Dustproof electrostatic chuck processing protective cover

Abstract

The utility model relates to electrostatic chuck processing technical field discloses a dustproof electrostatic chuck processing protection cover, including the cover body, the bottom fixed connection of cover body has the connecting frame, the outer wall of connecting frame is opened with the round hole, the bottom sliding connection of connecting frame has the base, the outer wall top of base is opened with the sliding slot, the inner wall fixed connection of sliding slot has the rubber column, a plurality of rubber columns all fixed connection has the ball bearing at the top, the inside fixed connection of rubber column has the spring, the outer wall bottom fixed connection of connecting frame has the rubber bush, the inner wall bottom fixed connection of base has the fixed component. In the utility model, the rubber ball resets by the spring force, can take out, when putting back, uses the thrust and inserts the sliding slot that the base opens, makes the ball bearing to receive extrusion, then will the rubber bush and the rubber ball buckle, the ball bearing is tight to the round hole at this moment, fixes the cover body, has realized more swift disassembly.

Description

Technical Field

[0001] This utility model relates to the field of electrostatic chuck processing technology, and in particular to a dustproof protective cover for electrostatic chuck processing. Background Technology

[0002] An electrostatic chuck is a precision device that uses electrostatic adsorption to fix workpieces. Its core structure includes an electrode plate, an insulating layer, and an adsorption platform. In the field of precision manufacturing, electrostatic chucks are widely used in the processing of high-precision semiconductor and LCD panel products due to their stable adsorption performance. Since even tiny dust particles in the processing environment can cause serious quality problems such as scratches on the workpiece surface and short circuits, it is crucial to protect the processing area of ​​the electrostatic chuck from dust. As a result, dustproof electrostatic chuck processing protective covers have emerged.

[0003] However, traditional electrostatic chuck processing protective covers involve cumbersome disassembly steps that lead to excessive time consumption when replacing or repairing the protective cover. Furthermore, ordinary protective covers deteriorate internal air quality due to prolonged use, affecting protective efficiency. Moreover, the compatibility between the protective cover and the electrostatic chuck is poor; different sizes and shapes of electrostatic chuck require customized protective covers, resulting in low versatility. While current market products connect side protective plates to the base frame via sliding rails, allowing for free sliding and adjustment based on the width or diameter of the electrostatic chuck, covering sizes from small to large, the disassembly process is still too cumbersome, delaying maintenance and reducing protection time. Additionally, excessive accumulation of impurities in the internal air after prolonged use further reduces protective efficiency. Utility Model Content

[0004] To overcome the above shortcomings, this utility model provides a dustproof electrostatic chuck processing protective cover, which aims to improve the problem that the disassembly steps of the protective cover in the prior art are too cumbersome and that too much impurity accumulates in the internal air after long-term operation.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a dustproof electrostatic chuck processing protective cover, comprising a cover body, a connecting frame fixedly connected to the bottom of the cover body, a circular hole formed on the outer wall of the connecting frame, a base slidably connected to the bottom of the connecting frame, a sliding groove formed on the top of the outer wall of the base, rubber columns fixedly connected to the inner wall of the sliding groove, ball bearings fixedly connected to the top of each of the rubber columns, springs fixedly connected to the inside of each of the rubber columns, a rubber sleeve fixedly connected to the bottom of the outer wall of the connecting frame, a fixing component fixedly connected to the bottom of the inner wall of the base, and a ventilation mechanism fixedly connected to the top of the cover body for ventilating the interior of the cover body.

[0006] As a further description of the above technical solution:

[0007] The ventilation mechanism includes a protective shell, the bottom of the outer wall of the protective shell is fixedly connected to the cover, the top and bottom of the protective shell are fixedly connected to protective covers, the inside of the protective shell is fixedly connected to a motor, the output end of the motor is fixedly connected to an impeller, the top of the cover is fixedly connected to a protective frame, the top of the protective frame is fixedly connected to a filter plate, the top of the cover has a ventilation opening, and the outer wall of the protective frame has an installation groove.

[0008] As a further description of the above technical solution:

[0009] The fixing component includes a screw rod, the outer wall of which is threaded to the bottom of the inner wall of the base, and a support column is fixedly connected to the top of each of the screw rods.

[0010] As a further description of the above technical solution:

[0011] Each of the support columns has a rubber ball fixedly connected to its top, and the bottom of the base is threadedly connected to a screw rod.

[0012] As a further description of the above technical solution:

[0013] Nuts are threaded onto the outer walls of multiple screw rods, and an inner groove is provided on the top of the cover.

[0014] As a further description of the above technical solution:

[0015] An anti-electric plate is slidably connected to the inner wall of the inner groove, and a fixing block is fixedly connected to the top left and right sides of the anti-electric plate.

