Coating tool and machine

Abstract

The utility model provides a kind of coating tool and platform, comprising: coating frame extends along first direction, first direction is perpendicular to the coating direction of coating tool, multiple accommodating grooves are located the side of coating frame towards coated surface, multiple accommodating grooves are arranged along first direction;Accommodating groove includes opening cavity and accommodating cavity, opening cavity is communicated with accommodating cavity, the cross-sectional width of opening cavity is less than the cross-sectional width of accommodating cavity, coating knife includes the support column extending along second direction, and the blade being connected with the first end of support column;Support column penetrates opening cavity, and the length of support column is greater than the cross-sectional length of opening cavity in second direction;Second direction is perpendicular to the plane where first direction and coating direction are located, the blade of multiple coating knives is adjacent, elastic member is located in accommodating cavity, and elastic member is respectively connected with the cavity bottom of accommodating cavity and the second end of support column;Elastic member can be elastically deformed in second direction, suitable for the wafer of different warping degrees in each area.

Description

Technical Field

[0001] This utility model relates to the field of printing apparatus, and in particular to a coating tool and machine. Background Technology

[0002] In recent years, large-size wafer packaging has increasingly dominated the market. Current printing processes involve larger product sizes and a growing number of panels. Due to varying warpage rates across different areas of large wafers, traditional integrated squeegees are ill-suited for printing on them, leading to printing defects or anomalies. Therefore, there is an urgent need to develop a coating tool suitable for printing on large-size wafers.

[0003] It should be noted that the above introduction to the technical background is only for the purpose of providing a clear and complete explanation of the technical solutions of this utility model and facilitating understanding by those skilled in the art. It should not be assumed that these technical solutions are known to those skilled in the art simply because they have been described in the background section of this utility model. Utility Model Content

[0004] In view of the shortcomings of the prior art described above, the purpose of this utility model is to provide a coating tool and machine to solve the problem of poor printing or abnormalities in large-size wafers in the prior art.

[0005] Firstly, to achieve the above-mentioned and other related objectives, this utility model provides a coating tool, comprising:

[0006] A coating rack for connecting to a machine base, the coating rack extending along a first direction; the first direction is perpendicular to the coating direction of the coating tool;

[0007] Multiple receiving slots are located on the side of the coating rack facing the coating surface, and the multiple receiving slots are arranged along the first direction; wherein, each receiving slot includes an opening and a receiving cavity, the opening and the receiving cavity are in communication, and the cross-sectional width of the opening is smaller than the cross-sectional width of the receiving cavity;

[0008] A plurality of coating blades, each coating blade including a support post extending along a second direction and a blade connected to a first end of the support post; the support post penetrates the opening, and the length of the support post is greater than the cross-sectional length of the opening in the second direction; wherein, the second direction is perpendicular to the plane containing the first direction and the coating direction; the blades of the plurality of coating blades are adjacent to each other;

[0009] An elastic element is located within the accommodating cavity and is connected to the bottom of the accommodating cavity and the second end of the support column, respectively; the elastic element can generate elastic deformation in the second direction.

[0010] In one embodiment, the coating knife further includes:

[0011] A limiting member protrudes from the side wall of the second end of the support column, the second end being disposed opposite to the first end in the second direction; wherein, the portion of the support column from the position of the limiting member to the second end of the support column is located within the receiving cavity, the cross-sectional width of the opening is smaller than the lateral dimension of the limiting member, and the lateral dimension of the limiting member is smaller than the cross-sectional width of the receiving cavity.

[0012] In one embodiment, the coating tool further includes:

[0013] A baffle is located on both sides of the coating rack in the first direction. The baffle protrudes from the side of the coating rack facing the coating surface in the second direction. The first direction is perpendicular to the plane where the baffle is located.

[0014] In one embodiment, the first end of the blade in the first direction includes a slot extending in the second direction, and the second end of the blade in the first direction includes a protrusion that engages with the slot; the blade is connected to an adjacent blade via the slot and the protrusion.

[0015] In one embodiment, the end face of the first end of the support column includes a groove that extends in the first direction, the groove has a "V" shaped cross-section, and the cross-section of the groove is perpendicular to the first direction.

[0016] The coating knife further includes screws for fixing the support column and the blade; wherein the blade is located in the clamping groove, and the screws pass through the support column and the blade on both sides of the clamping groove.

