Apparatus for moving an optical system, and laser machining device
Patent Information
- Authority / Receiving Office
- EP · EP
- Patent Type
- Applications
- Current Assignee / Owner
- TRUMPF SCHWEIZ AG
- Filing Date
- 2024-07-24
- Publication Date
- 2026-06-03
AI Technical Summary
Existing optics movement facilities are limited by wear and tear, require lubrication, and are not compact, making them inefficient for precise and long-term use in laser processing applications.
A facility using concentrically arranged, symmetrically designed plate springs with overlapping arms in the circumferential direction, allowing for increased bending and reduced wear, combined with a compact design featuring a hollow carrier body and magnetic drive elements, enables precise and long-range movement of optics without misalignment.
The solution achieves reduced wear and tear, increased precision, and a compact design, allowing for efficient movement of optics over a larger range with minimal mechanical tensions and weight reduction, suitable for various applications including laser processing.
Smart Images
Figure EP2024071045_30012025_PF_FP_ABST
Abstract
Description
[0001] Device for moving an optics and laser processing device
[0002] The present invention relates to a device for moving an optical system, comprising: a base body, a carrier body to which the optical system is attached, a drive for moving the carrier body relative to the base body along a longitudinal axis of the carrier body, a first plate spring which is fastened in an outer region to the base body and in an inner region to a first side of the carrier body, and a second plate spring which is fastened in an outer region to the base body and in an inner region to a second side of the carrier body, wherein the outer region and the inner region of the first plate spring and the outer region and the inner region of the second plate spring are each connected to one another via a plurality of arms extending in the circumferential direction.
[0003] Such a device in the form of a drive device for a lens is described in EP2099030A1.
[0004] The device described above is used to move an optical system, for example in the form of a lens or a lens group, along a longitudinal axis of the carrier body. The longitudinal axis of the carrier body usually coincides with the optical axis of the optical system, but this is not mandatory. The movement of the optical system is typically a linear movement or displacement of the optical system in the direction of its optical axis. If the optical system is a focusing optical system, the displacement can be used in particular to shift the focus position of a light beam or a laser beam out of a focal plane. Displacing an optical system using such a device is advantageous for various applications and can also be used to replace an F-theta lens that would otherwise be required in marking applications.One advantage of the device described above, in which the linear movement of the optics is realized by using two concentrically arranged, usually symmetrically designed diaphragm springs, is that the movement of the optics can be realized with virtually no wear. However, if the movement of the optics is realized using ball bearings, for example, this is not the case, since ball bearings have a limited service life and require lubrication. In principle, other mechanisms for the rapid movement of optics are also known.
[0005] EP3650161A1 describes a focusing device for focusing a laser beam for machining a workpiece. The focusing device comprises an optical device configured to transmit the laser beam, as well as a holding element on which the optical device is arranged. A connecting element is elastically connected to the holding element by means of a plurality of first spring elements arranged substantially parallel to one another. A base element is elastically connected to the connecting element by means of a plurality of second spring elements arranged substantially parallel to one another. The focusing device comprises a voice coil drive.
[0006] EP2372429A1 describes a drive module that, like EP2099030A1, has two flat springs. The drive module uses a wire made of a shape memory alloy as the drive.
[0007] Object of the invention
[0008] The invention is based on the object of improving a device for moving an optical system and a laser processing device for processing a workpiece, in particular by realizing them in a compact design.
[0009] According to a first aspect, this object is achieved by a device of the type mentioned at the outset, in which at least two of the arms, in particular all arms, overlap at least partially in the circumferential direction.
[0010] The circumferential direction and the radial direction (see below) each refer to the center of the diaphragm spring. The at least partial overlap of the at least two arms in the circumferential direction describes the fact that the at least two arms each have at least one section in which these two arms extend in a common angular range relative to the center of the diaphragm spring. In this section, one of the two adjacent arms extends radially inward, while the other arm extends radially outward.
[0011] The arms are typically curved or spiral-shaped. In the first case, the arms are at a substantially constant distance from the center of the diaphragm. In the second case, the distance of the arms from the center of the diaphragm varies circumferentially, meaning the arms extend both circumferentially and radially. The arms serve as flexural arms and connect the inner and outer regions of the diaphragm. The arms typically do not branch. The longitudinal axis of the support body and typically also the optical axis of the optics generally run through the center of the respective diaphragm.
