METHOD AND DEVICE FOR SYNCHRONIZING MULTIPLEX MEASUREMENTS WITH OPTICAL SENSORS

Abstract

A device for synchronizing multiplex measurements comprises a detector configured to detect at least one first electromagnetic measuring beam and convert it into an electrical measuring signal, and detector electronics configured to obtain at least one first status signal in a time-related and / or synchronous manner with the detection of the electromagnetic measuring beam and to couple the status signal with the electromagnetic measuring signal for informational purposes.

Description

Technical field

[0001] An embodiment of the present invention relates to a device for non-contact measurement of distances or layer thicknesses, in particular a device for measuring distances or layer thicknesses by means of image acquisition. Embodiments according to the present invention relate to optical sensors, in particular distance measuring sensors or non-contact measurement of distances between the sensor and the object being measured. The present invention further relates to a device for synchronizing multiplex measurements with optical sensors and to a method for providing a device for synchronizing multiplex measurements. background

[0002] Distance sensors, or optical sensors, are capable of non-contact measurements using a measuring beam that travels along a specific direction between the sensor and the object being measured. One technical application of optical sensors is the non-contact measurement of distances between the sensor and the object. Typically, an optical distance sensor measures only a single distance along the propagation direction of the measuring beam. If monitoring additional distances in other directions or even at different locations is required, further distance sensors are needed. In the field of optical distance sensors, it can be economical to use a single measuring device not only for distance measurements in one direction or at one location, but also for distance measurements in multiple directions or at multiple locations. This is known as multiplexing. A distinction is made between spatial multiplexing and temporal multiplexing.

[0003] In local multiplexing, the measurement radiation can be split into two beam paths, for example at a beam splitter, to simultaneously measure the distances to two different points. This works as long as the measurement signals are distinguishable and do not interfere with each other during evaluation. For monitoring and controlling industrial processes, a clear assignment of a measured distance to its location is essential. As the number of simultaneously measured distances increases, the complexity of this unambiguous assignment grows considerably.

[0004] The term "temporal multiplexing" refers to measurements taken with a single measuring device at different locations in sequential time. In other words, measurements can be taken with an optical sensor in different spatial directions or at different locations. Typical methods include: • Scanning: the measuring radiation is deflected, for example, by an electromagnetically moved mirror. • Switching: The measurement radiation, when guided, for example, in an optical fiber, is selectively directed towards different, downstream optical fibers by an electronically controlled fiber optic switch. An alternative is the use of multiple beam sources, each radiating to different measurement locations and activated at different times.

[0005] To ensure that measurement results and measurement locations can be unambiguously matched, the chronological sequence can be predetermined or the system state can be continuously monitored. Predetermining the chronological sequence occurs before the measurement begins and provides information about the order and location of the measurements. For example, a scanner or switch and an evaluation unit receive information from a control unit before a measurement begins, specifying the order in which measurements are taken at defined locations. Scanning or switching operations must generally begin synchronously with the detection of the measuring beam. If a scanning, switching, or detection operation is not executed as specified for any reason, subsequent measurements and locations can no longer be correctly matched.

[0006] Continuous measurements with the additional acquisition and transmission of system states with internal timestamps are complex and may require the use of additional or complex data lines. Depending on the type of measurement information, the amount of timestamp data can even be significantly larger than the measurement data itself. Furthermore, the temporal assignment of the data records generally requires interpolation of the position or measurement information, which results in a loss of accuracy. Therefore, one object of the present invention is to provide a device, e.g., a distance sensor, that can measure multiple distances simultaneously or sequentially in different directions and at different measurement locations, and is designed to allow rapid changes of measurement locations while ensuring the unambiguous assignment of a measured distance or measurement to a specific location.to ensure multiple measured distances to the respective measuring point.

[0007] This problem is solved by the subject matter of the independent patent claim. A key concept of the present invention is the recognition that, for the synchronization of multiplex measurements with optical sensors, a system state signal can be linked temporally to the exposure of a detector. Summary of the invention

[0008] An embodiment according to the present invention comprises a device for non-contact measurement, e.g., multiplex measurements, with at least one detector configured to detect a first electromagnetic measuring beam emanating from at least one electromagnetic radiation source and converting it into an electrical measuring signal, and detector electronics configured to obtain a first status signal, for example, emanating from the electromagnetic radiation source, in a temporally unambiguous manner and / or synchronously with the detection of the first electromagnetic measuring beam, and to couple the first status signal and the first electromagnetic measuring beam for informational purposes. For example, the first electromagnetic measuring beam can comprise a measuring radiation that emanates, e.g., along a first propagation direction and, e.g., along a second propagation direction emanating from the electromagnetic radiation source.is guided. In other words, during non-contact measurement, the device can synchronize the first status signal and the electromagnetic measuring beam, so that the information of the status signal is coupled with the information of the electromagnetic measuring beam.