[0017] In one embodiment, the coating rack further includes:

[0018] Fixing members are symmetrically arranged at both ends of the coating rack along the first direction for connecting to the machine base.

[0019] In one embodiment, the fastener includes bolts, hooks, pins, etc.

[0020] In one embodiment, the elastic element includes a spring.

[0021] In one embodiment, the coating tool further includes:

[0022] A guide post is located inside the receiving cavity and passes through the spring. The first end of the guide post is connected to the bottom of the receiving cavity, and the second end of the guide post is suspended.

[0023] The second end of the support column includes a groove for accommodating the guide column, the support column is sleeved on the outer wall of the guide column, and the guide column is slidably connected to the support column.

[0024] Secondly, the present invention also provides a machine tool, which includes the coating tool described in any one of the embodiments.

[0025] As described above, the coating tool and machine of this utility model have the following beneficial effects:

[0026] The present invention relates to a coating tool and machine base, comprising: a coating frame, multiple receiving slots, multiple coating blades, and an elastic element; wherein, the coating frame is used to connect to the machine base, the coating frame extends along a first direction, the first direction being perpendicular to the coating direction of the coating tool, the multiple receiving slots are located on the side of the coating frame facing the surface to be coated, and the multiple receiving slots are arranged along the first direction; wherein, the receiving slot includes an opening and a receiving cavity, the opening and the receiving cavity being connected, the cross-sectional width of the opening being smaller than the cross-sectional width of the receiving cavity, the coating blades include a support column extending along a second direction, and a blade connected to the first end of the support column; the support column penetrates the opening, and the length of the support column is greater than the cross-sectional length of the opening in the second direction; wherein, the second direction is perpendicular to the plane containing the first direction and the coating direction, the blades of the multiple coating blades are adjacent to each other, the elastic element is located in the receiving cavity, and the elastic element is connected to the bottom of the receiving cavity and the second end of the support column respectively; the elastic element can generate elastic deformation in the second direction. In this invention, the side of the coating holder facing the surface to be coated includes multiple receiving grooves arranged along a first direction. Each receiving groove includes an opening and a receiving cavity. Each elastic element is connected to a support column of a coating blade. The elastic element is located in the receiving cavity and is connected to the bottom of the receiving cavity and the support column respectively. The support column passes through the opening. The blade of the coating blade contacts the surface to be coated, so that during the coating process, when the coating blade contacts the surface to be coated, the coating tool can compress or stretch the elastic element according to the warpage of the surface to be coated, so that the coating blade can move in a second direction. Since each coating blade is independent of the others, it can be applied to wafers with different degrees of warpage in different areas, and thus is suitable for printing on large-size wafers with warpage. Attached Figure Description

[0027] The accompanying drawings, which form part of this specification, are provided to further illustrate embodiments of the present invention and, together with the textual description, serve to explain the principles of the present invention. It is obvious that the drawings described below are merely some embodiments of the present invention.

[0028] Figure 1 This is a schematic diagram of the structure of the coating tool provided in one embodiment;

[0029] Figure 2This is a schematic diagram of the structure of a coating blade provided in one embodiment;

[0030] Figure 3 This is a schematic diagram of the blade provided in one embodiment;

[0031] Figure 4 This is a schematic diagram of the blade provided in another embodiment;

[0032] Figure 5 This is a schematic diagram of the coating tool provided in another embodiment.

[0033] Component designation explanation

[0034] 10 Coating rack

[0035] 101 Fastener

[0036] 20 Reception Slots

[0037] 201 Receptacle

[0038] 203 Opening the oral cavity

[0039] 30 Coating Knife

[0040] 301 Support Column

[0041] 303 blade

[0042] 305 limit component

[0043] 307 screws

[0044] 40 Elastic element

[0045] 50 baffles Detailed Implementation

[0046] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model.

[0047] It should be emphasized that the term "including / comprises" as used herein refers to the presence of a feature, whole, step, or component, but does not exclude the presence or addition of one or more other features, wholes, steps, or components.

[0048] Features described and / or illustrated for one embodiment may be used in the same or similar manner in one or more other embodiments, combined with features in other embodiments, or substituted for features in other embodiments.

