Clean room arrangement and method for rapidly providing a clean room
Patent Information
- Application Number
- EP2023738648
- Authority / Receiving Office
- EP · EP
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2022-07-01
- Filing Date
- 2023-06-30
- Publication Date
- 2025-05-07
Smart Images
Figure 1.1
Abstract
Description
[0001] Cleanroom arrangement and method for the rapid provision of a cleanroom
[0002] Technical area
[0003] The invention relates to a clean room arrangement and a method for quickly providing a clean room, comprising a first shell wall arrangement which separates a first room, which is directly or indirectly adjacent to a floor area, from a second room surrounding the shell wall arrangement by means of a flexibly foldable shell wall which faces directly towards the first room and is made exclusively of at least one air-permeable, clean room-compatible material, and comprises at least one support element supported on the floor area and / or at least one suspension device provided on the shell wall, a mobile filter-fan unit, FVE for short, which has an air inlet area and an air outlet area and is arranged outside the first room, and a supply line which is made of clean room-compatible material and connects the air outlet area and the first room delimited by the shell wall arrangement.
[0004] State of the art
[0005] The term "clean room" or "ultra-clean room" describes a space that is sealed off from its surroundings and in which the concentration of airborne particles is kept as low as necessary, depending on the processes or activities to be carried out within the space. Clean rooms are primarily used in semiconductor manufacturing, optics and laser technology, the life sciences, medical research, and aerospace engineering, to name just a few areas of application. In addition to the aspect of the concentration of airborne particles that can lead to undesirable contamination of technical surfaces, it is particularly important in areas of application where chemically and microbiologically sensitive measures are carried out to take appropriate precautions to exclude chemical and / or microbiological contamination within a defined spatial area.
[0006] Typically, cleanrooms and ultra-cleanrooms are complex and technically sophisticated areas, access to which is usually achieved via various airlock systems. Cleanrooms are supplied with specially configured air conditioning units that ensure that contaminants are immediately removed from the air. To achieve this, a suitably filtered displacement flow is introduced into the cleanroom, within which a high air flow rate is intended to ensure the purity of the air. All surfaces facing the cleanroom, as well as objects located within the cleanroom, are subject to cleanroom-specific requirements to prevent air contamination through outgassing, particle releases, or similar processes that contaminate the cleanroom air.Since humans are generally the largest source of particle release, appropriate work clothing, special work equipment, and tools help maintain the cleanroom quality defined in standardized cleanroom classes. Work clothing made of specially lint-free materials, headgear, shoe covers, etc.
[0007] Clean rooms, such as those required in semiconductor microelectronics, aerospace engineering, etc., usually represent large-scale and complex infrastructures and require powerful fan and filter systems for controlled clean air supply, which are usually located in adjacent building areas.
[0008] For the operation of a cleanroom, particle measurements are carried out for classification and quality control purposes, which enable a classification of the cleanliness of the room. The German industrial standard DIN EN ISO 14644-1 from August 2015 provides for a subdivision into nine different cleanliness classes ISO 1 to ISO 9, which are illustrated in the table in Figure 2a. For example, a cleanroom of cleanroom class 7 may contain a maximum of 352,000 particles with a diameter of 0.5 pm or greater, a maximum of 83,200 particles with a diameter of 1 pm or greater, and a maximum of 2,930 particles with a diameter of 5 pm or greater, each per cubic meter. In the table illustrated in Figure 2a, the cleanliness requirements increase with decreasing cleanroom class number.For example, a cleanroom of cleanroom class ISO 1 may only contain a maximum of 10 particles with a particle diameter of greater than or equal to 0.1 pm and a maximum of 2 particles with a particle diameter of greater than or equal to 0.2 pm per cubic meter.
[0009] Corresponding cleanroom quality requirements regarding food-relevant microorganisms per cubic meter of air are regulated in the VDI 2083 series of guidelines. A standardized number of germ-forming units (CFU) relevant for pharmaceutical cleanroom applications is regulated in the cleanroom classification according to the EU GMP Guideline Annex 1, which is provided in more detail in Figure 2b. The room classifications are divided into GMP classes A to D and each specifies the maximum number of particles per cubic meter for corresponding particle sizes.
[0010] DE 36 21 452 A1 describes a typical cleanroom that offers a high level of cleanliness for semiconductor manufacturing. The different work areas are separated by suspended walls, while rooms with work areas requiring a high level of cleanliness are designed as laminar interfacial flow systems. The structure and layout of typical cleanroom areas illustrates the technological implementation effort required for cleanrooms in the form of stationary facilities.
[0011] If, however, no clean room requirements as described above are required to separate room areas from the environment, a variety of different solutions are known that use a tent-like structure to separate specially conditioned room areas from the environment.
