Cleaning program run status graphical user interface for electronic device
CN309723125SActive Publication Date: 2026-01-06SHANGHAI PUDATE SEMICON EQUIP CO LTD
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Patent Information
- Application Number
- CN202430764223.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-02
- Publication Date
- 2026-01-06
- Estimated Expiration
- 2039-12-02
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Figure 000001_ABST
Abstract
1. The name of the design product: the graphic user interface of the running state of the cleaning program of the electronic device. 2. The use of the design product: for cleaning of semiconductor wafers. 3. The design points of the design product: the graphic user interface. 4. The picture or photo that best shows the design points: the front view. 5. The use of the graphic user interface: for the human-computer interaction of the cleaning program selection of the wafer cleaning device. 6. The human-computer interaction mode of the graphic user interface: select an icon of a cleaning chamber, such as "CL1", on the left side of the front view, click the "Select Recipe" button on the right side of the front view, and a dialog box is popped up, which is shown as the interface change state diagram 1; select a "recipe" in the dialog box of the change state diagram 1, click the "Select" button below the dialog box, and the dialog box is closed, which is shown as the interface change state diagram 2; click the "Take Offline" button on the right side of the change state diagram 2, which is shown as the interface change state diagram 3, and the "Run Recipe" button in the interface change state diagram 3 is in the active state; click the "Run Recipe" button on the right side of the interface change state diagram 3, and the cleaning program is run, the first cleaning arm starts to swing, which is shown as the interface change state diagram 4; according to the time set by the program, the first cleaning arm stops running and resets, the second cleaning arm automatically starts to swing, which is shown as the interface change state diagram 5; then the second cleaning arm stops running and resets, the third cleaning arm automatically starts to swing, which is shown as the interface change state diagram 6; finally, the program running is completed, and each cleaning arm returns to the initial position, which is shown as the interface change state diagram 7.
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