[0009] For example, the electromagnetic radiation source can be electrically connected to the detector electronics. For instance, the electromagnetic radiation source can be integrated into a common housing of the device and, for example, form an optoelectronic sensor, or it can be electrically coupled to the device as an external system or circuit, i.e., located outside or spatially separated from the device in a separate housing. For example, the detector electronics can detect the electrical status signal via at least one synchronization input. In other words, the optoelectronic sensor can, for example, include a light source (e.g., an electromagnetic radiation source), a light receiver (e.g., a detector), optical lenses, a logic circuit (e.g., detector electronics), and a switching output.Optical, non-contact detection of distances, layer thicknesses and associated status signals is carried out, for example, with measurement frequencies from 1 kHz up to 1 MHz.

[0010] An embodiment according to the present invention comprises, for example, a first state signal and a second state signal. Explicit time information, for example by means of a timestamp or a temporal sequence, is not required, since the state information is transmitted directly to the detector electronics and is acquired synchronously or in a time-fixed manner with the measurement signal. The state signal includes, for example, state information indicating whether a radiation source is active. The number of radiation sources is not limited to a single one. Rather, a plurality of radiation sources is possible, each of which is electrically coupled to the device and transmits state information to the device.The system transmits essential state information in the state signal to capture it in a time-aligned and / or synchronous manner with the electrical measurement signal, ensuring that the state signal is temporally coupled to the detector exposure. Thus, the state information can, for example, include information about which radiation sources are active. Further state information can encompass, for instance, the state of a fiber optic switch, the state and / or position of a rotary encoder, a glass scale, a positioning device, or a robot. Additionally, state information can include, for example, switch positions, modulation frequencies, wavelengths, beam diameters, radiation intensities, pulse durations, polarization states, range, and sensing range.

[0011] According to a further embodiment, the device comprises the detector, which is configured to detect a second electromagnetic measuring beam and convert it into an electrical measuring signal. The device further comprises the detector electronics, which are configured to receive a second status signal that is temporally attributable and / or synchronous with the detection of the second electromagnetic measuring beam and to couple the second status signal and the second electromagnetic measuring beam for informational purposes. In other words, the detector can detect a plurality of electromagnetic measuring beams and convert them, for example, into one electrical measuring signal and / or a plurality of electrical measuring signals. The number of electromagnetic measuring beams can be equal to the number of electrical measuring signals.Similarly, the number of electromagnetic measurement beams can differ from the number of electrical measurement signals and may be smaller or larger. For example, two or more electromagnetic measurement beams striking the detector can be converted into a single electrical measurement signal. Conversely, an electromagnetic measurement beam can strike the detector and be detected separately, for example, according to polarization or wavelength, and converted into two or more electrical measurement signals.

[0012] According to a further embodiment, the device comprises detector electronics configured to variably control the start and duration of the detector exposure, for example, by external control signals or synchronization signals. In other words, the start and duration of the exposure can be variably controlled by, for example, a clock or a predetermined synchronization frequency. For instance, the exposure can be varied by means of pulse duration modulation, pulse length modulation, pulse width modulation, or pulse-width modulation. In particular, a portion of a status signal can also be used to control the exposure duration.

[0013] According to another embodiment, the status signal is acquired before, at the beginning, during, at the end, and / or after the detector is exposed. In other words, the detection electronics can acquire the state of the electromagnetic radiation source before, at the beginning, during, at the end, and / or after the detector is exposed or the measurement radiation is detected, and transmit the temporally assigned and / or synchronously acquired measurement and status information together to an evaluation unit via an output signal. Evaluation units include, for example, personal computers, field-programmable gate arrays (FPGAs), and microcontrollers. For example, the state of the electromagnetic radiation source or the status signal can be binary-coded. Since the temporal assignment of timestamps by means of interpolation of the measurement information is eliminated, the accuracy of the measurement can be improved.By capturing a large amount of status information in a temporally assignable and / or synchronous manner with the measurement signal, continuous measurements can be realized with minimal post-processing effort.