[0049] In the detailed description of the embodiments of this utility model, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged and not to scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of this utility model. In actual manufacturing, the three-dimensional spatial dimensions of length, width, and depth should be included.

[0050] It is understood that the terms "first," "second," etc., used in this invention may be used to describe various elements, but these elements are not limited by these terms. These terms are only used to distinguish the first element from another element.

[0051] Spatial relation terms such as “below,” “under,” “below,” “under,” “above,” “above,” etc., are used herein to describe the relationship between one element or feature shown in the figure and other elements or features. It should be understood that, in addition to the orientation shown in the figure, spatial relation terms also include different orientations of the device in use and operation. For example, if the device in the figure is flipped, the element or feature described as “below,” “under,” or “below” will be oriented “above” the other element or feature. Therefore, the exemplary terms “below” and “under” can include both above and below orientations. Furthermore, the device may also include other orientations (e.g., rotated 90 degrees or other orientations), and the spatial descriptive terms used herein will be interpreted accordingly.

[0052] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0053] When used herein, the singular forms of “a,” “an,” and “the” may also include the plural forms unless the context clearly indicates otherwise. It should also be understood that terms such as “comprising / including” or “having” specify the presence of the stated features, wholes, components, parts, or combinations thereof, but do not preclude the possibility of the presence or addition of one or more other features, wholes, components, parts, or combinations thereof. Meanwhile, the term “and / or” as used in this specification includes any and all combinations of the associated listed items.

[0054] It should be noted that if an element is referred to as "fixed to" or "set on" another element, it can be directly on the other element or there may be an intermediate element. If an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element present. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this utility model are for illustrative purposes only and do not represent the only implementation. It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this utility model. Therefore, the illustrations only show components related to this utility model and are not drawn according to the actual number, shape, and size of components in the actual implementation. In the actual implementation, the type, quantity, and proportion of each component can be arbitrarily changed, and the component layout may also be more complex.

[0055] Please refer to Figure 1 This utility model provides a coating tool, including: a coating rack 10, multiple receiving grooves 20, multiple coating blades 30, and an elastic element 40.

[0056] The coating rack 10 is used to connect to the machine base and extends along a first direction; the first direction is perpendicular to the coating direction of the coating tool.

[0057] The coating tool is used to coat solder paste or the like onto the wafer surface during wafer printing processes. As an example, the coating rack 10 may include a connecting structure (not shown), and the machine base includes a fixing device corresponding to the connecting structure. The connecting structure is connected to the fixing device, thereby connecting the coating rack 10 to the machine base for easy disassembly and replacement of the coating tool. The horizontal plane containing the first direction and the coating direction is parallel to the surface to be coated.

[0058] The receiving groove 20 is located on the side of the coating rack 10 facing the coating surface, and multiple receiving grooves 20 are arranged along a first direction; wherein, the receiving groove 20 includes an opening 203 and a receiving cavity 201, the opening 203 is connected to the receiving cavity 201, and the cross-sectional width of the opening 203 is smaller than the cross-sectional width of the receiving cavity 201.

[0059] As an example, the receiving slots 20 are spaced apart from each other in the first direction, or they may be interconnected. The cross-sectional width of the opening 203 is the width of the cross section of the opening 203 parallel to the first and second directions in the first direction, and the cross-sectional width of the receiving cavity 201 is the width of the cross section of the receiving cavity 201 parallel to the first and second directions in the first direction.

[0060] The coating blade 30 includes a support post 301 extending along a second direction and a blade 303 connected to a first end of the support post 301; the support post 301 penetrates the opening 203 and the length of the support post 301 is greater than the cross-sectional length of the opening 203 in the second direction; wherein, the second direction is perpendicular to the plane in which the first direction and the coating direction are located; the blades 303 of the plurality of coating blades 30 are adjacent to each other.

[0061] In the coating knife 30, the cutting edge of the blade 303 is parallel to the first direction. The cross-sectional length of the opening 203 in the second direction is the length of the cross-section of the opening 203 parallel to both the first and second directions in the second direction.

[0062] As an example, the support column 301 and the blade 303 can be fixedly connected or detachably connected. Each blade 303 is in contact with the adjacent blade 303, and each blade 303 can move independently in the second direction.

[0063] The elastic element 40 is located inside the accommodating cavity 201 and is connected to the bottom of the accommodating cavity 201 and the second end of the support column 301 respectively; the elastic element 40 can generate elastic deformation in the second direction.

