A pick-up device

Abstract

The utility model relates to wafer transfer technical field, specifically disclose a pickup device, in the pickup device, the first side of casing is equipped with the air hole, the air hole is linked with the positive pressure gas source, and the air hole is used for the positive pressure airflow to spray out, a number of sucking disc subassembly, sucking disc subassembly includes helical bernoulli sucking disc and sucking disc body, sucking disc body and casing integral molding and with air hole through, helical bernoulli sucking disc is fixed in sucking disc body and with air hole intercommunication, helical bernoulli sucking disc has the air inlet and the air outlet, along the gas flow direction, air hole, air inlet and air outlet are sequentially linked with, the air outlet of helical bernoulli sucking disc forms the spiral airflow, a number of helical bernoulli sucking discs are arranged at the first side of casing at intervals, and the rotation direction of the gas discharged by adjacent two helical bernoulli sucking discs is opposite. The above-mentioned setting is convenient for the normal handling and transfer of wafer, reduces the probability of wafer falling in the handling process, and simultaneously, avoids the scratch of wafer.

Description

Technical Field

[0001] This utility model relates to the field of wafer transfer technology, and in particular to a pickup device. Background Technology

[0002] When transferring wafers or silicon wafers between or within processes, it is often necessary to use a handling robot equipped with a vacuum chuck to pick up the wafer and then transfer it.

[0003] As wafers become thinner, their rigidity also decreases. Under localized support or different process conditions, wafers can warp significantly. Vacuum adsorption methods in related technologies often fail to adsorb properly when wafers are warped, leading to air leakage and thus preventing normal handling or causing the wafers to fall or be damaged during handling.

[0004] Therefore, it is urgent to research a pickup device to solve the above problems. Utility Model Content

[0005] The purpose of this invention is to provide a pickup device to solve the problem in the prior art that after the wafer warps, it is easy to leak air and cause adsorption failure, which leads to the inability to handle the wafer normally or the wafer being easily dropped or damaged during the handling process.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A pickup device, comprising:

[0008] The housing has an air outlet on its first side, which is connected to a positive pressure air source and is used to eject positive pressure airflow.

[0009] A plurality of suction cup assemblies, each suction cup assembly including a spiral Bernoulli suction cup and a suction cup body, wherein the suction cup body is integrally formed with the housing and communicates with the air outlet; the spiral Bernoulli suction cup is fixedly mounted on the suction cup body and communicates with the air outlet.

[0010] The spiral Bernoulli suction cup has an air inlet and an air outlet. Along the gas flow direction, the air outlet, the air inlet, and the air outlet are connected in sequence. The gas discharged through the air outlet of the spiral Bernoulli suction cup forms a spiral airflow. Several spiral Bernoulli suction cups are spaced apart on the first side of the housing, and the spiral directions of the gas discharged from two adjacent spiral Bernoulli suction cups are opposite.

[0011] As an optional technical solution for the pickup device, the suction cup body is recessed to form a groove, and the air vent extends through the bottom of the groove, wherein at least a portion of the spiral Bernoulli suction cup is located within the groove; and / or,

[0012] Several of the spiral Bernoulli suction cups are arranged in a ring.

[0013] As an optional technical solution for the pickup device, the spiral Bernoulli suction cup has a connecting groove and a turning hole. The bottom of the connecting groove and the groove form a connecting hole. The connecting hole and the turning hole are connected. The end of the connecting hole away from the turning hole is connected to the air outlet. The air outlet is located at the end of the turning hole away from the connecting hole; and / or,

[0014] The bottom of the groove is provided with two limiting protrusions, which are respectively located on both sides of the air outlet and are inserted into the connecting groove.

[0015] As an optional technical solution for the pickup device, the spiral Bernoulli suction cup is screwed to the suction cup body; and / or,

[0016] The spiral Bernoulli suction cup has at least two air outlets; the at least two air outlets are evenly spaced around the axis of the spiral Bernoulli suction cup.

