Arrangement of optical elements

Abstract

Arrangement of optical elements for forming large-area structures (9) with linear structural elements on surfaces of components and / or in the volume of components by means of direct laser interference structuring and interference lithography, in which a laser beam (8) is directed onto an optical element (1) which is designed to split the laser beam (8) into at least two partial beams (8.1 and 8.2), wherein the partial beams (8.1 and 8.2) strike at least one first cylindrical lens (2) with at least one convex surface and are aligned such that they strike at least one second cylindrical lens (3), and the at least one first cylindrical lens (2) and / or the at least one second cylindrical lens (3) are designed and arranged at a distance relative to the first cylindrical lens (2) and the component such that the partial beams (8.1 and 8.2)2) are focused in the direction of a component in a common plane, and the partial beams (8.1 and 8.2) interfere with each other in a region, whereby rectangular or elliptical structures (9) of a predefinable length in an axis direction that is oriented perpendicular to the optical axis of the laser beam (8), and with linear structural elements, predefinable structure period Λ, which are arranged parallel and next to each other, can be formed as a result of a locally defined material removal and / or a modification of component material, which is achievable by the energy input of the partial beams (8.1 and 8.2) into the component material in the region in which the partial beams (8.1 and 8.2) interfere with each other.