Ceramic pressure sensing device

Abstract

This application relates to a ceramic pressure sensing device, including a display module, a pressure connector, and a pressure sensing component; the display module includes a display base and a display, and the display base has a connecting portion; one end of the pressure connector is connected to the connecting portion, and the other end of the pressure connector has a connection port; the pressure sensing component is disposed between the display module and the pressure connector, and the pressure sensing component has an annular body and a diaphragm connected to the annular body; wherein, the connection port of the pressure connector communicates with the diaphragm of the pressure sensing component inside the pressure connector, and the pressure sensing component is at least made of ceramic material for the diaphragm.

Description

Technical Field

[0001] This application relates to a measuring instrument, and more particularly to a ceramic pressure sensing device. Background Technology

[0002] Existing pressure sensing devices using diaphragm-type sensors are prone to inaccuracies in high-temperature or corrosive environments due to prolonged pressure deformation or the impact of temperature changes. Furthermore, diaphragm sensors require robustness and corrosion resistance, and are typically formed by thermoforming two diaphragms together: a corrosion-resistant diaphragm and a second, stress-deformable diaphragm. However, after a period of use, material fatigue can lead to delamination between the diaphragms. Additionally, the different materials at the diaphragm junction result in varying thermal expansion and contraction characteristics, further compromising pressure sensing accuracy.

[0003] In addition, the existing method of thermoforming diaphragms requires hydraulic pressure for calibration, and the oil must be sealed inside, so there is also a risk of contamination due to oil leakage.

[0004] In view of this, in order to improve and solve the above-mentioned deficiencies, the applicant has devoted himself to research and applied theoretical principles, and finally proposed a design that is reasonable and effective in improving the above-mentioned deficiencies. Utility Model Content

[0005] The main objective of this application is to provide a ceramic pressure sensing device, which uses ceramic materials to make pressure sensing components, or specifically refers to its diaphragm being made of ceramic materials, so as to utilize the characteristics of ceramic materials such as high-temperature stability and no need for temperature compensation to sense more accurate pressure values.

[0006] To achieve the above objectives, this application provides a ceramic pressure sensing device, including a display module, a pressure connector, and a pressure sensing component; the display module includes a display base and a display, and the display base has a connecting portion; one end of the pressure connector is connected to the connecting portion, and the other end of the pressure connector has a connection port; the pressure sensing component is disposed between the display module and the pressure connector, and the pressure sensing component has an annular body and a diaphragm connected to the annular body; wherein, the connection port of the pressure connector communicates with the diaphragm of the pressure sensing component inside the pressure connector, and the pressure sensing component is at least made of ceramic material for the diaphragm.

[0007] In one embodiment, the display is a display-type pressure gauge, and the pressure sensing component is connected by a signal line to display the obtained pressure value on the display.

[0008] In one implementation, the signal line further includes a temperature sensing signal as a temperature coefficient correction compensation for the pressure.

[0009] In one embodiment, the connecting part of the display module is a collar with internal threads, and the pressure connector is provided with mutually engaging external threads for screwing into each other.

[0010] In one embodiment, the pressure connector has a through hole that communicates with a connection port, allowing the connection port to connect to the diaphragm of the pressure sensing component.

[0011] In one embodiment, the pressure connector has an insertion hole at one end, and a through hole connects the connector to the insertion hole, while the pressure sensing component is placed inside the insertion hole for a tight fit.

[0012] In one embodiment, the display base and the connecting part have a neck, and the connecting part has a groove communicating with the inside of the neck, and the pressure sensing component is sandwiched between the insertion hole and the groove.

[0013] In one embodiment, the pressure sensing component is pressed into the insertion hole of the pressure connector by a screw assembly.

[0014] In one embodiment, the annular body has a recess, and the diaphragm is located in the recess and connected to or integrally connected to the inner surface of the annular body.

[0015] In one embodiment, the pressure sensing components are all made of ceramic material. Attached Figure Description

[0016] Figure 1 This is a three-dimensional assembly diagram of the first embodiment of this application.

[0017] Figure 2 This is an exploded perspective view of the first embodiment of this application.

[0018] Figure 3 This is a three-dimensional exploded view of another perspective of the first embodiment of this application.