[0014] According to another embodiment, the detector electronics include a digital or analog input as a synchronization input. This allows, for example, the detection of digital signals, e.g., from microcontrollers, or analog signals, e.g., from motors.

[0015] According to a further embodiment, the device comprises a detector, wherein the detector is a light-sensitive line detector or an area detector for converting the electromagnetic measuring beam from at least one electromagnetic radiation source into the electrical measuring signal. For example, the detector can be a semiconductor detector consisting, for instance, of a one-dimensional field or array of photodetectors or other detector elements. In other words, the one-dimensional field can comprise an arrangement of identical elements, such as the detectors, in a defined manner. Furthermore, CCD, CMOS, InGaAs, InSb, HgTe, and bolometric sensors, as well as analog sensors, are possible.

[0016] Further embodiments provide devices in which the detector electronics are configured to combine the electrical measurement signal and the status signal in a line image or an area image, wherein at least one first pixel of the line image or area image contains measurement information based on the electrical measurement signal, and at least one pixel contains at least one status information based on the status signal. For example, the line image or area image can be combined in a line detector or an area detector. For example, one pixel of the line image or area image can contain the measurement information and the status information, for example as coded status information. Furthermore, a first pixel can contain measurement information based on the measurement signal, and a second pixel can contain the coded status information based on the status signal.In other words, the state of the electromagnetic radiation source is detected via digital synchronization inputs and written in binary code to a pixel, for example, in a camera image. This allows the state of the electromagnetic radiation source at the corresponding time of image capture to be directly integrated into the camera image, thus establishing a temporal correlation between the state and the image capture within a data set, such as the camera image. Using a selected pixel generally does not result in any significant loss of image information, since, for example, a 1920 x 1080 pixel image (Full HD) consists of approximately two million pixels. By eliminating the need for interpolation of the state or measurement information, a high degree of accuracy in the output signal can be ensured.In other words, measurement and status information are combined and transmitted together as an image to an evaluation unit.

[0017] According to one embodiment, the device comprises measurement information that reaches the detector as a spectrally resolved interferogram. In other words, the measurement information can comprise a superposition of electromagnetic waves, for example, the first electromagnetic measurement beam from the first radiation source and / or further electromagnetic measurement beams. Using the interferogram, the corresponding superimposed wave can be recorded, for example, with a detector and used for distance measurement, refractive index measurement, angle measurement, and spectroscopic measurements.

[0018] Further embodiments provide devices in which the detector is configured to convert the first and / or subsequent electromagnetic measuring beams emanating from at least two electromagnetic radiation sources into the electrical measuring signal. In other words, one electromagnetic radiation source can be integrated within the device, and further electromagnetic radiation sources can be arranged outside, spatially separated, or adjacent to the device, so that the detector can, for example, detect direct and / or reflected measuring radiation. The electromagnetic measuring beams from the electromagnetic radiation sources can, for example, strike a measurement object at different locations or strike different measurement objects, thus enabling measurement at multiple locations or objects.

[0019] According to one embodiment, the device comprises a detector configured to combine the electromagnetic measuring beams of at least two electromagnetic radiation sources before or after interaction with at least one object being measured, such that the electromagnetic measuring beams are superimposed three-dimensionally and simultaneously strike the detector. In particular, the measuring beams can strike the detector at different times, so that during an exposure only the light from a single radiation source strikes the detector. Beam splitters or fiber optic networks can be used to superimpose the electromagnetic measuring beams.

[0020] According to a further embodiment, the device comprises a detector configured to convert the electromagnetic measurement beams emanating from at least two electromagnetic radiation sources into, for example, the electrical measurement signal, wherein no, one, or several electromagnetic radiation sources are active simultaneously. In other words, the detector can convert a plurality of measurement beams emanating from a plurality of electromagnetic radiation sources into an electrical measurement signal. None of the radiation sources may be active, or only one or more radiation sources may be active simultaneously. For example, one radiation source can serve as the reference signal and another radiation source as the measurement beam. Optionally, the first radiation source can emit the measurement beam along a first direction of propagation, and another radiation source can emit the measurement beam along a second direction of propagation.The response times of the radiation sources, for example, are in the nano- to microsecond range. The switching frequencies of the radiation sources or other electro-optical elements of optical sensors, for example, are in the hertz to megahertz range.

