A positioning device and ion emission mechanism

Abstract

The application discloses a positioning device and an ion emission mechanism, and the positioning device is used for positioning a filament assembly, the filament assembly comprises a filament and two filament clamps, the filament comprises two pins, the filament clamp comprises a clamping rod and a clamping head connected with each other, the clamping head is used for clamping the pins, one pin is clamped by one clamping head, and the positioning device comprises a body provided with at least two positioning grooves, one positioning groove is matched with one filament clamp, the distance between the clamping heads of the two filament clamps is adapted to the distance between the two pins, and a guide part is connected with the body and can limit the extension direction of the pins by stopping the pins. The positioning grooves and the guide part are arranged on the body, the deformation range of the filament can be reduced, the stress value in the stress concentration area of the filament is correspondingly reduced, the possibility that the filament is fused in the stress concentration area when the filament is heated to a high-temperature state is reduced, the service life of the filament is prolonged, and the technical problems of poor filament reliability and short service life in the prior art are solved.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing equipment technology, and in particular to a positioning device and an ion emission mechanism. Background Technology

[0002] Ion implantation is a technique that precisely injects high-energy ion beams into semiconductor materials to alter their physical and chemical properties. It is widely used in semiconductor manufacturing and material modification. A typical ion implantation device applies a voltage to a high-temperature filament to emit electrons. The emitted electrons heat the cathode, and the heated cathode, in conjunction with gas molecules and a magnetic field within the arc chamber, generates high-energy ions. These high-energy ions then undergo mass analysis, ion screening, acceleration, and other processes before finally being implanted into the semiconductor material.

[0003] In related technologies, the filament needs to be positioned using filament clamps. Specifically, two filament clamps are respectively attached to the two leads of the filament, and the position of the filament clamps needs to be manually adjusted during the installation process.

[0004] However, manual adjustment inevitably introduces installation errors, which can cause filament deformation and create stress concentration areas on the filament. During operation, these stress concentration areas are prone to premature melting, resulting in poor filament reliability and short service life. Utility Model Content

[0005] The first aspect of this application provides a positioning device for positioning a filament assembly. The filament assembly includes a filament and two filament clamps. The filament includes two leads. The filament clamps include a clamping rod and a clamping head connected to each other. The clamping head is used to clamp the leads, with one lead clamped by one clamping head. The positioning device includes: a body having at least two positioning grooves, one positioning groove cooperating with one filament clamp such that the distance between the clamping heads of the two filament clamps matches the distance between the two leads; and a guide portion connected to the body, which can stop the leads to define the extension direction of the leads.

[0006] In this embodiment, a positioning device for a filament assembly is provided, which can position the filament clip and the filament in the filament assembly.

[0007] Specifically, the filament includes two pins, each of which is clamped by a filament clamp. After the clamping action is completed, the two filament clamps can position the filament as a whole, so that the filament can work in the predetermined position and prevent the filament from being misaligned or even falling off during operation.

[0008] When the filament is not subjected to external force, the filament is in its inherent normal shape. Under normal shape, the distance between the center lines of the two pins on the filament is a set value. Ideally, after the filament is positioned by two filament clamps, the filament can be kept in its normal shape, thus matching the installation position on the arc chamber of the ion source.

[0009] However, in related technologies, the positions of the two filament clamps need to be manually calibrated. Manual calibration is unreliable, and deviations in the relative positions of the clamps can occur, resulting in positioning errors. Because the leads are held in place by the filament clamps, these positioning errors can cause the distance between the clamps to become mismatched with the distance between the leads. If the distance between the clamps is too large when the leads are attached to the filament clamps, the leads will be pried apart by the clamps, causing filament deformation. Conversely, if the distance is too small, the leads will be folded inwards by the clamps, also causing filament deformation. Stress concentration areas will appear on the deformed filaments.

[0010] During operation, the filament needs to be heated to a high temperature. Under high temperature, the stress concentration area is more likely to melt prematurely, causing the filament to melt before reaching its expected lifespan. This results in technical problems such as poor reliability and short lifespan of the filament.

[0011] In this embodiment, the positioning device includes a body and a guide. The body has at least two positioning slots, each capable of engaging with a filament clamp. After the two filament clamps and the two positioning slots are engaged, the relative positions of the two filament clamps are locked, and the distance between the two clamps is locked. Furthermore, the distance between the clamps of the two filament clamps is adapted to the distance between the two pins. For example, the clamps include space for accommodating the pins. When the distance between the two clamps is adapted to the distance between the two pins, the deviation between the centerlines of the two spaces for accommodating the pins, relative to the distance between the centerlines of the two pins, is within an acceptable range, thereby reducing the deformation of the filament.

[0012] Building upon this, the positioning device also includes a guide section connected to the main body. When the chucks are not misaligned, the pin extends in a predetermined direction, meaning the pin's extension direction aligns with the centerline of the space within the chucks used to accommodate the pin. In this case, the two chucks will not exert a torsional force on the filament. The guide section can also stop the filament from the outside, thereby limiting the deviation between the filament's extension direction and the centerline of the space used to accommodate the pin, for example, limiting this deviation to within 5°. This reduces the torsional force exerted on the pin by the filament clamps, further reducing the filament's deformation.

[0013] Therefore, by providing positioning grooves and guides on the body, the deformation range of the filament can be reduced, thereby minimizing stress concentration and reducing the possibility of filament melting in the stress concentration area, thus extending the service life of the filament.

[0014] Furthermore, compared to manually adjusting the filament clamp, the positioning slot and guide on the positioning device allow for faster positioning of the filament clamp and installation of the filament, thereby improving the assembly efficiency of the filament assembly and the production efficiency of the filament assembly.

[0015] Furthermore, in actual production, filament clips are consumables and are generally purchased or produced in bulk. Regardless of whether they are self-processed, custom-made, or purchased in bulk, it is inevitable that some filament clips will not meet the requirements. To address this, the positioning groove can screen the shape of the filament clip. If the filament clip cannot match the positioning groove, it indicates that the shape of the filament clip does not meet the requirements, thus quickly screening out defective products. This prevents defective products and filament assemblies from being mistakenly assembled onto the ion source, thereby improving the yield rate of filament assemblies.

[0016] Specifically, the production process involves various types of filaments, and the distance between the leads of different filament types may vary. The main body has 2N positioning slots, where N is an integer greater than or equal to 1. Two positioning slots form a group, and the distance between different groups of slots is adapted to different types of filaments. This allows a single positioning device to meet the assembly requirements of multiple filament types, thereby broadening the applicability of the positioning device and improving its practicality.

