A drag chain motion stage

Abstract

The application provides a drag chain motion table, and relates to the technical field of semiconductor manufacturing. The drag chain motion table comprises a base, a first direction motion mechanism arranged on the base, a cross beam connected with the first direction motion mechanism, a second direction motion mechanism arranged on the cross beam, and a cross beam carrier plate arranged on the cross beam. The first direction motion mechanism drives the cross beam to move along a first direction relative to the base. The second direction motion mechanism drives the cross beam carrier plate to move along a second direction on the cross beam. The drag chain motion table further comprises a first drag chain structure and a first drag chain guide mechanism. A free end of the first drag chain structure is configured to move along with the movement of the cross beam. One end of the first drag chain guide mechanism is fixedly connected with the free end of the first drag chain structure. The other end of the first drag chain guide mechanism is configured to move along the first direction relative to the base. The first drag chain guide mechanism is configured to be flexible at least for rotation around the first direction.

Description

Technical Field

[0001] This specification relates to the field of semiconductor manufacturing technology, and in particular to a drag chain motion table. Background Technology

[0002] The motion table or motion device may include a two-dimensional motion device capable of achieving precise movement in a first direction (e.g., the X-axis) and / or a second direction (e.g., the Y-axis) within a horizontal plane. The two-dimensional motion device may include a first-direction motion mechanism (e.g., an X-axis motion mechanism) and a second-direction motion mechanism (e.g., a Y-axis motion mechanism). The second-direction motion mechanism can be used to drive a driven component to move along the second direction, and the first-direction motion mechanism can be used to drive the second-direction motion mechanism and the driven component as a whole to move along the first direction, thereby achieving two-dimensional movement of the driven component.

[0003] The second-direction motion mechanism may have a second-direction motion mechanism cable, which moves along the first direction as the second-direction motion mechanism moves. The driven component may have a driven component cable, which moves along the first and / or second directions as the driven component moves. In some relevant application scenarios, the second-direction motion mechanism cable and / or the driven component cable lack guidance and support, which can easily affect the motion accuracy of the motion table. Utility Model Content

[0004] This specification provides one or more embodiments of a cable chain motion table, including: a base, a first direction motion mechanism disposed on the base, a crossbeam connected to the first direction motion mechanism, a second direction motion mechanism disposed on the crossbeam, and a crossbeam carrier plate disposed on the crossbeam; the first direction motion mechanism drives the crossbeam to move relative to the base along a first direction; the second direction motion mechanism drives the crossbeam carrier plate to move on the crossbeam along a second direction; the cable chain motion table further includes: a first cable chain structure and a first cable chain guide mechanism, the free end of the first cable chain structure being configured to move with the movement of the crossbeam, one end of the first cable chain guide mechanism being fixedly connected to the free end of the first cable chain structure, and the other end of the first cable chain guide mechanism being configured to move relative to the base along the first direction; the first cable chain guide mechanism being configured to be flexible at least for rotation about the first direction.

[0005] In some embodiments, the first cable chain guiding mechanism includes: a first cable chain guide rail directly or indirectly disposed on the base, a first cable chain guide slider matching the first cable chain guide rail, and a first cable chain guide spring connecting the first cable chain guide slider and the free end of the first cable chain structure; the first cable chain guide spring is configured to be flexible with respect to rotation about a first direction, or the first cable chain guide spring is configured to be flexible with respect to rotation about the first direction and rotation about a third direction; the first direction intersects the second direction, and the third direction is perpendicular to the first direction and the second direction.

[0006] In some embodiments, the drag chain motion table further includes: a beam adapter plate disposed on the beam and an adapter plate spring connecting the beam carrier plate and the beam adapter plate; the adapter plate spring is configured to be flexible at least for rotation about a second direction.

[0007] In some embodiments, the crossbeam has adjacent first and second surfaces, with an included angle between the first and second surfaces; the crossbeam carrier plate is movable along the second direction on the first surface of the crossbeam; and the crossbeam adapter plate is movable along the second direction on the second surface of the crossbeam.

[0008] In some embodiments, the transition leaf spring is configured to be flexible with respect to rotation about a second direction, or the transition leaf spring is configured to be flexible with respect to rotation about the second direction and with respect to rotation about a third direction; the transition leaf spring is also configured to be rigid in the second direction and the third direction; the first direction intersects the second direction, and the third direction is perpendicular to the first direction and the second direction.