[0021] Further embodiments provide devices in which at least one electromagnetic radiation source comprises a semiconductor emitter, in particular a superluminescent diode and / or a laser diode. For example, the device can have two semiconductor emitters that are alternately switched on and off by a higher-level control unit or by the device itself. The digital synchronization output can be switched on and off with each switching of the diode currents. For example, the state of the semiconductor emitters can be transmitted from the semiconductor emitters' driver electronics to the detector electronics. For example, the state of the semiconductor emitters can include a change in the switch-on / switch-off frequency or, for example, repeated use of a semiconductor emitter.To ensure the reliability and accuracy of temporal multiplexing, very fast switching between different states in the microsecond or even nanosecond range is required, for example, when switching electromagnetic radiation sources. Semiconductor emitters, in particular, can perform abrupt switching operations with rise times in the nanosecond range, thus enabling very fast transitions between different states—that is, between different radiation sources or measurement points—with minimal time expenditure.

[0022] Further embodiments provide devices in which at least one electromagnetic radiation source is configured to switch the first electromagnetic measuring beam between at least two beam paths or between at least two radiation states. For example, the electromagnetic radiation source can have a first beam path for the first measuring beam and a second beam path for the second measuring beam, in order to achieve, for example, a temporal and / or spatial deviation of the measuring beam. Alternatively, the electromagnetic radiation source can switch between two radiation states, for example, "activated" and "deactivated." For example, the radiation state can include a change in radiation intensity or polarization to adapt the measurement conditions to a test object and thus provide an optimal measurement result.

[0023] According to a further embodiment, at least one beam path of the first electromagnetic measuring beam can be modified by means of a beam deflection device. For example, the beam path can also include a change in the direction of the electromagnetic measuring beam, which can be changed, deflected, or modified by means of the beam deflection device. Examples of beam deflection devices are galvanometer scanners, polygon scanners, piezo tilt systems, MEMS systems, and acousto-optic modulators. By directing, for example, one beam path to a first measuring location and the second beam path to a second measuring location, e.g., adjacent to the first measuring location, a line or an area can be scanned by temporal multiplexing.

[0024] According to one embodiment, at least one of the beam paths of the electromagnetic measuring beam can be selected by means of an optical switch or a fiber optic switch. In other words, at least one beam path can be connected to an optical switch or a fiber optic switch in order to distribute an electromagnetic measuring radiation to two or more beam paths or to guide the electromagnetic measuring radiation from two or more beam paths to one or more detectors.

[0025] Further embodiments provide devices in which a sequence of switching on and off operations of the at least two electromagnetic radiation sources, or a sequence between the at least two beam paths, or between at least two radiation states, can be defined and / or modified during operation. In other words, the sequence of switching on and off operations, the switching sequence, or the sequence of radiation states of the radiation sources or beam paths can be defined and modified during operation, for example, by an additional control unit, in order to increase the adjustment options of the measuring beam of the electromagnetic radiation sources. The sequence information can be transmitted from the additional control unit to the radiation source to synchronize and adjust the switching on and off sequence with the radiation sources.

[0026] The method is based on the same considerations as the device described above for synchronizing non-contact measurements.

[0027] The procedure can optionally be supplemented with all features, functionalities and details described here with regard to the device, both individually and in combination.

[0028] Furthermore, it should be noted that all the above-described embodiments can optionally be supplemented by the features, functionalities and details described below, both individually and in combination. List of characters

[0029] Preferred embodiments of the present invention are explained below with reference to the accompanying drawings. The drawings show: Fig. 1 a schematic block diagram of a device for synchronizing multiplex measurements according to an embodiment of the present invention; Fig. 2 a schematic diagram of a method for synchronizing multiplex measurements according to an embodiment of the present invention; Fig. 3 a schematic diagram of a method for synchronizing multiplex measurements according to a further embodiment of the present invention; Fig. 4 a schematic diagram of a method for synchronizing multiplex measurements according to a further embodiment of the present invention; Fig. 5 a schematic representation of a device for synchronizing multiplex measurements according to a further embodiment of the present invention; Fig. 6 a schematic representation of a device for synchronizing multiplex measurements according to a further embodiment of the present invention; and Fig. 7 a schematic diagram of a method for adjusting the exposure time in synchronized multiplex measurements according to a further embodiment of the present invention.