[0016] As a further description of the above technical solution:

[0017] The top left and right sides of the cover are rotatably connected to rotating shafts, and the outer walls of the two rotating shafts are fixedly connected to fixing plates.

[0018] As a further description of the above technical solution:

[0019] Both of the fixing plates have slots at their tops, and the cover and the bottom of the outer wall of the connecting frame have dustproof grooves.

[0020] This utility model has the following beneficial effects:

[0021] 1. In this utility model, when the cover needs to be repaired and inspected, simply pull it out from the base to separate the rubber sleeve and the rubber ball. At the same time, the ball and the round hole on the outer wall of the connecting frame separate. Then the rubber ball returns to its original position with the help of the spring force, and can be removed. When putting it back, use the pushing force to insert it into the sliding groove opened in the base to squeeze the ball. Then the rubber sleeve and the rubber ball are fastened together. At this time, the ball is tightly attached to the round hole, fixing the cover, thus achieving a quicker disassembly.

[0022] 2. In this utility model, when ventilation is required, the motor inside the protective shell is started, and the motor drives the impeller to rotate, so that the air inside the shell is drawn out along the ventilation port, and then discharged after being filtered by the filter plate on the protective frame. Meanwhile, the outside air is first filtered by the filter plate and then drawn into the interior of the shell, thus completing the exchange of air inside the shell. Attached Figure Description

[0023] Figure 1 A front perspective view of a dustproof electrostatic chuck processing protective cover proposed in this utility model;

[0024] Figure 2 This is a bottom view of a dustproof electrostatic chuck processing protective cover proposed in this utility model;

[0025] Figure 3 This is a partial structural breakdown diagram of the protective cover for dustproof electrostatic chuck processing proposed in this utility model.

[0026] Figure 4 This is a split view of the top structure of the dustproof electrostatic chuck processing protective cover proposed in this utility model;

[0027] Figure 5 This is a partial structural diagram of the protective shell of a dustproof electrostatic chuck processing protective cover proposed in this utility model.

[0028] Legend:

[0029] 1. Cover; 2. Ventilation mechanism; 201. Protective shell; 202. Protective cover; 203. Motor; 204. Impeller; 205. Protective frame; 206. Filter plate; 207. Ventilation port; 208. Mounting groove; 3. Connecting frame; 4. Round hole; 5. Base; 6. Slide groove; 7. Rubber column; 8. Ball bearing; 9. Spring; 10. Rubber sleeve; 11. Screw one; 12. Support column; 13. Rubber ball; 14. Screw two; 15. Nut; 16. Inner groove; 17. Anti-electric plate; 18. Rotating shaft; 19. Fixing plate; 20. Fixing block; 21. Slot; 22. Dustproof groove. Detailed Implementation

[0030] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0031] Please see the appendix Figure 2 - Appendix Figure 4 This utility model provides an embodiment of a dustproof electrostatic chuck processing protective cover, including a cover body 1. The bottom of the cover body 1 is tightly connected to a connecting frame 3 by a fixed connection. Multiple round holes 4 are opened around the outer wall of the connecting frame 3. These round holes 4 allow the ball bearings 8 to fit against them, thereby fixing the connecting frame 3. The bottom of the connecting frame 3 is connected to a base 5 by a sliding connection, ensuring that it can slide up and down during use. A sliding groove 6 is opened at the top of the outer wall of the base 5. Multiple rubber pillars 7 are fixedly connected to the inner wall of the sliding groove 6. A ball bearing 8 is firmly fixedly connected to the top of each rubber pillar 7. These ball bearings 8 can fit against the round holes 4. A spring 9 is fixedly connected inside each rubber pillar 7. The spring 9 provides a certain elastic force to ensure that the ball bearing 8 can move flexibly. A rubber sleeve 10 is also fixedly connected around the bottom of the outer wall of the connecting frame 3. A fixing component is fixedly connected to the bottom of the inner wall of the base 5. A ventilation mechanism 2 is fixedly connected to the top of the cover body 1. The ventilation mechanism 2 is used to ventilate the inside of the cover body 1.

[0032] Specifically, the bottom of the cover 1 is tightly fixed to the connecting frame 3. Multiple round holes 4 are opened around the outer wall of the connecting frame 3 for the ball bearings 8 to fit and fix the connecting frame 3. The bottom of the connecting frame 3 is slidably connected to the base 5 and can slide up and down. The top of the outer wall of the base 5 has a sliding groove 6, and multiple rubber pillars 7 are fixed to the inner wall. The top of the pillars is connected to the ball bearings 8 and fits with the round holes 4. Springs 9 are fixed inside the rubber pillars 7 to provide elasticity and make the ball bearings 8 move flexibly. Rubber sleeves 10 are also fixed around the bottom of the outer wall of the connecting frame 3. The bottom of the inner wall of the base 5 is fixed with components. The top of the cover 1 is fixed with a ventilation mechanism 2 for internal ventilation.