[0009] In some embodiments, the first surface is provided with a second direction guiding mechanism for guiding the movement of the crossbeam carrier plate along the second direction; the second surface is provided with an auxiliary guiding mechanism for guiding the movement of the crossbeam adapter plate along the second direction; the crossbeam adapter plate is used for cable transfer; the auxiliary guiding mechanism at least partially supports the weight of the crossbeam adapter plate, or the auxiliary guiding mechanism at least partially supports the weight of the crossbeam adapter plate and the cable connected to the crossbeam adapter plate.

[0010] In some embodiments, the first surface is located on the side of the crossbeam, and the second surface is located on the upper surface of the crossbeam; two second direction guide mechanisms are provided on the first surface, and a second direction motion mechanism is disposed between the two second direction guide mechanisms.

[0011] In some embodiments, the drag chain motion table further includes: a second drag chain structure, the fixed end of the second drag chain structure being directly or indirectly fixedly connected to the crossbeam, and the free end of the second drag chain structure being configured to move with the movement of the crossbeam carrier plate.

[0012] In some embodiments, the drag chain motion table further includes a cable tray, which is fixedly connected to the crossbeam.

[0013] In some embodiments, one end of the cable tray protrudes from the crossbeam and is connected to the free end of the first cable chain structure; the other end of the cable tray faces the second cable chain structure which is directly or indirectly fixedly connected to the crossbeam.

[0014] In some embodiments, the wiring trough is fixed to the lower surface of the crossbeam or suspended from the lower surface of the crossbeam by a wiring trough connector.

[0015] In some embodiments, the second cable chain structure is fixed to the lower surface of the crossbeam or suspended from the lower surface of the crossbeam by a second cable chain structure connector.

[0016] In some embodiments, the cable chain motion table further includes: a first directional support base disposed on the base and extending along the first direction; the first directional support base provides one or more of a first support surface, a second support surface, and a third support surface; a first directional motion mechanism is provided on the first support surface; a first directional guide mechanism is provided on the second support surface for guiding the movement of the crossbeam along the first direction; and a first cable chain guide mechanism is provided on the third support surface for guiding the movement of the free end of the first cable chain structure along the first direction.

[0017] The beneficial effects that the embodiments of this specification may bring include, but are not limited to: (1) the first drag chain guide mechanism guides the first drag chain structure to move with the crossbeam, reducing the vibration of the crossbeam and improving the motion accuracy of the equipment; (2) the first drag chain guide mechanism can bear part of the weight of the first drag chain structure, reducing the load on the crossbeam; (3) the first drag chain guide mechanism has rotational flexibility in the first direction, which can realize the decoupling between the crossbeam and the first drag chain structure; (4) the crossbeam adapter plate can realize cable transfer and transfer the weight of the cable to the crossbeam instead of the crossbeam carrier plate, so as to reduce the load on the crossbeam carrier plate and improve the motion accuracy of the crossbeam carrier plate; (5) the crossbeam carrier plate and the crossbeam adapter plate are respectively arranged on the first surface and the second surface, providing installation space and working space for the driven components on the crossbeam carrier plate, and facilitating the crossbeam to bear the weight of the crossbeam adapter plate and the cables on it; (6) the adapter plate springs are connected (7) The crossbeam carrier plate and the crossbeam adapter plate enable the crossbeam adapter plate to move synchronously with the crossbeam carrier plate; (8) The decoupling between the crossbeam carrier plate and the crossbeam adapter plate is achieved through the adapter plate spring, avoiding friction or jamming caused by installation accuracy or processing accuracy; (9) The cable near the crossbeam carrier plate is stored, supported and guided by the second drag chain structure, so that the cable can follow the movement of the crossbeam carrier plate; (10) The cable is further supported by the cable tray; (11) The free end of the first drag chain structure is pulled to move with the crossbeam through the cable tray; (12) The first direction support base is arranged, and the first direction movement mechanism, the first direction guide rail and the first drag chain guide mechanism are integrated on multiple surfaces of the first direction support base, reducing the overall volume of the equipment and having a high degree of integration; (13) Part of the weight of the first drag chain structure is transferred to the first direction support base through the first direction guide mechanism, reducing the load on the crossbeam. It should be noted that different embodiments may produce different beneficial effects. In different embodiments, the beneficial effects may be any one or a combination of the above, or any other possible beneficial effects. Attached Figure Description

[0018] This specification will be further described by way of exemplary embodiments, which will be described in detail with reference to the accompanying drawings. The same numbers in the drawings denote the same structures or steps.

[0019] Figure 1 , Figure 2 This is a schematic diagram of a cable carrier motion table according to some embodiments of this specification.

[0020] Figure 3 This is a cross-sectional schematic diagram of a cable carrier motion table according to some embodiments of this specification.

[0021] Figure 4 This is a schematic diagram of the crossbeam adapter plate of the cable carrier motion table according to some embodiments of this specification.

