Graphical user interface for liquid flow operating system of semiconductor industry for electronic devices

Abstract

1. Name of the present design product: graphical user interface of liquid flow operation system for electronic equipment in semiconductor industry. 2. Use of the present design product: display graphical user interface. 3. Design points of the present design product: in graphical user interface content. 4. Picture or photo that best indicates the design points: design 1 front view. 5. The present design product carrier is an existing design, omitting rear view, left view, right view, top view and bottom view. 6. Design 1 is designated as the basic design. 7. Use of graphical user interface: control liquid flow system for semiconductor industry. 8. Area of graphical user interface in product: area of graphical user interface in product. 9. Human-computer interaction mode of graphical user interface: click touch interaction. 10. Other cases need to be described with reference to the drawings: design 1 main view is the main interface after entering the system, showing the information of liquid flow operation system, the left main area is the schematic diagram of pipeline connection between liquid flow equipment, and the right side is the operation menu of control system; design 2 main view is the parameters interface after entering the system, which displays bulk parameters, i.e. the related parameters of bulk tank; click Process parameters on the top, enter design 2 change state diagram, which displays Process parameters, i.e. the related parameters of supply tank; design 3 main view is the Options interface after entering the system, Option #1 of the interface, i.e. the related setting state of system component function, is not selected and displayed in gray, and the selected one is displayed in green; click Option #2 below, enter design 3 change state diagram, which is Option #2, i.e. the setting of device alarm condition, whether to enable the related alarm; design 4 main view is the Alarms interface after entering the system, which is History, i.e. the related historical data of device alarm; Current and PT on the top can be clicked to enter the related interface, such as design 4 usage state reference diagram 1 and design 4 usage state reference diagram 2 corresponding to Current and PT; design 5 main view is the Comm interface after entering the system, which is output group 1, i.e. the signal output state of #1 outlet; output group 2, output group 3, output group 4 and INPUT below can be clicked to enter the related interface, such as design 5 usage state reference diagram 1, design 5 usage state reference diagram 2, design 5 usage state reference diagram 3 and design 5 usage state reference diagram 4 corresponding to output group 2, output group 3, output group 4 and INPUT; design 6 main view is the log interface after entering the system, which is log, i.e. the operation log query of the system.

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