[0017] In addition, the positioning device provided by this utility model may also have the following additional technical features:

[0018] In some embodiments of this utility model, optionally, the positioning groove includes an opening, a bottom surface, and a side surface connecting the opening and the bottom surface, and the filament clamp can be inserted into the positioning groove through the opening, and the side surface can cooperate with the outer peripheral surface of the filament clamp.

[0019] In some embodiments of this utility model, optionally, the side of the positioning groove is interference-fitted or transition-fitted with the outer peripheral surface of the filament clamp.

[0020] In some embodiments of this utility model, optionally, the positioning groove is strip-shaped, and the positioning groove includes a first groove segment and a second groove segment. The first groove segment and the second groove segment extend in different directions. The first groove segment is used to accommodate the clamping rod, and the second groove segment is used to accommodate the clamp.

[0021] In some embodiments of this utility model, optionally, a notch is provided at the end of the second groove segment away from the first groove segment, and the clamp portion is located outside the notch.

[0022] In some embodiments of this invention, optionally, the hole wall forms an annular guide surface; the mounting hole is used for the pin to pass through, and the guide surface is configured to surround the periphery of the pin.

[0023] In some embodiments of this utility model, optionally, the filament clip is fixed to the insulator by a fixing member, characterized in that the body further includes a first clearance hole, the first clearance hole is connected to the positioning groove, each positioning groove is provided with at least one first clearance hole, the first clearance hole is used for the fixing member to pass through the body.

[0024] In some embodiments of this utility model, optionally, the filament clamp includes an insertion hole, and the filament clamp is opened by inserting a tool into the insertion hole. The feature is that the body also includes two second clearance holes, which communicate with the positioning groove and are used to allow the tool to pass through the body.

[0025] In some embodiments of this utility model, optionally, the main body includes: two mounting brackets, which are spaced apart, each mounting bracket including a top plate and a side plate, the side plate surrounding the periphery of the top plate, the top plate and the side plate forming a positioning groove, and a guide portion disposed on the top plate; and a connecting bracket disposed between the two mounting brackets and connecting the two mounting brackets.

[0026] A second aspect of this utility model provides an ion emission mechanism, characterized in that the ion emission mechanism includes a filament assembly, a positioning device, an insulator, and a fixing member, wherein: the filament assembly includes a filament and two filament clamps, the filament including two leads; the filament clamp includes a clamping rod and a clamping head connected to each other, the clamping head being used to clamp the leads, one lead being clamped by one clamping head; the positioning device includes a body and a guide portion connected to the body, the body having at least two positioning grooves and a first clearance hole communicating with the positioning grooves, one positioning groove cooperating with one filament clamp, such that the distance between the clamping heads of the two filament clamps is adapted to the distance between the two leads; the guide portion can limit the extension direction of the leads by stopping the outer surface of the leads; the fixing member connects the insulator and the filament clamps, and the fixing member passes through the first clearance hole. Attached Figure Description

[0027] Figure 1 A schematic diagram of the structure of a filament assembly according to an embodiment of the present invention is shown. Figure 1 ;

[0028] Figure 2 A schematic diagram of the structure of a filament assembly according to an embodiment of the present invention is shown. Figure 2 ;

[0029] Figure 3 A schematic diagram of the structure of a filament assembly according to an embodiment of the present invention is shown. Figure 3 ;

[0030] Figure 4 A schematic diagram of the structure of a filament assembly according to an embodiment of the present invention is shown. Figure 4 ;

[0031] Figure 5 A schematic diagram of the structure of a positioning device according to an embodiment of the present invention is shown. Figure 1 ;

[0032] Figure 6 A schematic diagram of the structure of a positioning device according to an embodiment of the present invention is shown. Figure 2 ;

[0033] Figure 7 A schematic diagram of the structure of a filament clip according to an embodiment of the present invention is shown.

[0034] in, Figures 1 to 7 The correspondence between the reference numerals and component names in the attached drawings is as follows:

[0035] 10: Ion emission mechanism; 100: Positioning device; 110: Body; 1102: First clearance hole; 1104: Second clearance hole; 112: Positioning groove; 1122: Opening; 1124: Bottom surface; 1126: Side surface; 1127: First groove segment; 1128: Second groove segment; 1129: Notch; 114: Guide part; 1142: Guide surface; 1144: Mounting hole; 116: Mounting bracket; 1162: Top plate; 1164: Side plate; 118: Connecting bracket; 200: Filament assembly; 210: Filament; 212: Pin; 220: Filament clamp; 2202: Outer peripheral surface; 2204: Insertion hole; 222: Clamping rod; 224: Clamp head; 230: Fixing component; 240: Insulator; 250: Tool. Detailed Implementation

[0036] To better understand the embodiments provided in this specification, the embodiments of this specification will be described in detail below with reference to the accompanying drawings and specific examples. It should be understood that the embodiments of this specification and the specific features therein are detailed descriptions of the embodiments of this specification, rather than limitations thereof. Unless otherwise specified, the embodiments of this specification and the technical features therein can be combined with each other.

[0037] In this paper, relational terms such as “first” and “second” are used only to distinguish one entity or operation from another entity or structure, without necessarily requiring or implying any such actual relationship or order between these entities or structures.

[0038] The following is combined Figures 1 to 7 The positioning device 100 and the ion emission mechanism 10 according to embodiments of this application are described.

[0039] like Figures 1 to 5 As shown, one embodiment of the present invention provides a positioning device 100 for positioning a filament assembly 200. The filament assembly 200 includes a filament 210 and two filament clamps 220, wherein the filament 210 includes two leads 212, and the filament clamps 220 include a clamping rod 222 and a clamp 224 connected to each other. The clamps 224 are used to clamp the leads 212, with one lead 212 being clamped by one clamp 224. The positioning device 100 includes: a body 110 having at least two positioning grooves 112, one positioning groove 112 cooperating with one filament clamp 220 such that the distance between the clamps 224 of the two filament clamps 220 is adapted to the distance between the two leads 212; and a guide portion 114 connected to the body 110, the guide portion 114 being able to stop the outer surface of the lead 212 to define the extension direction of the lead 212.

[0040] In this embodiment, a positioning device 100 is provided for use in a filament assembly 200, which is capable of positioning the filament clip 220 and the filament 210 in the filament assembly 200.

