Wafer screening apparatus with automatic sorting function

Abstract

The utility model discloses a wafer screening equipment with automatic sorting function relates to wafer processing technical field. A wafer screening equipment with automatic sorting function, include: bottom plate, the center of bottom plate upper end is fixedly connected with the collecting box, the upper of collecting box is provided with screening frame, the lower end of screening frame inside is opened with screening hole, the both sides of bottom plate upper end are fixedly connected with first side plate and second side plate, the upper end of first side plate and second side plate all are fixedly connected with fixed link, one end of fixed link is fixedly connected with visual camera, first side plate is fixedly connected with the shell on. The screening equipment of existing solution, do not have automatic sorting function, when people use screening equipment, cannot automatic starting operation, when wafer enters screening equipment, every time needs manual starting and closing, the technical problem of inconvenient people's use.

Description

Technical Field

[0001] This utility model relates to the field of wafer processing technology, and in particular to a wafer screening device with automatic sorting function. Background Technology

[0002] A wafer is a silicon wafer used to make silicon semiconductor circuits. Its raw material is silicon. High-purity polycrystalline silicon is dissolved and mixed with silicon crystal seed crystals. Then it is slowly pulled out to form a cylindrical single crystal silicon. After grinding, polishing and slicing, the silicon crystal rod is formed into a silicon wafer, which is a wafer. Screening equipment is required in the wafer processing process.

[0003] However, existing technologies have some problems: existing screening equipment does not have automatic sorting function. When people use the screening equipment, it cannot start and run automatically. After the wafers enter the screening equipment, they need to be manually started and stopped each time, which is inconvenient for people to use. Therefore, it is necessary to provide a wafer screening equipment with automatic sorting function to solve the above technical problems. Utility Model Content

[0004] This utility model provides a wafer screening device with automatic sorting function, which solves the technical problem that existing screening devices do not have automatic sorting function, and cannot be started and run automatically when people use the screening device. After the wafers enter the screening device, they need to be manually started and stopped each time, which is inconvenient for people to use.

[0005] To solve the above-mentioned technical problems, this utility model provides a wafer screening device with automatic sorting function, comprising:

[0006] A base plate, a collection box is fixedly connected to the center of the upper part of the base plate, a screening frame is provided above the collection box, a screening hole is opened at the lower end of the screening frame, a first side plate and a second side plate are fixedly connected to the two sides of the upper part of the base plate respectively, a fixing rod is fixedly connected to the upper end of the first side plate and the second side plate, a vision camera is fixedly connected to one end of the fixing rod, and a shell is fixedly connected to the first side plate.

[0007] A buffer assembly and a push assembly are provided. The buffer assembly is located in the housing and is used to buffer and dampen the filter frame. The push assembly is located on the second side plate and is used to drive the reciprocating movement of the filter frame.

[0008] Preferably, the buffer assembly includes a damping shock absorber, one end of which is fixedly connected to a fixing plate, and the front and rear ends of one side of the fixing plate are fixedly connected to fixing columns, one end of which extends through the outer shell and is fixedly connected to one side of the screening frame.

[0009] Preferably, the pushing component includes a cylinder, the output end of the cylinder is fixedly connected to a connecting plate, the front end and the rear end of one side of the connecting plate are fixedly connected to a connecting rod, one end of the connecting rod is fixedly connected to the other side of the screening frame, and the cylinder is electrically connected to the visual camera.

[0010] Preferably, the front and rear sides of the fixing plate are fixedly connected to sliders, and the sliders are slidably connected to a slide rod, which is laterally fixedly connected to the outer shell.

[0011] Preferably, columns are fixedly connected around the lower end of the base plate, and rubber pads are fixedly connected to the lower ends of the columns.

[0012] Compared with related technologies, the wafer screening equipment with automatic sorting function provided by this utility model has the following beneficial effects:

[0013] This utility model provides a wafer screening device with automatic sorting function. The fixing rod plays a role in fixing and stabilizing the vision camera during use, solving the problem that the vision camera is prone to falling off during use.

[0014] This utility model provides a wafer screening device with automatic sorting function. The device uses a buffer component, which effectively buffers the screening frame during use, thus solving the problem of poor buffering effect of the screening frame during use.

[0015] This utility model provides a wafer screening device with automatic sorting function. By using the collection box, the screening frame can be used to facilitate the collection of wafers during use, thus solving the problem that the screening frame is not convenient for collecting wafers during use. Attached Figure Description

[0016] Figure 1 A schematic diagram of a preferred embodiment of a wafer screening device with automatic sorting function provided by this utility model;

[0017] Figure 2 This is a cross-sectional view of the outer shell structure of this utility model;

[0018] Figure 3 This is a top view of the screening shell structure of this utility model.

[0019] The following are the labels in the diagram: 1. Base plate; 2. Collection box; 3. Screening frame; 4. Screening hole; 5. Fixing rod; 6. Vision camera; 7. Housing; 8. Buffer assembly; 81. Damping shock absorber; 82. Fixing plate; 83. Fixing column; 9. Pushing assembly; 91. Cylinder; 92. Connecting plate; 93. Connecting rod; 10. Slider; 11. Slide rod; 12. First side plate; 13. Second side plate. Detailed Implementation

[0020] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention.