[0030] Examples of the present revelation are described in detail below, using the accompanying figures. The accompanying description provides many details to offer a more thorough explanation of examples from the revelation. However, it is obvious to those skilled in the art that other examples can be implemented without these specific details. Features of the different examples described can be combined unless features of such a combination are mutually exclusive or such a combination is expressly excluded.

[0031] It should be noted that identical or similar elements, or elements with the same functionality, may be given the same or similar reference symbols or be labelled identically, whereby a repeated description of elements with the same or similar reference symbols or labelled identically is typically omitted. Descriptions of elements with the same or similar reference symbols or labelled identically are interchangeable. Detailed description

[0032] Fig. Figure 1 shows a schematic block diagram of a device 100 for synchronizing multiplex measurements according to an embodiment of the present invention. The device 100 comprises at least one detector 110 configured to detect a first electromagnetic measuring beam 132 and convert it into an electrical measuring signal 112. Furthermore, the device 100 comprises detector electronics 120 configured to obtain a first status signal 134 that is temporally attributable and / or synchronous with the detection of the first electromagnetic measuring beam 132 and to couple the first status signal 134 and the first electromagnetic measuring beam 132 informationally.

[0033] Fig. Figure 2 shows a schematic diagram of a method 200 for synchronizing multiplex measurements according to an embodiment of the present invention. The method 200 comprises converting 210 an electromagnetic radiation into an electrical measurement signal, synchronously acquiring 220 a status signal and the electrical measurement signal, and rigidly coupling the status signal with the electrical measurement signal.

[0034] Fig. Figure 3 shows a schematic diagram of a method 300 for synchronizing multiplex measurements according to an embodiment of the present invention, wherein steps 310, 320, 330 and 340 can optionally be combined with the method 200 for synchronizing multiplex measurements.

[0035] In step 310, the start and duration of the exposure are variably controlled. Step 310 can, for example, follow step 230 and be controlled, for instance, by detector electronics within the device or by external control or synchronization signals.

[0036] In a further step 320, a status signal changes before, at the beginning, during, at the end, and / or after exposure. Step 220 of method 200 can include steps 310 and 320, so that the synchronous acquisition of the status signal and the electrical measurement signal also captures a change in the status signal before, at the beginning, during, at the end, and / or after exposure. In other words, the acquisition 220 of the status signal or the acquisition 320 of the changing status signal can follow before, at the beginning, during, at the end, and / or after exposure, so that the status signal can be processed, for example, by means of detector electronics.

[0037] In a further step, 330, the electrical measurement signal and the status signal are combined in a line image or an area image. Step 330 can, for example, follow step 230, so that the status signal, temporally linked to the exposure time or exposure itself, is combined with the measurement signal in a line image or an area image. Furthermore, at least one pixel can contain measurement information, and at least one pixel can contain at least binary-coded status information. A single pixel can also contain both measurement information and binary-coded status information.

[0038] In a further step 340, a status signal containing status information is transmitted. Step 340 can follow step 330. For example, the status of the measurement radiation can be transmitted to a synchronization input of detector electronics, or the status of the binary-coded status information can be transmitted to an evaluation unit.

[0039] Fig. Figure 4 shows a schematic diagram of a method 400 for synchronizing multiplex measurements according to an embodiment of the present invention, in which the measurement radiation is generated by at least two radiation sources or is split between at least two beam paths. In other words, the measurement radiation can be generated by at least one radiation source, the radiation of which can be switched between at least two beam paths or two radiation states.

[0040] In step 410, the electromagnetic radiation or measurement radiation from at least two electromagnetic radiation sources, beam paths and / or beam directions is combined before or after an interaction with at least one measurement object, so that the electromagnetic measurement radiation is superimposed three-dimensionally.

[0041] In step 420, the electromagnetic radiation is converted into the electrical signal, whereby no, one, or several radiation sources, beam paths, or beam directions are active simultaneously. Step 420 can therefore follow step 410, in which the measurement radiation is generated by at least two radiation sources or comprises two beam paths.

[0042] In step 425, the active radiation sources, beam paths or beam directions are detected based on the status signal.

