Graphical user interface for wafer tool commonality analysis of electronic devices

Abstract

1. The name of this design product: Graphical user interface for common analysis of wafer tools for electronic equipment. 2. Purpose of this design product: for use in an electronic device. 3. The key design point of this design product lies in the graphical user interface. 4. The picture or photo that best illustrates the key points of the design: Main view of Design 1. 5. The electronic equipment is of conventional design and other views of each design are omitted. 6. Designate Design 1 as the base design. 7. Purpose of the graphical user interface: It is used for common analysis of wafer tools. Wafer data can be grouped to identify abnormal process steps and abnormal tools. Tool data and tool-related wafer statistics (such as statistical data of wafer electrical test / inspection, etc.) can be viewed, including mosaic plots, trend charts, wafer maps and other related analysis charts. 8. Human-computer interaction mode of the graphical user interface: Data statistics are performed by selecting different data and conditions in each design main view; click the mouse to select the chart data below the design 3 main view to enter the design 3 interface change state diagram 1, and release the mouse from the design 3 interface change state diagram 1 to enter the design 3 interface change state diagram 2. 9. Other situations that require explanation: The single gray filled area in the interface is the content screen.

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