[0019] Figure 4 This is a three-dimensional schematic diagram of the pressure sensing component of this application.

[0020] Figure 5 This is a cross-sectional schematic diagram of the first embodiment of this application.

[0021] Figure 6 This is a three-dimensional assembly diagram of the second embodiment of this application.

[0022] Figure 7 This is an exploded perspective view of the second embodiment of this application.

[0023] Figure 8 This is a three-dimensional exploded view of another perspective of the second embodiment of this application.

[0024] Figure 9This is a cross-sectional schematic diagram of the second embodiment of this application.

[0025] Explanation of reference numerals in the attached figures:

[0026] 1: Display module;

[0027] 10: Display stand;

[0028] 100: Joint;

[0029] 101: Neck;

[0030] 101a: Perforation;

[0031] 102: Groove;

[0032] 11: Monitor;

[0033] 2: Pressure fitting;

[0034] 20: Connection port;

[0035] 200: Through hole;

[0036] 21: Insertion hole;

[0037] 3: Pressure sensing components;

[0038] 30: Ring-shaped body;

[0039] 300: Recessed hole;

[0040] 31: Membrane;

[0041] 32: Signal line;

[0042] 4: Screw fastening assembly. Detailed Implementation

[0043] To further disclose the features and technical content of this application, please refer to the following detailed description and accompanying drawings. However, the accompanying drawings are for reference and illustration only and are not intended to limit this application.

[0044] Please see Figure 1 , Figure 2 and Figure 3 These are, respectively, a three-dimensional assembly diagram, a three-dimensional exploded diagram, and a three-dimensional exploded diagram from another perspective, representing the first embodiment of this application. This application provides a ceramic pressure sensing device, including a display module 1, a pressure connector 2, and a pressure sensing component 3; wherein:

[0045] The display module 1 includes a display base 10 and a display 11. The display 11 can be a pressure gauge for displaying pressure values ​​and has buttons for operation. In this embodiment, the display base 10 can be horizontal, allowing the display 11 to be mounted on the display base 10 with its face upwards. Figure 5 As shown, the display base 10 has a connecting part 100 below it for connecting the pressure connector 2; in the embodiment of this application, the connecting part 100 may be a collar with an internal thread, and an external thread that matches each other on the pressure connector 2, so that the display base 10 can be screwed onto the pressure connector 2.

[0046] Please refer to the following: Figure 5 As shown, one end of the pressure connector 2 (as shown above) is used to connect and seal with the joint 100 of the display module 1, while the other end of the pressure connector 2 (as shown below) is used to connect to a pressure source (not shown) and has a connection port 20. The connection port 20 can also be internally threaded to the pressure source, and the connection port 20 communicates with both ends inside the pressure connector 2. In the embodiment of this application, the pressure connector 2 has a through hole 200 that communicates with the connection port 20.

[0047] Please refer to the following: Figure 4 and Figure 5 As shown, the pressure sensing component 3 is disposed between the display module 1 and the pressure connector 2, and the pressure sensing component 3 has an annular body 30 and a diaphragm 31 connected to the annular body 30. The annular body 30 has a recess 300, and the diaphragm 31 is located in the recess 300 and is connected to or integrally connected to the inner surface of the annular body 30. In this application, the pressure sensing component 3 is mainly made of ceramic material. Specifically, at least the diaphragm 31 is made of ceramic material, or the diaphragm 31 and the annular body 30 are both integrally formed of ceramic material.

[0048] Please see again Figure 5As shown, in the first embodiment of this application, the pressure connector 2 has an insertion hole 21 at one end, and the through hole 200 is connected to the insertion hole 21 through the connection port 20, allowing the pressure sensing component 3 to be placed in the insertion hole 21 for a tight fit, thereby allowing the pressure source to pass from the connection port 20 to the diaphragm 31 of the pressure sensing component 3. The display module 1 has a neck 101 between the display base 10 and the connecting portion 100, and the connecting portion 100 has a groove 102 communicating with the inside of the neck 101, allowing the display module 1 to be attached to the pressure connector 2, and the pressure sensing component 3 to be sandwiched between the insertion hole 21 and the groove 102. Accordingly, when the pressure of the environment to be measured changes, the diaphragm 31 on the pressure sensing component 3 deforms due to the pressure, and the amount of deformation also changes accordingly. As a piezoresistive material, the resistance value of the diaphragm 31 itself changes after deformation. This change in resistance is read and processed by circuits such as Wheatstone bridge and amplification circuit, and the magnitude of the pressure can be measured by the change in resistance.