[0043] In step 430, the electromagnetic measurement radiation is switched between at least two beam paths or between at least two radiation states in order to generate two beam paths of the measurement radiation from at least one radiation source. Furthermore, it is possible to switch two beam sources on and off alternately to switch between the beam paths of the measurement radiation. Fig. Figure 5 shows a schematic block diagram of a device with two radiation sources 130. Step 430 can follow step 410, step 420, or step 425.

[0044] Step 440 defines the sequence of switching on and off operations of the at least two electromagnetic radiation sources, or a sequence between the at least two beam paths, or between the at least two radiation states. Furthermore, step 440 can optionally include modifying the switching sequence at runtime, allowing the sequence to be adapted. For example, step 440 can be executed by a higher-level controller, which then transmits the sequence state to the respective radiation sources.

[0045] Fig. Figure 5 shows an alternative embodiment of the measuring device 500. Fig. 1, in which two radiation sources 130' and 130" are used for multiplex measurement at two measurement locations 512' and 512". The electromagnetic measurement radiation 132 from the two radiation sources 130' and 130" strikes the object under test 510 at different measurement positions 512' and 512" respectively. The radiation 132 reflected or scattered by the object under test 510 is spatially superimposed and strikes a common detector 110, where it is converted into the electrical measurement signal 112. The detector electronics 120 acquire the electrical measurement signal 112 synchronously with the status signals 134 of the beam sources 130' and 130". The status signals 134 include at least the status of which of the beam sources 130', 130" is switched on and thus at which measurement location 512', 512" the measurement takes place. The beam path is shown schematically in Fig. Figure 5 is a significant simplification. It is obvious to a person skilled in the art that, depending on the measurement method used, e.g., interferometry, laser triangulation, or confocal methods, additional optical elements 150, fiber optic beam guidance, and / or additional or modified beam paths may be necessary or advantageous. It is also obvious to a person skilled in the art that, depending on the measurement method, the measurement may also take place in transmission rather than reflection.

[0046] Fig. Figure 6 shows another alternative embodiment of the measuring device 600. Fig. 1, in which the electromagnetic measurement radiation 132 from a single beam source 130 can be directed by an optical deflection element 610 onto two beam paths and thus measurement positions 512' and 512" on the object 510. The optical deflection element 610 can be, for example, a fiber optic switch, a movable mirror, in particular a scanner mirror, or an electro- or acousto-optic deflector. The radiation 132 reflected or scattered by the object 510 is converted into the electrical measurement signal 112 at the detector 110 and detected by the detector electronics 120 synchronously with the status signal 134 of the deflection device 610. The status signal 134 includes at least one piece of information regarding the active beam path, for example, the switch position or the angular position of a mirror. The beam path is shown schematically in Fig. Figure 6 is again a significant simplification. It is obvious to a person skilled in the art that, depending on the measurement method used, e.g., interferometry, laser triangulation, or confocal methods, further optical elements 150, fiber optic beam guidance, and / or additional or modified beam paths may be necessary or advantageous. It is also obvious to a person skilled in the art that, depending on the measurement method, the measurement can also take place in transmission rather than reflection.

[0047] Fig.Figure 7 shows a schematic diagram of a procedure 700, which extends procedure step 310. In other words, procedure 700 can, for example, precede step 320. In step 710, an exposure is triggered, for example, based on a fixed frequency or by an external signal. In step 720, at least one initial status signal is acquired synchronously with the start of the exposure time. In the optional step 730, the initial status signal is used to determine the exposure duration. For example, the initial status signal can contain information about the power of a radiation source or about the orientation and / or reflection properties of a measurement object, so that the optimal exposure time for the measurement procedure can be determined. In the optional step 740, at least one second status signal is acquired at the end of the exposure time.

[0048] Although some aspects have been described in connection with a device, it is understood that these aspects also constitute a description of the corresponding process, such that a block or component of a device can also be understood as a corresponding process step or as a feature of a process step. Similarly, aspects described in connection with or as a process step also constitute a description of a corresponding block, detail, or feature of a corresponding device. Some or all of the process steps can be performed by (or using) a hardware apparatus, such as a microprocessor, a programmable computer, or an electronic circuit. In some embodiments, some or more of the key process steps can be performed by such an apparatus.

[0049] Depending on specific implementation requirements, embodiments of the invention can be implemented in hardware or in software. The implementation can be carried out using a digital storage medium, for example, a DVD, Blu-ray Disc, CD, ROM, PROM, EPROM, EEPROM, FLASH memory, hard disk, or other magnetic or optical storage medium, on which electronically readable control signals are stored. These signals interact with a programmable computer system to execute the respective method. Therefore, the digital storage medium can be computer-readable.