[0012] The document DE 198 36 896 A1 discloses an air-conditioned bed hood for a baby, which creates a tent-like superstructure over a room area in which, for example, a baby's bed is located and which can be air-conditioned in terms of temperature and humidity with the help of an air-conditioning device.
[0013] A comparable arrangement for the realisation of a therapeutic oxygen tent can be found in the document US 2,664,890, which surrounds a cuboid-shaped volume by means of an oxygen-impermeable shell wall, whereby pure oxygen is introduced through the shell wall into the interior of the volume via a gas supply line.
[0014] The document US 2014 / 0148089 A1 describes a dust protection device arranged around an object to be protected from contamination, which is located on a moving platform. It essentially consists of a cubic strut structure placed around the object, with side wall elements designed as roller blind-like curtains. A fan unit with four air outlets, each of which opens onto the side walls, is attached to the ceiling area of the strut structure. The supply air flowing out of the air outlets penetrates the side wall elements, each consisting of three layers. The supply air is filtered and thus enters the interior volume surrounded by the side wall elements, protected from dust, with reduced dust.Excess air can escape into the environment through corresponding gaps both vertically between the adjacent roller blind walls and in the floor area of the protective device.
[0015] The document EP 0 224 505 B1 discloses an isolator for surgery for
[0016] Creating a contaminant-free atmosphere. This is, in particular, a compressed air-supported enclosure that is supplied with filtered air via a blower, which exits the chamber through an outlet. The chamber also has an upper viewing window through which a surgeon can view the interior of the chamber from the outside. The chamber serves as a sterile space in which, for example, surgical procedures can be performed. Preferably, a plurality of so-called sleeves, attached to the chamber in a fluid-tight manner, allow access to the interior of the chamber.
[0017] The document DE 603 07 945 T2 discloses an air-conditioned, room-encompassing air-supported construction with wall and ceiling sections enclosing air cells, which are subject to active air flow, wherein the room is air-conditioned via openings within the air cells with the aid of the air flow.
[0018] EP 2 601 927 B1 describes a ventilation device for clean rooms which is mounted on the ceiling of a clean room and has a plurality of air supply chambers running parallel to one another, through which air flows, the cylindrical shape of which is air pressure-stabilised.
[0019] EP 1 229 187 A1 describes an inflatable tent whose outer tent skin is attached to a supporting frame.
[0020] The document US 2005 / 212415 A1 discloses an air treatment device for decontamination, air treatment and air heating of an air stream which is obtained from the ambient air and can be used in the form of a supply air stream, preferably for ventilation or filling of a tent arrangement.
[0021] US 2002 / 0083653 A1 describes an inflatable tent arrangement with an airtight tent wall, whose tent wall support structures can be erected in a very short time using compressed air. A ventilation device can supply the tent interior with fresh air, which can optionally be purified. US 2004 / 0261324 A1 discloses a protective tent against biological and / or chemical contamination in the environment. The protective tent features a tent wall made of transparent plastic, with an air inlet at the bottom, which is connected to a suitable air supply device.
[0022] The publication CA 2 172 929 A1 describes a portable enclosure arrangement for enclosing a room area in which a positive pressure is generated relative to the ambient air by means of a fan-driven supply air flow. An allergen filter integrated into the supply air flow serves to prevent contamination of the room area via the supply air flow.
[0023] The document US 5 726 426 A discloses an enclosure supported by a rigid structure through which purified air is passed into the room area delimited by the enclosure by means of an air supply device.
[0024] The publication WO 2017 / 102568 A1 discloses a mobile cleanroom arrangement comprising a room with a dome-shaped, tent-like enclosure wall arrangement. The enclosure wall has a flexible, foldable enclosure wall directly facing the room, which is made exclusively of at least one cleanroom-compatible material, and at least one support element supported on the floor area and / or at least one suspension device provided on the enclosure wall. The enclosure wall is spaced from the floor area at least in sections or has at least one opening in the enclosure wall directly or indirectly adjacent to the floor area for the controlled outflow of air from the room area into the environment.A mobile filter-fan unit is used to produce ultrapure air from ambient air, which flows into the room via a supply line made of cleanroom-compatible material through the upper wall area of the enclosure, creating a vertically downward flow of clean air within the room, which then flows out of the room in a controlled manner near the floor area. Description of the invention.
[0025] Based on the above-cited prior art according to WO 2017 / 102568 A1, the invention seeks to further develop a cleanroom arrangement in such a way that it should be possible to create a particle-free and dry cleanroom atmosphere that can be provided as quickly, flexibly, and cost-effectively as possible. In particular, the avoidance and elimination of the humidity present in conventional cleanrooms, which is a major disadvantage, particularly in battery production, semiconductor production, the development and manufacture of highly sensitive technical surfaces, such as in satellite technology, and many other applications, requires the utmost attention.Since the need and demand for such highly sensitive products significantly exceeds the existing production capacities, it is important to create the necessary production-technical prerequisites and to provide dry and particle-free cleanroom conditions quickly and cost-effectively and for use in as many locations as possible.