[0012] The plate springs are flat in a non-deflected rest position and bend when the support body moves from the rest position. Due to the sectionally overlapping of the arms in the circumferential direction, the bending component of the plate springs of the device according to the invention is increased compared to the plate springs described in EP2099030A1, in which the arms are arranged at different angular ranges in the circumferential direction. The plate springs also have larger bending components than similarly sized diaphragm springs, as described, for example, in EP1643284B1. With the same dimensions of the plate springs, the support body and thus also the optics can be moved over a greater distance in the longitudinal direction than is the case with the plate or diaphragm springs described therein. Accordingly, smaller dimensioned plate springs can be used in the device according to the invention in order to displace the optics by the same distance.
[0013] The interior of each diaphragm typically has an annular opening. The opening in the interior of the diaphragm is required if a light beam or laser beam is to pass through the diaphragm. The opening is also necessary if the optics are to be mounted in the center of the diaphragm. It is advantageous if the opening, or the optics mounted in the area of the opening, are comparatively small in relation to the overall size of the diaphragm.
[0014] In one embodiment, each arm has a section adjacent to the outer region that overlaps in the circumferential direction with a section of an adjacent arm adjacent to the inner region. This type of circumferential overlap has proven advantageous with regard to the realization of arms with long bending portions.
[0015] In one embodiment, the arms of the respective plate spring are arranged cyclically symmetrically with respect to the center of the plate spring. The plate spring can, for example, have two, three, four, five, ... arms that are arranged cyclically symmetrically, i.e. evenly distributed in the circumferential direction, around the center of the plate spring. When the plate spring is deflected, the cyclically symmetrical arrangement of the arms causes a rotational compensating movement of the center of the plate spring, which causes the optics to rotate about its optical axis. A rotation about the optical axis is less critical with regard to beam guidance than a displacement of the optical axis of the optics in the radial direction, particularly in the case of rotationally symmetrical optics, for example a spherically designed lens.In a further embodiment, two adjacent arms of the plate springs are separated from each other by a slot, which preferably terminates in widened end sections. The slots extend in the circumferential direction of the respective plate spring and can also extend in the radial direction if the arms are spiral. The termination of the slots in widened, e.g., drop-shaped end sections serves to reduce notch stresses that can occur at the end sections of the slots when the plate springs bend or deflect.
[0016] In a further embodiment, the device comprises a first, preferably plate-shaped, pressure element for pressing the outer region of the first plate spring against the base body, and a second, preferably plate-shaped, pressure element for pressing the outer region of the second plate spring against the base body. The pressure elements are preferably designed as pressure plates that press a respective outer region of the plate spring against the base body to ensure that the outer region of the plate spring remains flat and a defined bending of the plate spring occurs. The pressure elements also prevent any possible misorientation of the plate spring.
[0017] In a further development of this embodiment, the outer regions of the first plate spring and the second plate spring are designed to be closed in themselves, and the first pressure element is designed to press the outer region of the first plate spring against the base body in the circumferential direction, and the second pressure element is designed to press the outer region of the second plate spring against the base body in the circumferential direction. A closed outer region is understood to mean that the outer region is annular (but not necessarily circular) and has a continuous circumferential edge that is not interrupted by grooves as in EP2099030A1. The outer region, or more precisely the circumferential edge of the outer region, is generally not circular but has the geometry of a polygon, for example a rectangle or a square.The two pressure elements can, for example, be plate-shaped and have a ring-shaped, protruding edge whose geometry corresponds to the edge of the diaphragm spring. In this case, the edge of the pressure elements rests flat against the outer area of the respective diaphragm spring and presses it against the base body.
[0018] In a further embodiment, the carrier body has on the first or second side an annular mounting region for the optics, which is preferably connected via connecting webs to an annular fastening region for fastening the inner region of the first or second plate spring. The optics can in principle be fastened at any position along the longitudinal axis of the carrier body, but it is generally advantageous if the optics are fastened to one of the two sides of the carrier body. The optics are fixed in the annular mounting region, for example by the optics, e.g. in the form of a lens or a lens group, being glued to the mounting region at its peripheral edge.
[0019] The material of the optics typically has a thermal expansion coefficient that differs from that of the carrier body. As the optics heat up during operation, mechanical stresses can therefore arise. To reduce these mechanical stresses, it has proven advantageous to connect the mount area, and thus the optics, via connecting webs that typically run radially, to a radially outer fastening area, to which the inner area of one of the two plate springs is attached on one of the two sides of the carrier body. To reduce these mechanical stresses, the connecting webs are typically arranged at equal distances from one another in the circumferential direction.