[0041] Specifically, when the filament 210 is not subjected to external force, the shape of the filament 210 is its inherent normal shape. Under normal shape, the distance between the center lines of the two pins 212 on the filament 210 is a set value. In an ideal state, after the filament 210 is positioned by the two filament clamps 220, the filament 210 can be kept in its normal shape, thereby adapting to the installation position on the arc chamber of the ion source.

[0042] However, in related technologies, the positions of the two filament clamps 220 need to be manually calibrated. Manual calibration has poor reliability, and the relative positions of the clamps 224 of the two filament clamps 220 may deviate, resulting in positioning errors. Because the pin 212 is clamped by the filament clamps 220, the positioning error of the two filament clamps 220 will cause the distance between the two clamps 224 to be mismatched with the distance between the two pins 212. When the pin 212 is assembled to the filament clamp 220, if the distance between the two clamps 224 is too large, the two pins 212 will be pried apart by the two excessively far clamps 224, causing the filament 210 to deform. Conversely, if the distance between the two clamps 224 is too small, the two pins 212 will be folded inward by the two excessively far clamps 224, also causing the filament 210 to deform. Stress concentration areas will appear on the deformed filament 210.

[0043] During operation, the filament 210 needs to be heated to a high temperature. Under high temperature, the stress concentration area is more likely to melt prematurely, causing the filament 210 to melt before reaching its expected lifespan. As a result, the filament 210 has technical problems of poor reliability and short service life.

[0044] In this embodiment, the positioning device 100 includes a body 110 and a guide portion 114. The body 110 has at least two positioning slots 112, each capable of engaging with a filament clamp 220. After the engagement of the two filament clamps 220 and the two positioning slots 112 is completed, the relative positions of the two filament clamps 220 are locked, and the distance between the two clamp heads 224 is locked. Furthermore, the distance between the clamp heads 224 of the two filament clamps 220 is adapted to the distance between the two pins 212. For example, the clamp head 224 includes space for accommodating the pins 212. When the distance between the two clamp heads 224 is adapted to the distance between the two pins 212, the deviation between the centerlines of the two spaces accommodating the pins 212 and the distance between the centerlines of the two pins 212 is within an acceptable range, thereby reducing the deformation amplitude of the filament 210.

[0045] Based on this, the positioning device 100 also includes a guide portion 114, which is connected to the body 110. When the clamp 224 is not deflected, the pin 212 extends in a predetermined direction, that is, the extension direction of the pin 212 is consistent with the direction of the centerline of the space in the clamp 224 used to accommodate the pin 212. In this case, the two clamps 224 will not exert a torsional force on the filament 210. The guide portion 114 can stop the filament 210 on the outside of the filament 210 to limit the deviation between the extension direction of the filament 210 and the direction of the centerline of the space used to accommodate the pin 212 through the stop engagement, for example, limiting the deviation to within 5°, thereby reducing the torsional force applied to the pin 212 by the filament clamp 220, and further reducing the deformation amplitude of the filament 210.

[0046] Therefore, by providing a positioning groove 112 and a guide portion 114 on the body 110, the deformation amplitude of the filament 210 can be reduced, thereby minimizing stress concentration and reducing the possibility of the filament 210 melting in the stress concentration area, thus extending the service life of the filament 210.

[0047] Furthermore, compared to manually adjusting the filament clamp 220, the positioning operation of the filament clamp 220 and the installation operation of the filament 210 can be completed more quickly through the positioning groove 112 and guide part 114 on the positioning device 100, thereby improving the assembly efficiency of the filament assembly 200 and the production efficiency of the filament assembly 200.

[0048] Furthermore, in actual production, the filament clip 220 is a consumable and is generally purchased or produced in bulk. Regardless of whether it is self-processed, custom-processed, or purchased in bulk, it is inevitable that some filament clips 220 will not meet the requirements. In this regard, since the positioning groove 112 of the positioning device 100 can screen the shape of the filament clip 220, if the filament clip 220 cannot match the positioning groove 112, it means that the shape of the filament clip 220 does not meet the requirements, thereby quickly screening out unqualified products and preventing unqualified products and the filament assembly 200 from being mistakenly assembled onto the ion source, thereby achieving the technical effect of improving the yield of the filament assembly 200.

[0049] Furthermore, the production process involves various types of filaments 210, and the distance between the pins 212 of different types of filaments 210 may vary. In this embodiment, the number of positioning slots 112 on the body 110 is 2N, where N is an integer greater than or equal to 1. Among the 2N positioning slots 112, two positioning slots 112 form a group, and the distance between different groups of positioning slots 112 is adapted to different types of filaments 210. This allows a single positioning device 100 to meet the assembly requirements of various types of filaments 210, thereby broadening the applicability of the positioning device 100 and achieving the technical effect of improving the practicality of the positioning device 100.

[0050] like Figure 6 and Figure 7 As shown, in some embodiments of this utility model, optionally, the positioning groove 112 of the body 110 includes an opening 1122, a bottom surface 1124, and a side surface 1126 connecting the opening 1122 and the bottom surface 1124. The filament clip 220 can be embedded into the positioning groove 112 through the opening 1122. In other words, the bottom surface 1124 and the side surfaces 1126 on both sides enclose a space with an opening 1122, which is used to accommodate the filament clip 220. The side surface 1126 of the positioning groove 112 can cooperate with the outer peripheral surface 2202 of the filament clip 220. The side surface 1126 of the positioning groove 112 and the outer peripheral surface 2202 of the filament clip are closely fitted. The friction between the two achieves the fixation of the filament clip 220 and prevents the filament clip 220 from shaking in the space.

[0051] In this embodiment, the positioning groove 112 forms an opening 1122 on the first side of the body 110. The shape of the opening 1122 is adapted to the shape of the outer peripheral surface 2202 of the filament clip 220, so that the filament clip 220 can be inserted into the positioning groove 112 through the opening 1122 to quickly complete the mating action between the filament clip 220 and the body 110, thereby improving the installation efficiency of the filament assembly 200. After the filament clip 220 is inserted into the positioning groove 112, the bottom surface 1124 of the positioning groove 112 can limit the filament clip 220 in the depth direction of the positioning groove 112, preventing the filament clip 220 from being tilted in the positioning groove 112.