[0026] The solution to the problem underlying the invention is defined in claim 1. The subject matter of claim 12 is a method for rapidly providing a clean room. Features that advantageously further develop the inventive concept are the subject matter of the dependent claims and the further description, particularly with reference to the exemplary embodiments.
[0027] The cleanroom arrangement according to the solution utilizes the mobile cleanroom arrangement disclosed in the above-mentioned document WO 2017 / 102568 A1, which provides a first enclosure wall arrangement that defines a first space with a flexibly foldable enclosure wall directly or indirectly adjacent to a floor area and has at least one support element supported on the floor area and / or at least one suspension device provided on the enclosure wall. To prevent particle releases through the enclosure wall into the first space, the enclosure wall is made of at least one air-permeable, cleanroom-compatible material. In addition, a mobile filter-fan unit (FVE) is provided, which has an air inlet and an air outlet area and is arranged outside the first space.A supply line made of cleanroom-compatible material is used to feed in clean or ultra-clean air that can be produced by means of the FVE, which fluidically connects the air outlet area of the FVE with the first space delimited by the shell wall arrangement.
[0028] Based on this known cleanroom arrangement, the cleanroom arrangement according to the solution has a second shell wall arrangement which encloses the first shell wall arrangement, including a second space surrounding the first shell wall arrangement, as well as the FVE arranged therein, with a flexibly foldable shell wall which is made exclusively of at least one material that is diffusion-proof against moisture. The shell wall that is diffusion-proof against moisture borders, as it were, the shell wall of the first shell wall arrangement made of cleanroom-compatible material, directly or indirectly on the floor area, and borders the interior of the second shell wall arrangement, i.e. the first and second spaces, from the external atmospheric environment. The second shell wall arrangement also has, as in the first shell wall arrangement, at least one support element supported on the floor area and / or at least one suspension device provided on the second shell wall.In this way, the second shell wall arrangement forms a spatially separate, independently load-bearing structural unit from the first shell wall arrangement.
[0029] Finally, a mobile air drying unit (LTE) is provided, with an air inlet opening into the surrounding area and an air outlet opening into the second space surrounded by the second shell wall arrangement. The LTE is preferably located in the surrounding area next to the second shell wall.
[0030] The principle underlying the clean room arrangement according to the solution is to create a dry atmosphere within the second room enclosed by the second shell wall arrangement, preferably with a dryness described by the dew point temperature, which lies between -30°C and -70°C. This means that the residual moisture contained in the second room only begins to condense at very low dew point temperatures. Except for the slight residual moisture, the air fed into the second room via the LTE essentially has the same particulate composition as the ambient air.
[0031] Due to the moisture-proof shell wall, whose water vapor permeability according to DIN 53 122-2 is preferably less than 0.1g H20 / (m 2x 24 h) from which the second shell wall arrangement is made, no moisture can enter the second room, so that the formation of a long-term stable, dry atmosphere within the second room is ensured.
[0032] In a subsequent step, the dried ambient air is sucked in by means of the FVE arranged within the second room and, by means of appropriate filtering, clean air or, depending on requirements, ultra-clean air is generated, which is fed via a supply line into the first room enclosed by the first shell wall arrangement.
[0033] In order to ensure the user-specific cleanliness requirements within the first room, both the supply line between the FVE and the first room as well as the shell wall enclosing the first room are made of cleanroom-compatible material, which, depending on the requirements, correspond to the cleanliness conditions of ISO classes 1 to 9 according to DIN ISO 14644-1.
[0034] Due to the flexible and mobile design of the first and second shell wall assemblies, the cleanroom arrangement according to the solution can be set up quickly and easily, thus making it cost-effective to deploy. The first shell wall assembly is set up at a suitable location, similar to the erection of a tent structure or a self-stable or self-supporting inflatable shell wall structure that encloses the first room.
[0035] The second shell wall arrangement is then positioned such that it encloses the first shell wall arrangement without contact, thereby defining an intermediate space, the so-called second chamber. Subsequently, air from the environment immediately adjacent to the second shell wall arrangement is dried, and the dried ambient air is fed into the second chamber. This creates a dry, particle-laden atmosphere within the second chamber. This ambient air, dried within the second chamber, is used in a second step to clean it and subsequently fed into the first chamber, the clean room, in the form of purified, dry clean or ultrapure air.
[0036] Preferably, the ambient air is dried by means of sorption-assisted condensation to obtain dried ambient air which has a dew point between -30°C and -70°C and which is subsequently fed into the second space through the second shell wall arrangement in a controlled manner, continuously or intermittently, such that a pressure p2 is formed within the second space which is greater than the ambient pressure p3.