[0020] In a further embodiment, the carrier body is designed as a hollow body having a casing that connects the first side of the carrier body to the second side of the carrier body, wherein at least one opening is preferably formed in the casing. The use of a carrier body in the form of a hollow body enables a reduction in the weight of the carrier body. The weight reduction is advantageous in order to realize the fastest possible linear movement of the optics. The opening(s) in the casing of the carrier body also serve to reduce the weight of the carrier body. The casing can have one, two or more openings or windows. Openings or openings can also be provided on the (front) sides of the carrier body in order to reduce the weight of the carrier body.
[0021] In a further embodiment, the drive comprises a first and a second drive element, wherein the first drive element, which preferably has a coil or is designed as a coil, is attached to the carrier body, and the second drive element, which preferably has a magnet or is designed as a magnet, is attached to the base body. The first drive element and the second drive element are displaceable relative to one another by a preferably magnetic interaction. The drive with the two drive elements can be designed as a voice coil drive or in another way.
[0022] In a further development of this embodiment, the first drive element and preferably the second drive element run inside the carrier body designed as a hollow body. By arranging the two drive elements inside the carrier body, the device can be realized in a particularly compact design. In the event that the first drive element is a coil, this is typically attached to one of the two (front) sides of the carrier body. In the event that the second drive element is a (permanent) magnet, this is attached to the base body in the region of the other (front) side of the carrier body.
[0023] In a further development of this embodiment, the base body has a base body section for attaching the second drive element, which section projects through an opening in the shell of the hollow body into the interior of the hollow body. In this case, the base body section projects into the interior of the hollow body in order to be able to arrange the second drive element inside the hollow body. As described above, the second drive element can be a (permanent) magnet that extends from the base body section in the longitudinal direction of the carrier body and overlaps the (immersion) coil in the longitudinal direction.
[0024] In a further embodiment, the carrier body is constructed in multiple parts. A two- or multi-part construction of the carrier body is advantageous or necessary in order to arrange the second drive element inside the carrier body. For example, in this case, the (front) side of the carrier body, which is arranged adjacent to the base body section, can form a first partial body of the carrier body, and the casing and the other side of the carrier body can form a second partial body of the carrier body. The two or more partial bodies of the carrier body are preferably detachably connected to one another, for example via a screw connection or the like, but can also be connected to one another via a permanent connection.
[0025] In a further embodiment, the support body can be deflected relative to the base body along its longitudinal direction within a range of at least + / - 1 mm, preferably at least + / - 1.5 mm, about a rest position of the support body when the first plate spring and the second plate spring are not deflected. Designs with deflections in this range of up to + / - 5 mm are also conceivable. Deflections in this range can be realized quickly and with high precision using the device described here.
[0026] In a further embodiment, the device comprises a measuring device for measuring a displacement of the carrier body in the longitudinal direction relative to the base body, wherein the measuring device preferably has a glass scale and, for example, an optical sensor. The displacement or displacement path can be determined with the aid of the measuring device with an accuracy on the order of micrometers. The, for example, incrementally coded glass rod can be attached to the carrier body, usually to the casing of the carrier body. The sensor is typically attached to the base body and is thus stationary.
[0027] Alternatively, other measuring devices can be used, for example a magnetic sensor in combination with a magnetic tape or the like.
[0028] The invention also relates to a laser processing device for processing a workpiece, comprising: a device for moving an optical system configured as described above. If the optical system is a focusing optical system, the device can be used, for example, to quickly change the focus position of the laser beam in the beam direction of the laser beam, which is advantageous, for example, for marking applications. It is understood that the device can also be used for applications other than marking applications and does not necessarily have to be used in a laser processing device.
[0029] Further advantages of the invention will become apparent from the description and the drawings. Likewise, the above-mentioned and further listed features can be used individually or in combination. The embodiments shown and described are not intended to be exhaustive, but rather serve as examples for describing the invention.
[0030] They show:
[0031] Fig. 1 is a schematic representation of a device for moving an optic, which has a base body and a carrier body, in a perspective view,
[0032] Fig. 2 is a schematic representation of the device analogous to Fig. 1 ,
[0033] Fig. 3 is a schematic representation of a plate spring of the type shown in Fig. 1 and Fig.