[0050] Some embodiments according to the invention therefore include a data carrier which has electronically readable control signals which are able to interact with a programmable computer system in such a way that one of the methods described herein is carried out.

[0051] In general, embodiments of the present invention can be implemented as a computer program product with a program code, wherein the program code is effective in carrying out one of the methods when the computer program product runs on a computer.

[0052] The program code can also be stored on a machine-readable medium, for example.

[0053] Other embodiments include the computer program for carrying out one of the methods described herein, wherein the computer program is stored on a machine-readable medium.

[0054] In other words, an embodiment of the method according to the invention is thus a computer program that includes program code for carrying out one of the methods described herein when the computer program runs on a computer.

[0055] Another embodiment of the methods according to the invention is thus a data carrier (or a digital storage medium or a computer-readable medium) on which the computer program for carrying out one of the methods described herein is recorded. The data carrier, the digital storage medium, or the computer-readable medium is typically tangible and / or non-perishable or non-temporary.

[0056] Another embodiment of the method according to the invention is thus a data stream or a sequence of signals that represents the computer program for carrying out one of the methods described herein. The data stream or sequence of signals can be configured, for example, to be transferred via a data communication connection, such as the Internet.

[0057] Another embodiment comprises a processing device, for example a computer or a programmable logic device, which is configured or adapted to perform one of the methods described herein.

[0058] Another embodiment comprises a computer on which the computer program for performing one of the procedures described herein is installed.

[0059] Another embodiment of the invention comprises a device or system designed to transmit a computer program for carrying out at least one of the methods described herein to a receiver. The transmission can be, for example, electronic or optical. The receiver can be, for example, a computer, a mobile device, a storage device, or a similar device. The device or system can, for example, include a file server for transmitting the computer program to the receiver.

[0060] In some embodiments, a programmable logic device (for example, a field-programmable gate array, an FPGA) can be used to perform some or all of the functionalities of the methods described herein. In some embodiments, a field-programmable gate array can interact with a microprocessor to perform one of the methods described herein. Generally, in some embodiments, the methods are performed by any hardware device. This can be general-purpose hardware such as a computer processor (CPU) or method-specific hardware such as an ASIC.

[0061] The devices described herein can be implemented, for example, using a hardware apparatus, or using a computer, or using a combination of a hardware apparatus and a computer.

[0062] The devices described herein, or any components of the devices described herein, may be implemented at least partially in hardware and / or in software (computer program).

[0063] The methods described herein can be implemented, for example, using a hardware apparatus, or using a computer, or using a combination of a hardware apparatus and a computer.

[0064] The methods described herein, or any components thereof, may be executed at least partially by hardware and / or by software.

[0065] The embodiments described above merely illustrate the principles of the present invention. It is understood that modifications and variations of the arrangements and details described herein will be obvious to other people skilled in the art. Therefore, it is intended that the invention be limited only by the scope of protection set forth in the following claims and not by the specific details presented herein by way of description and explanation of the embodiments.