[0022] Figure 5 This is a schematic diagram of the cable tray guide mechanism of the drag chain motion table according to some embodiments of this specification.

[0023] The diagram shows: 1 Base; 11 First Direction Support Base; 111 First Support Surface; 112 Second Support Surface; 113 Third Support Surface; 12 First Direction Guide Mechanism; 2 First Direction Motion Mechanism; 3 Crossbeam; 31 First Surface; 32 Second Surface; 4 Second Direction Motion Mechanism; 5 Crossbeam Carrier Plate; 6 Crossbeam Adapter Plate; 7 Adapter Plate Spring; 81 Second Direction Guide Mechanism; 82 Auxiliary Guide Mechanism; 83 First Cable Carrier Guide Mechanism; 831 First Cable Carrier Guide Spring; 832 First Cable Carrier Guide Rail; 833 First Cable Carrier Guide Slider; 834 First Cable Carrier Guide Spring Connector; 9 Cable Tray; 91 Cable Tray Connector; 101 First Cable Carrier Structure; 102 Second Cable Carrier Structure; 1021 Second Cable Carrier Structure Connector. Detailed Implementation

[0024] To more clearly illustrate the technical solutions of the embodiments in this specification, the embodiments will be described in detail below with reference to the accompanying drawings. Obviously, the content described below are some examples or embodiments of this specification. For those skilled in the art, without creative effort, the technical solutions or means disclosed in this specification can be applied to other scenarios based on this technical content.

[0025] It should be understood that the terms "system," "device," "equipment," "part" and / or "component," "unit" and / or "module" used in this specification are a method of distinguishing different components, elements, parts, sections, or assemblies at different levels. However, if other words can achieve the same purpose, they may be replaced by other expressions.

[0026] Unless otherwise specified, the technical terms used to describe components, elements, etc. in this specification are not singular but may include plural. Generally speaking, terms such as "comprising" or "including" only indicate that explicitly identified steps, elements, or components are included, and these steps, elements, and components do not constitute an exclusive list, as the described method or apparatus may also include other steps or components.

[0027] In the description of this specification, it should be understood that the directional descriptions, such as up, down, front, back, left, and right, indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings. These descriptions are for the convenience of describing this application and for simplification, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. In the description of this specification, unless otherwise expressly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly. Those skilled in the art can reasonably determine the specific meaning of the above terms in this specification in conjunction with the specific content of the technical solution.

[0028] The motion table or motion device may include a two-dimensional motion device capable of achieving precise movement in a first direction (e.g., the X-axis) and / or a second direction (e.g., the Y-axis) within a horizontal plane. The two-dimensional motion device may include a first-direction motion mechanism (e.g., an X-axis motion mechanism) and a second-direction motion mechanism (e.g., a Y-axis motion mechanism). The second-direction motion mechanism can be used to drive a driven component to move along the second direction, and the first-direction motion mechanism can be used to drive the second-direction motion mechanism and the driven component as a whole to move along the first direction, thereby achieving two-dimensional movement of the driven component.

[0029] The two-dimensional motion device can be a gantry motion device, which may include two parallel first-direction motion mechanisms and at least one second-direction motion mechanism. The two parallel first-direction motion mechanisms drive the crossbeam and related components on the crossbeam to move along the first direction, while the second-direction motion mechanism and the driven components driven by the second-direction motion mechanism can be arranged on the crossbeam.

[0030] The driven component can be an end-effector used to perform related functions. For example, the driven component on a two-dimensional motion device can be a bonding head module used to implement chip bonding processes. In some related embodiments, the second-direction motion mechanism can have a second-direction motion mechanism cable, which moves along the first direction with the movement of the second-direction motion mechanism. In some related embodiments, the driven component can have a driven component cable, which moves along the first and / or second directions with the movement of the driven component. In some related application scenarios, the second-direction motion mechanism cable and / or the driven component cable lack guidance and support, which can easily affect the motion accuracy of the motion stage.

[0031] Based on this, one or more embodiments of this specification provide a cable carrier motion table, which guides the cable through a first cable carrier structure and a first cable carrier guide mechanism, so that the cable can move with the movement of the crossbeam, thereby reducing or avoiding the influence of the cable on the motion accuracy of the motion table.