[0017] As an optional technical solution for the pickup device, the spiral Bernoulli suction cup has a mounting hole, and the suction cup body has a mounting screw hole. The mounting screw passes through the mounting hole and is threaded into the mounting screw hole.

[0018] As an optional technical solution for the pickup device, the housing has a main air passage with a straight cross-section and several branch air passages connected to the main air passage, and the air outlet is formed at the end of the branch air passage.

[0019] As an optional technical solution for the pickup device, the housing includes a base and a cover. The base is provided with a main groove and a branch groove. The cover is placed on the base. The cover and the main groove form the main air passage. The cover and the branch groove form the branch air passage. The side of the base away from the cover forms the first side surface.

[0020] As an optional technical solution for the pickup device, the pickup device further includes a friction element disposed on the housing and protruding from a first side of the housing.

[0021] As an optional technical solution for the pickup device, the friction element is screwed to the housing; and / or,

[0022] The pickup device includes several friction elements, with at least one friction element disposed between every two adjacent spiral Bernoulli suction cups.

[0023] As an optional technical solution for the pickup device, the friction element has a cylindrical structure, and the side wall of the friction element is provided with an exhaust hole that runs through both the inner and outer sides of the friction element.

[0024] This utility model has at least the following beneficial effects:

[0025] This invention provides a pickup device comprising a housing and several suction cup assemblies. Each suction cup assembly includes a suction cup body and a spiral Bernoulli suction cup. The suction cup body is integrally formed with the housing and fixedly installed with the spiral Bernoulli suction cup. This design effectively prevents the suction cup body and spiral Bernoulli suction cup from detaching, effectively replacing the shortcomings of existing solutions that use glue or similar methods to fix the suction cup body and spiral Bernoulli suction cup, and also avoiding the drawback of blocked air passages caused by glue fixation. The housing has an air outlet on its first side, which is connected to a positive pressure air source, and emits a positive pressure airflow. The spiral Bernoulli suction cup has an air inlet and an air outlet. Along the gas flow direction, the air outlet, air inlet, and air outlet are sequentially connected, and the gas discharged from the air outlet of the spiral Bernoulli suction cup forms a spiral airflow. Several spiral Bernoulli suction cups are spaced apart on the first side of the housing, and the spiral direction of the gas discharged from adjacent spiral Bernoulli suction cups is opposite. By using a spiral Bernoulli chuck, positive pressure gas flows rapidly out of the outlet, creating a negative pressure area near the first side. When the wafer is located near the first side, the pressure on the side of the wafer closer to the spiral Bernoulli chuck is lower than the pressure on the side farther away, thus adsorbing the wafer onto the first side of the housing. Even if the wafer warps, this increases the success rate of adsorption, facilitating normal handling and transfer, and reducing the probability of the wafer falling during transport. Simultaneously, the wafer does not contact the housing, creating a gap that prevents scratches. Furthermore, the opposite exhaust directions of adjacent spiral Bernoulli chucks counteract the lateral force on the wafer, helping to prevent the wafer from shifting radially relative to the housing, further improving the stability of the wafer transfer process. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.

[0027] Figure 1 This is an exploded view of the pickup device in an embodiment of the present invention;

[0028] Figure 2 for Figure 1 Enlarged view of point A in the middle;

[0029] Figure 3 for Figure 1 Enlarged view of point B in the middle;

[0030] Figure 4 This is a schematic diagram of the spiral Bernoulli suction cup in an embodiment of the present invention;

[0031] Figure 5 This is a schematic diagram of the pickup device from another perspective in an embodiment of this utility model;

[0032] Figure 6 This is a schematic diagram of the base structure in an embodiment of the present utility model;

[0033] Figure 7 This is a schematic diagram of the friction component in an embodiment of the present invention.