[0052] As mentioned above, the positioning groove 112 also includes a side surface 1126 connected between the bottom surface 1124 and the opening 1122. The shape of the side surface 1126 is consistent with the shape of the outer peripheral surface 2202 of the filament clip 220. After the filament clip 220 is embedded in the positioning groove 112, the side surface 1126 wraps around the outer periphery of the filament clip 220, so that the side surface 1126 of the positioning groove 112 can cooperate with the outer peripheral surface 2202 of the filament clip 220 to restrict the posture of the filament clip 220, prevent the filament clip 220 from shaking in the positioning groove 112, achieve precise positioning of the filament clip 220, and ensure that the distance between the two clamps 224 can be adapted to the distance between the two pins 212 on the filament 210, thereby achieving the technical effect of improving the assembly accuracy of the filament clip 220 and reducing the probability of premature melting of the filament 210.

[0053] Based on this, the side 1126 of the opening 1122 and the positioning groove 112 can screen the shape of the filament clip 220. When the deviation between the shape of the positioning groove 112 and the shape of the filament clip 220 is large, the filament clip 220 cannot be embedded in the positioning groove 112, thereby screening the filament clip 220 and preventing the filament clip 220 whose shape does not meet the requirements from being mistakenly assembled onto the ion source.

[0054] In some embodiments of this utility model, the side surface 1126 of the positioning groove 112 is interference-fitted with the outer peripheral surface 2202 of the filament clip 220, or the side surface 1126 of the positioning groove 112 is transition-fitted with the outer peripheral surface 2202 of the filament clip 220.

[0055] In this embodiment, when the side 1126 of the positioning groove 112 is interference-fitted with the outer peripheral surface 2202 of the filament clip 220, the inserted filament clip 220 will to some extent open the opening 1122 of the positioning groove 112. After the filament clip 220 is successfully inserted into the positioning groove 112, the side 1126 of the positioning groove 112 and the outer peripheral surface 2202 of the filament clip 220 are tightly fitted, thereby securing the filament clip 220 to the inside of the positioning groove 112, preventing the filament clip 220 from shaking in the positioning groove 112, thereby improving the positioning accuracy of the filament clip 220, ensuring that the distance between the two clamps 224 matches the distance between the two pins 212, and thus achieving the technical effect of reducing the deformation amplitude of the filament 210 and extending the service life of the filament 210.

[0056] In the case where the side surface 1126 of the positioning groove 112 is selected to be in an interference fit with the outer peripheral surface 2202 of the filament clip 220, the body 110 needs to have a certain degree of toughness to ensure that the filament clip 220, whose shape meets the requirements, can be smoothly inserted into the positioning groove 112. If the shape of the filament clip 220 does not meet the requirements, even if the body 110 can meet the interference fit requirements through deformation, the filament clip 220 cannot be installed, thereby quickly screening out defective products from the batch of filament clips 220.

[0057] With the transition fit between the side surface 1126 of the positioning groove 112 and the outer peripheral surface 2202 of the filament clamp 220, the dimensional deviation between the outer peripheral surface 2202 of the filament clamp 220 and the side surface 1126 of the positioning groove 112 is small. This reduces the difficulty of inserting the filament clamp 220 into the positioning groove 112, thus improving the assembly efficiency of the filament assembly 200. Furthermore, the transition fit results in less wear between the filament clamp 220 and the body 110. This prevents scratches on the functional coating of the outer surface of the filament clamp 220 and extends the service life of the body 110, preventing the side surface 1126 of the positioning groove 112 from failing rapidly due to frequent wear. This ultimately improves the assembly reliability of the filament clamp 220 and reduces the assembly cost of the filament assembly 200.

[0058] like Figure 6 and Figure 7 As shown, in some embodiments of this utility model, the positioning groove 112 is strip-shaped and includes a first groove segment 1127 and a second groove segment 1128. The first groove segment 1127 and the second groove segment 1128 extend in different directions. The first groove segment 1127 is used to accommodate the clamping rod 222, and the second groove segment 1128 is used to accommodate the chuck 224.

[0059] In this embodiment, the filament clamp 220 is strip-shaped, and the strip-shaped filament clamp 220 is divided into a clamping rod 222 and a clamp head 224 in the length direction. The clamp head 224 is bent relative to the clamping rod 222. Correspondingly, the positioning groove 112 is also strip-shaped, and the positioning groove 112 is divided into a first groove segment 1127 and a second groove segment 1128 in the length direction. There is an included angle between the extending directions of the first groove segment 1127 and the second groove segment 1128. This included angle corresponds to the bending angle of the clamp head 224 relative to the clamping rod 222. After the filament clamp 220 is inserted into the positioning groove 112, the clamping rod 222 is located in the first groove segment 1127, and the clamp head 224 is located in the second groove segment 1128. It can be seen that by setting the first groove segment 1127 and the second groove segment 1128, the degree of wrapping and fixing effect of the positioning groove 112 on the outer peripheral surface 2202 of the filament clamp 220 can be improved, thereby improving the positioning accuracy of the filament clamp 220 and further reducing the deformation range of the filament 210.

[0060] Based on this, by setting the first groove segment 1127 and the second groove segment 1128 corresponding to the clamp 224 and the clamping rod 222, the positioning groove 112 can also screen the shape of the filament clamp 220. For example, if the clamp 224 is bent too much relative to the clamping rod 222 due to processing errors, part of the clamp 224 cannot be smoothly inserted into the second groove segment 1128, allowing the user to classify the filament clamp 220 as a defective product. Similarly, if the bending of the clamp 224 relative to the clamping rod 222 is too small, the second groove segment 1128 can also prevent the clamp 224 from being inserted, thus completing the rapid screening. It can be seen that the first groove segment 1127 and the second groove segment 1128 can also meet the rapid screening requirements of the filament clamp 220.

[0061] like Figure 5 , Figure 6 and Figure 7 As shown, in some embodiments of this utility model, two positioning grooves 112 are symmetrically arranged, two first groove segments 1127 are parallel, and the distance between the two second groove segments 1128 gradually decreases in the direction away from the first groove segment 1127.

[0062] In this embodiment, by symmetrically arranging the two positioning slots 112, the two filament clips 220 that are correspondingly inserted can be symmetrically distributed. On the one hand, when the two filament clips 220 are misaligned, the distance between the two clamps 224 is uncontrollable, and the degree of misalignment will directly affect the distance between the two clamps 224. This can easily lead to a situation where the distance between the two clamps 224 does not match the distance between the two pins 212, causing the filament 210 to melt prematurely. Therefore, by symmetrically distributing the two filament clips 220, the distance between the two clamps 224 can be effectively controlled, avoiding excessive deformation of the filament 210 due to the misalignment of the two clamps 224, thereby achieving the technical effect of extending the service life of the filament 210.

