Automatic cleaning mechanism for chip suction nozzle

Abstract

The utility model relates to chip suction nozzle cleaning frock technical field, concretely relates to a kind of automatic cleaning mechanism of chip suction nozzle, and automatic cleaning mechanism includes mounting plate and material roll, first roller, material roll, driver and wiping platform on mounting plate are sequentially installed;Driver is transmission connection with material roll, to can drive material roll rotation;The free end of material roll is sequentially wound on first roller, wiping platform and material roll, to make the top surface of material roll between first roller and wiping platform can present first preset angle movement.First roller and wiping platform constitute the fulcrum of material roll, ensure that the top surface angle of material roll between first roller and wiping platform will not change along with the increase and decrease of material roll and material roll outer diameter, ensure the wiping angle of material roll between first roller and wiping platform.Suction nozzle is fixed in the cleaning position of cleaning area, and the wiping degree of material roll and suction nozzle can be kept consistent in multiple cleaning operations, ensure cleaning effect.

Description

Technical Field

[0001] This utility model relates to the field of chip nozzle cleaning fixture technology, specifically to an automatic cleaning mechanism for chip nozzles. Background Technology

[0002] Currently, in semiconductor equipment, the cleaning and wiping of chip pick-up nozzles is mostly done manually, requiring machine downtime during the cleaning process. Because the nozzles need to be cleaned multiple times during production to ensure the cleanliness of the chips they handle, the downtime of semiconductor equipment is long, resulting in low chip production or testing efficiency.

[0003] During cleaning, the nozzle moves to the cleaning area via its drive mechanism and is wiped manually with a lint-free cloth. Since it is difficult to ensure that the force and angle of the manual wiping of the nozzle are consistent each time, it will result in different cleaning effects, which may cause hidden dangers for the subsequent handling of the chip by the nozzle. For example, dirt on the nozzle may stick to the chip, affecting the detection of appearance defects of the chip. Utility Model Content

[0004] (a) Technical problems to be solved

[0005] In view of the above-mentioned shortcomings and deficiencies of the prior art, the present invention provides an automatic cleaning mechanism for chip nozzles, which solves the technical problem that it is difficult to ensure stable cleaning and wiping of chip nozzles.

[0006] (II) Technical Solution

[0007] To achieve the above objectives, the automatic cleaning mechanism for the chip nozzle of this utility model includes a mounting plate and a material roll, a first roller, a take-up roll, a driver, and a wiping platform that are sequentially mounted on the mounting plate.

[0008] The driver is connected to the take-up roll drive so as to drive the take-up roll to rotate;

[0009] The free end of the material roll is sequentially wound around the first roller, the wiping platform, and the take-up roll, so that the top surface of the material roll between the first roller and the wiping platform can move at a first preset angle.

[0010] Optionally, the drive includes a motor, a belt, and a pulley;

[0011] The motor and the material roll are both mounted on the first end face of the mounting plate, and the motor shaft passes through the second end face of the mounting plate; the pulley is mounted on the second end face of the mounting plate.

[0012] The belt is wound around the shaft and the pulley.

[0013] Optionally, the motor is disposed between the take-up roll and the wiping platform;

[0014] The motor is located inside the winding section of the coil.

[0015] Optionally, a second roller (61) is rotatably connected to the mounting plate (1);

[0016] The second roller (61) is disposed between the take-up roll (3) and the wiping platform (5);

[0017] The winding section of the material roll (4) is wound on the second roller (61) so that the top surface of the material roll (4) between the wiping platform (5) and the second roller (61) can move at a second preset angle.

[0018] Optionally, the wiping platform 5 includes a housing, a proximal support rod disposed near the driver (2), and a distal support rod disposed away from the driver (2);

[0019] The housing is connected to the mounting plate (1); an opening is provided on the top of the housing;

[0020] The proximal support rod and the distal support rod are disposed within the opening, and the cross-sections at the top of both are set at the first preset angle;

[0021] The winding section of the material roll (4) abuts against the top of the near-end support rod and the top of the far-end support rod, and is wound onto the take-up roll (3) via the far-end support rod.

