Lens fixing device and exposure system

Abstract

The utility model provides a kind of lens fixing device and exposure system, exposure system includes lens and lens fixing device, and lens fixing device is used to fix lens.Lens fixing device includes mirror seat and flexible piece, mirror seat is annular, the number of flexible piece is multiple, and all flexible pieces are spaced apart on the inner wall of mirror seat along the circumference of mirror seat;Flexible piece is used to be connected with lens, to position and support lens.The device can realize the fixation and support of lens by flexible piece, can improve the surface shape control precision of lens, to realize the surface shape change demand of nanometer level of lens.

Description

Technical Field

[0001] This utility model relates to the field of exposure lens technology, and in particular to a lens fixing device and an exposure system. Background Technology

[0002] In the manufacturing process of semiconductor devices or flat panels, the exposure process defines its density. The exposure system in the exposure machine transfers the image on the photomask onto the substrate to complete the product exposure process. To produce higher-performance products, the optical performance of the exposure system needs continuous upgrading. To make the imaging objective of the exposure system reach the diffraction limit as much as possible, the aberrations of the lens need to be controlled. Therefore, it is necessary to minimize the surface shape errors caused by the installation of optical components such as lenses or mirrors to obtain high-quality imaging results.

[0003] For lenses requiring vertical mounting, the lens exerts downward pressure on the mounting device. As an existing technology, the lens can be supported from below by a V-groove, a stop is installed on the upper side of the mounting device, and the lens is axially fixed by a spring. This fixing method struggles to achieve high-precision force control on the lens, thus it is only suitable for applications with lower requirements for lens surface accuracy. Another existing technology uses a limiting block for positioning below the lens and a rubber block for flexible support, while a coil magnet provides tension above the lens to achieve uniform support. Additionally, a cover plate can be used for axial positioning. This fixing method has the following drawbacks: 1) The magnetic coil generates heat during operation, affecting the optical system's imaging; 2) When using a rubber block as a flexible structure, the rubber material is prone to aging and deformation; 3) When the ambient temperature changes, the rigid limiting block generates significant thermal stress, affecting the lens surface accuracy.

[0004] Therefore, for those skilled in the art, how to design a fixing device that can improve the accuracy of lens surface shape control is a technical problem that urgently needs to be solved. Utility Model Content

[0005] To address the problems existing in the prior art, this utility model provides a lens fixing device and an exposure system. This device can fix and support the lens through flexible components, thereby improving the surface shape control accuracy of the lens and meeting the requirements for nanometer-level surface shape changes.

[0006] To achieve the above objectives, this utility model provides a lens fixing device for fixing a lens, including a lens base and flexible components. The lens base is annular, and there are multiple flexible components, all of which are spaced apart along the circumference of the lens base on the inner wall of the lens base. The flexible components are used to connect with the lens to position and support the lens.

[0007] Optionally, the number of flexible elements is at least three, and all the flexible elements are evenly distributed on the inner wall of the mirror mount.

[0008] Optionally, the number of flexible components is 3 to 36.

[0009] Optionally, the flexible element is bonded to the lens with adhesive, or the flexible element is provided with a clamping structure for clamping the lens.

[0010] Optionally, the flexible element is fixed to the mirror mount by screws.

[0011] Optionally, the inner wall of the mirror base is provided with a mounting groove that runs through its own axis. The number of mounting grooves is equal to the number of flexible members. All the mounting grooves are spaced apart in the circumferential direction of the mirror base, and each flexible member is used to be fixed in a corresponding mounting groove.

[0012] Optionally, the flexible component includes a mounting part, a connecting rod, and a fixing part. There are two mounting parts and at least two connecting rods. The two mounting parts are respectively fixed to both sides of the fixing part by at least one corresponding connecting rod. The mounting part is used to connect with the lens mount, and the fixing part is used to abut against and support the lens.

[0013] Optionally, the connecting rod is a cylindrical rod, and there are two of them. Each connecting rod is connected to one side of the fixing part and one of the mounting parts at both ends.

[0014] Optionally, the flexible component is bonded to the lens with adhesive; the fixing part is a block structure, and after the lens is placed in the lens base, there is a gap between the lens and all the fixing parts, and all the gaps have the same width.