[0032] Figure 1 , Figure 2 This is a schematic diagram of a cable chain motion table according to some embodiments of this specification. Figure 3 This is a cross-sectional schematic diagram of a cable chain moving table according to some embodiments of this specification. See also Figures 1 to 3 As shown, in one or more embodiments of this specification, the cable chain motion table may include: a base 1, a first-direction motion mechanism 2 disposed on the base 1, a crossbeam 3 connected to the first-direction motion mechanism 2, a second-direction motion mechanism 4 disposed on the crossbeam 3, and a crossbeam carrier plate 5 disposed on the crossbeam 3. The first-direction motion mechanism 2 drives the crossbeam 3 to move relative to the base 1 in a first direction X, and the second-direction motion mechanism 4 drives the crossbeam carrier plate 5 to move on the crossbeam 3 in a second direction Y. In some embodiments, the base 1 is used to support the first-direction motion mechanism 2, the crossbeam 3, the second-direction motion mechanism 4, the crossbeam carrier plate 5, and the driven component. In some embodiments, the first-direction motion mechanism 2 is a linear motion mechanism. In some embodiments, the second-direction motion mechanism 4 is a linear motion mechanism. In some embodiments, the driven component may be arranged on the crossbeam carrier plate 5.

[0033] In some embodiments, the second direction Y can be the extension direction of the beam 3, and the first direction X can intersect the second direction Y (e.g., the first direction X is perpendicular to the second direction Y). In some embodiments, the first direction X and the second direction Y can be located in the same plane, for example, in the same horizontal plane.

[0034] In some embodiments, the cable carrier motion table further includes a first cable carrier structure 101, the free end of which is configured to move with the movement of the crossbeam 3. In some embodiments, the first cable carrier structure 101 has a cable inside. In some embodiments, the cable may be a second direction motion mechanism cable of a second direction motion mechanism and / or a driven component cable of a driven component. In some embodiments, the first cable carrier structure 101 may include a fixed end and a free end. In some embodiments, the fixed end of the first cable carrier structure 101 is fixedly disposed, for example, fixed to the base 1. In some embodiments, the free end of the first cable carrier structure 101 is movably disposed to allow it to move with the movement of the crossbeam 3.

[0035] In some embodiments, the free end of the first cable chain structure 101 can be directly or indirectly connected to the crossbeam 3 to allow the crossbeam 3 to drive the free end of the first cable chain structure 101 to move. In some embodiments, the cables inside the first cable chain structure 101 extend from the free end and are connected to components on the crossbeam 3 (e.g., connected to the second direction motion mechanism 4 and / or connected to the driven components on the crossbeam carrier plate 5). When the crossbeam 3 moves along the first direction X, the cables extending from the free end exert traction on the free end of the first cable chain structure 101, thereby causing the free end of the first cable chain structure 101 to move with the movement of the crossbeam 3.

[0036] In some embodiments, the cable chain motion table further includes a first cable chain guide mechanism 83, one end of which is directly or indirectly fixedly connected to the free end of the first cable chain structure 101. In some embodiments, the other end of the first cable chain guide mechanism 83 is configured to move relative to the base 1 in a first direction X to guide the first cable chain guide mechanism 83 and the free end of the first cable chain structure 101 connected to the first cable chain guide mechanism 83.

[0037] In some embodiments, the first cable chain structure 101 vibrates during the movement of the crossbeam 3, which affects the movement of the crossbeam 3. In some applications, this vibration may reduce the movement accuracy of the crossbeam 3. In some applications, this vibration may reduce the working accuracy of the second-direction motion mechanism on the crossbeam 3. Due to the guiding effect of the first cable chain guide mechanism 83 on the free end of the first cable chain structure 101, the vibration at the free end of the first cable chain structure 101 can be reduced, thereby reducing the vibration of the cable extending from the free end of the first cable chain structure 101, and thus reducing the impact of this vibration on the crossbeam 3.

[0038] In some embodiments, the first drag chain guide mechanism 83 may also provide additional support or tension to the first drag chain structure 101 during the process of guiding the first drag chain structure 101, thereby reducing the weight of the first drag chain structure 101 borne by the crossbeam 3 (for example, reducing the downward pulling effect on the crossbeam 3 due to the weight of the first drag chain structure 101, or reducing the unbalanced effect caused by the first drag chain structure 101 being located on one side of the crossbeam 3).

[0039] In some embodiments, the first drag chain guide mechanism 83 is configured to be flexible at least with respect to rotation about a first direction X, so as to decouple the guidance of the first drag chain guide mechanism 83.

[0040] In some embodiments, see Figures 1 to 3 as well as Figure 5As shown, the first cable chain guiding mechanism 83 includes: a first cable chain guide rail 832 directly or indirectly disposed on the base 1, a first cable chain guide slider 833 matching the first cable chain guide rail 832, and a first cable chain guide spring 831 connecting the first cable chain guide slider 833 and the free end of the first cable chain structure 101. In some embodiments, the first cable chain guide rail 832 extends in a first direction X. In some embodiments, the first cable chain guide spring 831 can be fixedly connected to the free end of the first cable chain structure 101 through a first cable chain guide spring connector 834.