[0034] 2 shown device, Fig. 4 a schematic representation of the device with a
[0035] Measuring device for measuring a displacement of the carrier body relative to the base body,
[0036] Fig. 5a, 5b schematic representations of a first partial body of the carrier body, which has an end face for fastening the optics, and
[0037] Fig. 6 is a schematic sectional view of the carrier body with the first partial body and with a second partial body.
[0038] In the following description of the drawings, identical reference symbols are used for identical or functionally identical components.
[0039] Fig. 1 shows a device 1 in the form of a module for moving an optical system 2, which in the example shown is designed as a focusing lens. The device 1 comprises a base body 3 in the form of a stationary housing, as well as a support body 4 to which the optical system 2 is attached. The support body 4 is movable relative to the base body 3 along its longitudinal axis 5, shown in dash-dotted lines in Fig. 1, or more precisely, linearly displaceable.
[0040] The device 1 has a first plate spring 6a, which is fastened in an outer region 7a to the base body 3 of the device 1 and which is fastened with an inner region 8a to a first (front) side 4a of the carrier body 4. A second plate spring 6b of the device 1 is fastened in an outer region 7b to the base body
[0041] 3 and in an inner area 8b on a second (front) side 4b of the carrier body
[0042] 4. The two plate springs 6a, 6b are aligned parallel to each other and perpendicular to the longitudinal direction 5 of the support body 4 in a non-deflected rest position.
[0043] As can be seen in Fig. 2, the device 1 has a first plate-shaped pressure element 9a for pressing the outer region 7a of the first plate spring 6a against the base body 3 and a second plate-shaped pressure element 9b for pressing the outer region 7b of the second plate spring 6b against the base body 3. The outer regions 7a, 7b of the first plate spring 6a and the second plate spring 6b are annular and self-contained, as can be seen in Fig. 3.
[0044] The first plate-shaped pressure element 9a is designed to press the outer region 7a of the first plate spring 6a against the base body 3 in the circumferential direction 10 (cf. Fig. 1). For this purpose, the first plate-shaped pressure element 9a has a circumferential outer edge which extends in the longitudinal direction of the carrier body 4. As can also be seen in Fig. 2, the first plate-shaped pressure element 9a is screwed to the base body 3 and the outer region 7a of the first plate spring 6a is clamped between the first pressure element 9a, more precisely its circumferential edge, and the base body 3 and pressed flat against the base body 3. The second plate-shaped pressure element 9b is also designed accordingly and presses the outer region 7b of the second plate spring 6b flat against the base body 3 in the circumferential direction 10.The plate-shaped pressure elements 9a, 9b stabilize the respective plate spring 6a, 6b in addition to the fastening of the outer region 7a, 7b to the base body 3, which is effected via a screw connection.
[0045] Fig. 3 shows the first plate spring 6a of the device 1 from Fig. 1 and Fig. 2 in a plan view. The second plate spring 6b is structurally identical to the first plate spring 6a. As can be seen in Fig. 3, the outer region 7a of the first plate spring 6a is connected to the inner region 8a of the first plate spring 6a via four arms 11a-11d extending in the circumferential direction 10, which serve as bending arms. A respective arm 11a-11d is arc-shaped and extends essentially in the circumferential direction 10 with respect to a center Z of the first plate spring 6a, i.e. a respective arm 11a-11d has an essentially constant distance in the radial direction to the center Z of the first plate spring 6a. However, this is not absolutely necessary, i.e. the distance in the circumferential direction can also vary, so that the arms 11a-11d run spirally. As shown in Fig.3, two of the arms 11 a, 11 b; 11 b, 11 c; 11 c, 11 d; 11 d, 11 a overlap in sections in the circumferential direction 10. More precisely, a respective arm 11 a - 11 d, for example the first arm 11 a, has a section 12 adjacent to the outer region 7a of the first plate spring 6a, which section overlaps in the circumferential direction 10 with a section 13 of an adjacent arm 11 a - 11 d, in the example shown the fourth arm 11 d, which section is adjacent to the inner region 8a. The four arms 11 a - 11 d are arranged cyclically symmetrically with respect to the center Z of the respective plate spring 6a, 6b. Two adjacent arms 11 a, 11 b; 11 b, 11 c; 11 c, 11 d; 11 d, 11 a of the plate springs 6a, 6b are separated from each other by a slot 14, which terminates in two widened end sections 15a, 15b in order to reduce a notch effect during the deflection of the plate springs 6a, 6b.The two widened end sections 15a, 15b are drop-shaped in the example shown.