[0037] The dried ambient air within the second room is extracted by means of a dry air extraction system (FVE) and filtered through single or multiple filters to obtain purified, dry air, which is then fed into the first room through the first shell wall arrangement in such a way that a pressure p1 develops within the first room that is greater than the pressure p2 in the second room. By creating such a pressure gradient from the first room through the second room into the environment, it is ensured that no material flows can pass through the shell walls from the outside to the inside, even in the event of a local shell wall damage. This guarantees permanently particle-free and dry air quality within the first room. In principle, the clean room arrangement designed according to the solution is suitable for any production and research areas requiring low humidity and high air purity.Typical industries for the use of such cleanroom systems include automotive, mobile phone battery production and related research, and aerospace with satellite manufacturing and testing. The cleanroom system designed for this solution is also suitable for use in fields such as optics, life sciences, biochemistry, bioinformatics, biology, biomedicine, bioliquids, biotechnology and genetic engineering, nutritional science, food technology, medicine, medical technology, pharmacy and pharmacology, environmental management and environmental technology, chemistry, automotive, microsystems technology, semiconductor technology, automation technology, and the energy industry.
[0038] The advantages of the cleanroom arrangement according to the solution compared to classic dry cleanrooms include considerably faster availability, significantly lower construction costs with the same or higher qualities in terms of dryness and cleanliness when creating a dry, ultra-pure air atmosphere within the cleanroom.
[0039] The solution-based decoupling of dryness and purity by creating two rooms separated from the surroundings also offers a further technological advantage with regard to the additional use of the dry atmosphere within the second room.
[0040] To provide additional thermal decoupling from the environment, a further embodiment provides for an at least double-walled design of the second shell wall arrangement, in which both shell walls define an intermediate space with an internally mounted support structure, in which negative pressure conditions also prevail to reduce thermal conductivity and thus enable thermal decoupling. Since the demand for readily available dry cleanroom areas or dry cleanrooms is enormous and will continue to grow, there is significant economic potential to close this existing gap in demand.
[0041] Brief description of the invention
[0042] The invention is described below, without limiting the general inventive concept, using an exemplary embodiment with reference to the drawing. It shows:
[0043] Fig. 1 schematic representation of a clean room arrangement designed according to the solution,
[0044] Fig. 2 Top view of a clean room arrangement designed according to the solution, Fig. 3 Schematic representation of a solution-designed
[0045] Clean room arrangement with a double-walled second shell wall arrangement,
[0046] Fig. 4 multi-layer design of the second shell wall arrangement and Fig. 5a, b further embodiment for the design of the second
[0047] Shell wall arrangement.
[0048] Ways of implementing the invention, industrial applicability
[0049] Figure 1 shows a clean room arrangement composed of two separate shell wall arrangements 1, 2.
[0050] The second, outer shell wall arrangement 2 has a flexibly foldable and tent-like shell wall 3, which delimits an inner space, the so-called second space R2, to the outside, i.e., to the environment U. The shell wall 3 of the second shell wall arrangement 2 consists of a diffusion-tight material that is diffusion-tight against moisture. The preferably plastic film-like, diffusion-tight material has a water vapor permeability according to DIN 53 122-2 of preferably less than 0.1 g H2O / (m 2x 24 h). Preferably, the high-density casing wall 3 is made of a plastic film that is metal-coated on at least one side. Optionally, the plastic film that is metal-coated on at least one side comprises two or more layers, wherein a first layer has a different property than a second layer. In one embodiment, the casing wall 3 has at least three layers, wherein the casing wall 3 has at least one layer that is made of a metal, such as aluminum, copper, zinc, etc. For example, the casing wall 3 is designed as a pouch film. Alternatively, the casing wall 3 comprises at least one plastic film that is metal-coated at least in regions.
[0051] The shell wall 3 is otherwise completely closed, except for doors, windows, or media ducts (not shown) that are optionally incorporated within the shell wall 3. For an inherently stable construction of the second shell wall arrangement 2, at least one support element 5 supported on the floor area 4 and / or at least one suspension device 6 provided on the second shell wall 3 is provided.
[0052] The second room R2 has an air inlet 3" and an air outlet 3'. The air inlet 3" is connected via an air duct 7 to the air outlet of an air drying unit LTE, which is located outside the second room R2 in the atmospheric environment U. The air drying unit LTE is capable of drawing in atmospheric ambient air via its air inlet 8, drying it, and feeding it as dried ambient air into the second room R2 via the air duct 7. Like the shell wall 3, the supply duct 7 is also made of a material that is diffusion-proof against moisture.