[0041] In some embodiments, the first cable chain guide spring 831 may be arranged below the first cable chain guide slider 833, and the free end of the first cable chain structure 101 is suspended on the first cable chain guide spring 831 (e.g., suspended on the first cable chain guide spring connector 834). In some embodiments, the first cable chain guide slider 833 and the first cable chain guide spring 831 provide the aforementioned tension to the free end of the first cable chain structure 101, which may be borne by the first cable chain guide rail 832.

[0042] In some embodiments, the first cable chain guide spring 831 is configured to be flexible with respect to rotation about a first direction X, allowing the free end of the first cable chain structure 101 to bend relative to the first cable chain guide slider 833 about the first direction X. In some embodiments, the first cable chain guide spring 831 may be a sheet-like structure or a plate-like structure. In some embodiments, the mounting surface of the first cable chain guide rail 832 and the mounting surface of the first cable chain guide spring connector 834 may not be parallel due to issues such as machining accuracy, resulting in friction or jamming during movement. By providing a first cable chain guide spring 831 that can bend about the first direction X, the problems of friction or jamming can be avoided.

[0043] In other embodiments, the first cable chain guide spring 831 is configured to be flexible for rotation about a first direction X and a third direction Z, the third direction Z being perpendicular to the first direction X and the second direction Y. In this embodiment, the first cable chain guide spring 831 can not only bend about the first direction X, but also twist about the third direction Z to further avoid friction or jamming. In this embodiment, the twisting of the first cable chain guide spring 831 about the third direction Z can refer to: Figure 5 With the orientation of the first cable chain guide slider 833 unchanged, the front end of the first cable chain guide spring connector 834 moves to the left relative to the first cable chain guide slider 833, and the rear end of the first cable chain guide spring connector 834 moves to the right relative to the first cable chain guide slider 833, thereby causing the first cable chain guide spring 831 to twist; or Figure 5When the orientation of the first drag chain guide slider 833 remains unchanged, the front end of the first drag chain guide spring connector 834 moves to the right relative to the first drag chain guide slider 833, and the rear end of the first drag chain guide spring connector 834 moves to the left relative to the first drag chain guide slider 833, thereby causing the first drag chain guide spring 831 to twist, etc.

[0044] In one or more embodiments of this specification, see Figures 1 to 3 as well as Figure 4 As shown, the cable chain motion table also includes: a crossbeam adapter plate 6 disposed on the crossbeam 3 and an adapter plate spring 7 connecting the crossbeam carrier plate 5 and the crossbeam adapter plate 6. In some embodiments, the crossbeam adapter plate 6 is used to transfer cables (e.g., the driven component cable of the driven component). By arranging the crossbeam adapter plate 6, the weight of the crossbeam adapter plate 6 and the driven component cable on it is borne by the crossbeam adapter plate 6 and the crossbeam 3, avoiding the driven component cable affecting the movement of the crossbeam carrier plate 5 in the second direction Y.

[0045] In some embodiments, the crossbeam adapter plate 6 is configured to move along a second direction Y. In some embodiments, the crossbeam adapter plate 6 can move along with the crossbeam carrier plate 5 along the second direction Y. In some embodiments, the crossbeam carrier plate 5 drives the crossbeam adapter plate 6 to move along the second direction Y via the adapter plate spring 7. In some embodiments, the second direction motion mechanism 4 drives the crossbeam carrier plate 5 and the crossbeam adapter plate 6 to move along the second direction Y.

[0046] In some embodiments, the adapter leaf spring 7 has a sheet-like structure. In some embodiments, the upper part of the adapter leaf spring 7 is fixedly connected to the crossbeam adapter plate 6. In some embodiments, the lower part of the adapter leaf spring 7 is fixedly connected to the crossbeam carrier plate 5. In some embodiments, a portion of the crossbeam adapter plate 6 may be located above the crossbeam carrier plate 5 so that the adapter leaf spring 7 can be as undeformed as possible in its initial state (e.g., arranged as vertically as possible). In some embodiments, there is a gap between the crossbeam adapter plate 6 and the crossbeam carrier plate 5, and the adapter leaf spring 7 may be arranged within the gap between the crossbeam adapter plate 6 and the crossbeam carrier plate 5.

[0047] In some embodiments, the adapter leaf spring 7 is configured to be flexible at least for rotation about the second direction Y. In some embodiments, the running track of the crossbeam carrier plate 5 and the moving track of the crossbeam adapter plate may not be parallel due to problems such as machining accuracy or installation accuracy, thereby generating friction or jamming during movement. By providing an adapter leaf spring 7 that can bend about the second direction Y, the problems of friction or jamming can be avoided.

