A sealed special gas pipeline connection structure for ALD equipment

Abstract

The utility model relates to a kind of sealing special gas pipeline connecting structure for ALD equipment, its structure is that special gas hose is wrapped with protective sleeve, the upper end of special gas hose is connected with upper connector and lower connector respectively, upper connector is connected with the outside of special gas hose upper end and is connected with upper sealing seat, upper sealing seat end is inserted in the inner of protective sleeve upper end, sealing ring is equipped between upper sealing seat and upper connector, lower connector is connected with the outside of special gas hose lower end and is connected with lower sealing seat, lower sealing seat end is inserted in the inner of protective sleeve lower end, sealing ring is equipped between lower sealing seat and lower connector, upper connector outer end is connected with upper connecting pipe, upper connecting pipe is connected with furnace inner flow uniform plate, lower connector is connected with special gas inlet pipe.The utility model has the advantages of simple and reasonable structure, which can effectively improve the sealing property, reduce powder accumulation and facilitate maintenance, thereby prolonging the service life.

Description

Technical Field

[0001] This utility model relates to a special gas pipeline connection structure, specifically a sealed special gas docking pipeline connection structure for ALD (Atomic Layer Vapor Deposition) equipment. Background Technology

[0002] In photovoltaic cell production, atomic layer vapor deposition (ALD) equipment is used. Current ALD equipment suffers from problems such as poor sealing, complex structure, easy powder accumulation, and short maintenance cycles, which restrict the overall coating efficiency and quality of the ALD equipment and cannot effectively meet production needs. Utility Model Content

[0003] This utility model proposes a sealed special gas pipeline connection structure for ALD equipment. Its purpose is to overcome the above-mentioned shortcomings of the existing technology, improve the sealing performance, reduce powder accumulation, and extend the service life without complicating the structure.

[0004] The technical solution of this utility model is as follows: A sealed special gas pipeline connection structure for ALD equipment, the structure includes an upper connecting pipe, an upper adapter, a sealing ring, a special gas hose, a protective sleeve, a pressure sensor, and a lower adapter. The special gas hose is wrapped with a protective sleeve. The upper and lower ends of the special gas hose are respectively connected to the upper adapter and the lower adapter. An upper sealing seat is sleeved on the outside of the connection between the upper adapter and the upper end of the special gas hose. The end of the upper sealing seat is inserted into the upper end of the protective sleeve. A sealing ring is provided between the upper sealing seat and the upper adapter. A lower sealing seat is sleeved on the outside of the connection between the lower adapter and the lower end of the special gas hose. The end of the lower sealing seat is inserted into the lower end of the protective sleeve. A sealing ring is provided between the lower sealing seat and the lower adapter. The outer end of the upper adapter is connected to the upper connecting pipe, the upper connecting pipe is connected to the flow equalization plate in the furnace, and the lower adapter is connected to the special gas inlet pipe. During operation, the special gas flows from bottom to top into the flow equalization plate through the special gas hose under pressure. It then diffuses and deposits onto the battery cells through the flow equalization plate. A sealing ring is used to achieve a high seal inside the protective sleeve. There will be no air leakage when it moves with the flow equalization plate. It can effectively solve the problems of poor sealing structure and serious powder accumulation in the existing technology. It has the advantages of convenient maintenance and long service life.

[0005] Preferably, a pressure sensor is installed on the lower sealing seat, and the sensor's acquisition end is connected to the inside of the protective sleeve. In the event of a leak, a signal can be transmitted immediately to alert personnel for maintenance.

[0006] The advantages of this utility model are: simple and reasonable structural design, which can effectively improve sealing performance and reduce powder accumulation compared with the prior art, and convenient maintenance and repair, which can effectively extend service life. Attached Figure Description

[0007] Figure 1This is a schematic diagram of the sealed special gas pipeline connection structure for ALD equipment of this utility model.

[0008] Figure 2 This is a cross-sectional schematic diagram of the sealed special gas pipeline connection structure for ALD equipment of this utility model.

[0009] In the diagram, 1 is the upper connecting pipe, 2 is the upper adapter, 3 is the sealing ring, 4 is the upper sealing seat, 5 is the special gas hose, 6 is the protective sleeve, 7 is the pressure sensor, 8 is the lower sealing seat, and 9 is the lower adapter. Detailed Implementation

[0010] The present invention will be further described in detail below with reference to embodiments and specific implementation methods.

