Anti-reflective and anti-reflective membranes

Abstract

This invention provides an antireflective coating, comprising: a substrate; and alternatingly stacked high-refractive-index layers and low-refractive-index layers along the thickness direction of the substrate, wherein the high-refractive-index layers are made of titanium pentoxide and the low-refractive-index layers are made of silicon aluminum oxide; the alternatingly stacked high-refractive-index and low-refractive-index layers along the thickness direction of the substrate sequentially include a first low-refractive-index layer, a first high-refractive-index layer, a second low-refractive-index layer, a second high-refractive-index layer, a third low-refractive-index layer, a third high-refractive-index layer, and a fourth low-refractive-index layer; the physical thickness of the second high-refractive-index layer is 143nm-130nm, and the physical thickness of the fourth low-refractive-index layer is 123nm-130nm. This invention improves the adhesion between the deposited antireflective coating and the substrate, and reduces the reflectivity of the antireflective coating in the near-infrared range.

Description

Technical Field

[0001] This utility model relates to the field of membrane structure technology, and in particular to an anti-reflection and anti-reflection membrane. Background Technology

[0002] In pursuit of portability, infrared sensors in AR / VR smart wearable devices are often made of plastic. However, the reflectivity of the coating on the surface of these sensors is too high in the near-infrared band, affecting signal transmission and hindering accurate motion tracking and data acquisition. Furthermore, existing anti-reflective coatings have poor light transmission performance and poor adhesion to plastic PC substrates, resulting in poor performance of optical components with these coatings.

[0003] Therefore, it is necessary to provide a novel antireflective and anti-reflective film to solve the aforementioned problems existing in the prior art. Utility Model Content

[0004] The purpose of this invention is to provide an anti-reflection and anti-reflection film to solve at least one defect in the prior art, improve the adhesion between the deposited anti-reflection and anti-reflection film and the substrate, and reduce the reflectivity of the anti-reflection and anti-reflection film in the near-infrared light range.

[0005] To achieve the above objectives, the antireflective and anti-reflective film of this invention comprises: a substrate; and alternatingly stacked high-refractive-index layers and low-refractive-index layers along the thickness direction of the substrate, wherein the high-refractive-index layers are made of titanium pentoxide and the low-refractive-index layers are made of silicon aluminum oxide; along the thickness direction of the substrate, the alternatingly stacked high-refractive-index layers and low-refractive-index layers sequentially comprise a first low-refractive-index layer, a first high-refractive-index layer, a second low-refractive-index layer, a second high-refractive-index layer, a third low-refractive-index layer, a third high-refractive-index layer, and a fourth low-refractive-index layer.

[0006] Furthermore, the physical thickness of the first low-refractive-index layer is 14nm-15nm, the physical thickness of the first high-refractive-index layer is 18nm-19nm, the physical thickness of the second low-refractive-index layer is 32nm-34nm, the physical thickness of the second high-refractive-index layer is 130nm-143nm, the physical thickness of the third low-refractive-index layer is 32nm-34nm, the physical thickness of the third high-refractive-index layer is 21nm-23nm, and the physical thickness of the fourth low-refractive-index layer is 123nm-130nm.

[0007] Furthermore, the first high refractive index layer exhibits a reddish-blue chromatic aberration in the visible light band.

[0008] Furthermore, the second low-refractive-index layer exhibits a bluish chromatic aberration in the visible light band.

[0009] Furthermore, the alternating stacked high-refractive-index and low-refractive-index layer structure has a maximum reflectivity of less than 3% for light with a wavelength range of 930 nm to 950 nm and an incident angle range of 33 degrees to 45 degrees.

[0010] Furthermore, the alternating stacked high-refractive-index and low-refractive-index layer structure has a maximum reflectivity of less than 6% for light with a wavelength range of 930 nm to 950 nm and an incident angle range of 45 degrees to 60 degrees.