[0063] On the other hand, the two symmetrically distributed filament clamps 220 can straighten the filament 210 by clamping the two pins 212 of the filament 210, so that the posture of the filament 210 can meet the assembly requirements of the filament assembly 200, avoid the filament 210 deflection affecting the performance of the filament assembly 200, ensure that the filament assembly 200 can meet the operating conditions of the high-energy ion implantation equipment, and thus achieve the technical effect of improving the yield of the filament assembly 200.

[0064] like Figure 3 , Figure 5 and Figure 6 As shown, in some embodiments of the present invention, optionally, a notch 1129 is provided at the end of the second groove segment 1128 away from the first groove segment 1127, and the clamp 224 is located outside the notch 1129.

[0065] In this embodiment, the end of the chuck 224 away from the clamping rod 222 can be opened and closed. Specifically, the clamping and unclamping of the pin 212 can be achieved through the opening and closing action. When the chuck 224 is opened, the outer peripheral surface 2202 of the corresponding area needs to be expanded outward.

[0066] To address this, a notch 1129 is provided at the end of the second groove 1128 away from the first groove 1127. After the filament clamp 220 is inserted into the limiting groove, the end of the clamp 224 near the clamping rod 222 is located inside the second groove 1128, and the end of the clamp 224 away from the clamping rod 222 extends out from the notch 1129 to the outside of the second groove 1128. Because the openable part of the clamp 224 is located outside the notch 1129, the side 1126 of the positioning groove 112 will not restrict the opening action of the clamp 224, so that the user can complete the disassembly and assembly of the filament 210 without removing the positioning device 100, thereby reducing the difficulty of disassembly and assembly of the filament 210.

[0067] Specifically, when the body 110 is made of sheet metal, a surrounding sidewall can be formed by a stamping process or a bending process, and then a portion of the sidewall can be removed by a cutting process to form the aforementioned notch 1129.

[0068] like Figure 3 , Figure 5 and Figure 6 As shown, in some embodiments of the present invention, the guide portion 114 includes an annular guide surface 1142, which is configured to surround the periphery of the pin 212.

[0069] In this embodiment, the guide portion 114 includes a guide surface 1142, which is annular. After the lead 212 of the filament 210 is clamped by the filament clamp 220 and the positions of the two filament clamps 220 are calibrated by the positioning device 100, the guide surface 1142 surrounds the lead 212. The annular guide surface 1142 can stop the lead 212 in all directions, preventing the lead 212 from deflecting in a certain direction. Thus, the guide surface 1142 limits the torsion range of the filament 210, avoids stress concentration in the filament 210, and thereby achieves the technical effect of extending the service life of the filament 210.

[0070] In some embodiments of this utility model, the guide portion 114 has a mounting hole 1144 for the pin 212 to pass through, and the hole wall of the mounting hole 1144 extends to form a guide surface 1142.

[0071] In this embodiment, the diameter of the mounting hole 1144 is greater than or equal to the outer diameter of the pin 212. During the installation of the filament 210, the clamp 224 is first opened, and then the pin 212 is passed through the clamp 224 and the mounting hole 1144. At this time, the hole wall of the mounting hole 1144 can restrict the extension direction of the pin 212 through the stop, so as to prevent the pin 212 from deflecting. Finally, the clamp 224 is closed so that the pin 212 is clamped inside the clamp 224.

[0072] Therefore, the mounting hole 1144 can guide the installation of the filament 210 in conjunction with the pin 212, thereby reducing the assembly difficulty of the filament 210. After the insertion of the filament 210 is completed, the mounting hole 1144 can straighten the filament 210 through the stop pin 212 to reduce the torsion amplitude of the filament 210, thereby reducing the deformation amplitude of the filament 210 and achieving the technical effect of extending the service life of the filament 210.

[0073] like Figure 3 , Figure 5 and Figure 6 As shown, in some embodiments of this utility model, the guide portion 114 is a mounting tube, which is used to sleeve on the outside of the pin 212, and the inner wall of the mounting tube forms a guide surface 1142. In this embodiment, the mounting tube penetrates the body 110, one end of the mounting tube is connected to the positioning groove 112, and the other end of the mounting tube is located outside the mounting groove.

[0074] During the installation of filament 210, pin 212 needs to pass through the mounting tube. After the pin 212 is inserted, the inner wall of the mounting tube blocks the pin 212 from tilting in a certain direction around the pin 212, thereby straightening the filament 210 and extending the service life of the filament 210 by reducing the deformation amplitude of the filament 210.

[0075] Optionally, the mounting tube is detachably connected to the main body 110. The positioning device 100 may include a variety of different types of mounting tubes with different inner diameters, which are adapted to pins 212 with different outer diameters. This allows the positioning device 100 to be adapted to different types of filaments 210, eliminating the need to produce a dedicated positioning device 100 for each type of filament 210. This achieves the technical effects of broadening the application range of the positioning device 100, improving the practicality of the positioning device 100, and reducing the production cost of the filament assembly 200.

[0076] In some embodiments of this invention, the distance between the two pins 212 is a first distance, and the distance between the axes of the two guide surfaces 1142 is a second distance. The absolute value of the difference between the first distance and the second distance is greater than or equal to 0 mm and less than 0.05 mm. Here, 0.05 mm corresponds to the maximum deformation of the filament 210, or in other words, the temperature threshold that the filament 210 can withstand under maximum deformation. By controlling the absolute value of the difference between the first distance and the second distance to within 0.05 mm, the operating temperature of the filament 210 can be limited to below the temperature threshold. Specifically, the absolute value of the difference between the first distance and the second distance can be selected as 0.02 mm, 0.03 mm, or 0.04 mm.

[0077] In this embodiment, when the filament 210 is not subjected to external force, the shape of the filament 210 is its inherent shape. The distance between the centerlines of the two pins 212 on the filament 210 under its inherent shape is the first distance. The distance between the axes of the two guide surfaces 1142 is the second distance. Since the two pins 212 need to be inserted into the two guide surfaces 1142 respectively, the difference between the first distance and the second distance can reflect the deformation range of the filament 210 after it is installed.

[0078] In response, by limiting the absolute value of the difference between the first distance and the second distance to less than 0.05 mm, the deformation amplitude of the filament 210 can be controlled within an acceptable range, and the stress value in the stress concentration area can be controlled below the melting threshold, thereby reducing the probability of premature melting of the filament 210 and extending the service life of the filament 210.