[0048] In other embodiments, the adapter leaf spring 7 is configured to be flexible for rotation about a second direction Y and rotation about a third direction Z, the third direction Z being perpendicular to the first direction X and the second direction Y. In some embodiments, the adapter leaf spring 7 can be a sheet-like structure or a plate-like structure. In this embodiment, the adapter leaf spring 7 can not only bend about the first direction X, but also twist about the third direction Z to further avoid friction or jamming. In this embodiment, the twisting of the adapter leaf spring 7 about the third direction Z can refer to: Figure 4 With the upper part of the transition spring 7 remaining unchanged, the front end of the lower part of the transition spring 7 moves to the left relative to its upper part, and the rear end of the lower part of the transition spring 7 moves to the right relative to its upper part, thereby causing a twist in the middle of the transition spring 7; or Figure 4 With the upper part of the transition spring 7 remaining unchanged, the front end of the lower part of the transition spring 7 moves to the right relative to its upper part, and the rear end of the lower part of the transition spring 7 moves to the leftmost relative to its upper part, thereby causing the middle part of the transition spring 7 to twist, etc.

[0049] In one or more of the above embodiments, the transition leaf spring 7 is further configured to be rigid in the second direction Y, so that the crossbeam carrier plate 5 can pull the crossbeam transition plate 6 to move in the second direction Y. In one or more of the above embodiments, the transition leaf spring 7 is further configured to be rigid in the third direction Z, so as to support the crossbeam transition plate 6 in the third direction Z based on the crossbeam carrier plate 5, or to provide a third-direction Z-force to the crossbeam carrier plate 5 based on the crossbeam transition plate 6.

[0050] In one or more embodiments of this specification, the crossbeam 3 has adjacent first surfaces 31 and second surfaces 32, with an included angle between the first surfaces 31 and the second surfaces 32. In some embodiments, the crossbeam carrier plate 5 is movable along a second direction Y on the first surface 31 of the crossbeam 3. In some embodiments, the crossbeam adapter plate 6 is movable along a second direction Y on the second surface 32 of the crossbeam 3.

[0051] In some embodiments, the first surface 31 is a side surface of the crossbeam 3 to facilitate the arrangement of the driven components, such as providing lateral space for the end-function device. In some embodiments, the second surface 32 is the upper surface of the crossbeam 3 to allow the crossbeam 3 to bear the weight of the crossbeam adapter plate 6 and the driven component cables thereon. In some embodiments, the first surface 31 may be perpendicular to the second surface 32. In some embodiments, the first surface 31 may be a vertical surface. In some embodiments, the second surface 32 may be a horizontal surface.

[0052] In some embodiments, the first surface 31 is provided with a second direction guide mechanism 81 for guiding the movement of the crossbeam carrier plate 5 along the second direction Y. In some embodiments, the second direction guide mechanism 81 may include a second direction guide rail extending along the second direction Y and fixed to the first surface 31, and a second direction guide slider that matches the second direction guide rail, wherein the crossbeam carrier plate 5 is fixedly connected to the second direction guide slider.

[0053] In some embodiments, the second surface 32 is provided with an auxiliary guide mechanism 82 for guiding the movement of the crossbeam adapter plate 6 along the second direction Y. In some embodiments, the auxiliary guide mechanism 82 may include an auxiliary guide rail fixed to the second surface 32 extending along the second direction Y, and an auxiliary guide slider that matches the auxiliary guide rail, with the crossbeam adapter plate 6 fixedly connected to the auxiliary guide slider.

[0054] In some embodiments, the auxiliary guide mechanism 82 at least partially supports the weight of the crossbeam adapter plate 6, or the auxiliary guide mechanism 82 at least partially supports the weight of the crossbeam adapter plate 6 and the cables connected to the crossbeam adapter plate 6.

[0055] In some embodiments, two second-direction guide mechanisms 81 are provided on the first surface 31, and a second-direction motion mechanism 4 is disposed between the two second-direction guide mechanisms 81. In some embodiments, the second-direction motion mechanism 4 may include a second-direction stator disposed between the two second-direction guide mechanisms 81 and a second-direction mover connected to the crossbeam carrier plate 5.

[0056] In one or more embodiments of this specification, see Figures 1 to 3 As shown, the drag chain motion table also includes: a second drag chain structure 102, the fixed end of the second drag chain structure 102 being directly or indirectly fixedly connected to the crossbeam 3, and the free end of the second drag chain structure 102 being configured to move with the movement of the crossbeam carrier plate 5.