[0011] Furthermore, the alternating stacked high-refractive-index and low-refractive-index layer structure has a maximum reflectivity of less than 20% for light with a wavelength range of 930 nm to 950 nm and an incident angle range of 60 degrees to 77 degrees.

[0012] Furthermore, the alternating stacked high-refractive-index and low-refractive-index layer structure has a maximum transmittance of more than 85% for light with a wavelength range of 930 nm to 950 nm and an incident angle range of 0 degrees to 45 degrees.

[0013] Furthermore, the alternating stacked high-refractive-index and low-refractive-index layer structure has a maximum transmittance of more than 80% for light with a wavelength range of 930 nm to 950 nm and an incident angle range of 45 degrees to 60 degrees.

[0014] Furthermore, the alternating stacked high-refractive-index and low-refractive-index layer structure has a maximum transmittance of more than 55% for light with a wavelength range of 930 nm to 950 nm and an incident angle range of 60 degrees to 77 degrees.

[0015] The beneficial effects of the anti-reflective and anti-reflective film described in this utility model are as follows:

[0016] The antireflective coating of this invention employs alternating stacked low-refractive-index and high-refractive-index layers. Along the thickness direction of the substrate, both the innermost and outermost layers of the antireflective coating are low-refractive-index layers. This allows light to undergo multiple refractions and reflections within the antireflective coating before entering the substrate, reducing light reflection and increasing light transmittance. Furthermore, the physical thickness of the second high-refractive-index layer is 130nm-143nm, and the physical thickness of the fourth low-refractive-index layer is 123nm-130nm, reducing the reflectivity of light in the near-infrared range and improving transmittance. In addition, the high-refractive-index layer made of titanium pentoxide has strong light transmission properties, and the low-refractive-index layer made of silicon aluminum oxide has good adhesion, thus improving the stability of the connection between the substrate and the deposited antireflective coating while maintaining light transmission performance. Attached Figure Description

[0017] Figure 1 A cross-sectional schematic diagram of the antireflective and anti-reflective coating and the substrate provided in the embodiments of this utility model;

[0018] Figure 2 The measured reflectance spectrum of the antireflection and anti-reflection film provided in the embodiments of this utility model;

[0019] Figure 3 The measured transmittance spectrum of the antireflective and anti-reflective coating provided in the embodiments of this utility model. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions in the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but does not exclude other elements or objects.

[0021] In view of the problems existing in the prior art, the embodiments of this utility model provide an anti-reflective and anti-reflective film. The specific embodiments of this utility model will be further described in detail below with reference to the accompanying drawings.

[0022] The wavelength range of the near-infrared band in this invention is 930nm to 950nm, and the wavelength range of the visible light band in this invention is 380nm to 780nm.

[0023] Figure 1 A cross-sectional schematic diagram of the anti-reflective and anti-reflective coating and substrate provided in the embodiments of this utility model.

[0024] Reference Figure 1As shown in some embodiments of the present invention, the antireflective coating 200 of the present invention is deposited on a substrate 100. The antireflective coating 200 includes alternatingly stacked low-refractive-index layers and high-refractive-index layers along the thickness direction of the substrate 100. The low-refractive-index layers are made of silicon aluminum oxide, and the high-refractive-index layers are made of titanium pentoxide. The alternatingly stacked low-refractive-index layers and high-refractive-index layers along the thickness direction of the substrate 100 sequentially include a first low-refractive-index layer 201, a first high-refractive-index layer 202, a second low-refractive-index layer 203, a second high-refractive-index layer 204, a third low-refractive-index layer 205, a third high-refractive-index layer 206, and a fourth low-refractive-index layer 207. The physical thickness of the first low-refractive-index layer 201 is 14nm-15nm, the physical thickness of the first high-refractive-index layer 202 is 18nm-19nm, the physical thickness of the second low-refractive-index layer 203 is 32nm-34nm, the physical thickness of the second high-refractive-index layer 204 is 130nm-143nm, the physical thickness of the third low-refractive-index layer 205 is 32nm-34nm, the physical thickness of the third high-refractive-index layer 206 is 21nm-23nm, and the physical thickness of the fourth low-refractive-index layer 207 is 123nm-130nm.