[0015] Optionally, the fixing part is provided with a first injection hole that extends through its own thickness direction, and the lens mount is provided with a second injection hole that extends through its own radial direction. The first injection hole is used to communicate with the second injection hole after the flexible part and the lens mount are installed.

[0016] To achieve the above objectives, the present invention also provides an exposure system, including a lens and any of the lens fixing devices described in the present invention, wherein the lens fixing device is used to fix the lens.

[0017] Optionally, the lens may be configured as a lens and / or a reflector.

[0018] This invention provides a lens fixing device and an exposure system. The device can install and clamp the lens through a flexible component to fix and support the lens. The flexible component can deform under force, making it less likely for the lens to shift during use. This not only improves the surface shape control accuracy of the lens and enables nanometer-level surface shape changes, but also increases the modal frequency of the lens, ensuring that the modal frequency meets the requirements, preventing large vibrations of the lens, and improving the exposure accuracy of the lens. Attached Figure Description

[0019] Figure 1 This is a front view schematic diagram of the lens and lens fixing device in a preferred embodiment of the present invention;

[0020] Figure 2 This is a three-dimensional structural diagram of the lens fixing device in a preferred embodiment of the present invention;

[0021] Figure 3 This is a partial structural diagram of the lens and lens fixing device in a preferred embodiment of the present invention;

[0022] Figure 4 This is a schematic diagram of the flexible component in a preferred embodiment of the present invention;

[0023] Figure 5a This is a simulation diagram of the surface shape when the lens is supported by three points below it in the existing technology.

[0024] Figure 5b This is a surface simulation diagram of a lens supported by a lens fixing device in a preferred embodiment of the present invention;

[0025] Figure 6 This is a modal simulation diagram of the lens and lens fixing device in a preferred embodiment of the present invention;

[0026] Figure 7a This is a surface simulation diagram of a lens supported by a different number of flexible components in a preferred embodiment of the present invention, wherein the number of flexible components is 9;

[0027] Figure 7b This is a surface simulation diagram of a lens supported by a different number of flexible components in a preferred embodiment of the present invention, wherein the number of flexible components is 12.

[0028] Figure 7c This is a surface simulation diagram of a lens supported by a different number of flexible components in a preferred embodiment of the present invention, wherein the number of flexible components is 18.

[0029] Figure 7d This is a surface simulation diagram of a lens supported by a different number of flexible components in a preferred embodiment of the present invention, wherein the number of flexible components is 36.

[0030] Figure 7e This is a surface simulation diagram of a lens supported by a different number of flexible components in a preferred embodiment of the present invention, wherein the flexible components are arranged on the entire circumference of the lens base.

[0031] Figure 8a This is a stress simulation cloud diagram of the mirror mount in a preferred embodiment of the present invention;

[0032] Figure 8b This is a stress simulation cloud diagram of the lens in a preferred embodiment of the present invention;

[0033] Figure 8c This is a stress simulation cloud diagram of the flexible component in a preferred embodiment of the present invention;

[0034] Figure 8d This is a displacement simulation cloud diagram of the flexible component in a preferred embodiment of the present invention;

[0035] Figure 9 This is a simulation diagram of the surface shape of the lens in a horizontal state in a preferred embodiment of the present invention.

[0036] In the picture:

[0037] Lens base 1; mounting groove 11; second glue injection hole 12; flexible part 2; mounting part 21; connecting rod 22; fixing part 23; first glue injection hole 231; groove 232; lens 3; glue 4. Detailed Implementation

[0038] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become clearer from the following description. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of the present invention.

[0039] The terms “center,” “longitudinal,” “lateral,” “length,” “width,” “thickness,” “upper,” “lower,” “front,” “rear,” “left,” “right,” “vertical,” “horizontal,” “top,” “bottom,” “inner,” “outer,” “clockwise,” “counterclockwise,” “axial,” “radial,” and “circumferential” indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the mechanism or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0040] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "fixation," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between the components; they can refer to a direct connection or a connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0041] In existing technologies, after a lens is mounted on a lens fixing device, the lens may undergo thermal deformation if the ambient temperature changes. Simultaneously, the lens may also experience surface shape changes due to installation stress during installation. To prevent significant changes in lens surface shape, a lens fixing device that can reduce these changes is needed.