[0064] As an example, the width of the elastic member 40 in the first direction is greater than the cross-sectional width of the opening 203, and the width of the elastic member 40 in the first direction is less than or equal to the cross-sectional width of the receiving cavity 201, so that the elastic member 40 deforms within the receiving cavity 201, preventing the elastic member 40 from coming out of the receiving cavity 201 and causing the blade 303 to dislocate.

[0065] In the above embodiments, the coating tool includes: a coating rack, multiple receiving slots, multiple coating blades, and an elastic element; wherein the coating rack is used to connect to the machine base, the coating rack extends along a first direction, the first direction being perpendicular to the coating direction of the coating tool, the multiple receiving slots are located on the side of the coating rack facing the surface to be coated, and the multiple receiving slots are arranged along the first direction; wherein the receiving slot includes an opening and a receiving cavity, the opening and the receiving cavity are connected, the cross-sectional width of the opening is smaller than the cross-sectional width of the receiving cavity, the coating blade includes a support column extending along a second direction, and a blade connected to the first end of the support column; the support column penetrates the opening, and the length of the support column is greater than the cross-sectional length of the opening in the second direction, so that the support column can be displaced within the opening; wherein the second direction is perpendicular to the plane where the first direction and the coating direction are located, the blades of the multiple coating blades are adjacent to each other, the elastic element is located within the receiving cavity, and the elastic element is connected to the bottom of the receiving cavity and the second end of the support column respectively; the elastic element can generate elastic deformation in the second direction. In this embodiment, the side of the coating holder facing the surface to be coated includes multiple receiving grooves arranged along a first direction. Each receiving groove includes an opening and a receiving cavity. Each elastic element is connected to a support column of a coating blade. The elastic element is located in the receiving cavity and is connected to the bottom of the cavity and the support column. The support column passes through the opening. The blade of the coating blade contacts the surface to be coated, so that during the coating process, when the coating blade contacts the surface to be coated, the coating tool can compress or stretch the elastic element according to the unevenness of the surface to be coated, so that the coating blade can move in a second direction. Since each coating blade is independent of each other, it can be applied to wafers with different degrees of warpage in different areas, and thus is suitable for printing on large-size wafers with warpage.

[0066] In some embodiments, please refer to Figure 2 The coating blade 30 also includes a limiting member 305, which protrudes from the side wall of the second end of the support column 301. The second end of the support column 301 is disposed opposite to the first end of the support column 301 in a second direction. The portion of the support column 301 from the position of the limiting member to the second end of the support column is located in the receiving cavity 201. The cross-sectional width of the opening 203 is smaller than the lateral dimension of the limiting member, and the lateral dimension of the limiting member is smaller than the cross-sectional width of the receiving cavity 201.

[0067] As an example, the limiting member 305 may include at least two protrusions (not shown) located on the side wall of the support column 301, each protrusion being symmetrically arranged on the side wall of the second end of the support column 301, or the limiting member 305 may be a columnar object penetrating the second end of the support column 301, with both ends of the columnar object protruding from the side wall of the second end of the support column 301.

[0068] In the above embodiment, the limiting member protrudes from the side wall of the second end of the support column. The limiting member can move along with the support column in the second direction. Since the portion of the support column from the position of the limiting member to the second end of the support column is located within the receiving cavity, the cross-sectional width of the opening is smaller than the lateral dimension of the limiting member, and the lateral dimension of the limiting member is smaller than the cross-sectional width of the receiving cavity. This ensures that the lowest limiting position of the limiting member in the second direction is located at the connection between the receiving cavity and the opening, thereby preventing the second end of the support column from dislodging from the opening and affecting the stability of the blade. Preferably, the end face of the limiting member can contact the inner wall of the receiving cavity, thereby improving the stability of the support column and the blade.

[0069] In some embodiments, the elastic element includes a spring.

[0070] As an example, one end of the spring is connected to the bottom of the receiving cavity, and the other end of the spring is connected to the second end of the support column. Furthermore, a limiting member can be inserted into the spring to increase the connection strength between the support column and the spring.

[0071] In some embodiments, the elastic element may further include: an elastic block made of an elastic material (e.g., rubber).