[0034] In the picture:

[0035] 100. Shell; 110. Base; 111. Vent; 112. First side; 113. Groove; 114. Limiting protrusion; 115. Main groove; 116. Branch groove; 117. Mounting screw hole; 120. Cover; 121. Second side;

[0036] 200. Spiral Bernoulli suction cup; 210. Connecting slot; 220. Turning hole; 221. Air outlet; 230. Mounting hole; 240. Mounting screw;

[0037] 300, Friction component; 310, Mounting part; 311, First hole; 312, Second hole; 313, Vent hole; 320, Friction component; 330, Friction screw. Detailed Implementation

[0038] Before explaining any implementation of this application in detail, it should be understood that this application is not limited to its application to the structural details and component arrangements set forth in the following description or shown in the above drawings.

[0039] In this application, the terms "comprising," "including," "having," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element.

[0040] In this application, the term "and / or" describes the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent three cases: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this application generally indicates that the preceding and following related objects have an "and / or" relationship.

[0041] In this application, the terms "connection," "combination," "coupling," and "installation" can refer to direct connection, combination, coupling, or installation, or indirect connection, combination, coupling, or installation. For example, a direct connection refers to two parts or components being connected together without the need for an intermediary, while an indirect connection refers to two parts or components each being connected to at least one intermediary, with the connection achieved through the intermediary. Furthermore, "connection" and "coupling" are not limited to physical or mechanical connections or couplings, but can also include electrical connections or couplings.

[0042] In this application, those skilled in the art will understand that relative terms (e.g., “about,” “approximately,” “basically,” etc.) used in conjunction with quantities or conditions are to include the values ​​and have the meaning indicated by the context. For example, such relative terms include at least the degree of error associated with the measurement of a particular value, tolerances associated with the particular value due to manufacturing, assembly, use, etc. Such terms should also be considered as disclosing a range defined by the absolute values ​​of the two endpoints. Relative terms may refer to a certain percentage (e.g., 1%, 5%, 10% or more) of the indicated value. Numerical values ​​not using relative terms should also be disclosed as specific values ​​with tolerances. Furthermore, “basically” when expressing relative angular relationships (e.g., substantially parallel, substantially perpendicular) may refer to a certain degree (e.g., 1 degree, 5 degrees, 10 degrees or more) added to or subtracted from the indicated angle.

[0043] In this application, those skilled in the art will understand that the function performed by a component can be performed by one component, multiple components, one part, or multiple parts. Similarly, the function performed by a part can also be performed by one part, one component, or a combination of multiple parts.

[0044] In this application, the directional terms "upper," "lower," "left," "right," "front," and "rear" are used to describe the orientation and positional relationships shown in the accompanying drawings and should not be construed as limiting the embodiments of this application. Furthermore, in the context, it should be understood that when an element is mentioned as being connected "upper" or "lower" to another element, it can be directly connected to the other element "upper" or "lower," or indirectly connected through an intermediate element. It should also be understood that directional terms such as upper side, lower side, left side, right side, front side, and rear side not only represent positive orientation but can also be understood as lateral orientation. For example, "below" can include directly below, lower left, lower right, lower front, and lower rear.

