abutment block to achieve the fitting or detachment of the platform, thus facilitating the assembly and disassembly of the platform.

[0015] 2. Twisting the threaded rod drives the U-shaped frame connected to the threaded rod to move, which in turn drives the pointed cone block to move and contact the blocking block. This blocks the blocking block and allows the lubricating oil inside the oil tank to drip into the oil filling groove through the oil outlet, thus lubricating the U-shaped frame and the threaded rod. This ensures smooth movement of the contact block and makes the installation of the platform more convenient. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings.

[0017] Figure 1 This is a three-dimensional view of the overall structure of this utility model;

[0018] Figure 2 This is a perspective view of the overall structure of the abutment block after it has been moved according to this utility model.

[0019] Figure 3 This is a three-dimensional view of the internal structure of the turntable of this utility model (partially cut out).

[0020] Figure 4 This is a three-dimensional view of the internal structure of the fuel tank of this utility model (partially cut out).

[0021] Explanation of reference numerals in the attached figures:

[0022] 1. Frame; 2. Turntable; 3. Platform; 4. Mounting slot; 5. Abutment block; 6. U-shaped frame; 7. Sliding groove; 8. Threaded rod; 9. Oiling assembly; 901. Oil tank; 902. Oil outlet; 903. Plug; 904. Extension rod; 905. Top plate; 906. Spring; 907. Oil filling slot; 908. Conical block; 909. Connecting block. Detailed Implementation

[0023] To enable those skilled in the art to better understand the technical solution of this utility model, the present utility model will be further described in detail below with reference to the accompanying drawings.

[0024] This utility model provides, for example Figure 1-4 The table shown is a probe stage, including a frame 1. A turntable 2 is rotatably mounted on the top of the frame 1, and a mounting groove 4 is provided on the turntable 2. A table 3 is movably mounted inside the mounting groove 4. An abutment block 5 is slidably mounted inside the mounting groove 4, and a U-shaped frame 6 is fixedly mounted on the lower end of the abutment block 5. The U-shaped frame 6 slides inside a sliding groove 7 reserved inside the turntable 2. A threaded rod 8 is rotatably connected to the inner wall of the sliding groove 7, and the threaded rod 8 is threadedly connected to the U-shaped frame 6. An oiling assembly 9 is provided inside the sliding groove 7 to lubricate the threaded rod 8.

[0025] The rotation of turntable 2 allows the four sets of platforms 3 to be used in a cycle, ensuring the efficiency of the probe station. At the same time, the twisting threaded rod 8 moves the U-shaped frame 6 inside the sliding groove 7, which in turn moves the abutment block 5 to achieve the fitting or detachment of the platform 3, thus facilitating the assembly and disassembly of the platform 3.

[0026] To facilitate the continuous use of multiple stages 3, four mounting slots 4 are provided, and the four mounting slots 4 are distributed in a ring at equal angles. Each mounting slot 4 has a stage 3 installed inside. In this way, the four sets of stages 3 can be used in a cycle to ensure the efficiency of the probe station. The mounting slot 4 is U-shaped, and the straight inner wall of the mounting slot 4 is attached to the outer wall of the abutment block 5 to achieve a sliding connection. This makes it easy for the abutment block 5 to move and abut against the stage 3, thereby realizing the installation of the stage 3 and the mounting slot 4.

[0027] To ensure a smooth threaded connection between the U-shaped frame 6 and the threaded rod 8, the oiling assembly 9 includes an oil tank 901 fixedly installed inside the sliding groove 7. The oil tank 901 passes through the internal gap of the U-shaped frame 6 and is slidably connected to the U-shaped frame 6. An oil outlet 902 is provided at the bottom of the oil tank 901. A plug 903 is movably installed at the oil outlet 902. An extension rod 904 installed on the top of the plug 903 and a top plate 905 installed on the top of the extension rod 904 are elastically connected to the outer wall of the oil tank 901 through a spring 906. Under the pressure applied by the spring 906, the plug 903 blocks the oil outlet 902. The oiling assembly 9 also includes an oil filling groove 907 pre-installed inside the U-shaped frame 6. A pointed cone block 908 is fixedly installed inside the oil filling groove 907 through a connecting block 909.

