A drag chain motion stage

The cable guide mechanism and adapter plate spring of the cable carrier motion table solve the problem of lack of cable guidance and support, improve motion accuracy and reduce equipment load, and enhance the installation space and integration of the equipment.

CN224601627UActive Publication Date: 2026-08-07YINGUAN SEMICON TECH CO LTD
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Patent Information

Application Number
CN202521758463.4
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-08-19
Publication Date
2026-08-07
Estimated Expiration
2035-08-19

AI Technical Summary

Technical Problem

In two-dimensional motion devices, the lack of guidance and support for the cables of the second-direction motion mechanism and/or the driven component cables affects the motion accuracy of the motion table.

Method used

The cable carrier motion table structure includes a first cable carrier guide mechanism and a transfer plate spring, which provides flexible rotation and guidance, reduces cable vibration, guides the first cable carrier structure through the first cable carrier guide mechanism, and connects the crossbeam carrier plate and the transfer plate through the transfer plate spring to realize the transfer of cables and weight transfer.

Benefits of technology

It improves the motion accuracy of the equipment, reduces the load on the crossbeam, avoids friction or jamming, increases the installation space, and reduces the size of the equipment by integrating the guide mechanism.

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Abstract

The application provides a drag chain motion table, and relates to the technical field of semiconductor manufacturing. The drag chain motion table comprises a base, a first direction motion mechanism arranged on the base, a cross beam connected with the first direction motion mechanism, a second direction motion mechanism arranged on the cross beam, and a cross beam carrier plate arranged on the cross beam. The first direction motion mechanism drives the cross beam to move along a first direction relative to the base. The second direction motion mechanism drives the cross beam carrier plate to move along a second direction on the cross beam. The drag chain motion table further comprises a first drag chain structure and a first drag chain guide mechanism. A free end of the first drag chain structure is configured to move along with the movement of the cross beam. One end of the first drag chain guide mechanism is fixedly connected with the free end of the first drag chain structure. The other end of the first drag chain guide mechanism is configured to move along the first direction relative to the base. The first drag chain guide mechanism is configured to be flexible at least for rotation around the first direction.
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