[0045] like Figures 1 to 7As shown, this embodiment provides a pickup device for picking up larger wafers, even 8-inch and 12-inch wafers with good compatibility. Even when 8-inch or 12-inch wafers experience a warpage of 0mm-9mm, the pickup device can still effectively pick them up. The pickup device includes a housing 100 and several suction cup assemblies. Each suction cup assembly includes a spiral Bernoulli suction cup 200 and a suction cup body. The first side 112 of the housing 100 has an vent 111 connected to a positive pressure air source, allowing positive pressure airflow to escape. The suction cup body is integrally formed with the housing 100 and communicates with the vent 111. The spiral Bernoulli suction cup 200 is fixedly mounted on the suction cup body and communicates with the vent 111. This design allows the spiral Bernoulli suction cup 200 to be fixedly mounted on the suction cup body, with the suction cup body and housing 100 forming an integrated design. This effectively replaces the drawbacks of existing designs that rely on glue for fixation, such as blocked air passages and easy component detachment. Furthermore, the spiral Bernoulli suction cup 200 has an air inlet and an air outlet 221. Along the gas flow direction, the air outlet 111, air inlet, and air outlet 221 are sequentially connected. The gas discharged through the air outlet 221 of the spiral Bernoulli suction cup 200 forms a spiral airflow. Several spiral Bernoulli suction cups 200 are spaced apart on the first side 112 of the housing 100, and the spiral direction of the gas discharged from adjacent spiral Bernoulli suction cups 200 is opposite. The exhaust direction of the spiral Bernoulli suction cup 200 is perpendicular to the axis of the wafer. By using the spiral Bernoulli chuck 200, a negative pressure area is formed near the first side surface 112 when the positive pressure gas flows out rapidly from the outlet 221. When the wafer is located near the first side surface 112, the pressure on the side of the wafer closer to the spiral Bernoulli chuck 200 is less than the pressure on the side of the wafer farther from the spiral Bernoulli chuck 200, thus adsorbing the wafer onto the first side surface 112 of the housing 100. Even if the wafer warps, the success rate of adsorption is improved, facilitating normal handling and transfer, and reducing the probability of the wafer falling during handling. At the same time, the wafer does not contact the housing 100, creating a gap between the wafer and the housing 100 to avoid scratches. In addition, the exhaust directions of adjacent spiral Bernoulli chucks 200 are opposite, which can counteract the lateral force on the wafer and help prevent the wafer from shifting from the housing 100 along its own radial direction, further improving the stability of the wafer transfer process.

[0046] It should be noted that the distance between the wafer and the first side 112 is only required to be sufficient to lift the wafer by the lifting force generated by the pressure difference between the two sides of the wafer. This distance is affected by the weight of the wafer and parameters such as airflow speed. This distance is not the focus of this application and is therefore not specifically limited.

[0047] To improve the uniformity of airflow and thus ensure the stability of wafer adsorption, in some embodiments, the spiral Bernoulli chuck 200 has at least two air outlets 221; the at least two air outlets 221 are evenly spaced around the axis of the spiral Bernoulli chuck 200. The airflow directions of the two air outlets 221 are opposite and both are perpendicular to the axial direction of the spiral Bernoulli chuck 200. In other embodiments, the spiral Bernoulli chuck 200 may also have three air outlets 221, with the included angle between any two of the three air outlets 221 being 120°.

[0048] In some embodiments, the suction cup body is recessed to form a groove 113, and an air outlet 111 extends through the bottom of the groove 113, wherein at least a portion of the spiral Bernoulli suction cup 200 is located within the groove 113. The cooperation between the groove 113 and the spiral Bernoulli suction cup 200 helps to reduce the overall thickness of the picking device and reduces the risk of collision with other components during material handling. Exemplarily, a portion of the spiral Bernoulli suction cup 200 is located outside the groove 113, and along a direction perpendicular to the axis of the spiral Bernoulli suction cup 200, the projected portion of the air outlet 221 is located above the first side surface 112 and partially located inside the groove 113.

[0049] The spiral Bernoulli suction cup 200 has a connecting groove 210 and a turning hole 220. The connecting groove 210 and the bottom of the groove 113 form a connecting hole, which is connected to the turning hole 220. The end of the connecting hole away from the turning hole 220 is connected to the air outlet 111, and the air outlet 221 is located at the end of the turning hole 220 away from the connecting hole. This configuration helps to reduce the thickness of the spiral Bernoulli suction cup 200, thereby further reducing the overall thickness of the picking device and reducing the risk of the picking device colliding with other components during material handling.

[0050] Furthermore, the housing 100 internally forms a main air passage with a straight cross-section and several branch air passages connected to the main air passage, with air outlets 111 formed at the ends of the branch air passages. The height of the main air passage is less than its width; the straight cross-section of the main air passage helps to ensure airflow while reducing height, thereby reducing the height of the housing 100. The height of the main air passage is its dimension along the axial direction of the spiral Bernoulli suction cup 200. In some embodiments, the main air passage is Y-shaped along the gas flow direction.