[0079] Of course, when the absolute value of the difference between the first distance and the second distance is 0, the current shape of the filament 210 is strictly consistent with the aforementioned inherent shape. Except for the clamping force of the clamp 224 on its pin 212, the filament 210 itself will not generate stress due to deformation. After being powered on, the temperature of the local area of ​​the filament 210 will not exceed the tolerable temperature threshold due to excessive stress value, thereby effectively reducing the possibility of the filament 210 melting prematurely and thus extending the service life of the filament 210.

[0080] like Figures 1 to 4 As shown, in some embodiments of this utility model, the filament clip 220 is fixed to the insulator 240 by the fixing member 230; correspondingly, the body 110 also includes a first clearance hole 1102, the first clearance hole 1102 is connected to the positioning groove 112, and each positioning groove 112 is provided with at least one first clearance hole 1102, the first clearance hole 1102 is used to allow the fixing member 230 to pass through the body 110.

[0081] In this embodiment, the filament assembly 200 also includes an insulator 240, which is connected to the arc chamber of the ion implantation device. During operation, since the filament 210 needs to be energized, the insulator 240 can provide insulation between the filament clamp 220 and the ion implantation device, preventing the filament 210 from short-circuiting, thereby improving the safety and reliability of the ion implantation device.

[0082] Based on this, the main body 110 is also provided with a first clearance hole 1102 that penetrates the main body 110, and the filament clamp 220 is provided with a corresponding screw hole. After the filament clamp 220 is installed and fitted into the positioning groove 112, the first clearance hole 1102 is aligned with the screw hole. Then the fixing member 230 can be passed through the first clearance hole 1102 and the screw hole, so that the fixing member 230 can be connected to the insulator 240 to complete the assembly of the filament assembly 200.

[0083] After the filament assembly 200 is assembled, the positioning device 100 can be removed from the insulator 240 and the filament clamp 220. During this process, the first clearance hole 1102 allows the fixing member 230 to pass through.

[0084] Therefore, after calibrating the relative positions of the two filament clamps 220, the connection between the filament clamp 220 and the insulator 240 can be completed without removing the positioning device 100, ensuring the final installation accuracy of the filament clamp 220, avoiding secondary deformation of the filament 210 during the connection process between the filament clamp 220 and the insulator 240, thereby achieving the technical effect of reducing the deformation amplitude of the filament 210 and extending the service life of the filament 210.

[0085] like Figure 5 and Figure 6 As shown, in some embodiments of this utility model, each positioning groove 112 is provided with a plurality of first clearance holes 1102, and the plurality of first clearance holes 1102 are spaced apart in the extending direction of the positioning groove 112. Correspondingly, each filament clamp 220 includes a plurality of screw holes, the number of which is the same as the number of first clearance holes 1102. After the filament clamp 220 is fitted into the positioning groove 112, the plurality of screw holes correspond one-to-one with the plurality of first clearance holes 1102. On this basis, a fixing member 230 is inserted into each first clearance hole 1102 and screw hole, thereby achieving multi-point positioning of the filament clamp 220 through the plurality of fixing members 230, ensuring a reliable connection between the filament clamp 220 and the insulator 240, and thus improving the installation accuracy of the filament clamp 220. Correspondingly, improving the installation accuracy of the filament clamp 220 can reduce the possibility of secondary deformation of the filament clamp 220 after removing the positioning device 100, or reduce the amplitude of secondary deformation of the filament clamp 220, thereby reducing the stress value in the filament 210, reducing the possibility of premature melting of the filament 210, and extending the service life of the filament 210.

[0086] As mentioned above, during application, after the filament assembly 200 is assembled onto the arc chamber of the ion source, the positioning device 100 can be removed from the insulator 240 and the filament clamp 220; however, this is not the only possibility. In practice, the positioning device 100 can also be left on the filament assembly 200. When subsequent maintenance or repair of the ion implantation equipment is required, especially when the filament 210 needs to be replaced, the filament assembly 200 and the positioning device 100 should be removed from the arc chamber, and the positioning device 100 should be removed from the insulator 240 and the filament clamp 220.

[0087] like Figure 2 , Figure 3 and Figure 7 As shown, in some embodiments of this utility model, optionally, the filament clip 220 includes an insertion hole 2204, which can be opened by inserting a tool 250 into the insertion hole 2204; correspondingly, the body 110 also includes two second clearance holes 1104, which are connected to the positioning groove 112. Each positioning groove 112 is provided with a corresponding second clearance hole 1104, and the second clearance hole 1104 is used for the tool 250 to pass through the body 110.

[0088] In this embodiment, the clamp 224 of the filament clamp 220 is provided with a socket 2204. The socket 2204 is in communication with the space for clamping the pin 212. The shape of the socket 2204 is adapted to the shape of the tool 250 for opening the clamp 224. When it is necessary to disassemble or assemble the filament 210, inserting the tool 250 into the socket 2204 can open the clamp 224, allowing the pin 212 to be smoothly installed into the clamp 224. After the pin 212 is arranged, the tool 250 is pulled out from the socket 2204, the clamp 224 closes, and the pin 212 is fixed by the clamping action.

[0089] Based on this, a second clearance hole 1104 is also provided on the main body 110. The second clearance hole 1104 penetrates the main body 110. After the filament clamp 220 and the positioning groove 112 are engaged, the insertion hole 2204 is exposed in the second clearance hole 1104. The user can insert the tool 250 into the insertion hole 2204 through the second clearance hole 1104, so that the user can control the opening and closing of the clamp 224 without removing the positioning device 100, thereby improving the practicality of the positioning device 100 and reducing the difficulty of disassembling and assembling the filament 210.

[0090] Specifically, the socket 2204 is a strip-shaped hole, and the shape of the front end of the tool 250 is adapted to the shape of the strip-shaped hole. Specifically, it can be a quadrangular prism. After inserting the front end of the tool 250 into the socket 2204, twisting the tool 250 can open the chuck 224.

[0091] like Figure 5 and Figure 6As shown, in some embodiments of this utility model, the main body 110 includes a connecting frame 118 and two mounting frames 116, wherein the two mounting frames 116 are spaced apart, and the mounting frame 116 includes a top plate 1162 and a side plate 1164. The side plate 1164 is partially arranged around the periphery of the top plate 1162, and the top plate 1162 and the side plate 1164 enclose a positioning groove 112. A guide portion 114 is provided on the top plate 1162. The connecting frame 118 is disposed between the two mounting frames 116 and connects the two mounting frames 116.