[0025] In this way, by reasonably configuring the thickness of each refractive index layer, the antireflective coating 200 has a low reflectivity, a high transmittance, and a low absorptivity, thereby achieving the final optical stability; and it can also improve the texture of the substrate 100 on which the antireflective coating 200 is deposited.

[0026] In some specific embodiments of this utility model, the substrate 100 can be a transparent substrate, and the material of the transparent substrate can be transparent glass, PMMA board, or PC board.

[0027] In some embodiments of this invention, the alternating stacked high-refractive-index and low-refractive-index layer structure has a maximum reflectivity of less than 3% for light with a wavelength range of 930 nm to 950 nm and an incident angle range of 33 degrees to 45 degrees.

[0028] In some embodiments of this invention, the alternating stacked high-refractive-index and low-refractive-index layer structure has a maximum reflectivity of less than 6% for light with a wavelength range of 930 nm to 950 nm and an incident angle range of 45 degrees to 60 degrees.

[0029] In some embodiments of this invention, the alternating stacked high-refractive-index and low-refractive-index layer structure has a maximum reflectivity of less than 20% for light with a wavelength range of 930 nm to 950 nm and an incident angle range of 60 degrees to 77 degrees.

[0030] With this setting, by reasonably adjusting the reflectivity, the antireflective coating 200 can have a low reflectivity for visible light with an incident angle range of 0 degrees to 77 degrees, thereby improving the imaging quality of optical components coated with the antireflective coating 200.

[0031] In some embodiments of this invention, the alternating stacked high refractive index layer and low refractive index layer structure has a maximum transmittance of more than 85% for light with a wavelength range of 930 nm to 950 nm and an incident angle range of 0 degrees to 45 degrees.

[0032] In some embodiments of this invention, the alternating stacked high refractive index layer and low refractive index layer structure has a maximum transmittance of more than 80% for light with a wavelength range of 930 nm to 950 nm and an incident angle range of 45 degrees to 60 degrees.

[0033] In some embodiments of this invention, the alternating stacked high refractive index layer and low refractive index layer structure has a maximum transmittance of greater than 55% for light with a wavelength range of 930nm to 950nm and an incident angle range of 60 degrees to 77 degrees.

[0034] With this setting, by reasonably setting the reflectivity, the antireflective coating 200 can have a high transmittance for light with an incident angle range of 0 degrees to 77 degrees and a wavelength range of 930nm to 950nm, thereby improving the light transmittance of the optical component coated with the antireflective coating 200 in the near-infrared band.

[0035] In some embodiments of this invention, the low-refractive-index layer is made of silicon aluminum oxide, such that the refractive index of the low-refractive-index layer at a wavelength of 550 nm is 1.48. The refractive index of the low-refractive-index layer is close to that of silicon oxide, which does not affect the optical performance of the antireflective coating 200.

[0036] In some embodiments of this utility model, the low refractive index layer is made of silicon aluminum oxide, which can greatly reduce the internal stress of the antireflective and anti-reflective film 200, improve the film bonding force, enable the antireflective and anti-reflective film 200 to achieve excellent stress matching, and also enable the antireflective and anti-reflective film 200 to have good resistance to thermal shock and salt spray corrosion.

[0037] In some embodiments of this utility model, the first low refractive index layer 201 serves as the first layer in contact with the substrate 100 and also as the base layer of the antireflective coating 200. The first low refractive index layer 201 is made of silicon aluminum oxide, which can effectively improve the connection stability between the antireflective coating 200 and the substrate 100.