[0046] As can be seen in Fig. 4, the carrier body 4 is designed as a hollow body and has a substantially cylindrical casing 16 which connects the first side 4a of the carrier body 4 to the second side 4b of the carrier body 4. As is also shown in Fig. 4, two large openings 17a, 17b are formed in the casing 16, which serve to reduce the weight of the carrier body 4. The carrier body 4 can be deflected relative to the base body 3 along its longitudinal axis 5 in a range of at least + / - 1 mm, generally at least + / - 1.5 mm, in order to achieve a rest position of the carrier body 4 when the first plate spring 6a and the second plate spring 6b are not deflected. For the measurement of the deflection orthe displacement path of the carrier body 4 relative to the base body 3, the device 1 has a measuring device 18 which, in the example shown, comprises a glass scale 19 which is attached to the carrier body 4, more precisely to the casing 16 of the carrier body 4. The measuring device 18 also has an optical sensor 20 for detecting the glass scale 19 which is attached to the base body 3.
[0047] To generate the linear movement of the carrier body 4 relative to the base body 3, the device 1 has a drive 21, which in the example shown is designed as a moving coil drive. The drive 21 comprises a first drive element 22a and a second drive element 22b (see Fig. 2). The first drive element 22a is designed as a coil and is attached to the carrier body 4. The second drive element 22b is designed as a permanent magnet and is attached to the base body 3. The first drive element 22a and the second drive element 22b are - as is usual with moving coil drives - displaceable relative to one another by magnetic interaction, with the displacement occurring along the longitudinal axis 5 of the carrier body 4.
[0048] As shown in Fig. 2, the two drive elements 22a, 22b extend inside the hollow support body 4. The first drive element 22a in the form of a coil is attached to the inside of the first end face 4a of the support body 4. The second drive element 22b in the form of a permanent magnet is attached to a projecting base body portion 23 of the base body 3, which projects into the interior of the support body 4 through an opening 17c in the casing 16 of the support body 4, shown in Fig. 5a.
[0049] In the example shown, the carrier body 4 is constructed in several parts, more precisely in two parts, and comprises a first partial body 24a and a second partial body 24b. The first partial body 24a, which is shown in Fig. 5a and Fig. 5b, comprises the casing 16 and the first side 4a of the carrier body 4; the second partial body 24b in the example shown consists of the second side 4b of the carrier body 4 and is fastened to the casing 16 of the first partial body 24a, more precisely screwed, as can be seen in Fig. 6. The multi-part design of the carrier body 4 is necessary to enable the attachment of the second drive element 22b to the protruding base body section 23.
[0050] As can be seen in Fig. 5b, the carrier body 4, more precisely the first partial body 24a, has an annular mounting area 25 on the first side 4a for attaching the optics 2 in the form of the focusing lens. The optics 2 is permanently connected to the carrier body 4 in the mounting area 25. In the example shown, the optics 2 is glued to the mounting area 25. The mounting area 25 is surrounded in the radial direction by an annular fastening area 26, which serves to attach the inner area 8a of the first plate spring 6a and which, for this purpose, protrudes slightly beyond the remaining end face 4a of the carrier body 4. The mounting area 25 is connected to the fastening area 26 via three connecting webs 27a-27c running in the radial direction. The connecting webs 27a-27c are arranged at equal distances from one another in the circumferential direction and separated from one another by elongated holes.The connecting webs 27a-27c each form a section of a conical opening in the fastening region 26. As can also be seen in Figures 5a, 5b, the first side 4a of the carrier body 4 has four further openings 28a-28d in order to further reduce the weight of the carrier body 4.
[0051] The device 1 described above can be used in various optical systems, for example in a laser processing device 29 for processing, for example for marking, a workpiece, which is indicated by dashed lines in Fig. 1. In such a laser processing device 29, the device can be used, for example, as a focusing device that enables rapid displacement of the focus position of the laser beam from a focal plane in the vicinity of which the workpiece is typically located. To enable the laser beam to pass through the device 1, it has a through-channel, which can be seen in Fig. 1 and extends from the first side 4a of the carrier body 4 to the second side 4b of the carrier body 4.