[0011] like Figure 1 , 2 As shown, a sealed special gas pipeline connection structure for an ALD device includes an upper connecting pipe 1, an upper adapter 2, a sealing ring 3, a special gas hose 5, a protective sleeve 6, a pressure sensor 7, and a lower adapter 9. The special gas hose 5 is wrapped in the protective sleeve 6. The upper and lower ends of the special gas hose 5 are connected to the upper adapter 2 and the lower adapter 9, respectively. An upper sealing seat 4 is sleeved on the outside of the connection between the upper adapter 2 and the upper end of the special gas hose 5. The end of the upper sealing seat 4 is inserted into the upper end of the protective sleeve 6. The upper sealing seat 4 and the upper adapter 9 are connected... A sealing ring 3 is provided between the connectors 2. The lower adapter 9 is connected to the lower end of the special gas hose 5 and the outer side of the connection is fitted with a lower sealing seat 8. The end of the lower sealing seat 8 is inserted into the lower end of the protective sleeve 6. A sealing ring 3 is provided between the lower sealing seat 8 and the lower adapter 9. A pressure sensor 7 is installed on the lower sealing seat 8. The pressure sensor 7 is connected to the inner side of the protective sleeve 6. The outer end of the upper adapter 2 is connected to the upper connecting pipe 1. The upper connecting pipe 1 is connected to the flow equalization plate in the furnace (not shown). The lower adapter 9 is connected to the special gas inlet pipe (not shown).

[0012] Based on the above structure, during operation, since the special gas inlet pipe is connected to the lower adapter 9 and the upper connecting pipe 1 is connected to the flow equalization plate inside the furnace, the special gas flows from bottom to top into the flow equalization plate through the special gas hose 5 under pressure, and diffuses and deposits onto the battery cells through the flow equalization plate.

[0013] In the above structure, a sealing ring 3 is used to achieve a high seal inside the protective sleeve 6, and a pressure sensor 7 detects the pressure status inside the protective sleeve 6 in real time. When a leak occurs, it can transmit a signal to the outside immediately to remind personnel to carry out maintenance.

[0014] This structure is connected to the flow equalizer, which can prevent air leakage when moving with the flow equalizer. It can effectively solve the problems of poor sealing structure and serious powder accumulation in the existing technology, and has the advantages of convenient maintenance and long service life.

[0015] All of the components described above are existing technologies, and those skilled in the art can use any model and existing design that can achieve their corresponding functions.

[0016] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present utility model, and these all fall within the protection scope of the present utility model.

Claims

1. A sealed special gas pipeline connection structure for ALD equipment, characterized in that, The system includes an upper connecting pipe (1), an upper adapter (2), a sealing ring (3), a special gas hose (5), a protective sleeve (6), a pressure sensor (7), and a lower adapter (9). The special gas hose (5) is wrapped with a protective sleeve (6). The upper and lower ends of the special gas hose (5) are connected to the upper adapter (2) and the lower adapter (9), respectively. An upper sealing seat (4) is sleeved on the outside of the connection between the upper adapter (2) and the upper end of the special gas hose (5). The end of the upper sealing seat (4) is inserted into the protective sleeve (6). Inside the upper end, a sealing ring (3) is provided between the upper sealing seat (4) and the upper adapter (2). The lower sealing seat (8) is sleeved on the outside of the connection between the lower adapter (9) and the lower end of the special gas hose (5). The end of the lower sealing seat (8) is inserted into the lower end of the protective sleeve (6). A sealing ring (3) is provided between the lower sealing seat (8) and the lower adapter (9). The outer end of the upper adapter (2) is connected to the upper connecting pipe (1). The upper connecting pipe (1) is connected to the flow equalization plate inside the furnace. The lower adapter (9) is connected to the special gas inlet pipe.

2. The sealed special gas pipeline connection structure for ALD equipment as described in claim 1, characterized in that, A pressure sensor (7) is installed on the lower sealing seat (8), and the acquisition end of the pressure sensor (7) is connected to the inside of the protective sleeve (6).

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