[0038] In some embodiments of this invention, the color difference value is represented based on the internationally accepted color space Lab, where L value represents brightness, a and b values ​​represent the actual color difference value, and c value represents the color purity or saturation. The smaller the c-value, the smaller the difference between the color of the film in the visible light band and the actual color, and the more accurate the displayed color; the larger the L-value, the higher the reflectivity of the film and the higher the brightness.

[0039] In some embodiments of this invention, the first low-refractive-index layer 201, the first high-refractive-index layer 202, and the second low-refractive-index layer 203 control the chromatic aberration of visible light transmitted through the antireflective coating 200. The first high-refractive-index layer 202 controls the chromatic aberration value of the transmitted visible light to be biased towards red and blue, while the second low-refractive-index layer 203 controls the chromatic aberration value of the transmitted visible light to be biased towards blue. This results in the chromatic aberration value c of the antireflective coating 200 in the visible light band being less than 5, ensuring that the antireflective coating 200 and the optical component to which the antireflective coating 200 is deposited are well-matched and do not affect the optical component's color judgment.

[0040] In some embodiments of this invention, the brightness value of visible light with an incident angle range of 0 to 20 degrees on the antireflective coating 200 is less than 25, the brightness value of visible light with an incident angle range of 20 to 40 degrees on the antireflective coating 200 is less than 30, and the brightness value of visible light with an incident angle range of 40 to 60 degrees on the antireflective coating 200 is less than 40.

[0041] With this setting, by reasonably adjusting the brightness, the antireflective coating 200 can have a matchingly low reflectivity for the visible light band with an incident angle range of 0 degrees to 77 degrees, thereby improving the light transmittance of the optical component coated with the antireflective coating 200 in the visible light band.

[0042] In some embodiments of this invention, the second high-refractive-index layer 204, the third low-refractive-index layer 205, the third high-refractive-index layer 206, and the fourth low-refractive-index layer 207 control the reflectivity and transmittance of light with a wavelength range of 930 nm to 950 nm passing through the antireflection and anti-reflection coating 200. When light with a wavelength range of 930 nm to 950 nm passes sequentially through the second high-refractive-index layer 204, the third low-refractive-index layer 205, the third high-refractive-index layer 206, and the fourth low-refractive-index layer 207, the reflectivity decreases and the transmittance increases, thereby significantly reducing the reflectivity of the antireflection and anti-reflection coating 200 in the near-infrared band.

[0043] In some specific embodiments of this utility model, since the physical thickness of the second high refractive index layer 204 is 130nm-143nm and the physical thickness of the fourth low refractive index layer 207 is 123nm-130nm, the reflectivity of light with a wavelength range of 930nm-950nm passing through the antireflection and anti-reflection film 200 is reduced and the transmittance is increased.

[0044] In some embodiments of this invention, the antireflective coating 200 is prepared by electron beam evaporation. In some specific embodiments of this invention, the antireflective coating 200 is prepared using a physical vapor deposition (PVD) optical coating machine with an RF ion source, advanced reflective optical monitoring, and high-precision crystal control for film thickness monitoring.

[0045] The antireflective coating of this invention achieves the following reflectivity for light with a wavelength range of 930nm to 950nm: when the incident angle of light is 33 degrees to 45 degrees, the maximum reflectivity is less than 3%; when the incident angle of light is 45 degrees to 60 degrees, the maximum reflectivity is less than 6%; and when the incident angle of light is 60 degrees to 77 degrees, the maximum reflectivity is less than 20%.

[0046] The antireflective coating of this invention can achieve a transmittance of 13%-17% for visible light when the incident angle of light is between 0 and 45 degrees.

[0047] The antireflective coating of this invention achieves the following reflectivity for light with a wavelength range of 930nm to 950nm: when the incident angle of light is 0 degrees to 45 degrees, the maximum transmittance is greater than 85%; when the incident angle of light is 45 degrees to 60 degrees, the maximum transmittance is greater than 80%; and when the incident angle of light is 60 degrees to 77 degrees, the maximum transmittance is greater than 55%.