[0092] Specifically, the mounting bracket 116 is formed by stamping or bending a sheet metal. The mounting bracket 116 forms a positioning groove 112 by a top plate 1162 and side plates 1164. The top plate 1162 forms the bottom surface 1124 of the positioning groove 112, and the side plates 1164 form the side surface 1126 of the positioning groove 112. The edges of the side plates 1164 enclose the opening 1122 of the mounting groove. After the stamping or bending process is completed, the aforementioned notch 1129 can be formed by cutting off a portion of the side plates 1164, allowing the chuck 224 to be positioned outside the second groove section 1128.

[0093] The two mounting brackets 116 are symmetrically arranged, and the connecting bracket 118 fixes the two mounting brackets 116 together. By setting the connecting bracket 118, the relative position relationship of the two mounting brackets 116 can be locked, thereby accurately calibrating the relative position of the two filament clamps 220, so that the distance between the two clamps 224 matches the distance between the two pins 212, thereby reducing the deformation amplitude of the filament 210 and extending the service life of the filament 210.

[0094] Specifically, the connecting frame 118 is a plate-shaped structure, a tubular structure, or a U-shaped structure. One end of the connecting frame 118 is welded to the side plate 1164 of one of the mounting frames 116, and the other end is welded to the side plate 1164 of the other mounting frame 116.

[0095] like Figures 1 to 7 As shown, in a specific embodiment of this application, a positioning device 100 for the filament 210 on an ion source is designed. Two filament clamps 220 are symmetrically arranged. The filament clamps 220 and the insulator 240 are fixedly connected by four screws (the screws correspond to the aforementioned fixing member 230). The top of the filament clamp 220 is provided with an opening 1122 (notch) for clamping and fixing the filament 210.

[0096] The positioning device 100 is axially symmetrical and includes the following structure:

[0097] Two symmetrically arranged mounting brackets 116, each mounting bracket 116 having a U-shaped (or C-shaped) cross section, with the middle of each mounting bracket 116 bent toward the other mounting bracket 116, the bending angle being an obtuse angle, the specific angle being consistent with the bending angle between the clamp 224 and the clamp rod 222 on the standard filament clamp 220.

[0098] The mounting tube is fixed to the first end of the mounting bracket 116 and is used to insert the two pins 212 of the filament 210. Both ends of the mounting tube extend out of the mounting bracket 116 to support and guide the filament 210. The spacing of the filament 210 varies between different equipment models, and the spacing of the corresponding mounting tubes also varies. For example, the spacing of the filament 210 in a medium current ion implanter (MCI) is 13.71 mm, while the spacing of the filament 210 in a high current ion implanter (HCI) is 8 mm.

[0099] The connecting frame 118 is a plate-like structure connecting the two mounting frames 116. The three together form an approximately H-shaped structure, with the connecting frame 118 being relatively closer to the second end of the mounting frame 116.

[0100] In use, forcefully engage the filament clamp 220 using the positioning device 100, and then tighten the four screws. The clamp 224 can be opened using the tool 250 through the second clearance hole 1104, and the filament 210 can be inserted to verify the relative position. Finally, remove the tool 250. If the positioning device 100 cannot fully engage with the filament clamp 220, it indicates that the filament clamp 220 is not positioned correctly or is deformed or damaged, requiring readjustment or replacement.

[0101] Because the relative position of the filament clamp 220 needs to be precisely positioned, the dimensional accuracy of each part is required to be high, and the structural dimensional error of each component must be less than 0.05mm.

[0102] like Figures 1 to 4 As shown, one embodiment of the present invention provides an ion emission mechanism. The ion emission mechanism 10 includes a positioning device 100 and a filament assembly 200, wherein:

[0103] The filament assembly 200 includes: a filament 210, which includes two leads 212; and two filament clamps 220, which include a clamping rod 222 and a clamp 224 connected to each other. The clamp 224 is used to clamp the leads 212, and one lead 212 is clamped by one clamp 224.

[0104] The positioning device 100 includes a body 110 and a guide portion 114. The body 110 has at least two positioning grooves 112, one of which engages with a filament clamp 220, such that the distance between the clamps 224 of the two filament clamps 220 is adapted to the distance between the two pins 212. The guide portion 114 is connected to the body 110 and can limit the extension direction of the pin 212 by stopping the outer surface of the pin 212.

[0105] In this embodiment, an ion emission mechanism 10 including the positioning device 100 in any of the above embodiments is defined. Therefore, the ion emission mechanism 10 has the advantages of any of the above positioning devices 100 and can achieve the technical effects that the positioning device 100 in any of the above embodiments can achieve. To avoid repetition, it will not be described again here.

[0106] Specifically, the filament 210 includes two pins 212, and each pin 212 is fitted with a filament clamp 220. After the clamping action is completed, the two filament clamps 220 can position the filament 210 as a whole, so that the filament 210 can work in the predetermined position, and prevent the filament 210 from being misaligned or even falling off during the operation.

[0107] When the filament 210 is not subjected to external force, the shape of the filament 210 is its inherent shape. The distance between the center lines of the two pins 212 on the filament 210 under the inherent shape is a set value. Under ideal conditions, after the filament 210 is positioned by the two filament clamps 220, the filament 210 can be kept in its inherent shape.

[0108] The positioning device 100 includes a body 110 and a guide portion 114. The body 110 has at least two positioning slots 112, each capable of engaging with a filament clamp 220. After the engagement of the two filament clamps 220 with the two positioning slots 112 is completed, the relative positions of the two filament clamps 220 are locked, and the distance between the two clamp heads 224 is locked. Furthermore, the distance between the clamp heads 224 of the two filament clamps 220 is adapted to the distance between the two pins 212. For example, the clamp head 224 includes space for accommodating the pins 212. When the distance between the two clamp heads 224 is adapted to the distance between the two pins 212, the deviation between the centerlines of the two spaces accommodating the pins 212 and the distance between the centerlines of the two pins 212 is within an acceptable range, thereby reducing the deformation amplitude of the filament 210.

[0109] Based on this, the positioning device 100 also includes a guide portion 114, which is connected to the body 110. When the clamp 224 is not deflected, the pin 212 extends in a predetermined direction, that is, the extension direction of the pin 212 is consistent with the direction of the centerline of the space in the clamp 224 used to accommodate the pin 212. In this case, the two clamps 224 will not exert a torsional force on the filament 210. The guide portion 114 can stop the filament 210 on the outside of the filament 210 to limit the deviation between the extension direction of the filament 210 and the direction of the centerline of the space used to accommodate the pin 212 through the stop engagement, for example, limiting the deviation to within 5°, thereby reducing the torsional force applied to the pin 212 by the filament clamp 220, and further reducing the deformation amplitude of the filament 210.

