Locking device for a multi-arc ion plating machine

Abstract

The utility model discloses a locking device of multi-arc ion coating machine, include: coating machine body, the inside of coating machine body is provided with vacuum cavity, the front side hinged of coating machine body has vacuum cavity door, the right side fixed coupling of vacuum cavity door has lock catch, and the number of lock catch has two symmetry settings, the front side of vacuum cavity door is provided with pull assembly. The utility model discloses a pull assembly can be in locking before pulling vacuum cavity door to coating machine body direction, effectively eliminates the clearance between vacuum cavity door and vacuum cavity, is convenient for subsequent locking, avoids the problem such as not strict sealing caused by the clearance existence, through locking assembly, make two lock bars can be close to and insert locking hole from both sides, lock the lock catch, ensure that vacuum cavity door always keeps stable closing state in the working process, guarantees the sealing property of vacuum cavity.

Description

Technical Field

[0001] This utility model relates to the field of locking device technology, specifically a locking device for a multi-arc ion plating machine. Background Technology

[0002] Multi-arc ion plating involves ionizing the target material through arc discharge inside a vacuum chamber, and then depositing a thin film on the workpiece surface. Therefore, the sealing performance of the vacuum chamber directly affects the coating quality.

[0003] Multi-arc ion plating is mainly accomplished by a multi-arc ion plating machine. The multi-arc ion plating machine is a coating equipment that needs to be carried out under a high vacuum. The main body of the coating machine, the cylinder and the cylinder cover are combined to form a closed cavity. The cylinder and the cylinder cover are controlled by a locking device to open and close the cylinder cover. Existing locking devices, such as magnetic locks, are prone to inaccurate closing, which leads to a decrease in the sealing effect. Alternatively, complex buckle locks require a large operating force during use, which cannot solve the problem of both good sealing effect and easy operation. Utility Model Content

[0004] To address the shortcomings of existing technologies, this utility model provides a locking device for a multi-arc ion plating machine. By pulling the assembly, the vacuum chamber door can be pulled towards the coating machine body before locking, effectively eliminating the gap between the vacuum chamber door and the vacuum chamber, facilitating subsequent locking, and avoiding problems such as poor sealing caused by gaps. Through the locking assembly, two locking rods can simultaneously approach and insert into the locking hole, locking the latch from both sides, ensuring that the vacuum chamber door remains stably closed during operation, and guaranteeing the airtightness of the vacuum chamber.

[0005] To achieve the above objectives, this utility model is implemented through the following technical solution: a locking device for a multi-arc ion plating machine, comprising: a plating machine body, wherein a vacuum chamber is provided inside the plating machine body, a vacuum chamber door is hinged to the front side of the plating machine body, a latch is fixedly connected to the right side of the vacuum chamber door, and the number of latches is two and symmetrically arranged, and a pulling component is provided on the front side of the vacuum chamber door;

[0006] The pulling assembly includes a locking frame, which is fixedly connected to the side wall of the coating machine body. There are two locking frames arranged symmetrically. A rotating shaft is rotatably connected between the two locking frames. Two pull rods are fixedly connected to the outer side wall of the rotating shaft. A driven sprocket is fixedly connected between the two pull rods and sleeved on the outer side wall of the rotating shaft. A locking assembly is provided between the two locking frames.

[0007] Preferably, the locking assembly includes a second rotating shaft and a mounting bracket. The second rotating shaft is rotatably connected between two locking brackets. Both ends of the second rotating shaft pass through the locking brackets and are fixedly connected with screws, and the two screws have opposite threads. The outer walls of the two screws are threaded with threaded sleeves, and the opposite sides of the two threaded sleeves are fixedly connected with locking rods. The outer wall of the second rotating shaft is fixedly connected with a drive sprocket. A gear is fixedly connected to one side of the drive sprocket and sleeved on the outer wall of the second rotating shaft. The mounting bracket is fixedly connected to the side wall of the coating machine body. A drive motor is fixedly connected to one side of the mounting bracket, and the output end of the drive motor passes through the mounting bracket and is fixedly connected with a gear.

[0008] Preferably, the second gear is located on one side of the first gear, and the second gear is meshed with the first gear.

[0009] Preferably, the outer walls of the driving sprocket and the driven sprocket are fitted with chains, and the driving sprocket and the driven sprocket are connected by chain drive.

[0010] Preferably, each of the two latches has a through hole on one side, through which the pull rod passes. Each of the two latches has a locking hole on the side that is far apart from each other, and the locking rod is slidably connected to the locking hole.

[0011] Preferably, each of the two mounting brackets has a guide rod fixedly connected to the side away from each other, and the guide rod passes through the threaded sleeve and is slidably connected to it. Beneficial effects

[0012] This invention provides a locking device for a multi-arc ion plating machine. Compared with the prior art, it has the following advantages:

[0013] (1) By using double locks and double lock rods, and with the screws of reverse threads, the lock rods are inserted into the locking holes synchronously, and the problem of uneven compression of the seal caused by unilateral force is avoided; the pulling assembly eliminates the gap between the vacuum chamber door and the vacuum chamber by swinging the pull rod, ensuring that the sealing surface is tightly fitted and effectively preventing gas leakage.