[0042] This invention provides a lens fixing device and an exposure system. The device can adapt to the deformation of the lens during actual use and reduce the amount of lens deformation. At the same time, it can maintain the uniformity and stability of the force on the lens, so that the lens has high stability and high adaptability during use.

[0043] The present invention will now be described in detail with reference to the accompanying drawings and preferred embodiments. Unless otherwise specified, the following embodiments and features can complement or combine with each other.

[0044] Reference Figures 1-4 As shown, a preferred embodiment of this utility model provides a lens fixing device for fixing a lens 3. The lens fixing device includes a lens base 1 and flexible members 2. The lens base 1 is annular. There are multiple flexible members 2, all of which are spaced apart along the circumference of the lens base 1 on the inner wall of the lens base 1. The flexible members 2 are used to connect with the lens 3 to position and support the lens 3.

[0045] In a preferred embodiment, the lens mount fixing device can fix and support the lens 3 used in a vertical position. Since the lens 3 is installed vertically, the gravity acts vertically downwards along the radial direction of the lens 3. Using this lens mount fixing device can reduce the surface shape effect of the lens 3 under the action of gravity and avoid large surface shape changes of the lens 3. In another preferred embodiment, the lens mount fixing device can also fix and support the lens 3 used in a horizontal position.

[0046] A preferred embodiment of the present invention also provides an exposure system, including a lens 3 and a lens fixing device as described in any one of the claims, the lens fixing device being used to fix the lens 3.

[0047] This application provides a lens fixing device and an exposure system. The device can install and clamp a lens 3 through a flexible member 2 to fix and support the lens 3. The flexible member 2 can deform under force, making it difficult for the lens 3 to move during use. This not only improves the surface shape control accuracy of the lens 3, achieving nanometer-level surface shape accuracy control, but also increases the modal frequency of the lens 3, making the modal frequency of the lens 3 meet the requirements, preventing the lens 3 from vibrating significantly, and improving the exposure accuracy of the lens 3.

[0048] Specifically, in the prior art, after the lens 3 is fixed, when the ambient temperature changes, the lens 3 and the lens base 1 have different coefficients of thermal expansion, which causes relative displacement between the lens 3 and the lens base 1, resulting in a large change in the surface shape of the lens 3.

[0049] This application provides a flexible element 2 between the lens mount 1 and the lens 3. In the working or storage environment of the lens 3, the flexible element 2 has a certain degree of deformability. The flexible element 2 is used to clamp and fix the lens 3. The flexible element 2 can absorb the deformation of the lens 3 caused by temperature changes or installation stress, thereby reducing the degree of deformation of the lens 3 and improving the surface shape control accuracy of the lens fixing device on the lens 2.

[0050] It should be understood that, for lenses 3 of different sizes and types, the stiffness, structure and layout of the flexible component 2 can be designed. That is, by changing the stiffness, number and distribution of the flexible component 2, the thermal stress and installation stress generated by the lens 3 when subjected to changes in ambient temperature can be reduced. The lens 3 can achieve different modal index requirements through the stiffness design and number selection of the flexible component 2, thereby enabling the lens fixing device to meet the first-order modal frequency requirements of the lens 3 and enabling the lens 3 to achieve surface accuracy requirements after installation. This avoids the lens 3 from resonating under external vibration interference, which would affect the exposure accuracy.

[0051] This application does not limit the specific type of lens 3; lens 3 can be configured as a lens and / or a reflector. The lens fixing device can also be adapted to different spatial orientations of multiple lenses 3. Furthermore, this lens fixing device can clamp the lens during the manufacturing and surface shape testing stages of lens 3, thereby improving the surface shape control accuracy of lens 3.

[0052] Preferably, the flexible component 2 can be made of a metal material (e.g., stainless steel). The flexible component 2 made of metal material has a stable structure and high reliability, making it less prone to aging and deformation after long-term use, thus improving the service life of the flexible component 2.

