Method for operating a particle beam microscope, particle beam microscope and computer program product

Abstract

Method for operating a particle beam microscope (1), comprising: Generating a beam (5) of particles; Directing the beam (5) of particles to a location (7) on an object (9); Generating electrons at the location (7) of the object (9) with the particles of the beam (5) directed at the location (7); Directing the generated electrons onto a detector (13) with a plurality of detector pixels (23); Detecting detector events, each triggered by the electrons directed onto the detector (13) striking detector pixels (23) of the detector (13); Generating a detection signal (77) for each detector event detected by a detector pixel (23) with the detector pixel (23) by encoding a value (87) representing a set of charge carriers generated in the detector pixel (23) at the detector event, and by encoding a value (81) identifying the detector pixel (23) within the plurality of detector pixels (23); and Processing the detection signals (77) based on the values ​​(87) encoded in the detection signals (77) representing the quantity of charge carriers and the values ​​(81) identifying the detector pixel (23).

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