[0014] (2) The pull rod passes through the through hole of the lock to achieve initial positioning, which facilitates subsequent locking; the guide rod improves the stability of the threaded sleeve when it moves, and further improves the accuracy of the lock rod being inserted into the locking hole. Attached Figure Description

[0015] Figure 1 This is a front view of the structure of this utility model;

[0016] Figure 2 This is a schematic diagram of the unfolding structure of the vacuum chamber door of this utility model;

[0017] Figure 3 This is a front view of the pull component structure of this utility model;

[0018] Figure 4 for Figure 3 Enlarged view of the structure at point A in the middle.

[0019] In the diagram: 1. Coating machine body; 2. Vacuum chamber; 3. Vacuum chamber door; 4. Lock; 5. Pull assembly; 501. Locking frame; 502. Rotating shaft one; 503. Pull rod; 504. Driven sprocket; 6. Locking assembly; 601. Rotating shaft two; 602. Mounting bracket; 603. Screw; 604. Threaded sleeve; 605. Locking rod; 606. Drive sprocket; 607. Gear one; 608. Drive motor; 609. Gear two; 7. Chain; 401. Through hole; 402. Locking hole; 6021. Guide rod. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0021] Please see Figure 1-4 This utility model provides a technical solution: a locking device for a multi-arc ion plating machine, comprising: a plating machine body 1, a vacuum chamber 2 inside the plating machine body 1, a vacuum chamber door 3 hinged to the front side of the plating machine body 1, a latch 4 fixedly connected to the right side of the vacuum chamber door 3, and two latches 4 arranged symmetrically, and a pulling component 5 provided on the front side of the vacuum chamber door 3.

[0022] The pulling assembly 5 includes a locking frame 501, which is fixedly connected to the side wall of the coating machine body 1. There are two locking frames 501 arranged symmetrically. A rotating shaft 502 is rotatably connected between the two locking frames 501. Two pull rods 503 are fixedly connected to the outer wall of the rotating shaft 502. A driven sprocket 504 is fixedly connected between the two pull rods 503 and sleeved on the outer wall of the rotating shaft 502. A locking assembly 6 is provided between the two locking frames 501. The pulling assembly 5 can initially pull and position the vacuum chamber door 3, eliminating the gap between the vacuum chamber door 3 and the vacuum chamber 2, which facilitates subsequent locking.

[0023] The locking assembly 6 includes a second rotating shaft 601 and a mounting bracket 602. The second rotating shaft 601 is rotatably connected between two locking brackets 501. Both ends of the second rotating shaft 601 pass through the locking brackets 501 and are fixedly connected with screws 603. The two screws 603 have opposite threads. The outer walls of the two screws 603 are threaded with threaded sleeves 604. The opposite sides of the two threaded sleeves 604 are fixedly connected with locking rods 605. The outer wall of the second rotating shaft 601 is fixedly connected with a drive sprocket 606. A gear 607 is fixedly connected to one side of the drive sprocket 606 and sleeved on the outer wall of the second rotating shaft 601. The mounting bracket 602 is fixedly connected to the side wall of the coating machine body 1. A drive motor 608 is fixedly connected to one side of the mounting bracket 602. The drive motor 608 is a three-phase AC asynchronous motor that can achieve forward and reverse rotation. The output end of the drive motor 608 passes through the mounting bracket 602 and is fixedly connected with a gear 609. When the rotating shaft 601 rotates, the two threaded sleeves 604 can drive the locking rod 605 to move synchronously in opposite directions or relative to each other, thereby simultaneously locking or unlocking the vacuum chamber door 3.

[0024] Gear 2 609 is located on one side of gear 1 607, and gear 2 609 is meshed with gear 1 607. The rotation of gear 2 609 drives the rotation of gear 1 607, which in turn drives the rotation of shaft 2 601.

[0025] A chain 7 is fitted onto the outer walls of the driving sprocket 606 and the driven sprocket 504, and the driving sprocket 606 and the driven sprocket 504 are connected by the chain 7. The chain 7 enables the driven sprocket 504 to rotate when the driving sprocket 606 rotates.

[0026] Each of the two latches 4 has a through hole 401 on one side, through which the pull rod 503 passes. Each of the two latches 4 has a locking hole 402 on the side furthest from each other, through which the locking rod 605 is slidably connected. The through hole 401 allows the pull rod 503 to pass through the latch 4 for initial positioning; the locking hole 402 allows the locking rod 605 to be inserted into the latch 4 for locking.