[0110] Therefore, by providing a positioning groove 112 and a guide portion 114 on the body 110, this application can reduce the deformation amplitude of the filament 210, correspondingly reduce the stress value in the stress concentration area on the filament 210, thereby reducing the possibility of the filament 210 melting in the stress concentration area when the filament 210 is heated to a high temperature, extending the service life of the filament 210, and thus improving the reliability of the filament 210 and extending its service life.

[0111] like Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, in some embodiments of this utility model, optionally, the body 110 further includes a first clearance hole 1102, which communicates with the positioning groove 112. Each positioning groove 112 is provided with at least one first clearance hole 1102. The filament assembly 200 further includes: an insulator 240, a filament clip 220 disposed on the insulator 240; and a fixing member 230 connecting the insulator 240 and the filament clip 220, wherein the fixing member 230 passes through the first clearance hole 1102.

[0112] In this embodiment, each filament clamp 220 includes multiple screw holes, and multiple first clearance holes 1102 are provided corresponding to each positioning groove 112. The number of screw holes is the same as the number of first clearance holes 1102. After the filament clamp 220 is fitted into the positioning groove 112, the multiple screw holes correspond one-to-one with the multiple first clearance holes 1102. On this basis, a fixing member 230 is inserted into each first clearance hole 1102 and screw hole, thereby achieving multi-point positioning of the filament clamp 220 through multiple fixing members 230, ensuring that the filament clamp 220 will not shake or deflect on the insulator 240, thereby improving the installation accuracy of the filament clamp 220. Correspondingly, improving the installation accuracy of the filament clamp 220 can reduce the possibility of secondary deformation of the filament clamp 220 after the positioning device 100 is removed, or reduce the amplitude of secondary deformation of the filament clamp 220, thereby reducing the stress value in the filament 210, reducing the possibility of premature melting of the filament 210, and extending the service life of the filament 210.

[0113] It should be noted that the descriptions of each embodiment in the above embodiments have different focuses. For parts that are not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0114] The above embodiments are only used to illustrate the embodiments of this application, and are not intended to limit it. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the embodiments described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding embodiments to deviate from the spirit and scope of the embodiments of this application.

Claims

1. A positioning device (100) for positioning a filament assembly (200), the filament assembly (200) comprising a filament (210) and two filament clamps (220), the filament (210) comprising two leads (212), the filament clamps (220) comprising interlocking clamping rods (222) and clamps (224), the clamps (224) being used to clamp the leads (212), one lead (212) being clamped by one clamp (224), characterized in that, The positioning device (100) includes: The body (110) has at least two positioning slots (112), one of the positioning slots (112) cooperating with one of the filament clips (220) such that the distance between the clamps (224) of the two filament clips (220) is adapted to the distance between the two pins (212); The guide portion (114) is connected to the body (110) and can limit the extension direction of the pin (212) by stopping the pin (212).

2. The positioning device (100) according to claim 1, characterized in that, The positioning groove (112) includes an opening (1122), a bottom surface (1124), and a side surface (1126) connecting the opening (1122) and the bottom surface (1124). The filament clip (220) can be embedded into the positioning groove (112) through the opening (1122), and the side surface (1126) can cooperate with the outer peripheral surface (2202) of the filament clip (220).

3. The positioning device (100) according to claim 2, characterized in that, The side surface (1126) of the positioning groove (112) is interference-fitted or transition-fitted with the outer peripheral surface (2202) of the filament clamp (220).

4. The positioning device (100) according to claim 1, characterized in that, The positioning groove (112) is strip-shaped and includes a first groove segment (1127) and a second groove segment (1128). The first groove segment (1127) and the second groove segment (1128) extend in different directions. The first groove segment (1127) is used to accommodate the clamping rod (222), and the second groove segment (1128) is used to accommodate the chuck (224).

5. The positioning device (100) according to claim 4, characterized in that, The second groove segment (1128) has a notch (1129) at one end away from the first groove segment (1127), and the clamp (224) is located outside the notch (1129).

6. The positioning device (100) according to claim 1, characterized in that, The guide portion (114) has a mounting hole (1144), the wall of which forms an annular guide surface (1142); the mounting hole (1144) is used for the pin (212) to pass through, and the guide surface (1142) is configured to surround the periphery of the pin (212).

7. The positioning device (100) according to claim 1, characterized in that, The filament clip (220) is fixed to the insulator (240) by a fastener (230). The body (110) also includes a first clearance hole (1102), which communicates with the positioning groove (112). Each positioning groove (112) is provided with at least one first clearance hole (1102). The first clearance hole (1102) is used for the fastener (230) to pass through the body (110).

8. The positioning device (100) according to claim 1, characterized in that, The filament clamp (220) includes a socket (2204). The filament clamp (220) is opened by inserting a tool (250) into the socket (2204). The body (110) also includes two second clearance holes (1104). The second clearance holes (1104) communicate with the positioning groove (112). The second clearance holes (1104) are used to allow the tool (250) to pass through the body (110).

9. The positioning device (100) according to any one of claims 1 to 8, characterized in that, The body (110) includes: Two mounting brackets (116) are spaced apart. Each mounting bracket (116) includes a top plate (1162) and a side plate (1164). The side plate (1164) is arranged around the periphery of the top plate (1162). The top plate (1162) and the side plate (1164) enclose the positioning groove (112). The guide part (114) is provided on the top plate (1162). A connecting bracket (118) is disposed between the two mounting brackets (116) and connects the two mounting brackets (116).

10. An ion emission mechanism (10), characterized in that, Includes a filament assembly (200), a positioning device (100), an insulator (240), and a fastener (230), wherein: The filament assembly (200) includes a filament (210) and two filament clamps (220). The filament (210) includes two leads (212). The filament clamps (220) include connected clamping rods (222) and clamps (224). The clamps (224) are used to clamp the leads (212), and one lead (212) is clamped by one clamp (224). The positioning device (100) includes a body (110) and a guide portion (114) connected to the body (110). The body (110) has at least two positioning grooves (112) and a first clearance hole (1102) communicating with the positioning grooves (112). One of the positioning grooves (112) cooperates with one of the filament clips (220) such that the distance between the clamps (224) of the two filament clips (220) is adapted to the distance between the two pins (212). The guide portion (114) can define the extension direction of the pin (212) by stopping the outer surface of the pin (212). The fastener (230) connects the insulator (240) and the filament clamp (220), and the fastener (230) passes through the first clearance hole (1102).

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