[0053] Figure 5a The simulated surface shape test results of lens 3 under three-point support in the prior art are shown. (Refer to...) Figure 5aAs shown, the surface PV value of lens 3 with three-point support was measured to be 12.1 nm through simulation. Figure 5b The image shows the simulated surface shape test results of lens 3 when the same lens 3 is supported by the lens fixing device in a preferred embodiment of this utility model. (Refer to...) Figure 5b As shown, the surface shape PV value of lens 3 when it is installed on the lens fixing device is 4.6nm, as measured by simulation.

[0054] It should be understood that the PV value of the surface shape of lens 3 represents the peak and valley values ​​of the surface shape change of lens 3, that is, the height difference between the highest and lowest points on lens 3.

[0055] pass Figure 5a and Figure 5b It can be seen that the lens fixing device provided in this application can increase the PV value of the lens 3 surface shape from 12.1nm to 4.6nm, indicating that the lens fixing device can better control the surface shape accuracy of the lens 3 and improve the exposure effect of the lens 3.

[0056] Furthermore, the surface shape PV value of lens 3 without clamping and support was measured using an interferometer, which was then obtained as x. The surface shape PV value of lens 3 with clamping and support using the lens fixing device of this application was also measured using an interferometer, which was then obtained as y. The surface shape test results show that the difference in surface shape PV value between the unclamped state and the clamped state of lens 3 is 7.6 nm, i.e., xy = 7.6 nm. This indicates that the lens fixing device of this application can improve the surface shape control accuracy of lens 3 and enable the surface shape of lens 3 to achieve nanometer-level precision control requirements.

[0057] Figure 6 Modal simulation diagrams of the lens and lens fixing device are shown. (For example...) Figure 6 As shown, both lens 3 and lens fixing device have large modal frequencies, which can meet the requirements of first-order modal frequencies, and different modal index requirements can be achieved through the stiffness design and quantity selection of flexible component 2.

[0058] Interferometer measurements show that this lens fixing device enables lens 3 to withstand the thermal stress generated by temperature variations of 10–40 degrees Celsius during storage, and can control the surface shape PV value of lens 3 mounted on the device to within 16 nm. Measurement results indicate that the surface shape change of lens 3 on the device is minimal, achieving nanometer-level measurement accuracy for the surface shape PV value of lens 3. In contrast, existing fixing devices typically produce surface shape PV values ​​above 25 nm when holding lens 3, indicating that this lens fixing device can improve the surface shape control accuracy of the lens by more than 40%.

[0059] Furthermore, the repeatability error of the surface shape PV value of lens 3 measured by interferometer under different rotation installation angles is less than 1nm, indicating that different flexible parts 2 can provide the same support force to lens 3, and the force on lens 3 at each support point is relatively uniform.

[0060] In a preferred embodiment, the number of flexible elements 2 is at least three, and all flexible elements 2 are evenly distributed on the inner wall of the lens mount 1, thus achieving multi-point uniform support for the lens 3. When the lens 3 is in a vertical state, since each flexible element 2 has the same support, the flexible elements 2 at different positions in the lens mount 1 have the same stiffness in the direction of gravity of the lens 3. At this time, the supporting force provided by each flexible element 2 to the lens 3 is consistent, and all support points of the lens mount 1 can be subjected to uniform force, so that the lens 3 can be installed on the exposure system at any rotation angle, and the lens mount 1 can provide the same supporting force to the lens 3 at any rotation installation angle, improving the ease of installation of the lens mount 1.

[0061] Preferably, the number of flexible components 2 is 3 to 36, and as the number of flexible components 2 increases, the surface shape change of the lens mount 1 decreases, and the surface shape control accuracy of the lens mount 1 on the lens 3 gradually improves.

[0062] To reduce the impact of gravity on the surface shape, this invention provides a scheme for uniform support along the outer circumference of the lens, and analyzes the influence of different numbers of support points on the accuracy of lens surface shape control.

[0063] Figures 7a-7e The diagram shows a surface simulation of the lens 3 supported by varying numbers of flexible members 2. Figures 7a to 7d The number of support points for lens 3 in the middle are 9, 12, 18 and 36 points respectively. Figure 7e A simulation diagram of the surface shape of the flexible component 2 fixed on the entire circumference of the lens 3.

[0064] Table 1 shows the PV values ​​of the lens surface shape at different support points.