[0053] Furthermore, an air outlet 3' is provided on the shell wall 3, preferably in a shell wall region remote from the dry air feed into the outer shell wall arrangement 2, which is connected to the latter via a discharge line with another air inlet 8' of the LTE. In this way, a quasi-closed dry air circuit is created with regard to the dry air feed into and out of the second room R2, in order to quickly achieve the degree of dryness within the second room R2 and to maintain it with long-term stability using the least possible energy. The thus closed dry air circuit is only quasi-closed by the additional feed or supply of dried supply air from the atmospheric environment via the air inlet 8 of the LTE. If necessary, the air quantities supplied to the LTE through the air inlets 8, 8' can be regulated or coordinated with one another.
[0054] The LTE air drying unit is an industrially standard air treatment unit for drying the supply air from the ambient air U through condensation, optionally supported by sorption, to a degree of dryness such that the dried supply air fed into the second room R2 has a dew point between -20°C and -80°C. This creates a dry, yet particle-laden air atmosphere within the second room R2, which also has an overpressure p2 prevailing relative to the ambient pressure p3.
[0055] Within the second shell wall arrangement 2, a further shell arrangement, the so-called first shell arrangement 1, is arranged separately and at a distance from the latter, which shell arrangement has a flexibly foldable shell wall 9 which directly faces the inner first space R1 and which, in contrast to the shell wall 3, is not diffusion-tight but consists of an air-permeable, cleanroom-compatible material which, on the one hand, has no or only low intrinsic emission behavior of particles and fibers and, on the other hand, opens up the possibility of air flow.
[0056] For the purpose of creating a dry clean room atmosphere within the first room R1, a filter fan unit FVE is installed within the second room R2. The dried ambient air contained within the second room R2 is sucked in via the air inlet area 10 of the filter fan unit FVE, which is then cleaned within the filter fan unit FVE and fed into the first room R1 via the air outlet area 11 and a feed line 12 adjoining it through the shell wall 9 of the first shell wall arrangement 1. Preferably, the air inlet area 10 of the FVE is located in close proximity to the location of the dry air feed into the second room R2. The degree of purity of the dried clean air fed into the first room R1 can be selected depending on requirements and preferably corresponds to the ISO classes
[0057] 1 to 9 according to DIN EN ISO 14644-1. In order to reliably maintain the purity classes defined therein within the first room area R1 and with the greatest possible long-term stability, both the casing wall 9 and the supply line 12, which connects the air outlet area 11 of the filter valve unit FVE with the first casing wall arrangement 1, are made of cleanroom-compatible material in accordance with the standards DIN EN ISO 14644-14 and DIN EN ISO 14644-
[0058] 15 manufactured.
[0059] The dried clean or ultra-clean air is fed into the first room R1 via an air guide plenum 13 mounted in the ceiling area of the first shell wall arrangement 1, which distributes the dry clean or ultra-clean air introduced into the air guide plenum 13 vertically downwards towards the floor area 4 by means of suitable air guide structures. Preferably, the vertically downward air distribution with the aid of the air guide plenum 13 is as homogeneous as possible over the entire area, i.e., the vertical downward air outflow occurs over the entire outflow area of the vertically downward-opening air guide plenum 13.
[0060] The air guide plenum 13 is designed to be airtight or almost airtight except for the downstream flow surface into the first room R1.
[0061] The first shell wall arrangement 1 forms, as does the second shell wall arrangement
[0062] 2 a self-supporting, independent and separate structural unit, which in turn has either a supporting structure 5' supported on the floor area 4 and / or at least one suspension device 6' attached to the shell wall 9.
[0063] To minimize electrostatic fields or charges, the shell wall 9 of the first shell wall arrangement 1 is designed to be electrostatically conductive and connected via a grounding point 14. Similarly, to minimize electrostatic fields or charges, the diffusion-tight shell wall 3 is also designed to be electrostatically conductive and is electrically connected via a grounding point 20.
[0064] Similar to the second shell wall arrangement 2, the shell wall 9 of the first shell wall arrangement 1 also provides at least one door for entering the first room R1. Optionally, windows or other media feedthroughs can be integrated within the shell wall 9, which are not shown in Figure 1.
[0065] In order to discharge the clean or ultra-clean air from the first room area R1 into the second room area R2, the casing wall 9 of the first casing wall arrangement 1 is made over its entire surface from air-permeable fabric material suitable for clean rooms, i.e. due to an overpressure p1 occurring in the first room R1 compared to the pressure p2 in the second room R2, dry clean air flows over the entire surface through the casing wall 9 into the second room R2. In addition, the casing wall 9 preferably has at least one opening 15 in the area near the floor, preferably in the form of a circumferential floor gap, through which the largest proportion of the dry clean air directed from the first room R1 into the second room R2 can escape, see air outflow arrows there. The air thus circulates between the two rooms R2 and R1, with static pressure ratios p1, p2 to the ambient pressure p3 being established in such a way that p1 > p2 > p3 applies.