[0072] In some embodiments, the coating tool further includes: a guide post located within the accommodating cavity and extending through the spring, a first end of the guide post being connected to the bottom of the accommodating cavity, and a second end of the guide post being suspended; wherein, the second end of the support post includes a groove for accommodating the guide post, the support post being sleeved on the outer wall of the guide post, and the guide post and the support post being slidably connected.

[0073] As an example, when the blade contacts the surface to be coated, the support column can move upward in the second direction along with the blade, compressing the spring. At the same time, since the support column is sleeved on the outer wall of the guide column, the support column slides relative to the guide column in the second direction.

[0074] In the above embodiments, by setting a guide post, the first end of the guide post is connected to the bottom of the cavity, the second end of the guide post is suspended, the second end of the support post includes a groove for accommodating the guide post, and the support post is sleeved on the outer wall of the guide post, thereby improving the stability of the coating knife and improving the coating quality.

[0075] In some embodiments, please refer to Figure 3 and Figure 4 The first end of the blade in the first direction includes a slot extending in the second direction, and the second end of the blade in the first direction includes a protrusion that engages with the slot; the blade and the adjacent blade are connected by the slot and the protrusion.

[0076] As an example, the thickness of the blade 303 is a preset thickness, which is greater than 0. The orthographic projection of the slot at the first end of the blade 303 in the first direction can be V-shaped, and the orthographic projection of the protrusion at the second end of the blade 303 in the first direction is an angular protrusion that fits into the V-shape. The length of the slot in the second direction and the length of the protrusion in the second direction are equal to the length of the blade 303 in the second direction. Furthermore, the first or second end of the blade 303 near the edge of the coating holder 10 in the first direction can be flat.

[0077] As an example, the thickness of the blade 303 is a preset thickness, which is greater than 0. The orthographic projection of the slot at the first end of the blade 303 in the first direction can be concave, and the orthographic projection of the protrusion at the second end of the blade 303 in the first direction is a convex protrusion that fits into the concave shape. The length of the slot in the second direction and the length of the protrusion in the second direction are equal to the length of the blade 303 in the second direction.

[0078] In the above embodiments, by including a slot at the first end of the blade in the first direction and a protrusion that engages with the slot at the second end of the blade in the first direction, the slot of the blade engages with the protrusion of the adjacent blade, and the protrusion of the blade engages with the slot of the adjacent blade, thereby connecting the blades of each adjacent blade into a plane, thereby preventing materials such as solder paste from embedding in the gaps between the blades and improving the coating quality. In addition, the shape of the slot is preferably V-shaped, which improves the connection strength between the blades and avoids damaging the strength of the blades themselves. At the same time, since the slot and the protrusion extend along the first and second ends of the blade in the first direction, they do not affect the independent movement between the blades.

[0079] In some embodiments, please refer to Figure 5 The coating tool also includes: baffles 50, located on both sides of the coating rack 10 in the first direction, the baffles 50 protruding from the side of the coating rack 10 facing the surface to be coated in the second direction, and the first direction being perpendicular to the plane where the baffle is located.

[0080] As an example, the width of the baffle 50 in the coating direction is at least greater than or equal to the thickness of the blade 303 in the coating direction, and the blade 303 protrudes from or is flush with the baffle 50 when it is not in contact with the coated surface.

[0081] In the above embodiments, by placing the baffles on the two side walls of the coating rack in the first direction, the solder paste can be confined between the two baffles in the coating tool during the solder paste application process, thus preventing solder paste leakage.

[0082] In some embodiments, please refer to Figure 2The end face of the first end of the support column 301 includes a clamping groove (not shown), which extends in a first direction and has a "V" shaped cross-section, which is perpendicular to the first direction. The coating knife 30 also includes a screw 307 for fixing the support column 301 and the blade 303. The blade 303 is located in the clamping groove, and the screw 307 passes through the support column 301 and the blade 303 on both sides of the clamping groove.

[0083] As an example, the support posts 301 on both sides of the clamping groove include holes that penetrate both sides of the clamping groove, and screws 307 penetrate the holes. The inner surface of the holes includes threads that correspond to the threads on the surface of screws 307.

[0084] In the above embodiments, by using screws to fix the support column and the blade, it is easy to disassemble or replace the blade individually, thus improving the convenience of maintenance of the coating tool.