[0057] In some embodiments, the second cable chain structure 102 is used to receive cables that extend partly or entirely from the interior of the first cable chain structure 101. In some embodiments, cables entering the interior of the second cable chain structure 102 extend from the free end of the second cable chain structure 102 and are connected to the driven component on the crossbeam carrier plate 5 and / or are transferred via the crossbeam adapter plate 6.

[0058] In some embodiments, the cable carrier table further includes a cable routing groove 9, which is fixedly connected to the crossbeam 3. In some embodiments, the cable routing groove 9 provides support for a portion of a cable. In some embodiments, the cable routing groove 9 can be a closed tubular structure or an open groove structure. In some embodiments, a cable extending from the first cable carrier structure 101 passes through the cable routing groove into the interior of the second cable carrier structure 102. In some embodiments, a gap exists between the cable routing groove 9 and the first cable carrier structure 101 to facilitate cable routing. In some embodiments, a gap exists between the cable routing groove 9 and the second cable carrier structure 102 to facilitate cable routing.

[0059] In some embodiments, one end of the cable tray 9 protrudes from the crossbeam 3 and is connected to the free end of the first cable chain structure 101. In some embodiments, the crossbeam 3 moves along the second direction Y to drive the cable tray 9 to move with the crossbeam 3, and the cable tray 9 pulls the free end of the first cable chain structure 101 to move along the second direction Y.

[0060] In some embodiments, the cable tray 9 is a rigid member. In some embodiments, the free end of the first cable chain structure 101 has a rigid member. In some embodiments, the cable tray 9 is fixedly connected to the rigid member of the free end of the first cable chain structure 101 to pull the free end of the first cable chain structure 101 to move along the second direction Y.

[0061] In some embodiments, one end of the first drag chain guide mechanism 83 can be fixedly connected to the free end of the first drag chain structure 101 through the wiring groove 9. For example, the first drag chain guide spring 831 of the first drag chain guide mechanism 83 is connected to the wiring groove 9 through the first drag chain guide spring connector 834.

[0062] In some embodiments, the other end of the cable tray 9 faces the second drag chain structure 102 which is directly or indirectly fixedly connected to the crossbeam 3.

[0063] In some embodiments, the cable tray 9 is fixed to the lower surface of the crossbeam 3 or suspended from the lower surface of the crossbeam 3 by the cable tray connector 91. In some embodiments, the second cable chain structure 102 is fixed to the lower surface of the crossbeam 3 or suspended from the lower surface of the crossbeam 3 by the second cable chain structure connector 1021.

[0064] In one or more embodiments of this specification, see Figure 2 As shown, the cable chain motion table further includes a first direction support base 11, which is disposed on the base 1 and extends along a first direction X. In some embodiments, the first direction support base 11 provides one or more of a first support surface 111, a second support surface 112, and a third support surface 113.

[0065] In some embodiments, a first directional motion mechanism 2 is provided on the first support surface 111.

[0066] In some embodiments, a first direction guide mechanism 12 is provided on the second support surface 112 for guiding the movement of the crossbeam 3 along the first direction X.

[0067] In some embodiments, a first cable chain guide mechanism 83 is provided on the third support surface 113 for guiding the movement of the free end of the first cable chain structure 101 along the first direction X. In some embodiments, a first cable chain guide rail 832 may be arranged on the third support surface 113. In some embodiments, the third support surface 113 may be a side or part of a side of the first direction support base 11. In some embodiments, a part of the first cable chain structure 101 is suspended from bottom to top on the third support surface 113 of the first direction support base 11 via a first cable chain guide spring connector 834, a first cable chain guide spring 831, a first cable chain guide slider 833, and a first cable chain guide rail 832.

[0068] The basic concepts have been described above. It is obvious that the detailed disclosure above is merely illustrative and does not constitute a limitation of this specification. Although not explicitly stated herein, various modifications, improvements, and corrections may be made to this specification by those skilled in the art. Such modifications, improvements, and corrections are taught in this specification and therefore remain within the spirit and scope of the exemplary embodiments described herein.

Claims

1. A cable chain motion table, characterized in that, include: The base (1), the first direction motion mechanism (2) provided on the base (1), the crossbeam (3) connected to the first direction motion mechanism (2), the second direction motion mechanism (4) provided on the crossbeam (3), and the crossbeam carrier plate (5) provided on the crossbeam (3). The first direction motion mechanism (2) drives the crossbeam (3) to move relative to the base (1) in the first direction (X); The second direction motion mechanism (4) drives the crossbeam carrier plate (5) to move along the second direction (Y) on the crossbeam (3); The cable carrier motion table further includes: a first cable carrier structure (101) and a first cable carrier guide mechanism (83), wherein the free end of the first cable carrier structure (101) is configured to move with the movement of the crossbeam (3), one end of the first cable carrier guide mechanism (83) is fixedly connected to the free end of the first cable carrier structure (101), and the other end of the first cable carrier guide mechanism (83) is configured to move relative to the base (1) along the first direction (X); The first drag chain guide mechanism (83) is configured to be flexible at least for rotation about a first direction (X).