[0021] Example 1:

[0022] Please see Figure 1-3 This utility model provides a technical solution: a wafer screening device with automatic sorting function, comprising: a base plate 1, a collection box 2 fixedly connected to the center of the upper end of the base plate 1, a screening frame 3 arranged above the collection box 2, a screening hole 4 opened at the lower end of the screening frame 3, a first side plate 12 and a second side plate 13 fixedly connected to the two sides of the upper end of the base plate 1 respectively, a fixing rod 5 fixedly connected to the upper end of the first side plate 12 and the second side plate 13, a vision camera 6 fixedly connected to one end of the fixing rod 5, a housing 7, a buffer assembly 8 and a pushing assembly 9 fixedly connected to the first side plate 12, the buffer assembly 8 being located in the housing 7, the buffer assembly 8 being used to buffer and reduce shock for the screening frame 3, and the pushing assembly 9 being located on the second side plate 13, the pushing assembly 9 being used to drive the reciprocating movement of the screening frame 3.

[0023] In this embodiment, when the vision camera 6 monitors the wafer entering the screening frame 3, the cylinder 91 starts to run. The cylinder 91 drives the connecting rod 93 to reciprocate through the connecting plate 92. The connecting plate 92 drives the screening frame 3 to reciprocate. The screening frame 3 screens the wafer through the screening holes 4.

[0024] Example 2:

[0025] Please see Figure 1-3 As shown, based on Embodiment 1, this utility model provides a technical solution: the buffer assembly 8 includes a damping shock absorber 81, one end of which is fixedly connected to a fixing plate 82, and the front and rear ends of one side of the fixing plate 82 are both fixedly connected to fixing columns 83, one end of the fixing column 83 penetrates into the outer shell 7 and is fixedly connected to one side of the screening frame 3; the pushing assembly 9 includes a cylinder 91, the output end of the cylinder 91 is fixedly connected to a connecting plate 92, the front and rear ends of one side of the connecting plate 92 are both fixedly connected to a connecting rod 93, one end of the connecting rod 93 is fixedly connected to the other side of the screening frame 3; the cylinder 91 is electrically connected to the visual camera 6; the front and rear sides of the fixing plate 82 are both fixedly connected to a slider 10, the slider 10 is slidably connected to a sliding rod 11, the sliding rod 11 is horizontally fixedly connected in the outer shell 7; the lower end of the bottom plate 1 is fixedly connected to columns around its perimeter, and the lower end of the columns is fixedly connected to a rubber pad.

[0026] In this embodiment: qualified wafers fall into the collection box 2. At this time, the screening frame 3 is buffered on the fixed plate 82 by the fixed column 83. The fixed plate 82 drives the slider 10 to slide on the slide rod 11. At the same time, the fixed plate 82 is buffered on the damping shock absorber 81, thereby ensuring the stability of the screening frame 3.

[0027] The working principle of the wafer screening equipment with automatic sorting function provided by this utility model is as follows:

[0028] Implementation steps for the first innovation point:

[0029] Step 1: When the vision camera 6 detects that the wafer has entered the screening box 3, the cylinder 91 starts to run. The cylinder 91 drives the connecting rod 93 to reciprocate through the connecting plate 92.

[0030] Step 2: The connecting plate 92 drives the screening frame 3 to reciprocate, and the screening frame 3 screens the wafer through the screening hole 4.

[0031] Implementation steps for the second innovation point:

[0032] Step 1: Qualified wafers fall into the collection box 2. At this time, the screening frame 3 is buffered on the fixed plate 82 by the fixed post 83. The fixed plate 82 drives the slider 10 to slide on the slide rod 11.

[0033] Step 2: At the same time, the fixing plate 82 buffers the damping shock absorber 81, thereby ensuring the stability of the screening frame 3.

[0034] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A wafer screening device with automatic sorting function, characterized in that: include: A base plate (1) is provided. A collection box (2) is fixedly connected to the center of the upper end of the base plate (1). A screening frame (3) is provided above the collection box (2). A screening hole (4) is provided at the lower end of the screening frame (3). A first side plate (12) and a second side plate (13) are fixedly connected to the two sides of the upper end of the base plate (1). A fixing rod (5) is fixedly connected to the upper end of the first side plate (12) and the second side plate (13). A visual camera (6) is fixedly connected to one end of the fixing rod (5). A shell (7) is fixedly connected to the first side plate (12). The buffer assembly (8) and the push assembly (9) are located in the housing (7) and are used to buffer and dampen the filter box (3). The push assembly (9) is located on the second side plate (13) and is used to drive the reciprocating movement of the filter box (3).

2. The wafer screening equipment with automatic sorting function according to claim 1, characterized in that, The buffer assembly (8) includes a damping shock absorber (81), one end of which is fixedly connected to a fixing plate (82). The front and rear ends of one side of the fixing plate (82) are both fixedly connected to fixing columns (83). One end of the fixing column (83) extends through the outer shell (7) and is fixedly connected to one side of the screening frame (3).

3. A wafer screening device with automatic sorting function according to claim 1, characterized in that, The pushing component (9) includes a cylinder (91), the output end of which is fixedly connected to a connecting plate (92), and a connecting rod (93) is fixedly connected to the front and rear ends of one side of the connecting plate (92). One end of the connecting rod (93) is fixedly connected to the other side of the screening frame (3), and the cylinder (91) is electrically connected to the visual camera (6).

4. A wafer screening device with automatic sorting function according to claim 2, characterized in that, The front and rear sides of the fixed plate (82) are both fixedly connected to sliders (10), and the sliders (10) are slidably connected to a slide rod (11), which is laterally fixedly connected in the outer shell (7).

5. A wafer screening device with automatic sorting function according to claim 1, characterized in that, The bottom plate (1) is fixedly connected to columns around its lower end, and the lower end of each column is fixedly connected to a rubber pad.

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