[0065]

[0066] As shown in Table 1, as the number of support points of lens 3 increases, the PV value of the surface shape of lens 3 gradually decreases, the surface shape change of lens 3 gradually decreases, and the surface shape control accuracy of lens 3 gradually improves.

[0067] As a preferred embodiment, the flexible component 2 can be fixed to the lens mount 1 with screws. Alternatively, the flexible component 2 can also be fixed to the lens mount 1 by means of adhesive or clips.

[0068] Reference Figure 2 and Figure 3 As shown, in an optional embodiment, the flexible element 2 and the lens 3 are bonded together by adhesive 4.

[0069] In another alternative embodiment, the flexible element 2 and the lens 3 can be mechanically fixed. In one example, the flexible element 2 is provided with a clamping structure (not shown) for clamping the lens 3, replacing the function of the adhesive 4.

[0070] Reference Figure 2 and Figure 3 As shown, in one specific embodiment, the inner wall of the mirror base 1 is provided with a mounting groove 11 that extends along its own axial direction. The number of mounting grooves 11 is equal to the number of flexible members 2. All mounting grooves 11 are spaced apart in the circumferential direction of the mirror base 1, and each flexible member 2 is used to fix itself in a corresponding mounting groove 11, thereby preventing the flexible member 2 from shifting or falling off.

[0071] In a specific example, the flexible member 2 can be fixed in the mounting groove 11 of the mirror base 1 by bolts or clips through the mounting parts 21 on both sides of the connecting rod 22.

[0072] Preferably, the length of the flexible member 2 is matched with the length of the mounting groove 11 in the axial direction of the lens base 1, so as to maximize the rigidity of the flexible member 2 and fix the lens 3 in the middle position of the lens base 1.

[0073] As another specific implementation, the mounting groove 11 may not be provided on the inner wall of the mirror base 1. In this case, multiple flexible parts 2 can be directly fixed on the inner wall of the mirror base 1 at intervals along the circumference of the mirror base 1.

[0074] Reference Figure 4 As shown, in a preferred embodiment, the flexible component 2 includes a mounting portion 21, a connecting rod 22, and a fixing portion 23. There are two mounting portions 21 and at least two connecting rods 22. The two mounting portions 21 are respectively fixed to both sides of the fixing portion 23 via at least one corresponding connecting rod 22. The mounting portions 21 are used to connect to the lens mount 1, and the fixing portions 23 are used to abut against and support the lens 3.

[0075] In one embodiment, the flexible member 2 is fixed to the lens base 1 by bolts. In another embodiment, the flexible member 2 is fixed to the lens base 1 by clips or adhesive.

[0076] In this application, the fixing part 23 supporting the lens 3 is connected to the mounting part 21 via the connecting rod 22. This arrangement allows the fixing part 23 to deform in the radial direction of the lens mount 1. The fixing part 23 can absorb the surface shape change of the lens 3, thereby improving the surface shape control accuracy of the lens mount fixing device on the lens 3.

[0077] In one specific embodiment, the connecting rod 22 is a cylindrical rod, and there are two of them. Each connecting rod 22 is connected to one side of the fixing part 23 and a mounting part 21 at both ends. Setting the connecting rod 22 as a cylindrical rod can improve the flexibility of the flexible member 2 and give all the flexible members 2 sufficient rigidity and support force, thereby further improving the surface shape control accuracy of the lens fixing device.

[0078] It should be noted that, in actual design, the structure and dimensions of the connecting rod 22 and the structure and dimensions of the fixing part 23 can be designed according to the size and type of the lens 3, thereby balancing the rigidity and flexibility of the fixing part 23 in the radial direction of the lens base 1. The support force of the flexible part 2 on the lens 3 can be adjusted by design to meet the requirements of the lens 3 for the first natural frequency. At the same time, the fixing part 23 can be deformed and displaced in the radial direction of the lens base 1, so that the fixing part 23 can absorb the surface shape change of the lens 3, thereby avoiding large vibration and surface shape change of the lens 3.