[0027] Guide rods 6021 are fixedly connected to the opposite sides of the two mounting brackets 602. The guide rods 6021 pass through the threaded sleeve 604 and are slidably connected to it. The guide rods 6021 improve the stability of the threaded sleeve 604 during movement and allow the threaded sleeve 604 to move axially along the guide rods 6021.

[0028] Furthermore, any content not described in detail in this specification is existing technology known to those skilled in the art.

[0029] When it is necessary to lock the vacuum chamber door 3, the vacuum chamber door 3 is closed. At this time, the pull rod 503 passes through the through hole 401 and the latch 4 to achieve initial positioning. Then, the output gear 609 of the drive motor 608 is started to rotate. Since the gear 609 meshes with the gear 607, the gear 607 rotates synchronously with the gear 609, thereby driving the rotating shaft 601 to rotate. When the rotating shaft 601 rotates, it drives the drive sprocket 606 to rotate synchronously. Through the transmission action of the chain 7, it drives the driven sprocket 504 and the rotating shaft 502 to rotate, causing the two pull rods 503 on the rotating shaft 502 to swing. The pull rods 503 pass through the through hole 401 on the latch 4. By swinging, the vacuum chamber door 3 is moved towards the coating. The machine body 1 is pulled in one direction to eliminate the gap between the vacuum chamber door 3 and the vacuum chamber 2, completing the initial positioning. In addition, when the rotating shaft 2 601 rotates, it drives the two screws 603 to rotate synchronously, thereby causing the two threaded sleeves 604 to move closer synchronously under the reverse thread drive, driving the locking rod 605 to insert into the locking hole 402, completing the locking of the vacuum chamber door 3. When unlocking, the drive motor 608 is started to reverse, thereby causing the screws 603 to drive the threaded sleeves 604 to move away synchronously, causing the locking rod 605 to slide out of the locking hole 402. At the same time, the driving sprocket 606 drives the driven sprocket 504 and the rotating shaft 1 502 to rotate in the opposite direction through the chain 7, and the pull rod 503 swings to release the pull, thereby opening the vacuum chamber door 3.

[0030] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0031] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A locking device for a multi-arc ion plating machine, comprising: The coating machine body (1) is characterized in that: a vacuum chamber (2) is provided inside the coating machine body (1), a vacuum chamber door (3) is hinged to the front side of the coating machine body (1), a latch (4) is fixedly connected to the right side of the vacuum chamber door (3), and there are two latches (4) arranged symmetrically, and a pulling component (5) is provided on the front side of the vacuum chamber door (3). The pulling assembly (5) includes a locking frame (501), which is fixedly connected to the side wall of the coating machine body (1). There are two locking frames (501) arranged symmetrically. A rotating shaft (502) is rotatably connected between the two locking frames (501). Two pull rods (503) are fixedly connected to the outer wall of the rotating shaft (502). A driven sprocket (504) is fixedly connected between the two pull rods (503) and sleeved on the outer wall of the rotating shaft (502). A locking assembly (6) is provided between the two locking frames (501).

2. The locking device for a multi-arc ion plating machine according to claim 1, characterized in that: The locking assembly (6) includes a second rotating shaft (601) and a mounting bracket (602). The second rotating shaft (601) is rotatably connected between two locking brackets (501). Both ends of the second rotating shaft (601) pass through the locking brackets (501) and are fixedly connected with screws (603). The two screws (603) have opposite threads. The outer walls of the two screws (603) are threaded with threaded sleeves (604). The opposite sides of the two threaded sleeves (604) are fixedly connected with locking rods (605). The outer side wall of the second rotating shaft (601) is fixedly connected to a drive sprocket (606). A gear (607) is fixedly connected to one side of the drive sprocket (606) and sleeved on the outer side wall of the second rotating shaft (601). The mounting bracket (602) is fixedly connected to the side wall of the coating machine body (1). A drive motor (608) is fixedly connected to one side of the mounting bracket (602). The output end of the drive motor (608) passes through the mounting bracket (602) and is fixedly connected to a gear (609).

3. The locking device for a multi-arc ion plating machine according to claim 2, characterized in that: The second gear (609) is located on one side of the first gear (607), and the second gear (609) is meshed with the first gear (607).

4. The locking device for a multi-arc ion plating machine according to claim 2, characterized in that: The outer walls of the driving sprocket (606) and the driven sprocket (504) are fitted with chains (7), and the driving sprocket (606) and the driven sprocket (504) are connected by the chain (7).

5. The locking device for a multi-arc ion plating machine according to claim 1, characterized in that: Each of the two latches (4) has a through hole (401) on one side, and the pull rod (503) passes through the through hole (401). Each of the two latches (4) has a locking hole (402) on the side away from each other, and the locking rod (605) is slidably connected to the locking hole (402).

6. The locking device of a multi-arc ion plating machine according to claim 2, wherein: Guide rods (6021) are fixedly connected to the two mounting brackets (602) on opposite sides. The guide rods (6021) pass through the threaded sleeve (604) and are slidably connected thereto.

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