[0033] Please see the appendix Figure 3 - Appendix Figure 5The ventilation mechanism 2 includes a protective shell 201. The bottom of the outer wall of the protective shell 201 is fixed to the cover 1 by a sturdy connection to ensure the stability of the overall structure. The top and bottom of the protective shell 201 are both firmly fixed with protective covers 202. These protective covers 202 provide additional protection to prevent external debris from entering and internal components from leaking out. Inside the protective shell 201, a motor 203 is fixedly connected. The motor 203 is the core power source of the ventilation mechanism 2. The output end of the motor 203 is reliably fixedly connected to an impeller 204. The impeller 204 rotates under the drive of the motor 203 to achieve the ventilation function. The top of the cover 1 is also fixedly connected with a protective frame 205. The top of the protective frame 205 is fixedly connected with a filter plate 206. The function of the filter plate 206 is to filter impurities in the air to ensure ventilation quality. The top of the cover 1 is also provided with a ventilation opening 207 to facilitate air circulation. The outer wall of the protective frame 205 is provided with a mounting groove 208.

[0034] Specifically, the ventilation mechanism 2 includes a protective shell 201, the bottom of which is firmly connected to the cover 1 to maintain overall stability. Protective covers 202 are fixed at the top and bottom to prevent external debris from entering and internal components from leaking out. A motor 203 is fixed inside, which is the core power source of the ventilation mechanism 2. The output end of the motor 203 is connected to the impeller 204 to drive it to rotate and achieve ventilation. A protective frame 205 is fixed at the top of the cover 1, and a filter plate 206 is fixed at the top of the frame 1 to filter air impurities and ensure ventilation quality. A ventilation opening 207 is opened at the top of the cover 1 to facilitate air circulation. An installation groove 208 is opened on the outer wall of the protective frame 205.

[0035] Please see the appendix Figure 2 - Appendix Figure 3 The fixing component specifically includes a screw 11, the outer wall of which is tightly connected to the bottom of the inner wall of the base 5 by means of threads. In order to enhance the stability of the structure, there are multiple screws 11. The top of each screw 11 is firmly fixed to a support column 12. The top of each support column 12 is fixed to a rubber ball 13. The rubber ball 13 and the rubber sleeve 10 are locked together to form a fixation. The bottom of the base 5 is also connected to a screw 2 14 by means of threads, and there are multiple such screws 2 14. The outer wall of each screw 2 14 is connected to a nut 15 by means of threads to facilitate the adjustment and fixing of the height and position of the entire component. The top part of the cover 1 has an inner groove 16.

[0036] Specifically, the fixing component includes multiple screws 11, whose outer walls are tightly connected to the bottom of the inner wall of the base 5 by threads, and the top is connected to a support column 12. The top of the support column 12 is connected to a rubber ball 13 and a rubber sleeve 10 for locking and fixing. The bottom of the base 5 is threaded with multiple screws 14 and nuts 15 to adjust the height. The top of the cover 1 has an inner groove 16.

[0037] Please see the appendix Figure 1 - Appendix Figure 3 The inner wall of the inner groove 16 is fitted with an anti-electric plate 17 by means of sliding connection. The top left and right sides of the anti-electric plate 17 are firmly fixed with fixing blocks 20 to ensure its stability and functionality. The top left and right sides of the cover 1 are fitted with rotating shafts 18 by means of rotatable connection. The outer walls of the two rotating shafts 18 are firmly fixed with fixing plates 19 to enhance their structural support. The top of the two fixing plates 19 are provided with slots 21 for snapping, so as to connect and fix with the fixing blocks 20. The bottom of the outer walls of the cover 1 and the connecting frame 3 are provided with dustproof grooves 22.

[0038] Specifically, the inner wall of the inner groove 16 is connected to the anti-electric plate 17, and the top left and right sides are fixedly connected to the fixing blocks 20 for stability. The top left and right sides of the cover 1 are connected to the rotating shaft 18. The outer wall is fixedly connected to the fixing plate 19 to enhance support. The top of the fixing plate 19 has a slot 21 to connect with the fixing block 20. The bottom of the outer wall of the cover 1 and the connecting frame 3 has a dustproof groove 22.

