Shaft connection portion of wafer holding heater

Abstract

1. The name of the design product: shaft connecting portion of a wafer holding heater. 2. The use of the design product: the whole product is used as a wafer holding heater for holding and heating a wafer when forming a thin film on the wafer surface; the partial product is used as a shaft connecting portion of a wafer holding heater for supporting a wafer placing plate on which the wafer is placed. 3. The design points of the design product: the shape of the claimed partial product. 4. The picture or photograph best indicating the design points: the enlarged view of part A. 5. The solid line is used to represent the claimed partial product, the dotted line is used to represent the unclaimed portion, and the dash-dot line is used to represent the boundary line between the claimed partial product and the unclaimed portion.

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