[0079] Furthermore, the mounting part 21 and the fixing part 23 are placed in the mounting groove 11. At this time, the thickness of the mounting part 21 and the fixing part 23 in the radial direction of the lens base 1 is less than or equal to the height of the mounting groove 11 in the radial direction of the lens base 1. This facilitates the lens 3 to enter the lens base 1 and contact the fixing part 23, and also facilitates the fixing part 23 to abut against the outer wall of the lens 3, thereby fixing and supporting the lens 3.

[0080] Continue to refer to Figure 4 The fixing part 23 is also provided with a groove 232 on the surface facing the lens 3. The design of the groove 232 can be used to adjust the stiffness of the flexible member 2 to meet the support requirements of the flexible member 2 for the lens 3.

[0081] Continue to refer to Figure 2 and Figure 4 In a preferred embodiment, the flexible component 2 and the lens 3 are bonded together using adhesive 4. The fixing part 23 has a block structure. When the lens 3 is fixedly installed, after the lens 3 is placed inside the lens base 1, there are gaps (not shown) between the lens 3 and all the fixing parts 23, and the width of all gaps (the width in the radial direction of the lens base 1) is the same. Then, the gaps between the lens 3 and the flexible component 2 need to be bonded together using adhesive 4, and the adhesive 4 needs to be cured to complete the installation of the lens 3 on the lens base 1.

[0082] More preferably, the fixing part 23 is provided with a first glue injection hole 231 that extends through its own thickness direction, and the lens base 1 is provided with a second glue injection hole 12 that extends through its own radial direction. The first glue injection hole 231 is used to communicate with the second glue injection hole 12 after the flexible part 2 and the lens base 1 are installed.

[0083] During actual installation, after the lens 3 comes into contact with the fixing part 23, glue 4 can be injected into the second glue injection hole 12. The glue 4 connects the lens 3 to the fixing part 23 after passing through the first glue injection hole 231.

[0084] Furthermore, after the flexible component 2 is bonded to the lens 3, the adhesive 4 will undergo a certain shrinkage displacement during curing. The fixing part 23 can absorb the shrinkage generated by the curing of the adhesive 4, thereby reducing the impact of the adhesive 4 curing on the surface shape of the lens 3 and controlling the stress on the lens 3 within the required range to avoid significant changes in the surface shape of the lens 3 after the adhesive 4 cures. At the same time, the fixing part 23 is a block structure with a certain rigidity, which can provide a certain support force in the radial and axial directions of the lens 3, so that the first-order mode of the lens 3 meets certain requirements and prevents the lens 3 from vibrating significantly.

[0085] Furthermore, the stiffness of the flexible component 2 can be designed by changing the structure and size of the fixing part 23 and the connecting rod 22, so that the supporting force of the flexible component 2 on the lens 3 is within a set range.

[0086] Considering the manufacturing cost and design requirements of the lens 3, in a preferred embodiment, the lens fixing device has 12 flexible members 2 on the lens base 1 for supporting the lens 3. The 12 flexible members 2 are evenly arranged and fixed on the inner surface of the lens base 1. Preferably, the sidewall of the lens 3 is bonded to each of the flexible members 2 with adhesive 4.

[0087] Figure 8a The stress simulation cloud diagram of the mirror mount is shown. Figure 8b The stress simulation cloud map of the lens is shown. Figure 8c The stress simulation cloud diagram of the flexible component is shown. Figure 8d The displacement simulation cloud diagram of the flexible component is shown.

[0088] Figures 8a to 8d The simulation diagrams show the stress and displacement of the flexible component when the overall storage environment temperature of lens 3 and the lens fixing device increases by 18 degrees Celsius. The simulation results show that the flexible component 2 absorbs a relative displacement of 0.015 mm. At this point, the maximum stress of the flexible component 2 is 89.5 MPa, and the maximum stress of lens 3 is 25.2 MPa. This indicates that the flexible component 2 can absorb part of the thermal stress of lens 3 and deform when thermal stress occurs. At this time, the thermal stress on lens 3 is significantly reduced, and lens 3 exhibits a smaller surface shape change. This demonstrates that the design of the flexible component 2 can significantly improve the surface shape control accuracy of lens 3.