[0022] Optionally, the automatic cleaning mechanism further includes a cleaning fluid storage tank and a fluid supply pipe;

[0023] One end of the liquid supply pipe is connected to the cleaning liquid storage tank, and the other end is located at the bottom of the free end of the material roll on the wiping platform.

[0024] Optionally, the automatic cleaning mechanism further includes a first drain;

[0025] The liquid supply pipe is connected to the wiping platform through the first drain.

[0026] Optionally, the automatic cleaning mechanism further includes a second drain;

[0027] The liquid supply pipe is connected to the cleaning fluid storage tank through the second drain valve.

[0028] Optionally, the automatic cleaning mechanism further includes a pusher and a slide rail module;

[0029] The mounting plate is mounted on the slide rail module;

[0030] The thruster is connected to the slide rail module to drive the mounting plate to move along a first direction.

[0031] (III) Beneficial Effects

[0032] The beneficial effects of this utility model are:

[0033] The first roller and the wiping platform form the fulcrum of the material roll, ensuring that the top surface angle of the material roll between the first roller and the wiping platform does not change with the increase or decrease of the take-up roll and the outer diameter of the material roll, thus ensuring the wiping angle of the material roll between the first roller and the wiping platform. Since the cleaning position of the suction nozzle in the cleaning area is fixed, the wiping force between the material roll and the suction nozzle between the first roller and the wiping platform remains consistent throughout multiple cleaning operations, ensuring the cleaning effect of the wiping suction nozzle under multiple cleaning operations and improving the stability of the automatic cleaning mechanism in cleaning the suction nozzle. Attached Figure Description

[0034] Figure 1 This is a perspective view of the front of the automatic cleaning mechanism of the chip nozzle of this utility model.

[0035] Figure 2 This is a top view of the automatic cleaning mechanism for the chip nozzle of this utility model;

[0036] Figure 3 This is a perspective view of the automatic cleaning mechanism of the chip nozzle of this utility model from the rear.

[0037] [Explanation of Labels in the Attached Images]

[0038] 1: Mounting plate;

[0039] 2: Driver; 21: Motor; 22: Belt; 23: Pulley;

[0040] 3: Receiving coils;

[0041] 4: Material rolls;

[0042] 5: Wipe the platform;

[0043] 6: First roller; 61: Second roller;

[0044] 7: Cleaning fluid storage tank;

[0045] 8: First drain valve;

[0046] 9: Second drain valve;

[0047] 10: Thruster;

[0048] 11: Slide rail module. Detailed Implementation

[0049] To better explain and facilitate understanding of this utility model, the present utility model will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0050] It should be noted that all directional indicators (such as up, down, left, right, front, back, etc.) in this utility model embodiment are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicator will also change accordingly.

[0051] Furthermore, in this utility model, the use of terms such as "first," "second," etc., is for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0052] In this utility model, unless otherwise explicitly specified and limited, the terms "connection," "fixing," etc., should be interpreted broadly. For example, "fixing" can mean a fixed connection, a detachable connection, or an integral part; "connection" can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0053] See Figures 1 to 3 This utility model provides an automatic cleaning mechanism for chip nozzles. The automatic cleaning mechanism includes a mounting plate 1 and a material roll 4, a first roller 6, a take-up roll 3, a driver 2, and a wiping platform 5, which are sequentially mounted on the mounting plate 1. The driver 2 is connected to the take-up roll 3 so as to drive the take-up roll 3 to rotate. The free end of the material roll 4 is sequentially wound around the first roller 6, the wiping platform 5, and the take-up roll 3 so that the top surface of the material roll 4 between the first roller 6 and the wiping platform 5 can move at a first preset angle.

[0054] In this embodiment, the material roll 4 is a cleanroom cloth roll, and the free end of the material roll 4 is fixed to the take-up roll 3 via the wiping platform 5. As the driver 2 drives the take-up roll 3 to rotate, the cleanroom cloth moves at the wiping platform 5, thereby wiping the suction nozzle chip nozzle that has moved above the wiping platform 5.