[0048] When the incident angle of light is between 0 and 60 degrees, the brightness value of visible light waves on the antireflective and anti-reflective film of this invention is less than 40, and the color difference value is less than 5.

[0049] The following is an illustration using Example 1: The antireflective and anti-reflective film of this invention is placed in a general-purpose spectrophotometer to measure the light reflectance and light transmittance of the antireflective and anti-reflective film of this invention. The measured data is then entered into LabVIEW software to calculate the values ​​of L, a, b, and c.

[0050] The measured reflectance values ​​of the antireflective and anti-reflective coating of this invention are shown in Table 1.

[0051]

[0052] Figure 2 The measured reflectance spectrum of the antireflection and anti-reflection film provided in the embodiments of this utility model is shown below. Figure 2 The vertical axis value represents the percentage of reflectance of the antireflective and anti-reflective film of this invention. Figure 2 The horizontal axis represents the wavelength of light.

[0053] From Table 1 and Figure 2As can be seen from the above, the maximum reflectivity of the antireflective coating of this invention for light with a wavelength range of 930nm to 950nm and an incident angle range of 33 degrees to 45 degrees is less than 3%. The maximum reflectivity of the antireflective coating of this invention for light with a wavelength range of 930nm to 950nm and an incident angle range of 45 degrees to 60 degrees is less than 6%. The maximum reflectivity of the antireflective coating of this invention for light with a wavelength range of 930nm to 950nm and an incident angle range of 60 degrees to 77 degrees is less than 20%. The antireflective coating of this invention can reduce the reflectivity in the light band with a wavelength range of 930nm to 950nm.

[0054] The measured transmittance values ​​of the antireflective and anti-reflective coating of this invention are shown in Table 2.

[0055]

[0056] Figure 3 The measured transmittance spectrum of the antireflection and antireflection membrane provided in the embodiments of this utility model is shown below. Figure 3 The vertical axis value represents the percentage of transmittance of the antireflective and anti-reflective film of this invention. Figure 3 The horizontal axis represents the wavelength of light.

[0057] From Table 2 and Figure 3 The data shows that the maximum transmittance of the antireflective coating of this invention for light with a wavelength range of visible light and an incident angle range of 0 to 45 degrees is 13%-17%. The maximum transmittance of the antireflective coating of this invention for light with a wavelength range of 930nm to 950nm and an incident angle range of 0 to 45 degrees is greater than 85%. The maximum transmittance of the antireflective coating of this invention for light with a wavelength range of 930nm to 950nm and an incident angle range of 45 to 60 degrees is greater than 80%. The maximum transmittance of the antireflective coating of this invention for light with a wavelength range of 930nm to 950nm and an incident angle range of 60 to 77 degrees is greater than 55%. The antireflective coating of this invention can increase the transmittance in the light wavelength range of 930nm to 950nm.

[0058] The values ​​of brightness (L) and color difference (c) of the antireflective and anti-reflective film of this invention are shown in Table 3.

[0059]

[0060]

[0061] As can be seen from the data in Table 3, the brightness value of visible light with an incident angle range of 0 to 20 degrees on the antireflective and anti-reflective film of this invention is less than 25; the brightness value of visible light with an incident angle range of 20 to 40 degrees on the antireflective and anti-reflective film of this invention is less than 30; the brightness value of visible light with an incident angle range of 40 to 60 degrees on the antireflective and anti-reflective film of this invention is less than 40; and the color difference value of visible light with an incident angle range of 0 to 60 degrees on the antireflective and anti-reflective film of this invention is less than 5. The antireflective and anti-reflective film of this invention can reduce color difference in the visible light band.

[0062] The antireflective coating of this invention includes alternating low-refractive-index layers and high-refractive-index layers stacked along the thickness direction of the substrate. There are a total of seven layers of alternating low-refractive-index layers and high-refractive-index layers. Fewer layers or sandwiched layers will affect the final optical stability of the antireflective coating.