Claims

[1] Device (100;500;600) for non-contact measurement, comprising the following features: at least one detector (110) which is designed to detect a first electromagnetic measuring beam (132) and convert it into an electrical measuring signal (112), a detector electronics (120) which is configured to receive a first status signal (134) in a time-related and / or synchronous manner with the detection of the first electromagnetic measuring beam (132) and to couple the first status signal (134) and the first electromagnetic measuring beam (132) informationally. [2] Device (100;500;600) according to claim 1, wherein the status signal (134) comprises information regarding a radiation source (130;130`;130") and / or information regarding the on / off state of at least one radiation source (130;130`;130") and / or information regarding a switch and / or information regarding a position of the device and / or the orientation of the measurement radiation of the radiation source (130). [3] Device (100;500;600) according to claim 2, wherein the non-contact measurement is carried out with a unique assignment of the measurement information to a measurement position (512`;512"), without explicitly capturing the time information. [4] Device (100;500;600) according to claim 3, wherein the detector (110) is configured to detect one or more further electromagnetic measuring beams (132) and convert them into an electrical measuring signal (112). [5] Device (100;500;600) according to claim 4, wherein the detector electronics (120) is configured to receive one or more further status signals (134) in a temporally assignable and / or synchronous manner to the detection of one or more further electromagnetic measuring beams (132) and to couple the one or more further status signals (134) and the one or more further electromagnetic measuring beams (132) informationally. [6] Device (100;500;600) according to one of the preceding claims, wherein the detection of the state signal (134) comprises detecting a change in the state signal before, at the beginning, during, at the end and / or after exposure of the detector (110). [7] Device (100;500;600) according to one of the preceding claims, wherein the detector electronics (120) comprises at least one synchronization input for detecting the status signal (134). [8] Device (100;500;600) according to claim 7, wherein the synchronization input for detecting the status signal (134) comprises at least one digital input. [9] Device (100;500;600) according to one of the preceding claims, wherein the detector (110) comprises a line detector or an area detector to convert the first and / or several further electromagnetic measuring beams (132) from at least one electromagnetic radiation source (130) into the electrical measuring signal (112). [10] Device (100;500;600) according to one of the preceding claims, wherein the detector electronics (120) is configured to combine the electrical measurement signal (112) and the first and / or several further state signals (134) in a line image or an area image, wherein at least one first pixel of the line image or area image has measurement information based on the electrical measurement signal (112) and at least one pixel has at least one state information based on the first and / or several further state signals (134). [11] Device (100;500;600) according to claim 10, wherein the measurement information of the line image or the area image comprises an interferogram. [12] Device (100;500;600) according to one of the preceding claims, wherein the detector (110) is configured to convert the first and / or several further electromagnetic measuring beams (132) originating from at least two electromagnetic radiation sources (130). [13] Device (100;500;600) according to one of the preceding claims, wherein the detector (110) or an upstream device is configured to combine the first and / or several further electromagnetic measuring beams (132) of the at least two electromagnetic radiation sources before or after an interaction with at least one object being measured in such a way that the first and / or several further electromagnetic measuring beams (134) are spatially superimposed and meet the detector (110). [14] Device (100;500;600) according to one of the preceding claims, wherein the detector (110) is configured to convert the first and / or several further electromagnetic measuring beams (132) originating from at least two electromagnetic radiation sources, wherein no, one or more electromagnetic radiation sources are active simultaneously. [15] Device (100;500;600) according to one of the preceding claims, wherein at least one electromagnetic radiation source (130) comprises an emitter, the emitter being electronically coupled to a synchronization input of the detector electronics (120). [16] Device (100;500;600) according to claim 15, wherein the synchronization input of the detector electronics (120) comprises at least one digital input. [17] Device (100;500;600) according to one of the preceding claims, wherein at least one electromagnetic radiation source (130) comprises a semiconductor emitter, preferably a superluminescent diode or a laser diode. [18] Device (100;500;600) according to one of the preceding claims, in which at least one electromagnetic radiation source (130) is configured to switch the first and / or several further electromagnetic measuring beams (132) between at least two beam paths or between at least two radiation states. [19] Device (100;500;600) according to one of the preceding claims, wherein the detector (110) is configured to combine the beam paths between at least two beam paths or between at least two radiation states of the first and / or second electromagnetic measuring beam (132) before or after their interaction with at least one measuring object in such a way that the first and / or second electromagnetic measuring beam (132) is superimposed three-dimensionally and jointly hits the detector (110). [20] Device (100;500;600) according to one of the preceding claims, in which at least one beam path of the first and / or several further electromagnetic measuring beams (132) is modifiable by means of a beam deflection device (610). [21] Device (100;500;600) according to claim 20, wherein the beam deflection device (610) comprises an optical switch, preferably a fiber optic switch. [22] Device (100;500;600) according to one of the preceding claims, wherein the electromagnetic radiation source (130) is configured to determine and / or change a sequence of the switching on and off processes of the at least two electromagnetic radiation sources or a sequence between at least two beam paths or between at least two radiation states. [23] Method (200;300;400;700) for synchronizing multiplex measurements with the following steps: Converting (210) an electromagnetic measurement radiation into an electrical measurement signal; Synchronous acquisition (220) of a status signal and the electrical measurement signal; and Temporarily fixed coupling (230) of the status signal with an exposure. [24] Method according to claim 23, further comprising: Variable control of the start and duration of an exposure; Capturing the changing state signal before, at the beginning, during, at the end and / or after an exposure Combining the electrical measurement signal and the status signal into a line or area diagram; and Transmitting the status signal.