[0055] The automatic cleaning mechanism is integrated into the machine tool. The suction nozzle is moved to the cleaning area on the machine tool via a drive mechanism. The lint-free cloth is wound around the support shaft at the center of the material roll 4, the first roller 6, the wiping platform 5, and the take-up roll 3. That is, the first roller 6 and the wiping platform 5 form the fulcrum of the lint-free cloth, ensuring that the top surface angle of the lint-free cloth between the first roller 6 and the wiping platform 5 does not change with the increase or decrease of the outer diameter of the take-up roll 3 and the material roll 4, thus ensuring the wiping angle of the lint-free cloth between the first roller 6 and the wiping platform 5. Since the cleaning position of the suction nozzle in the cleaning area is fixed, the wiping force of the lint-free cloth and the suction nozzle between the first roller 6 and the wiping platform 5 can remain consistent in multiple cleaning operations, ensuring the cleaning effect of wiping the suction nozzle under multiple cleaning operations and improving the stability of the automatic cleaning mechanism in cleaning the suction nozzle.

[0056] Based on the different shapes of the suction surface of the nozzle, the first preset angle of the top surface of the material roll 4 between the first roller 6 and the wiping platform 5 needs to be reasonably set. In this embodiment, the nozzle is a square nozzle with the bottom suction surface parallel to the horizontal plane. During cleaning, the drive mechanism moves the nozzle above the lint-free cloth on the wiping platform 5 and abuts against the top surface of the lint-free cloth. Based on the wiping force requirements, the lifting height of the nozzle is reasonably set so that the lint-free cloth can flexibly adapt to and wipe the suction surface of the nozzle. In addition, the residence time of the nozzle on the lint-free cloth is the wiping time, which can be reasonably set according to the cleaning requirements.

[0057] In actual operation, after the nozzle has completed the transfer of a preset number of chips, it moves to the cleaning area for cleaning; after cleaning, it returns to the picking station to pick up the next chip. This process can be carried out simultaneously during the processing or testing of the previous chip, so that the cleaning of the nozzle does not take up extra time and there is no need to stop the machine to clean the nozzle, thus ensuring the continuity of the production or testing process.

[0058] Furthermore, the driver 2 includes a motor 21, a belt 22, and a pulley 23; both the motor 21 and the material roll 4 are mounted on the first end face of the mounting plate 1, and the shaft of the motor 21 passes through the second end face of the mounting plate 1; the pulley 23 is mounted on the second end face of the mounting plate 1; the belt 22 is wound around the shaft and the pulley 23. Specifically, by correspondingly setting the transmission structure of the driver 2 and the material roll 4 on the two end faces of the mounting plate, the dust and other dirt adhering to the belt 22 will not fall off or float onto the lint-free cloth, ensuring the cleanliness of the lint-free cloth and thus improving the cleaning effect on the suction nozzle.

[0059] Secondly, the motor 21 is positioned between the take-up roll 3 and the wiping platform 5; the motor 21 is located inside the winding section of the roll 4. Specifically, the roll 4 includes an exit section wound on a support shaft, a take-up section wound on the roll 4, and a winding section connecting the exit section and the take-up section, which is wound around the first roller 6 and the wiping platform 5. Positioning the motor 21 inside the winding section reduces the space occupied by the automatic cleaning mechanism and does not interfere with the movement of the suction nozzle, thus improving the reliability of the automatic cleaning mechanism.

[0060] In addition, a second roller 61 is rotatably connected to the mounting plate 1; the second roller 61 is disposed between the take-up roll 3 and the wiping platform 5; the winding section of the material roll 4 is wound around the second roller 61, so that the top surface of the material roll 4 between the wiping platform 5 and the second roller 61 can move at a second preset angle. In this embodiment, both the first roller 6 and the second roller 61 are rotatably connected to the mounting plate 1, which improves the smoothness of the lint-free cloth sliding on the first roller 6 and the second roller 61. Similarly, the addition of the second roller 61 between the take-up roll 3 and the wiping platform 5 allows the second roller 61 to support the winding section, so that the angle of the top surface of the material roll 4 between the wiping platform 5 and the second roller 61 remains unchanged during the movement process, that is, the second preset angle will not change with the increase or decrease of the outer diameter of the take-up roll 3 and the material roll 4, which improves the stability of the movement of the winding section on the wiping platform 5, and thus improves the accuracy of the force and angle when wiping the suction nozzle.