[0066] This ensures, on the one hand, that neither air humidity nor particle contamination can penetrate or occur in the first room R1, and, on the other hand, that any moisture and / or particle ingress into the first room R1 caused by personnel, machines, or processes can be specifically discharged from the first room R1 into the second room R2. The continuous air flow through the first room R1 with the associated continuous air filtration using the filter fan unit FVE and the continuous or intermittent dry air feed into the second room R2 using the air drying unit LTE ensures the formation and maintenance of a dry clean room atmosphere within the first room R1. Figure 2 shows a schematic plan view of another embodiment of the clean room arrangement according to the solution.The diffusion-tight shell wall 3 separates the second chamber R2 from the atmospheric environment U. Directly adjacent to the shell wall 3 is a dry lock chamber 16, which is defined by both the shell wall 3 and a chamber wall 17. Access from the atmospheric environment into the dry lock chamber 16 is possible via a first lock door 18 incorporated in the shell wall 3. Access between the second chamber R2 and the dry lock chamber 16 is possible via a second lock door 19 incorporated in the chamber wall 17.
[0067] In the case illustrated in Figure 2, the LTE feeds dried supply air via supply line 7 through air inlet 3" into the second room R2. On the shell wall opposite the feed point 3" is the air outlet 3', which is connected to the further air inlet 8' of the LTE via a supply line. In addition, the LTE provides an air inlet 8 for drawing in atmospheric ambient air. Depending on requirements, the air volumes supplied via the air inlets 8, 8' of the LTE can be adjusted in a controlled manner. For example, the atmospheric supply air can be completely blocked via air inlet 8 if required, so that the supply air supply and air discharge into and from the second room R2 are completely conducted in a closed air circuit.
[0068] Located inside the second room R2 is the first enclosure wall assembly 1, whose air-permeable enclosure wall 9 separates the first room R1 from the second room R2. Several FVEs are used to feed dried clean or ultra-clean air from the second room R2 into the first room R1, thus enabling the most intensive dry air / clean air feed possible into the first room R1.
[0069] The cleanroom layout illustrated in Figure 1 is particularly suitable for any production and research areas requiring both low humidity and high levels of cleanliness. Typical industries for its use include automotive, mobile phone manufacturing and battery production and research, and aerospace, particularly satellite manufacturing and testing.
[0070] Figure 3 shows a modification or addition to the cleanroom arrangement illustrated in Figure 1, the second shell wall arrangement 26 of which, not as shown in Figure 1, consists of just one high-density shell wall 3 made of a material that is diffusion-tight against moisture, but of two flexibly foldable, moisture-diffusion-tight second shell walls 27, 28, each of which delimits an intermediate space 21 within which a support structure 22 is arranged that keeps the two second shell walls 27, 28 at a distance and allows flow to pass through them in the longitudinal direction of the shell wall. The intermediate space 21 is enclosed in a fluid-tight manner by both second shell walls 27, 28 in order to create an additional thermal barrier function against the environment U.Particularly when negative pressure is applied within the intermediate space 21, the double-walled second shell wall arrangement 26 functions as a thermal insulation layer in addition to the previously explained moisture-proofing effect of the solution. The negative pressure within the intermediate space 21 can be achieved by a single suction and subsequent hermetic sealing of the intermediate space 21 or, as optionally shown in Figure 3, by a fluid-tight connection to a negative pressure source 23. The negative pressure source 23 can be operated continuously, in a regulated, or controlled manner to ensure an actively monitored negative pressure P4 within the intermediate space 21.
[0071] In an advantageous addition, a sensor unit 24 is arranged on or in the second shell wall arrangement 26 for detecting a pressure P4 prevailing within the intermediate space 21 and for generating a sensor signal dependent on the pressure P4, which serves as a control variable for a control unit 25 that accordingly controls the vacuum source 23. All other components shown in Figure 3 are already provided with the reference numerals that were already explained in conjunction with Figure 1, so that a repeated explanation is omitted here.
[0072] Figure 4 shows a further alternative embodiment of a thermally insulating second shell wall arrangement 26, which consists of three flexibly foldable second shell walls 27, 28, 29, each enclosing two intermediate spaces 21, 21*, into each of which a flow-through support structure 22 is introduced in order to space the respective second shell walls 27, 28, 29 from one another in a mechanically load-bearing manner. In the illustrated embodiment, the respective second shell walls 27, 28, 29 are each connected 30 in a fluid-tight manner at their ends and each hermetically seal the inner intermediate space 21, 21*. Negative pressure conditions prevail inside the intermediate spaces 21, 21*, so that the shell wall arrangement 2 shown schematically in Figure 4 has thermally insulating properties.