[0039] Working principle: First, after fixing the base 5 to the external equipment, the cover 1 is inserted into the groove 6 opened in the base 5. Then, the connecting frame 3 connected to the bottom of the cover 1 uses the pushing force to squeeze the ball 8 in the groove 6, causing the spring 9 in the rubber column 7 to be squeezed and deformed. Then, when the rubber sleeve 10 at the bottom of the connecting frame 3 is pushed downward, it squeezes the rubber ball 13 on the groove 6. Due to the special material of the rubber ball 13, it deforms when squeezed and is then stuck by the rubber sleeve 10, forming a fixation. Then, because there is a spring 9 at the bottom of the groove 6, after the connecting frame 3 reaches the bottom, the rubber ball 13 is tightly attached to the round hole 4 on the outer wall of the connecting frame 3 with the elasticity of the spring 9, forming a fixation. When it is necessary to repair and inspect the cover 1, simply pull the cover 1 out of the base 5 and use the pulling force to make it separate naturally. When there is no force to squeeze, the rubber ball 13 is reset by the spring 9, making replacement faster and avoiding traditional disassembly steps, thus improving efficiency.

[0040] First, during long-term protection, the air in the dustproof groove 22 inside the cover 1 will contain too many impurities. At this time, the motor 203 inside the protective shell 201 is started. The rotation of the motor 203 drives the impeller 204 to rotate, thereby generating wind. This causes the air inside the cover 1 to be drawn out through the vent 207. In fact, the air gathers in the protective frame 205 and then floats out along the filter plate 206 on the protective frame 205. When passing through the filter plate 206, the impurities in the air are filtered out due to the filtering properties of the filter plate 206. When the outside air enters the protective frame 205, it is also filtered by the filter plate 206, so that the air entering the cover 1 is clean and avoids the air quality inside the cover 1 being too low, which would affect the dustproof work.

[0041] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A dustproof protective cover for electrostatic chuck processing, comprising a cover body (1), characterized in that: The bottom of the cover (1) is fixedly connected to a connecting frame (3), the outer wall of the connecting frame (3) is provided with a round hole (4), the bottom of the connecting frame (3) is slidably connected to a base (5), the top of the outer wall of the base (5) is provided with a sliding groove (6), the inner wall of the sliding groove (6) is fixedly connected to a rubber column (7), the top of the multiple rubber columns (7) is fixedly connected to a ball (8), the inside of the rubber column (7) is fixedly connected to a spring (9), the bottom of the outer wall of the connecting frame (3) is fixedly connected to a rubber sleeve (10), the bottom of the inner wall of the base (5) is fixedly connected to a fixing component, and the top of the cover (1) is fixedly connected to a ventilation mechanism (2), which is used to ventilate the inside of the cover (1).

2. The dustproof electrostatic chuck processing protective cover according to claim 1, characterized in that: The ventilation mechanism (2) includes a protective shell (201), the bottom of the outer wall of the protective shell (201) is fixedly connected to the cover (1), the top and bottom of the protective shell (201) are fixedly connected to protective covers (202), the inside of the protective shell (201) is fixedly connected to a motor (203), the output end of the motor (203) is fixedly connected to an impeller (204), the top of the cover (1) is fixedly connected to a protective frame (205), the top of the protective frame (205) is fixedly connected to a filter plate (206), the top of the cover (1) is provided with a ventilation opening (207), and the outer wall of the protective frame (205) is provided with an installation groove (208).

3. The dustproof electrostatic chuck processing protective cover according to claim 1, characterized in that: The fixing component includes a screw (11), the outer wall of which is threaded to the bottom of the inner wall of the base (5), and a support column (12) is fixedly connected to the top of each of the screws (11).

4. The dustproof electrostatic chuck processing protective cover according to claim 3, characterized in that: Each of the support columns (12) has a rubber ball (13) fixedly connected to its top, and the bottom of the base (5) is threadedly connected to a screw rod (14).

5. A dustproof protective cover for electrostatic chuck processing according to claim 4, characterized in that: Nuts (15) are threaded onto the outer walls of the multiple screws (14), and an inner groove (16) is provided on the top of the cover (1).

6. A dustproof protective cover for electrostatic chuck processing according to claim 5, characterized in that: The inner wall of the inner groove (16) is slidably connected to an anti-electric plate (17), and the top left and right sides of the anti-electric plate (17) are fixedly connected to fixing blocks (20).

7. A dustproof protective cover for electrostatic chuck processing according to claim 1, characterized in that: The top left and right sides of the cover (1) are rotatably connected to the rotating shaft (18), and the outer walls of the two rotating shafts (18) are fixedly connected to the fixing plate (19).

8. A dustproof protective cover for electrostatic chuck processing according to claim 7, characterized in that: The top of both fixing plates (19) is provided with a slot (21), and the bottom of the outer wall of the cover (1) and the connecting frame (3) is provided with a dustproof groove (22).

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