[0061] Furthermore, the wiping platform 5 includes a housing, a proximal support rod located near the driver 2, and a distal support rod located away from the driver 2; the housing is connected to the mounting plate 1; an opening is provided on the top of the housing; the proximal and distal support rods are located within the opening, and the cross-sections of their tops are set at a first preset angle; the winding section of the material roll 4 abuts against the tops of the proximal and distal support rods, and is wound onto the take-up roll 3 via the distal support rod. Specifically, the nozzle is wiped using a lint-free cloth between the proximal and distal support rods. Because the horizontal distance between the first roller 6 and the wiping platform 5 is large, that is, the distance between the support points of the first roller 6 and the distal support rod on the winding section is large, the lint-free cloth will deform significantly when wiping the nozzle, thereby reducing the wiping effect. Based on this, a proximal support rod is added to the shell to further support the winding section, effectively shortening the support point spacing of the winding section. When wiping the nozzles at the 5 points of the wiping platform, the deformation of the lint-free cloth becomes stable, effectively ensuring the contact force between the lint-free cloth and the nozzle, thereby improving the wiping effect.

[0062] Secondly, the automatic cleaning mechanism also includes a cleaning fluid storage tank 7 and a supply pipe; one end of the supply pipe is connected to the cleaning fluid storage tank 7, and the other end is located at the bottom of the free end of the material roll 4 on the wiping platform 5. Specifically, the cleaning fluid storage tank 7 stores cleaning fluid, which is delivered to the cleanroom cloth through the supply pipe. Optionally, the supply pipe is connected to a nozzle, which sprays or applies the cleaning fluid to the cleanroom cloth between the near-end support rod and the far-end support rod (or the cleanroom cloth above the motor 21) to enhance the cleaning effect.

[0063] In addition, the automatic cleaning mechanism also includes a first drain valve 8; the liquid supply pipe and the wiping platform 5 are connected through the first drain valve 8. Specifically, during the wiping of the nozzle, it is necessary to pressurize the cleaning liquid storage tank 7. Therefore, it is necessary to regulate the pressure at the spray end of the liquid supply pipe to avoid excessive cleaning liquid overflow and spillage on the cleanroom cloth, which would result in cleaning liquid adhering to the nozzle after wiping, affecting subsequent chip handling, production, and testing. In this embodiment, the draining method is achieved through liquid level difference. When the cleaning liquid reaches a preset position (high liquid level) in the first drain valve 8, it will automatically flow through the pipeline to the low liquid level cleaning liquid storage tank 7 to ensure the amount of cleaning liquid on the cleanroom cloth, ensuring that the nozzle is clean and free of cleaning liquid after cleaning.

[0064] Optionally, the automatic cleaning mechanism also includes a second drain valve 9; the liquid supply pipe and the cleaning fluid storage tank 7 are connected via the second drain valve 9. The first drain valve 8 can regulate the pressure at the tail end of the liquid supply pipe, and similarly, the second drain valve 9 can regulate the pressure at the head end of the liquid supply pipe. The principle of both is the same and will not be described in detail. Adding a second drain valve 9 to the first drain valve 8 further improves the control precision of the hydraulic pressure in the liquid supply pipe, ensuring the amount of cleaning fluid sprayed onto the lint-free cloth.

[0065] Furthermore, the automatic cleaning mechanism also includes a pusher 10 and a slide rail module 11; the mounting plate 1 is mounted on the slide rail module 11; the pusher 10 is connected to the slide rail module 11 to drive the mounting plate 1 to move along a first direction. Specifically, the pusher 10 can be a cylinder, a hydraulic cylinder, or an electric push rod. The slide rail module 11 is an existing slide rail and slider drive structure. By driving the mounting plate 1 and its components along the first direction through the pusher 10, the automatic cleaning mechanism can extend and retract in the first direction. When the suction nozzle needs to be wiped, the push rod of the pusher 10 extends, and the slide rail module 11 drives the mounting plate 1 to the wiping station. After wiping is completed, the push rod of the pusher 10 retracts, bringing the mounting plate 1 back to the waiting position. The effective cooperation between the pusher 10 and the slide rail module 11 allows the automatic cleaning mechanism to retract to the waiting position when not performing cleaning operations, avoiding interference between the suction nozzle and the automatic cleaning mechanism during movement, and further improving the reliability of the automatic cleaning mechanism.