[0073] Figure 5a shows a plan view of a further embodiment for a thermally insulating, second shell wall arrangement 26. Figure 5b shows a cross section through the corresponding shell wall arrangement 26. In the case of Figure 5b, the second shell wall arrangement 26 consists of two spaced-apart, diffusion-tight shell walls 27, 28, which each delimit an intermediate space 21 within which a support structure 22 is introduced.For stability reasons and to enable the second shell wall arrangement 26 to have the largest possible surface area, both second shell walls 27, 28 are joined to one another by array-shaped connecting regions 26 in the form of beads or similar, in order to, on the one hand, reduce the surface load acting on the support structure 22 due to negative pressure, particularly when large-area second shell wall arrangements 26 are formed, and, on the other hand, to improve the inherent load-bearing capacity of the flat shell wall arrangement. The clean room arrangement according to the solution enables rapid and cost-effective availability, additionally with low construction expenditure, while maintaining the same or higher quality in relation to the provision of a dry clean room. The decoupling for the generation of dry air and dry, clean air ensures a high level of robustness and reliability during operation of the clean room arrangement according to the solution.
[0074] List of reference symbols first shell wall arrangement second shell wall arrangement shell wall outside ' air outlet “ air inlet floor area
[0075] Supporting element ' Supporting element Suspension device ' Suspension device Air outlet
[0076] Air intake ' further air intake
[0077] Envelope wall inside 0 Air inlet area 1 Air outlet area 2 Supply line 3 Air guide plenum 4 Earthing point Envelope wall inside 5 Opening 6 Dry lock chamber 7 Chamber wall 8 First lock door 9 Second lock door 0 Earthing point Envelope wall outside 1 , 21* Intermediate space 2 Flow-through support structure 3 Negative pressure source 4 Sensor unit 25 Control unit
[0078] 26 second shell wall arrangement
[0079] 27, 28, 29 second shell walls
[0080] 30 hermetic closure
[0081] FVE filter-fan unit
[0082] LTE air drying unit
[0083] P1, P2, P3, P4 pressure values
[0084] R1 first room
[0085] R2 second room
[0086] U environment
Claims
Patent claims 1. A clean room arrangement comprising a first shell wall arrangement (1) which separates a first room (R1), which directly or indirectly borders a floor area (4), with a flexibly foldable shell wall (9) directly facing the first room (R1), which is made exclusively of at least one air-permeable, clean room-compatible material, from a second room (R2) surrounding the first shell wall arrangement (1), as well as at least one support element (5') supported on the floor area (4) and / or at least one suspension device (6') provided on the shell wall (9), a mobile filter-fan unit, FVE for short, which has an air inlet (10) and an air outlet area (11) and is arranged outside the first room (R1), as well as a filter-fan unit (FVE) which separates the air outlet area (11) and the first room (R1) delimited by the first shell wall arrangement (1). connecting supply line (12) made of cleanroom-compatible material,characterized in that a second shell wall arrangement (2) is provided, which encloses the first shell wall arrangement (1) together with the FVE arranged in the second space (R2) with a flexibly foldable second shell wall (3) which is made exclusively of at least one material that is diffusion-tight against moisture, and separates it from an environment (U) surrounding the second shell wall arrangement (2), and has at least one support element (5) supported on the floor area (4) and / or at least one suspension device (6) provided on the second shell wall (3), and in that a mobile air drying unit, LTE for short, is provided with an air inlet (8) opening into the environment (U) and an air outlet (7) opening into the second space (R2) surrounded by the second shell wall arrangement (2).
2. Clean room arrangement according to claim 1, characterized in that the at least one air-permeable clean room suitable material is suitable for a clean room of the ISO classes 1 to 9 according to DIN EN ISO 14644-1 and the mobile FVE is designed to produce ultra-clean air from ambient air according to the above DIN.
3. Cleanroom arrangement according to claim 1 or 2, characterized in that the at least one air-permeable cleanroom-compatible material is a flow-permeable textile with a flow permeability in the range of 500 to 9000 m 3 / m 2 h is.
4. Clean room arrangement according to one of claims 1 to 3, characterized in that the second shell wall (3) made exclusively of at least one material which is diffusion-tight against moisture has a water vapor permeability according to DIN 53 122-2 of preferably less than 0.1g H20 / (m 2 x 24 h).
5. Clean room arrangement according to one of claims 1 to 4, characterized in that the material diffusion-tight against moisture is plastic and the second shell wall (3) has at least one plastic film.
6. Clean room arrangement according to claim 5, characterized in that the plastic film is metallically coated on at least one side.
7. Clean room arrangement according to one of claims 1 to 6, characterized in that the air inlet (8) of the mobile LTE is arranged in the environment (U) for feeding in atmospheric ambient air, and that the mobile LTE sucks in the atmospheric ambient air through the air inlet (8), dries it and feeds it via the air outlet (7) into the second room (R2) in the form of dry exhaust air with a dew point between -20C° and -80C°.
8. Clean room arrangement according to one of claims 1 to 7, characterized in that the mobile FVE and LTE are selected and coordinated with one another in such a way that a first pressure p1 is formed within the first space (R1) and a second pressure p2 is formed within the second space (R2), and that for p1 and p2 the following applies: p1 > p2 > p3, where p3 corresponds to the atmospheric ambient pressure.