[0051] The housing 100 includes a base 110 and a cover 120. The base 110 has a main groove 115 and a branch groove 116. The cover 120 covers the base 110, and the cover 120 and the main groove 115 form a main air passage, while the cover 120 and the branch groove 116 form a branch air passage. A first side surface 112 is formed on the side of the base 110 away from the cover 120. The separate housing 100 facilitates the production of the main air passage and the branch air passage, reducing production costs. The thickness of the housing 100 is 3.5 mm. A second side surface 121, parallel to the first side surface 112, is formed on the side of the cover 120 away from the base 110, and the distance between the first side surface 112 and the second side surface 121 is 3.5 mm.

[0052] In some embodiments, the bottom of the groove 113 is provided with two limiting protrusions 114, which are respectively located on both sides of the air outlet 111 and are inserted into the connecting groove 210. During assembly, the limiting protrusions 114 are inserted into the connecting groove 210, which helps to improve the assembly accuracy of the spiral Bernoulli suction cup 200 and the housing 100 and improve the efficiency of the device.

[0053] The spiral Bernoulli suction cup 200 is screwed to the suction cup body. The screwing method improves the connection strength between the spiral Bernoulli suction cup 200 and the suction cup body; on the other hand, compared with glue bonding, it helps to avoid the problem of glue clogging the air vent 111.

[0054] For example, the spiral Bernoulli suction cup 200 has a mounting hole 230, and the suction cup body has a mounting screw hole 117. The mounting screw 240 passes through the mounting hole 230 and is threaded into the mounting screw hole 117. The axis of the mounting hole 230 is parallel to the axis of the spiral Bernoulli suction cup 200.

[0055] To avoid interference between the mounting screw 240 and the wafer, in some embodiments, the mounting hole 230 is a countersunk hole or a countersunk hole, so that the nut of the mounting screw 240 is hidden.

[0056] In some embodiments, the pickup device further includes a friction element 300, which is disposed on the housing 100 and protrudes from the first side surface 112 of the housing 100. During use, under the pressure difference between the two sides, the wafer abuts against the friction element 300 on the side facing the first side surface 112, thereby generating friction between them. When the pickup device moves along a direction perpendicular to the wafer axis, it effectively prevents relative displacement between the wafer and the housing 100 in its radial direction. The friction surface of the friction element 300 in contact with the wafer is higher than the top of the spiral Bernoulli chuck 200. In some embodiments, the distance between the friction surface of the friction element 300 in contact with the wafer and the first side surface 112 is 2 mm.

[0057] The friction element 300 is screwed to the housing 100. This screwing method ensures the connection strength between the friction element 300 and the housing 100. Specifically, the friction element 300 has a cylindrical structure, and its sidewall has an exhaust hole 313 penetrating both the inner and outer sides of the friction element 300. The friction element 300 includes a mounting portion 310 and a friction portion 320. The mounting portion 310 has a stepped hole, including a first hole 311 and a second hole 312. The diameter of the first hole 311 is smaller than the diameter of the second hole 312. The friction portion 320 has a flared structure, expanding outward from the second hole 312 in a direction away from the first hole 311. A friction screw 330 passes through the first hole 311 and is screwed into a friction screw hole in the housing 100. The nut of the friction screw 330 is located in the second hole 312, and the diameter of the nut of the friction screw 330 is larger than the diameter of the first hole 311. The vent 313 extends radially along the mounting portion 310 and communicates with the second hole 312. There are three vents 313, which are evenly distributed around the axis of the mounting portion 310.

[0058] In some embodiments, the pickup device includes a plurality of friction elements 300, with at least one friction element 300 disposed between every two adjacent spiral Bernoulli chucks 200 to ensure that the wafer can make dispersed contact with the plurality of friction elements 300, which helps to balance the force. There are eight spiral Bernoulli chucks 200 arranged in a ring. The plurality of friction elements 300 are also arranged in a ring. In some embodiments, the friction elements 300 are made of a material capable of elastic deformation, such as rubber, silicone, or polyurethane.