[0085] In some embodiments, please refer to Figure 5 The coating rack also includes: a fixing member 101; the fixing member 101 is symmetrically arranged at both ends of the coating rack 10 along the first direction and is used to connect with the machine.

[0086] As an example, the fastener 101 is located on the side of the coating holder 10 away from the coating surface, and is symmetrically arranged at both ends of the coating holder 10 along the first direction.

[0087] In some embodiments, the fastener may include bolts, hooks, pins, etc.

[0088] As an example, the fastener may include a bolt, the machine base includes a bolt hole for connection with the bolt, the bolt passes through the bolt hole and is secured by a nut.

[0089] This utility model also provides a machine tool, including: a coating tool; the coating tool includes: a coating rack for connecting to the machine tool, the coating rack extending along a first direction; the first direction is perpendicular to the coating direction of the coating tool; multiple receiving slots located on the side of the coating rack facing the surface to be coated, the multiple receiving slots arranged along the first direction; wherein, the receiving slot includes an opening and a receiving cavity, the opening and the receiving cavity are connected, the cross-sectional width of the opening is smaller than the cross-sectional width of the receiving cavity; multiple coating blades, each coating blade including a support column extending along a second direction, and a blade connected to a first end of the support column; the support column penetrates the opening, and the length of the support column is greater than the cross-sectional length of the opening in the second direction; wherein, the second direction is perpendicular to the plane where the first direction and the coating direction are located; the blades of the multiple coating blades are adjacent to each other; an elastic element located in the receiving cavity, the elastic element being connected to the bottom of the receiving cavity and the second end of the support column respectively; the elastic element can generate elastic deformation in the second direction.

[0090] In some embodiments, the coating knife further includes:

[0091] A limiting member protrudes from the side wall of the second end of the support column, and the second end is disposed opposite to the first end in a second direction; wherein, the portion of the support column from the position of the limiting member to the second end of the support column is located in the receiving cavity, the cross-sectional width of the opening is smaller than the lateral dimension of the limiting member, and the lateral dimension of the limiting member is smaller than the cross-sectional width of the receiving cavity.

[0092] In some embodiments, the coating tool further includes:

[0093] The baffle is located on both sides of the coating rack in the first direction. The baffle protrudes from the side of the coating rack facing the coating surface in the second direction. The first direction is perpendicular to the plane where the baffle is located.

[0094] In some embodiments, the first end of the blade in the first direction includes a slot extending in the second direction, and the second end of the blade in the first direction includes a protrusion that engages with the slot; the blade and adjacent blades are connected by the slot and the protrusion.

[0095] In some embodiments, the end face of the first end of the support column includes a groove that extends in a first direction, the cross-section of the groove is "V" shaped, and the cross-section of the groove is perpendicular to the first direction.

[0096] The coating knife also includes screws for fixing the support posts and the blade; wherein the blade is located in the clamping groove, and the screws pass through the support posts and the blade on both sides of the clamping groove.

[0097] In some embodiments, the coating rack further includes:

[0098] The fasteners are symmetrically arranged at both ends of the coating rack along the first direction for connecting to the machine.

[0099] In some embodiments, the fasteners include bolts, hooks, pins, etc.

[0100] In some embodiments, the elastic element includes a spring.

[0101] In some embodiments, the coating tool further includes:

[0102] The guide post is located inside the receiving cavity and passes through the spring. The first end of the guide post is connected to the bottom of the receiving cavity, and the second end of the guide post is suspended.

[0103] The second end of the support column includes a groove for accommodating the guide column. The support column is sleeved on the outer wall of the guide column, and the guide column and the support column are slidably connected.