[0049] Furthermore, the pressure sensing component 3 is provided with at least one signal line 32, and the signal line 32 is electrically connected to the display 11 through the neck 101 of the display base 10 (figure not shown). Specifically, at least one through hole 101a can be provided in the neck 101 for the signal line 32 to pass through, so that the pressure value obtained by the pressure sensing component 3 through the above principle can be displayed on the display 11. In a preferred design, in addition to transmitting the pressure change conversion signal, the signal line 32 can further include a temperature sensing signal as a temperature coefficient correction compensation for the pressure.

[0050] Therefore, the ceramic pressure sensing device of this application can be obtained by means of the above-described structure.

[0051] In addition, such as Figures 6 to 9 The image shows a second embodiment of this application. The display base 10 can be upright, allowing the display 11 to be mounted on the display base 10 with its face turned to the side. Furthermore, the pressure sensing component 3 is pressed and fixed within the insertion hole 21 of the pressure connector 2 by the screwing component 4, and the screwing component 4 is threaded into the insertion hole 21, thereby facilitating the assembly and replacement of the pressure sensing component 3.

[0052] Therefore, the ceramic pressure sensing device of this application offers higher stability because the ceramic component can be calibrated in an air environment within the pipeline, eliminating the need for oil filling and thus avoiding leakage and contamination issues, and it also lacks actuators. In contrast, diaphragm-type product combinations require hydraulic calibration, and the oil is sealed inside the product, posing a risk of leakage and contamination to the customer. This makes them unsuitable for applications such as PCB or semiconductor manufacturing processes due to the risk of contamination.

[0053] However, the above description is only a preferred embodiment of this application and does not limit the patent scope of this application. Therefore, all equivalent structural changes made using the content of this application's specification and drawings are also included within the scope of this application and are hereby stated.

Claims

1. A ceramic pressure sensing device, characterized by, include: The display module includes a display stand and a display, and the display stand is provided with a connecting part; A pressure connector, one end of which is connected to the joint, and the other end of which has a connection port; and A pressure sensing component is disposed between the display module and the pressure connector. The pressure sensing component has an annular body and a diaphragm connected to the annular body, and the pressure sensing component is made of at least the diaphragm as a ceramic material. The connection port of the pressure connector is internally connected to the diaphragm of the pressure sensing component.

2. The ceramic pressure sensing device of claim 1, wherein, The display is a display-type pressure gauge, and the pressure sensing component is connected by a signal line to display the obtained pressure value on the display.

3. The ceramic pressure sensing device of claim 2, wherein, The signal line further includes a temperature sensing signal as a temperature coefficient correction compensation for pressure.

4. The ceramic pressure sensing device of claim 1, wherein, The display module has a collar with internal threads, and external threads that engage with each other on the pressure connector.

5. The ceramic pressure sensing device of claim 1, wherein, The pressure connector has a through hole that communicates with the connection port, so that the connection port can be connected to the diaphragm of the pressure sensing component.

6. The ceramic pressure sensing device of claim 5, wherein, The pressure connector has an insertion hole at one end, and the through hole is connected to the insertion hole by the connection port, while the pressure sensing component is placed in the insertion hole for tight contact.

7. The ceramic pressure sensing device of claim 6, wherein, The display base and the connecting part have a neck, and the connecting part has a groove that communicates with the inside of the neck, and the pressure sensing component is sandwiched between the insertion hole and the groove.

8. The ceramic pressure sensing device of claim 6 or 7, wherein, The pressure sensing component is pressed into the insertion hole of the pressure connector by the screwing component.

9. The ceramic pressure sensing device of claim 1, wherein, The annular body has a recessed hole, and the membrane is located in the recessed hole and is connected to or integrally connected to the inner surface of the annular body.

10. The ceramic pressure sensing device of claim 9, wherein, All pressure sensing components are made of ceramic material.

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