Claims
Patent claims 1 . Device (1) for moving an optical system (2), comprising: a base body (3), a carrier body (4) to which the optical system (2) is attached, a drive (21) for moving the carrier body (4) relative to the base body (3) along a longitudinal axis (5) of the carrier body (4), a first plate spring (6a) which is fastened in an outer region (7a) to the base body (3) and in an inner region (8a) to a first side (4a) of the carrier body (4), and a second plate spring (6b) which is fastened in an outer region (7b) to the base body (3) and in an inner region (8b) to a second side (4b) of the carrier body (4), wherein the outer region (7a) and the inner region (8a) of the first plate spring (6a) and the outer region (7b) and the inner region (8b) of the second plate spring (6b) each have a plurality of arms (11) extending in the circumferential direction (10). a-11 d) are connected to each other, characterized in thatthat at least two of the arms (11 a-11 d) overlap at least partially in the circumferential direction (10)., 2. Device according to claim 1, wherein a respective arm (11 a) has a section (12) adjacent to the outer region (7a) which overlaps in the circumferential direction (10) with a section (13) of an adjacent arm (11 d) adjacent to the inner region (8a).
3. Device according to claim 1 or 2, wherein the arms (11 a-11 d) are arranged cyclically symmetrically with respect to the center (Z) of the respective plate spring (6a, 6b).
4. Device according to one of the preceding claims, in which two adjacent arms (11a, 11b; 11b, 11c; 11c, 11d; 11d, 11a) of the plate springs (6a, 6b) are separated from one another by a slot (14) which preferably terminates in widened end sections (15a, 15b).
5. Device according to one of the preceding claims, further comprising: a first preferably plate-shaped pressure element (9a) for pressing the outer region (7a) of the first plate spring (6a) against the base body (3) and a second preferably plate-shaped pressure element (9b) for pressing the outer region (7b) of the second plate spring (6b) against the base body (3).
6. Device according to claim 5, in which the outer regions (7a, 7b) of the first plate spring (6a) and the second plate spring (6b) are designed to be closed in themselves and in which the first pressure element (9a) is designed to press the outer region (7a) of the first plate spring (6a) against the base body (3) in the circumferential direction (10) and in which the second pressure element (9b) is designed to press the outer region (7b) of the second plate spring (6b) against the base body (3) in the circumferential direction (10).
7. Device according to one of the preceding claims, in which the carrier body (4) has on the first or the second side (4a) an annular mounting area (25) for the optics (2), which is preferably connected via connecting webs (27a-27c) to an annular fastening area (26) for fastening the inner area (8a) of the first or the second plate spring (6a).
8. Device according to one of the preceding claims, in which the carrier body (4) is designed as a hollow body which has a casing (16) which connects the first side (4a) of the carrier body (4) with the second side (4b) of the carrier body (4), wherein preferably at least one opening (17a-17c) is formed in the casing (16).
9. Device according to one of the preceding claims, in which the drive (21) comprises a first and a second drive element (22a, 22b), wherein the first drive element (22a), which preferably has a coil, is attached to the carrier body (4) and the second drive element (22b), which preferably has a magnet, is attached to the base body (3), and wherein the first drive element (22a) and the second drive element (22b) are displaceable relative to one another by a preferably magnetic interaction.
10. Device according to claim 8 and 9, wherein the first drive element (22a) and preferably the second drive element (22b) extend in the interior of the carrier body (4) designed as a hollow body. 11 . Device according to claim 10, wherein the base body (3) has a base body portion (23) for attaching the second drive element (22b), which portion projects through an opening (17c) in the casing (16) of the carrier body (4) into the interior of the carrier body (4).
12. Device according to one of the preceding claims, in which the carrier body (4) is formed in several parts.
13. Device according to one of the preceding claims, in which the carrier body (4) relative to the base body (3) along its longitudinal axis (5) in a range of at least + / - 1 mm, preferably of at least + / - 1.5mm around a rest position of the carrier body (4) when the first plate spring (6a) and the second plate spring (6b) are not deflected.
14. Device according to one of the preceding claims, further comprising: a measuring device (18) for measuring a displacement of the carrier body (4) relative to the base body (3), wherein the measuring device (18) preferably has a glass scale (19) and a sensor (20).
15. Laser processing device (29) for processing a workpiece, comprising: a device (1) for moving an optics (2) according to one of the preceding claims.