[0063] In some embodiments of this invention, the anti-reflective coating can be used on the infrared sensor of a smart wearable device. By evaporating and depositing the anti-reflective coating on both sides of the infrared sensor, anti-reflection is achieved in both the visible and near-infrared light bands within a large angle range of 0-77 degrees. This allows for the enhancement of near-infrared light in the 930-950nm wavelength range, enabling infrared light to pass through the viewing window area of ​​the infrared sensor and be effectively received and recognized by the internal sensors of the smart wearable device. This satisfies the motion tracking and information collection functions of the wearable device, thereby achieving excellent interactive operation between reality and virtuality.

[0064] Although the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as described in the claims. Moreover, the utility model described herein may have other embodiments and can be implemented or realized in various ways.

Claims

1. An antireflective and anti-reflective membrane, characterized in that, Comprising: a substrate; high refractive index layers and low refractive index layers alternately stacked in a thickness direction of the substrate, the high refractive index layers being made of tri-titanium pentoxide, the low refractive index layers being made of silicon aluminum oxide; in the thickness direction of the substrate, the alternately stacked high refractive index layers and low refractive index layers structure sequentially comprises a first low refractive index layer, a first high refractive index layer, a second low refractive index layer, a second high refractive index layer, a third low refractive index layer, a third high refractive index layer, and a fourth low refractive index layer.

2. The anti-reflective and transparent film according to claim 1, wherein The physical thickness of the first low refractive index layer is 14nm-15nm, the physical thickness of the first high refractive index layer is 18nm-19nm, the physical thickness of the second low refractive index layer is 32nm-34nm, the physical thickness of the second high refractive index layer is 130nm-143nm, the physical thickness of the third low refractive index layer is 32nm-34nm, the physical thickness of the third high refractive index layer is 21nm-23nm, and the physical thickness of the fourth low refractive index layer is 123nm-130nm.

3. The anti-reflective and transparent film according to claim 2, wherein The first high refractive index layer has a color difference value for the visible light band that is biased towards red and blue colors.

4. The anti-reflective and transparent film according to claim 2, wherein The second low refractive index layer has a color difference value for the visible light band that is biased towards blue color.

5. The anti-reflective and transparent film according to claim 2, wherein The alternately stacked high refractive index layers and low refractive index layers structure has a maximum reflectivity of less than 3% for light with a wavelength range of 930nm-950nm and an incident angle range of 33 degrees to 45 degrees.

6. The anti-reflective, transparent film of claim 2, wherein, The alternately stacked high refractive index layers and low refractive index layers structure has a maximum reflectivity of less than 6% for light with a wavelength range of 930nm-950nm and an incident angle range of 45 degrees to 60 degrees.

7. The anti-reflective, transparent film of claim 2, wherein, The alternately stacked high refractive index layers and low refractive index layers structure has a maximum reflectivity of less than 20% for light with a wavelength range of 930nm-950nm and an incident angle range of 60 degrees to 77 degrees.

8. The anti-reflective, transparent film of claim 2, wherein, The alternately stacked high refractive index layers and low refractive index layers structure has a maximum transmittance of greater than 85% for light with a wavelength range of 930nm-950nm and an incident angle range of 0 degrees to 45 degrees.

9. The anti-reflective, transparent film of claim 2, wherein, The alternately stacked high refractive index layers and low refractive index layers structure has a maximum transmittance of greater than 80% for light with a wavelength range of 930nm-950nm and an incident angle range of 45 degrees to 60 degrees.

10. The anti-reflective, transparent film of claim 2, wherein, The alternately stacked high refractive index layers and low refractive index layers structure has a maximum transmittance of greater than 55% for light with a wavelength range of 930nm-950nm and an incident angle range of 60 degrees to 77 degrees.

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