[0059] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A pickup device, characterized in that, include: The housing (100) has a first side (112) with an air outlet (111) connected to a positive pressure air source, and the air outlet (111) is used to eject positive pressure airflow. Several suction cup assemblies, each suction cup assembly including a spiral Bernoulli suction cup (200) and a suction cup body, the suction cup body being integrally formed with the housing (100) and communicating with the air outlet (111); the spiral Bernoulli suction cup (200) being fixedly mounted on the suction cup body and communicating with the air outlet (111); The spiral Bernoulli suction cup (200) has an air inlet and an air outlet (221). Along the gas flow direction, the air outlet (111), the air inlet, and the air outlet (221) are connected in sequence. The gas discharged through the air outlet (221) of the spiral Bernoulli suction cup (200) forms a spiral airflow. Several spiral Bernoulli suction cups (200) are spaced apart on the first side (112) of the housing (100), and the spiral direction of the gas discharged from two adjacent spiral Bernoulli suction cups (200) is opposite.

2. The pickup device according to claim 1, characterized in that, The suction cup body is recessed to form a groove (113), and the air vent (111) extends through the bottom of the groove (113), wherein at least a portion of the spiral Bernoulli suction cup (200) is located within the groove (113); and / or, Several of the spiral Bernoulli suction cups (200) are arranged in a ring.

3. The pickup device according to claim 2, characterized in that, The spiral Bernoulli suction cup (200) has a connecting groove (210) and a turning hole (220). The connecting groove (210) and the bottom of the groove (113) form a connecting hole. The connecting hole and the turning hole (220) are connected. The end of the connecting hole away from the turning hole (220) is connected to the air outlet (111). The air outlet (221) is located at the end of the turning hole (220) away from the connecting hole; and / or, The groove (113) has two limiting protrusions (114) on the bottom of the groove. The limiting protrusions (114) are respectively located on both sides of the air outlet (111) and are inserted into the connecting groove (210).

4. The pickup device according to claim 1, characterized in that, The spiral Bernoulli suction cup (200) is screwed to the suction cup body; and / or, The spiral Bernoulli suction cup (200) has at least two air outlets (221); the at least two air outlets (221) are evenly spaced around the axis of the spiral Bernoulli suction cup (200).

5. The pickup device according to claim 4, characterized in that, The spiral Bernoulli suction cup (200) has a mounting hole (230), and the suction cup body has a mounting screw hole (117). The mounting screw (240) passes through the mounting hole (230) and is threaded into the mounting screw hole (117).

6. The pickup device according to claim 1, characterized in that, The housing (100) has a main air passage with a cross-section of I-shape and several branch air passages connected to the main air passage. The air outlet (111) is formed at the end of the branch air passage.

7. The pickup device according to claim 6, characterized in that, The housing (100) includes a base (110) and a cover (120). The base (110) is provided with a main groove (115) and a branch groove (116). The cover (120) covers the base (110). The cover (120) and the main groove (115) form the main air passage. The cover (120) and the branch groove (116) form the branch air passage. The side of the base (110) away from the cover (120) forms the first side surface (112).

8. The pickup device according to any one of claims 1-7, characterized in that, The pickup device further includes a friction element (300), which is disposed on the housing (100) and protrudes from a first side surface (112) of the housing (100).

9. The pickup device according to claim 8, characterized in that, The friction element (300) is screwed to the housing (100); and / or, The pickup device includes a plurality of friction elements (300), with at least one friction element (300) disposed between every two adjacent spiral Bernoulli suction cups (200).

10. The pickup device according to claim 8, characterized in that, The friction element (300) has a cylindrical structure, and the side wall of the friction element (300) is provided with an exhaust hole (313) that runs through the inner and outer sides of the friction element (300).

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