Wafer aligner (lift-off)

CN310079273SActive Publication Date: 2026-07-10盖泽精密科技(苏州)有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
盖泽精密科技(苏州)有限公司
Filing Date
2025-11-21
Publication Date
2026-07-10

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Abstract

1. Name of the design product: wafer calibrator (lifting type) 2. Use of the design product: used for precisely carrying, lifting and positioning wafer in semiconductor equipment to realize automatic transmission and process treatment. 3. Design points of the design product: in shape. 4. Picture or photo best indicating the design points: perspective view 1.
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