[0104] In summary, the coating tool and machine of this utility model include: a coating rack, multiple receiving slots, multiple coating blades, and an elastic element; wherein, the coating rack is used to connect to the machine, the coating rack extends along a first direction, the first direction being perpendicular to the coating direction of the coating tool, the multiple receiving slots are located on the side of the coating rack facing the surface to be coated, and the multiple receiving slots are arranged along the first direction; wherein, the receiving slot includes an opening and a receiving cavity, the opening and the receiving cavity are connected, the cross-sectional width of the opening is smaller than the cross-sectional width of the receiving cavity, the coating blade includes a support column extending along a second direction, and a blade connected to the first end of the support column; the support column penetrates the opening, and the length of the support column is greater than the cross-sectional length of the opening in the second direction; wherein, the second direction is perpendicular to the plane where the first direction and the coating direction are located, the blades of the multiple coating blades are adjacent to each other, the elastic element is located in the receiving cavity, and the elastic element is connected to the bottom of the receiving cavity and the second end of the support column respectively; the elastic element can generate elastic deformation in the second direction. In this invention, the side of the coating holder facing the surface to be coated includes multiple receiving grooves arranged along a first direction. Each receiving groove includes an opening and a receiving cavity. Each elastic element is connected to a support column of a coating blade. The elastic element is located in the receiving cavity and is connected to the bottom of the receiving cavity and the support column respectively. The support column passes through the opening. The blade of the coating blade contacts the surface to be coated, so that during the coating process, when the coating blade contacts the surface to be coated, the coating tool can compress or stretch the elastic element according to the warpage of the surface to be coated, so that the coating blade can move in a second direction. Since each coating blade is independent of the others, it can be applied to wafers with different degrees of warpage in different areas, and thus is suitable for printing on large-size wafers with warpage.

[0105] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A coating tool, characterized in that, The coating tool includes: A coating rack for connecting to a machine base, the coating rack extending along a first direction; the first direction is perpendicular to the coating direction of the coating tool; Multiple receiving slots are located on the side of the coating rack facing the coating surface, and the multiple receiving slots are arranged along the first direction; wherein, each receiving slot includes an opening and a receiving cavity, the opening and the receiving cavity are in communication, and the cross-sectional width of the opening is smaller than the cross-sectional width of the receiving cavity; A plurality of coating blades, each coating blade including a support post extending along a second direction and a blade connected to a first end of the support post; the support post penetrates the opening, and the length of the support post is greater than the cross-sectional length of the opening in the second direction; wherein, the second direction is perpendicular to the plane containing the first direction and the coating direction; the blades of the plurality of coating blades are adjacent to each other; An elastic element is located within the accommodating cavity and is connected to the bottom of the accommodating cavity and the second end of the support column, respectively; the elastic element can generate elastic deformation in the second direction.

2. The coating tool according to claim 1, characterized in that, The coating knife also includes: A limiting member protrudes from the side wall of the second end of the support column, the second end being disposed opposite to the first end in the second direction; wherein, the portion of the support column from the position of the limiting member to the second end of the support column is located within the receiving cavity, the cross-sectional width of the opening is smaller than the lateral dimension of the limiting member, and the lateral dimension of the limiting member is smaller than the cross-sectional width of the receiving cavity.

3. The coating tool according to claim 1, characterized in that, The coating tool also includes: A baffle is located on both sides of the coating rack in the first direction. The baffle protrudes from the side of the coating rack facing the coating surface in the second direction. The first direction is perpendicular to the plane where the baffle is located.

4. The coating tool according to claim 1, characterized in that, The blade includes a slot extending along the second direction at a first end in the first direction, and a protrusion engaging with the slot at a second end in the first direction; the blade is connected to an adjacent blade by the slot and the protrusion.

5. The coating tool according to claim 1, characterized in that, The end face of the first end of the support column includes a clamping groove, the clamping groove extends in the first direction, the cross-section of the clamping groove is "V" shaped, and the cross-section of the clamping groove is perpendicular to the first direction; The coating knife further includes screws for fixing the support column and the blade; wherein the blade is located in the clamping groove, and the screws pass through the support column and the blade on both sides of the clamping groove.

6. The coating tool according to claim 1, characterized in that, The coating rack also includes: Fixing members are symmetrically arranged at both ends of the coating rack along the first direction for connecting to the machine base.

7. The coating tool according to claim 6, characterized in that, The fasteners include bolts, hooks, pins, etc.

8. The coating tool according to claim 1, characterized in that, The elastic element includes: a spring.

9. The coating tool according to claim 8, characterized in that, The coating tool also includes: A guide post is located inside the receiving cavity and passes through the spring. The first end of the guide post is connected to the bottom of the receiving cavity, and the second end of the guide post is suspended. The second end of the support column includes a groove for accommodating the guide column, the support column is sleeved on the outer wall of the guide column, and the guide column is slidably connected to the support column.

10. A machine tool, characterized in that, The machine includes the coating tool according to any one of claims 1-9.

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