[0089] In addition, the lens fixing device is also suitable for lenses 3 used in a horizontal state and can realize the surface shape control of the lens during use. Figure 9This is a simulation diagram of the lens's surface shape in a horizontal position after it has been installed on the lens fixing device. At this time, lens 3 is supported by multiple axial points. Figure 9 It can be seen that the lens fixing device has high surface shape control accuracy for lens 3, resulting in smaller surface astigmatism of lens 2.

[0090] In a non-limiting embodiment, the assembly process of the lens fixing device is as follows:

[0091] 1. Make the bottom surfaces of all 12 flexible parts 2 fit against the mirror base 1, and fix all the flexible parts 2 to the mirror base 1 with screws.

[0092] 2. In a horizontal state, align the lens 3 with all the fixing parts 23 of the flexible part 2, and adjust the relative position of the lens 3 and the lens base 1 to a specified range using a tooling. At this time, the gap between the lens 3 and all the fixing parts 23 is the same.

[0093] 3. Bond the gap between the lens 3 and the flexible part 2 with glue 4, and allow the glue 4 to cure.

[0094] 4. Adjust the lens fixing device for mounting lens 3 from a horizontal state to a vertical state, and finally integrate the lens fixing device for mounting lens 3 into the optical system.

[0095] In summary, this utility model provides a lens fixing device and an exposure system. The device can install and clamp the lens 3 through the flexible member 2 to fix and support the lens 3. The flexible member 2 can deform under force, making it difficult for the lens 3 to move during use. This not only improves the surface shape control accuracy of the lens 3, achieving nanometer-level surface shape accuracy control, but also increases the modal frequency of the lens 3, ensuring that the modal frequency of the lens 3 meets the requirements, preventing large vibrations of the lens 3, and improving the exposure accuracy of the lens 3.

[0096] The above description is only a description of the preferred embodiment of the present utility model and is not intended to limit the scope of the present utility model in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the present utility model.

Claims

1. A lens fixing device for fixing a lens, characterized by, The device includes a lens base and flexible components. The lens base is annular, and there are multiple flexible components. All the flexible components are spaced apart along the circumference of the lens base on the inner wall of the lens base. The flexible components are used to connect with the lens to position and support the lens.

2. The lens holding device according to claim 1, wherein The number of flexible components is at least three, and all the flexible components are evenly distributed on the inner wall of the mirror base.

3. The lens holding device according to claim 2, wherein The number of flexible components is 3 to 36.

4. The lens holding device according to claim 1, wherein The flexible component is bonded to the lens with adhesive, or the flexible component is provided with a clamping structure for clamping the lens.

5. The lens holding device according to claim 1, wherein The flexible component is fixed to the mirror base by screws.

6. The lens fixation device of any one of claims 1-5, wherein, The inner wall of the mirror base is provided with a mounting groove that runs through its own axis. The number of mounting grooves is equal to the number of flexible components. All the mounting grooves are spaced apart in the circumferential direction of the mirror base. Each flexible component is used to be fixed in a corresponding mounting groove.

7. The lens fixation device of any one of claims 1-5, wherein, The flexible component includes a mounting part, a connecting rod, and a fixing part. There are two mounting parts and at least two connecting rods. The two mounting parts are fixed to both sides of the fixing part by at least one corresponding connecting rod. The mounting part is used to connect with the lens mount, and the fixing part is used to abut against and support the lens.

8. The lens holding device according to claim 7, wherein The connecting rod is a cylindrical rod, and there are two of them. Each connecting rod is connected to one side of the fixing part and one of the mounting parts at both ends.

9. The lens holding device according to claim 7, wherein The flexible component is bonded to the lens with adhesive; the fixing part is a block structure, and after the lens is placed in the lens base, there is a gap between the lens and all the fixing parts, and all the gaps have the same width.

10. The lens holding device according to claim 7, wherein The fixing part is provided with a first injection hole that extends through its own thickness direction, and the lens mount is provided with a second injection hole that extends through its own radial direction. The first injection hole is used to communicate with the second injection hole after the flexible part and the lens mount are installed.

11. An exposure system, characterized in that, It includes a lens and a lens fixing device as described in any one of claims 1 to 10, wherein the lens fixing device is used to fix the lens.

12. The exposure system of claim 11, wherein, The lens is configured as a lens and / or a reflector.

Images