2. The cable chain motion table according to claim 1, characterized in that, The first cable chain guide mechanism (83) includes: a first cable chain guide rail (832) directly or indirectly disposed on the base (1), a first cable chain guide slider (833) matching the first cable chain guide rail (832), and a first cable chain guide spring (831) connecting the first cable chain guide slider (833) and the free end of the first cable chain structure (101). The first cable chain guide spring (831) is configured to be flexible for rotation about a first direction (X), or the first cable chain guide spring (831) is configured to be flexible for rotation about both the first direction (X) and a third direction (Z). The first direction (X) intersects the second direction (Y), and the third direction (Z) is perpendicular to the first direction (X) and the second direction (Y).

3. The cable chain motion table according to claim 1, characterized in that, Also includes: A beam transition plate (6) is provided on the beam (3) and a transition plate spring (7) connecting the beam carrier plate (5) and the beam transition plate (6). The adapter leaf spring (7) is configured to be flexible at least for rotation about the second direction (Y).

4. The cable chain motion table according to claim 3, characterized in that, The crossbeam (3) has an adjacent first surface (31) and a second surface (32), and there is an included angle between the first surface (31) and the second surface (32); The crossbeam carrier plate (5) is capable of moving along the second direction (Y) on the first surface (31) of the crossbeam (3); The crossbeam adapter plate (6) is capable of moving along the second direction (Y) on the second surface (32) of the crossbeam (3).

5. The cable chain motion table according to claim 4, characterized in that, The adapter leaf spring (7) is configured to be flexible for rotation about the second direction (Y), or the adapter leaf spring (7) is configured to be flexible for rotation about the second direction (Y) and for rotation about the third direction (Z). The adapter leaf spring (7) is also configured to be rigid in the second direction (Y) and the third direction (Z); The first direction (X) intersects the second direction (Y), and the third direction (Z) is perpendicular to the first direction (X) and the second direction (Y).

6. The cable chain motion table according to claim 4 or 5, characterized in that, The first surface (31) is provided with a second direction guide mechanism (81) for guiding the movement of the crossbeam plate (5) along the second direction (Y); The second surface (32) is provided with an auxiliary guide mechanism (82) for guiding the movement of the crossbeam transition plate (6) along the second direction (Y); The crossbeam adapter plate (6) is used for cable transfer; The auxiliary guide mechanism (82) at least partially supports the weight of the crossbeam adapter plate (6), or the auxiliary guide mechanism (82) at least partially supports the weight of the crossbeam adapter plate (6) and the cables connected to the crossbeam adapter plate (6).

7. The cable chain motion table according to claim 6, characterized in that, The first surface (31) is located on the side of the crossbeam (3), and the second surface (32) is located on the upper surface of the crossbeam (3); Two second direction guide mechanisms (81) are provided on the first surface (31), and the second direction motion mechanism (4) is located between the two second direction guide mechanisms (81).

8. The cable chain motion table according to claim 3, characterized in that, Also includes: The second drag chain structure (102) has a fixed end that is directly or indirectly fixedly connected to the crossbeam (3), and the free end of the second drag chain structure (102) is configured to move with the movement of the crossbeam carrier plate (5).

9. The cable chain motion table according to claim 1, characterized in that, Also includes: The cable tray (9) is fixedly connected to the crossbeam (3).

10. The cable chain motion table according to claim 9, characterized in that, One end of the cable tray (9) protrudes from the crossbeam (3) and is connected to the free end of the first drag chain structure (101); The other end of the cable tray (9) faces the second drag chain structure (102) which is directly or indirectly fixedly connected to the crossbeam (3).

11. The cable chain motion table according to claim 7, characterized in that, Also includes: A first direction support base (11) is disposed on the base (1) and extends along the first direction (X); The first directional support base (11) provides one or more of a first support surface (111), a second support surface (112), and a third support surface (113); The first support surface (111) is provided with the first direction movement mechanism (2); The second support surface (112) is provided with a first direction guide mechanism (12) for guiding the movement of the crossbeam (3) along the first direction (X); The third support surface (113) is provided with a first drag chain guide mechanism (83) for guiding the movement of the free end of the first drag chain structure (101) along the first direction (X).

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