9. Clean room arrangement according to one of claims 1 to 8, characterized in that the mobile FVE is arranged within the second room (R2) and the LTE is arranged in the environment (U).
10. Clean room arrangement according to one of claims 1 to 9, characterized in that the first shell wall arrangement (1) has at least one door (20) which, directly facing the first room (R1), is made exclusively of at least one material suitable for clean rooms, and in that the second shell wall arrangement (2) has at least one diffusion-tight door (18).
11. Clean room arrangement according to one of claims 1 to 10, characterized in that the first (1) and second shell wall arrangement (2) are designed as two separate and statically independent, self-supporting structural units.
12. Clean room arrangement according to one of claims 1 to 11, characterized in that an air guide plenum (13) is arranged within the first shell wall arrangement (1) in the ceiling area, into which the supply line (12) of the air outlet area (11) of the FVE opens and which has air guide structures through which the dry, ultra-clean air introduced into the air guide plenum (13) can be guided in the preferred direction of the floor area (4).
13. Clean room arrangement according to one of claims 1 to 12, characterized in that the second shell wall arrangement (2) provides a dry lock chamber (16) which has at least two doors (18, 19), of which at least a first door (18) provides access between the dry lock chamber (16) and the environment (U), and at least a second door (19) provides access between the dry lock chamber (16) and the first room (R1).
14. Clean room arrangement according to one of claims 1 to 13, characterized in that the second shell wall arrangement (26) has at least two spaced-apart, flexibly foldable, second shell walls (27, 28), each of which delimits an intermediate space (21), and in that a support structure (22) is arranged in the intermediate space (21) which keeps the two second shell walls (27, 28) at a distance and through which air can flow in the longitudinal direction of the shell wall.
15. Clean room arrangement according to claim 14, characterized in that a vacuum source (23) is connected in a fluid-tight manner to the intermediate space (21).
16. Clean room arrangement according to claim 14, characterized in that a sensor unit (24) for detecting a pressure (p4) prevailing within the intermediate space (21) and for generating a sensor signal dependent on the pressure is arranged on or in the second shell wall arrangement (26), and that a regulating or control unit (25) is provided which regulates or controls the vacuum source (23) on the basis of the sensor signal.
17. Clean room arrangement according to one of claims 14 to 16, characterized in that in the intermediate space (21) a pressure p4 prevails which is lower than a pressure p3 prevailing in the environment (U).
18. Clean room arrangement according to claim 17, characterized in that the pressure p4 prevailing in the intermediate space (21) is: 10 Pa < p4 < 100 000 Pa.
19. Clean room arrangement according to claim 14, characterized in that the intermediate space (21) is hermetically sealed.
20. Clean room arrangement according to claim 19, characterized in that negative or atmospheric pressure prevails in the intermediate space (21).
21. Clean room arrangement according to one of claims 14 to 20, characterized in that the at least two second shell walls (27, 28) consist of at least one material which is diffusion-tight against moisture.
22. A method for the rapid provision of a cleanroom including a first room (R1) in which dry cleanroom conditions prevail, characterized by the following steps: Setting up a portable first shell wall arrangement (1 ) which encloses the first room (R1 ), Setting up a portable second shell wall arrangement (2) which encloses the first shell wall arrangement (1) without contact and defines with it an intermediate space, a so-called second space (R2), Drying of ambient air from a second shell wall arrangement (2) adjacent environment (U) and feeding the dried ambient air into the second room (R2), and Cleaning the dried ambient air from the second room (R2) and feeding the cleaned, dry air into the first room (R1).
23. Method according to claim 22, characterized in that the drying of the ambient air takes place by means of sorption-assisted condensation to obtain dried ambient air which has a dew point between -20C° and -80C°, and that the feeding of the dried ambient air into the second space (R2) takes place in a controlled manner continuously or intermittently to form a pressure p2 and a predeterminable dryness within the second space (R2).
24. Method according to claim 22 or 23, characterized in that dried ambient air within the second room (R2) is extracted by means of filtering to obtain purified dry air, which is subsequently fed into the first room (R1). 25 Method according to claim 24, characterized in that the dried ambient air is cleaned to obtain dry, ultra-pure air which corresponds to the clean room conditions according to ISO classes 1 to 9 according to DIN EN ISO 14644-1. 26 Use of the clean room arrangement according to one of claims 1 to 21, in at least one area of the following fields: battery production and research, aerospace, optics, life sciences, biochemistry, bioinformatics, biology, biomedicine, biophysics, bio- and genetic engineering, nutritional sciences, food technology, medicine, medical technology, pharmacy and pharmacology, environmental management and environmental technology, chemistry, automotive, microsystem technology, semiconductor technology, automation technology and energy industry.