[0066] It should be understood that the above description of the specific embodiments of this utility model is only for illustrating the technical route and features of this utility model, and its purpose is to enable those skilled in the art to understand the content of this utility model and implement it accordingly. However, this utility model is not limited to the specific embodiments described above. All changes or modifications made within the scope of the claims of this utility model should be covered by the protection scope of this utility model.

Claims

1. An automatic cleaning mechanism for a chip suction nozzle, characterized in that, The automatic cleaning mechanism for the chip nozzle includes a mounting plate (1) and a material roll (4), a first roller (6), a take-up roll (3), a driver (2), and a wiping platform (5) that are sequentially mounted on the mounting plate (1); The driver (2) is connected to the take-up roll (3) so as to drive the take-up roll (3) to rotate; The free end of the material roll (4) is sequentially wound around the first roller (6), the wiping platform (5) and the take-up roll (3) so that the top surface of the material roll (4) between the first roller (6) and the wiping platform (5) can move at a first preset angle.

2. The automatic cleaning mechanism for the chip nozzle according to claim 1, characterized in that, The driver (2) includes a motor (21), a belt (22), and a pulley (23); The motor (21) and the material roll (4) are both mounted on the first end face of the mounting plate (1), and the shaft of the motor (21) passes through the second end face of the mounting plate (1); the pulley (23) is mounted on the second end face of the mounting plate (1); The belt (22) is wound around the shaft and the pulley (23).

3. The automatic cleaning mechanism for the chip nozzle according to claim 2, characterized in that, The motor (21) is located between the take-up roll (3) and the wiping platform (5); The motor (21) is located inside the winding section of the coil (4).

4. The automatic cleaning mechanism for the chip nozzle according to any one of claims 1-3, characterized in that, A second roller (61) is rotatably connected to the mounting plate (1); The second roller (61) is disposed between the take-up roll (3) and the wiping platform (5); The winding section of the material roll (4) is wound on the second roller (61) so that the top surface of the material roll (4) between the wiping platform (5) and the second roller (61) can move at a second preset angle.

5. The automatic cleaning mechanism for the chip nozzle according to any one of claims 1-3, characterized in that, The wiping platform (5) includes a housing, a proximal support rod disposed near the driver (2), and a distal support rod disposed away from the driver (2); The housing is connected to the mounting plate (1); an opening is provided on the top of the housing; The proximal support rod and the distal support rod are disposed within the opening, and the cross-sections at the top of both are set at the first preset angle; The winding section of the material roll (4) abuts against the top of the near-end support rod and the top of the far-end support rod, and is wound onto the take-up roll (3) via the far-end support rod.

6. The automatic cleaning mechanism for the chip nozzle according to any one of claims 1-3, characterized in that, The automatic cleaning mechanism also includes a cleaning fluid storage tank (7) and a fluid supply pipe; One end of the liquid supply pipe is connected to the cleaning liquid storage tank (7), and the other end is located at the bottom of the free end of the material roll (4) on the wiping platform (5).

7. The automatic cleaning mechanism for the chip nozzle according to claim 6, characterized in that, The automatic cleaning mechanism also includes a first drain (8); The liquid supply pipe is connected to the wiping platform (5) through the first drain (8).

8. The automatic cleaning mechanism for the chip nozzle according to claim 7, characterized in that, The automatic cleaning mechanism also includes a second drainer (9); The liquid supply pipe is connected to the cleaning liquid storage tank (7) through the second drain (9).

9. The automatic cleaning mechanism for the chip nozzle according to any one of claims 1-3, characterized in that, The automatic cleaning mechanism also includes a pusher (10) and a slide rail module (11); The mounting plate (1) is mounted on the slide rail module (11); The thruster (10) is connected to the slide rail module (11) to drive the mounting plate (1) to move in a first direction.

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