[0028] This twisting of the threaded rod 8 causes the U-shaped frame 6, which is threadedly connected to the threaded rod 8, to move. In turn, the pointed cone block 908 moves and comes into contact with the block 903, which lifts the block 903. This allows the lubricating oil inside the oil tank 901 to drip into the oil filling groove 907 through the oil outlet 902 and come into contact with the threaded rod 8, thus achieving lubrication of the U-shaped frame 6 and the threaded rod 8.

[0029] The oil filling groove 907 is inverted cone shape and is connected to the threaded groove reserved inside the U-shaped frame 6. The inner wall of the oil filling groove 907 does not contact the pointed cone block 908, ensuring that the lubricating oil can flow into the oil filling groove 907 through the oil outlet 902 along the pointed cone block 908.

[0030] The top of the cone block 908 is attached to the bottom wall of the oil tank 901 and slides together, and the tip of the cone block 908 contacts the plane reserved at the lower end of the block 903 and slides together, and the lower end of the block 903 extends beyond the oil tank 901.

[0031] When the conical block 908 comes into contact with the plug 903, it can lift the plug 903, allowing lubricating oil to flow through the gap between the oil outlet 902 and the plug 903 into the oil filling tank 907 for lubrication of the U-shaped frame 6 and the threaded rod 8. At the same time, after the conical block 908 separates from the plug 903, the plug 903 is reset under the elastic force of the spring 906, causing the plug 903 to seal the oil outlet 902 to prevent oil leakage. Meanwhile, the oil outlet 902 is located on the side of the oil tank 901, and the U-shaped frame 6 will only move to this position when it is necessary to add lubricating oil to the threaded rod 8.

[0032] The foregoing description only illustrates certain exemplary embodiments of the present invention. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A probe station wafer table comprising a table frame (1), characterized in that, A turntable (2) is rotatably mounted on the top of the frame (1), and an installation groove (4) is provided on the turntable (2). A platform (3) is movably mounted inside the installation groove (4). An abutment block (5) is slidably mounted inside the installation groove (4), and a U-shaped frame (6) is fixedly mounted at the lower end of the abutment block (5). The U-shaped frame (6) slides inside a sliding groove (7) reserved inside the turntable (2). A threaded rod (8) is rotatably connected to the inner wall of the sliding groove (7), and the threaded rod (8) is threadedly connected to the U-shaped frame (6). An oiling assembly (9) is provided inside the sliding groove (7) to lubricate the threaded rod (8).

2. The object table for a probe station according to claim 1, wherein There are four mounting slots (4) in total, and the four mounting slots (4) are arranged in a ring at equal angles. Each mounting slot (4) has a platform (3) installed inside it.

3. The stage for a probe station according to claim 2, characterized in that, The mounting groove (4) is U-shaped, and the straight inner wall of the mounting groove (4) is attached to the outer wall of the abutment block (5) to achieve a sliding connection.

4. The object table for a probe station according to claim 2, wherein The oiling assembly (9) includes an oil tank (901) fixedly installed inside the sliding groove (7). The oil tank (901) passes through the gap inside the U-shaped frame (6) and is slidably connected to the U-shaped frame (6). An oil outlet (902) is provided at the bottom of the oil tank (901). A block (903) is movably installed at the oil outlet (902). An extension rod (904) installed on the top of the block (903) and a top plate (905) installed on the top of the extension rod (904) are elastically connected to the outer wall of the oil tank (901) through a spring (906).

5. The object table for a probe station according to claim 4, wherein The oiling assembly (9) also includes an oiling groove (907) pre-installed inside the U-shaped frame (6), and a pointed cone block (908) is fixedly installed inside the oiling groove (907) by a connecting block (909).

6. The object table for a probe station according to claim 5, wherein The oiling groove (907) is inverted cone shape, and the oiling groove (907) is connected to the threaded groove reserved inside the U-shaped frame (6), and the inner wall of the oiling groove (907) does not contact the pointed cone block (908).

7. The object table for a probe station according to claim 6, wherein The top of the cone block (908) is attached to the bottom wall of the oil tank (901) and slides, and the tip of the cone block (908) contacts the plane reserved at the lower end of the block (903) and slides, and the lower end of the block (903) extends beyond the oil tank (901).

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